JPWO2007074509A1 - TCP handling device and connection terminal positioning method in TCP handling device - Google Patents

Abstract

Using the second camera 6b, the test pad P of the TCP under test is photographed to obtain the coordinate data of the test pad P, the probe 81 of the probe card 8 is photographed to obtain the coordinate data of the probe 81, and the test is performed. A positional deviation amount between the test pad P and the probe 81 is obtained from the coordinate data of the pad P and the coordinate data of the probe 81, the probe card 8 is moved by the probe card stage 7 based on the positional deviation amount, and the TCP under test is measured. The probe 81 is automatically aligned with the test pad P. Thereby, the alignment of the TCP test pad P and the probe 81 of the probe card 8 can be performed accurately and easily.

Description

  The present invention collects devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter referred to as TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices. The present invention relates to a TCP handling device used for testing and a method of aligning connection terminals in the TCP handling device.

  In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus that tests the performance and functions of the finally manufactured IC devices and devices in its intermediate stage is necessary. In the case of TCP, A test apparatus for TCP is used.

  A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”). This TCP handler transports a carrier tape on which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and the carrier tape is attached to a probe of a probe card that is electrically connected to a test head. Is pressed, and a test pad of TCP is brought into contact with the probe, whereby a plurality of TCPs are sequentially subjected to a test.

  By the way, in order to perform a test efficiently and accurately using a TCP handler, it is necessary to reliably contact the TCP test pad and each probe of the probe card.

  For this reason, when using a TCP handler, the TCP handler must be initialized in advance so that the TCP test pad and each probe of the probe card can be contacted with each other before performing a test in actual operation. And registering the settings.

  The initial setting of the TCP handler is performed as follows, for example. First, the TCP is transported to the test position, and the transported TCP is held by the pusher unit. Then, the pusher unit is moved to a height at which the TCP can be clearly recognized by the camera, the TCP test pad is photographed by the camera, and the image is displayed on the monitor. The operator looks at the monitor and visually grasps the rotation angle of the TCP. Next, in order to clearly recognize the probe of the probe card by the camera, the pusher unit is moved to a height at which TCP cannot be clearly recognized by the camera, and then the probe of the probe card is photographed by the camera and the image is displayed on the monitor. indicate. The operator rotates the probe card stage by manual operation while watching the monitor, and adjusts the rotation angle of the probe card with respect to the rotation angle of the TCP. Then, the pusher unit is moved to a height at which the TCP can be clearly recognized by the camera together with the probe. The operator moves the probe card stage in the X-axis direction and / or the Y-axis direction by manual operation while watching the monitor, and confirms that all the TCP test pads can contact the probe of the probe card. The position set in this way is registered as an initial setting.

  However, in the above initial setting method, the grasping of the rotation angle of the TCP and the adjustment of the rotation angle of the probe card are based on the operator's feeling, so that depending on the operator, a great amount of work time may be required. Further, since the TCP test pad is not displayed on the monitor when adjusting the rotation angle of the probe card, it is very difficult to adjust the rotation angle of the probe card with respect to the rotation angle of the TCP. If all the TCP test pads cannot contact the probe of the probe card, the movement of the pusher unit and the rotation of the probe card stage must be alternately repeated, which is very complicated.

  In particular, along with the recent increase in the number of pins and miniaturization of TCP, TCP test pads have become smaller and have a narrower pitch, making it difficult to align the pads and probes in the initial setting. The work time for initial setting is also long. In addition, the TCP and probe may not always be accurately aligned. This may cause contact failure, unstable contact resistance, short-circuit between adjacent pins, etc. during actual operation. Sometimes.

  The present invention has been made in view of such a situation, and in a TCP handling device and a TCP handling device capable of accurately and easily aligning a contact terminal of a contact portion and an external terminal of a TCP. It is an object of the present invention to provide a method capable of accurately and easily performing alignment processing.

  In order to achieve the above object, first, the present invention conveys a carrier tape on which a plurality of TCPs are formed, and presses the carrier tape to a plurality of connection terminals of a contact portion electrically connected to a test head. A TCP handling device capable of sequentially applying a plurality of TCPs to a test by connecting an external terminal of the TCP to the connection terminal, wherein the contact portion including the plurality of connection terminals is arranged in a plane direction. And a moving device that can move around the vertical axis, and an imaging device that can take an image of the external terminal of the TCP under test and the connection terminal. The external device of the TCP under test is connected by the imaging device. Shooting to acquire the coordinate data of the external terminal, shooting the connection terminal to acquire the coordinate data of the connection terminal, the external terminal From the coordinate data and the coordinate data of the connection terminal, the amount of positional deviation between the external terminal and the connection terminal is obtained, and the contact unit is moved by the moving device based on the amount of positional deviation, and the outside of the TCP under test is Provided is a TCP handling device characterized in that the connection terminal is aligned with a terminal (Invention 1).

  According to the above invention (Invention 1), these positional shift amounts are obtained from the coordinate data of the external terminals of the TCP to be aligned and the contact terminals of the contact portions, and the contact portions are automatically determined based on the positional shift amounts. Therefore, alignment between the external terminal of the TCP and the contact terminal of the contact portion can be performed accurately and easily. Therefore, when using the TCP handling device, the initial setting can be efficiently performed in a short time.

  In the above invention (Invention 1), firstly, the coordinate data of the external terminal and the coordinate data of the connection terminal are obtained, and the positional deviation amount around the vertical axis between the external terminal and the connection terminal is obtained, Based on the amount of positional deviation around the vertical axis, the moving device moves the contact portion around the vertical axis, and secondly, obtains the coordinate data of the connection terminal again, and the external terminal and the connection terminal It is preferable that the amount of positional deviation in the plane direction is obtained and the contact portion is moved in the plane direction by the moving device based on the amount of positional deviation in the planar direction (Invention 2). According to this invention (invention 2), the alignment between the TCP and the contact portion can be performed more accurately by sequentially performing the alignment around the vertical axis and the alignment in the plane direction separately.

  In the above invention (Invention 1), the amount of positional deviation about the vertical axis between the external terminal and the connection terminal is the angle of the first straight line obtained from the coordinate data of two or more locations of the external terminal, and the connection It can be obtained from the difference from the angle of the second straight line obtained from the coordinate data at two or more locations of the terminal (Invention 3).

  In the said invention (invention 3), it is preferable that the said TCP handling apparatus is further provided with the display apparatus, and can display the said 1st straight line and / or the said 2nd straight line on the said display apparatus (invention 4). ). According to this invention (invention 4), by displaying the first straight line and / or the second straight line on the display device, it is possible to visually confirm the positional deviation around the vertical axis.

  In the said invention (invention 4), it is preferable that the said 1st straight line can be overlaid and displayed on the said display device on the said external device image (invention 5), and the said invention. In (Invention 4), it is preferable that the second straight line can be overlaid on the display device and overlaid on the image of the connection terminal photographed by the imaging device (Invention 6).

  In the said invention (invention 4), it is preferable that the value of the difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device (invention 7). According to this invention (invention 7), the difference between the angle of the first straight line and the angle of the second straight line is displayed on the display device, so that the amount of positional deviation about the vertical axis can be visually expressed as a numerical value. Can be confirmed.

  In the above invention (invention 4), when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, It is preferable to change the color of the first straight line and / or the second straight line displayed on the display device (invention 8). According to this invention (invention 8), it can be visually confirmed by the display device that the positional deviation around the vertical axis has been corrected.

  In the above invention (invention 4), when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, It is preferable to emit a notification sound (Invention 9). According to this invention (invention 9), even when the operator is not looking at the display device, it is possible to visually confirm that the alignment around the vertical axis has been completed.

  In the said invention (invention 3), the said TCP handling apparatus is further equipped with the imaging device movement apparatus which can move the said imaging device, The said imaging device is the said external device by the movement by the said imaging device movement apparatus. It is preferable to photograph two or more terminals and two or more of the connection terminals (Invention 10). According to this invention (invention 10), since the imaging device can photograph a plurality of parts of the external terminal that are far from each other and a plurality of parts of the connection terminal that are far from each other, the positional deviation between the TCP and the contact portion. The amount can be determined with better accuracy, and the alignment between the TCP and the contact portion can be performed more accurately.

  In the said invention (invention 1), the said TCP handling apparatus is further equipped with the movable diffused reflection board, When image | photographing the connection terminal of the said contact part, it is between the said connection terminal and the said carrier tape. It is preferable to insert the diffuse reflector (Invention 11). According to this invention (invention 11), since a high-contrast connection terminal image can be obtained by using a diffuse reflector as a background, the coordinate data of the connection terminal can be obtained with good accuracy, and TCP And the contact portion can be more accurately aligned.

  Second, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a plurality of connection terminals of a contact portion electrically connected to a test head, A TCP handling device capable of sequentially testing a plurality of TCPs by connecting to connection terminals, an imaging device capable of photographing external terminals of the TCP under test and the connection terminals, and a display device The contact portion including the plurality of connection terminals is movable around the plane direction and the vertical axis, and images two or more external terminals of the TCP under test by the imaging device. The first straight line obtained from the acquired coordinate data of the external terminal and / or two or more locations of the connection terminal are acquired by the imaging device. The second straight line obtained from the coordinate data of the serial connection terminals, provides a TCP handling apparatus characterized by capable of displaying on the display device (invention 12).

  According to the above invention (Invention 12), the operator can move the contact portion around the vertical axis while viewing the first straight line and / or the second straight line displayed on the display device. Positioning around the vertical axis with the part can be performed accurately and easily.

  In the said invention (invention 12), it is preferable that the said 1st straight line can be overlaid and displayed on the said display apparatus over the image of the said external terminal image | photographed with the said imaging device (invention 13). In (Invention 12), it is preferable that the second straight line can be overlaid on the display device and overlaid on the image of the connection terminal photographed by the imaging device (Invention 14).

  In the above invention (Invention 12), an inclination angle and / or a coordinate value of a predetermined point of the first straight line and / or the second straight line may be further displayed on the display device ( Invention 15). According to this invention (Invention 15), the operator can perform alignment between the TCP and the contact portion on the basis of the tilt angle and / or the coordinate value displayed on the display device. Positioning with the part can be performed more accurately and easily.

  In the said invention (invention 12), it is preferable that the difference value between the angle of the first straight line and the angle of the second straight line can be displayed on the display device (invention 16). According to this invention (Invention 16), by displaying the value of the difference between the angles of the two straight lines, the operator aligns the TCP and the contact portion so that the value approaches 0 (deg). Therefore, the alignment can be performed more accurately and easily.

  In the above invention (Invention 12), when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, It is preferable to change the color of the first straight line and / or the second straight line displayed on the display device (Invention 17). According to this invention (Invention 17), by changing the color of the first straight line and / or the second straight line, the operator can visually recognize that the correction of the positional deviation around the vertical axis has been completed. Alignment between the TCP and the contact portion can be performed more easily.

  In the above invention (Invention 12), when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, It is preferable to emit a notification sound (Invention 18). According to this invention (invention 18), by issuing a notification sound, the operator can visually confirm that the correction of the positional deviation around the vertical axis has been completed. It can be done more easily.

  In the above invention (Invention 12), the TCP handling device further includes an imaging device moving device capable of moving the imaging device, and the imaging device is moved by the imaging device moving device to move the external device. It is preferable to photograph two or more terminals and two or more of the connection terminals (Invention 19). According to this invention (invention 19), since the imaging device can photograph a plurality of parts of the external terminal that are far from each other and a plurality of parts of the connection terminal that are far from each other, the first straight line and the second line The angle of the straight line can be determined more accurately, and the alignment between the TCP and the contact portion can be performed more accurately.

  In the said invention (invention 12), the said TCP handling apparatus is further equipped with the movable diffused reflection board, When image | photographing the connection terminal of the said contact part, it is between the said connection terminal and the said carrier tape. It is preferable to insert the diffuse reflector (Invention 20). According to this invention (invention 20), since the image of the high-contrast connection terminal can be obtained by using the diffuse reflector as a background, the angle of the second straight line can be obtained more accurately, and TCP and Positioning with the contact portion can be performed more accurately.

  Third, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a plurality of connection terminals of a contact portion electrically connected to the test head, A method of aligning connection terminals in a TCP handling device capable of sequentially subjecting a plurality of TCPs to a connection terminal by connecting to the connection terminals. First, the coordinate data of the external terminals and the coordinate data of the connection terminals To obtain a positional deviation amount around the vertical axis between the external terminal and the connection terminal, and based on the positional deviation amount around the vertical axis, move the contact portion around the vertical axis, and secondly The coordinate data of the connection terminal is acquired again, the amount of positional deviation in the plane direction between the external terminal and the connection terminal is obtained, and based on the amount of positional deviation in the plane direction, Moving the serial contact portion in the plane direction to provide a method of aligning the connecting terminal, wherein (invention 21).

  Further, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a plurality of connection terminals of a contact portion electrically connected to a test head, and connects the external terminals of TCP to the connection A connection method of a connection terminal in a TCP handling device capable of sequentially attaching a plurality of TCPs to a test by connecting to a terminal, and obtaining the coordinate data of the external terminal and the coordinate data of the connection terminal, The amount of positional deviation about the vertical axis and the amount of positional deviation in the plane direction between the external terminal and the connection terminal are obtained, and the contact portion is moved around the vertical axis and / or in the plane direction based on the positional deviation amount. A connection terminal positioning method characterized in that the connection terminal is positioned (Invention 22).

  In the above inventions (Inventions 21 and 22), the amount of positional deviation about the vertical axis between the external terminal and the connection terminal is the angle of the first straight line obtained from the coordinate data of two or more locations of the external terminal, It is preferable to obtain the difference from the angle of the second straight line obtained from the coordinate data at two or more locations of the connection terminal (Invention 23).

  In the said invention (invention 23), it is preferable to display the value of the difference of the angle of the said 1st straight line and the angle of the said 2nd straight line on a display apparatus (invention 24).

  In the above invention (Invention 23), the first straight line and the second straight line are displayed on a display device, the contact portion is moved around a vertical axis, and the angle of the first straight line and the second straight line are displayed. It is preferable that the color of the first straight line and / or the second straight line displayed on the display device is changed when the difference from the angle of the straight line becomes smaller than a predetermined value (Invention 25).

  In the above invention (Invention 23), when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, It is preferable to emit a notification sound (Invention 26).

  In the said invention (invention 21 and 22), when photographing the connection terminal of the said contact part, it is preferable to insert a diffuse reflection board between the said connection terminal and the said carrier tape (invention 27).

  Fourth, the present invention conveys a carrier tape on which a plurality of TCPs are formed, presses the carrier tape against a plurality of connection terminals of a contact portion electrically connected to a test head, A method of aligning connection terminals in a TCP handling device capable of sequentially subjecting a plurality of TCPs to a connection terminal by connecting to the connection terminals, wherein two or more external terminals of the TCP under test are photographed by the imaging device, A first straight line obtained from the acquired coordinate data of the external terminal is displayed on a display device, two or more locations of the connection terminal are photographed by an imaging device, and a second line obtained from the acquired coordinate data of the connection terminal is displayed. A straight line is displayed on the display device together with the first straight line, so that the operator can display the first straight line and the second straight line displayed on the display device. Provides a method of aligning the connecting terminal, characterized in that it is possible to move the contact portion about a vertical axis while watching the line (invention 28).

  In the said invention (invention 28), it is preferable to display the value of the difference of the angle of the said 1st straight line and the angle of the said 2nd straight line on a display apparatus (invention 29).

  In the above invention (Invention 28), when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, It is preferable to change the color of the first straight line and / or the second straight line displayed on the display device (Invention 30).

  In the above invention (Invention 28), when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, It is preferable to emit a notification sound (Invention 31).

  In the said invention (invention 28), when photographing the connection terminal of the said contact part, it is preferable to insert a diffuse reflection board between the said connection terminal and the said carrier tape (invention 32).

  According to the TCP handling device or the connection terminal alignment method of the present invention, alignment between the contact terminal of the contact portion and the external terminal of the TCP can be performed accurately and easily.

FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention. FIG. 2 is a side view of the pusher unit in the TCP handler according to the embodiment. FIG. 3 is a plan view of a pusher stage in the TCP handler according to the embodiment. FIG. 4 is a plan view of the probe card stage in the TCP handler according to the embodiment. FIG. 5 is a front view of the probe card stage in the TCP handler according to the embodiment. FIG. 6A is a flowchart (part 1) illustrating an operation at the time of initial setting of the TCP handler according to the embodiment. FIG. 6B is a flowchart (part 2) illustrating the operation at the time of initial setting of the TCP handler according to the embodiment. FIG. 6C is a flowchart (part 3) illustrating the operation at the time of initial setting of the TCP handler according to the embodiment. 7A to 7G are schematic views of a monitor display screen at the time of initial setting of the TCP handler according to the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Test apparatus for TCP 2 TCP handler 3 Pusher unit 4 Pusher stage 5 Carrier tape 6b 2nd camera (imaging apparatus)
7 Probe card stage 8 Probe card 81 Probe (contact terminal)
9 Display device 10 Test head 11 Diffuse reflector 21 Unwind reel 22 Take-up reel P TCP test pad (external terminal)

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a front view showing a TCP testing apparatus using a TCP handler according to an embodiment of the present invention, FIG. 2 is a side view of a pusher unit in the TCP handler according to the embodiment, and FIG. FIG. 4 is a plan view of a pusher stage in the TCP handler according to the embodiment, FIG. 4 is a plan view of a probe card stage in the TCP handler according to the embodiment, and FIG. 5 is a plan view of the TCP handler according to the embodiment. It is a front view of a probe card stage.

  First, an overall configuration of a test apparatus for TCP including a TCP handler according to an embodiment of the present invention will be described. The TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10.

  The TCP handler 2 sequentially attaches a plurality of TCPs formed on the carrier tape 5 to the test. In the present embodiment, the TCP handler 2 is assumed to be attached to the test for simplification of explanation. However, the present invention is not limited to this, and a plurality of TCPs arranged in the series direction and / or the parallel direction on the carrier tape 5 may be subjected to the test simultaneously.

  The TCP handler 2 includes an unwinding reel 21 and a take-up reel 22, and a carrier tape 5 before the test is wound on the unwinding reel 21. The carrier tape 5 is unwound from the unwinding reel 21 and is wound around the winding reel 22 after being subjected to the test.

  Between the unwinding reel 21 and the take-up reel 22, three spacer rolls 23 a, 23 b, and 23 c are provided that bridge the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. ing. Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.

  A tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.

  A tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape 5 after being subjected to the test is After being guided by the tape guide 24b through the side guide roller 25d, the out-side sub sprocket 25e, and the take-up limit roller 25f, the take-up reel 22 is wound.

  A pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d.

  As shown in FIGS. 1 and 2, a servo motor 31 capable of rotating a ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361, and the ball screw 32. The pusher main body 33 is engaged with two linear motion guides (hereinafter referred to as “LM guides”) 37 in the Z-axis direction. The pusher body 33 is movable in the vertical direction (Z-axis direction) while being guided by the linear motion guide 37 by driving the servo motor 31.

A suction plate 34 that is connected to a negative pressure source (not shown) and can suck and hold the carrier tape 5 is provided at the lower end of the pusher body 33.
A tension sprocket 35a is provided on the front side (left side in FIG. 1) of the pusher main body 33, and a main sprocket 35b is provided on the rear side (right side in FIG. 1) of the pusher main body 33. The carrier tape 5 is held with a desired tension.

  As shown in FIGS. 2 and 3, the pusher stage 4 is installed on the back side of the pusher body 33 in the pusher frame 36 so as to be placed on the base 38, and is a turntable for the pusher stage 4. The top table 48 is fixed to the pusher frame 36.

  On the base 40 of the pusher stage 4, a servo motor 41a for rotating a ball screw 42a having an axis in the X-axis direction, a servo motor 41b for rotating a ball screw 42b having an axis in the Y-axis direction, and a Y-axis direction A servo motor 41c that rotates a ball screw 42c having a shaft is provided, and the servo motor 41b and the servo motor 41c are located at both ends on the base 40, respectively.

  A sliding block 44a that is guided by LM guides 43a and 43a in the X-axis direction and that can slide in the X-axis direction is screwed into the ball screw 42a. A sliding plate 46a is attached to the sliding block 44a via a Y-axis LM guide 45a so as to be slidable in the Y-axis direction. A rotating member 47a having a roller ring inside is fixed to the upper side of the sliding plate 46a, and the rotating member 47a is rotatably attached to the top table 48.

  A sliding block 44b that is guided by LM guides 43b and 43b in the Y-axis direction and is slidable in the Y-axis direction is screwed into the ball screw 42b. A sliding plate 46b is attached to the sliding block 44b so as to be slidable in the X-axis direction via an LM guide 45b in the X-axis direction. A rotating member 47b having a roller ring inside is fixed on the upper side of the sliding plate 46b, and the rotating member 47b is rotatably attached to the top table 48.

  A sliding block 44c that is guided by LM guides 43c, 43c in the Y-axis direction and that can slide in the Y-axis direction is screwed into the ball screw 42c. A sliding plate 46c is attached to the sliding block 44c so as to be slidable in the X-axis direction via an LM guide 45c in the X-axis direction. A rotating member 47c having a roller ring inside is fixed on the upper side of the sliding plate 46c, and the rotating member 47c is rotatably attached to the top table 48.

  In the pusher stage 4 having such a configuration, the servo motor 41a is driven to slide the sliding block 44a, the sliding plate 46b, and the sliding plate 46c in the X-axis direction, so that the top table 48 is moved to the X direction. It can be moved in the axial direction. In addition, the top table 48 is moved in the Y-axis direction by driving the servo motor 41b and the servo motor 41c to slide the sliding block 44b, the sliding block 44c, and the sliding plate 46a in the same Y-axis direction. be able to. Furthermore, the servo motor 41a is driven to slide the sliding block 44a in the X-axis direction, and the servo motor 41b and the servo motor 41c are driven so that the sliding block 44b and the sliding block 44c are mutually connected to the Y axis. The top table 48 can be rotated about its vertical axis by sliding in the opposite direction and rotating each rotating member 47a, 45b, 45c. According to the pusher stage 4 as described above, the pusher unit 3 can be moved in the X-axis-Y-axis directions and rotated around the vertical axis.

  On the other hand, as shown in FIG. 1, a probe card stage 7 on which a probe card 8 is mounted is installed below the pusher unit 3 and above the test head 10. Here, the probe card stage 7 includes a type that can be moved and controlled by a motor drive mechanism and a type that has only a manual adjustment function. In this embodiment, the probe card stage 7 has a motor drive mechanism.

  4 and 5, on the base 71 of the probe card stage 7, a servo motor 711 that rotates a ball screw 712 having an axis in the X-axis direction, and four LM guides 713 in the X-axis direction, Is provided. On these four LM guides 713, rectangular X bases 72 are provided that are guided by the LM guides 713 so as to be slidable in the X-axis direction. A threaded portion 721 into which a ball screw 712 is threaded is formed on one side of the X base 72.

  On the X base 72, a servo motor 722 for rotating a ball screw 723 having an axis in the Y-axis direction and two LM guides 724 in the Y-axis direction are provided. On these two LM guides 724, a rectangular Y base 73 is provided that is slidably guided in the Y-axis direction by the LM guides 724. A threaded portion 731 into which a ball screw 723 is threaded is formed on one side of the Y base 73.

  On the Y base 73, a servo motor 732 that rotates a ball screw 733 having an axis in the Y-axis direction and a connection ring 734 that rotatably supports the card ring 735 are provided. A part of the card ring 735 is formed with a threaded portion 736 into which the ball screw 733 is threaded. The probe card 8 having a plurality of probes 81 is detachably attached to the card ring 735 by four pins 82.

  Although not shown in FIGS. 4 and 5, each probe 81 of the probe card 8 is electrically connected to the tester body via the test head 10.

  In the probe card stage 7 having such a configuration, by driving the servo motor 711, the X base 72, and hence the probe card 8, can be moved in the X-axis direction, and by driving the servo motor 722, The Y base 73 and thus the probe card 8 can be moved in the Y-axis direction. Further, by driving the servo motor 732 to rotate the ball screw 733 and moving the screwing portion 736, the card ring 735 and the probe card 8 can be rotated around the vertical axis. The TCP handler 2 includes a control device that can automatically control the drive of the servo motors 711, 722, and 732, thereby automatically moving the probe card 8 around the X axis direction, the Y axis direction, and the vertical axis. Can be moved.

  As shown in FIG. 1, the first camera 6 a is on the front stage side (left side in FIG. 1) of the pusher unit 3, the second camera (imaging device) 6 b is on the lower side of the test head 10, and the rear stage side of the pusher unit 3. A third camera 6c is provided on each (right side in FIG. 1). The test head 10 is formed with a gap through which the second camera 6b can photograph the probe card 8.

  A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c. The mark punch 26a is one in which one or a plurality of holes are formed at a predetermined position for the corresponding TCP based on the test result, and the reject punch 26b is a TCP that is determined to be a defective product as a result of the test. It is something that punches out.

  Each camera 6a, 6b, 6c causes the display device 9 to display images taken by these cameras so that the operator can visually recognize them. Among these cameras, the first camera 6a and the third camera 6c are for determining the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a. And the 2nd camera 6b is for acquiring the positional offset information between TCP and the probe card 8, and can acquire positional offset information about the several object in a visual field.

  Further, the second camera 6b is mounted on the camera stage 61, and can be moved in the vertical and horizontal directions (X axis-Y axis direction) and in the vertical direction (Z axis direction) by an actuator of the camera stage 61. ing. When the second camera 6b moves in the vertical and horizontal directions (X-axis-Y-axis direction) in plan view, the second camera 6b is located at a position far from each other of the plurality of test pads P and the probe card 8 at the positions far from each other in the TCP. Since the probe 81 can be photographed, the positional deviation amount between the TCP and the probe card 8 can be obtained with better accuracy. Further, the second camera 6b moves in the vertical direction (Z-axis direction), thereby changing the focal position of the second camera 6b to focus on the desired part of the test pad P or the probe 81 that is the imaging target. Can do. Thereby, a clear outline image of the imaging target region can be acquired, and the coordinate data of the test pad P or the probe 81 can be obtained accurately. Note that the second camera 6b itself has a focus adjustment function so that the focal position of the second camera 6b is externally controlled so that the desired position of the test pad P or the probe 81 that is the imaging target can be focused. Also good.

  The display device 9 includes an image processing unit and a monitor that displays an image captured by the second camera 6b. The image processing unit has means for overlaying and displaying an image photographed by the second camera 6b and a predetermined straight line, character, or the like on the monitor.

  Between the pusher unit 3 and the probe card 8, a diffusive reflecting plate 11 is detachably provided between the carrier tape 5 held on the suction plate 34 and the probe card 8. In the present embodiment, the diffusive reflector 11 can reciprocate in the X-axis direction. The diffuse reflector 11 has fine irregularities formed on the surface thereof, and can diffuse and reflect light from an illumination light source (not shown). Therefore, when the diffuse reflector 11 is inserted between the carrier tape 5 and the probe card 8, the background of the probe 81 can be uniformly bright or dark, and the second camera 6b can increase the height of the probe 81. A contrast image can be obtained. In addition, without providing the diffuse reflector 11, the conditions of the irradiation light source (irradiation light quantity, irradiation color, irradiation angle) may be changed so that the background of the probe 81 relative to the background (test pad) becomes clearer. .

Next, the usage method and operation of the TCP handler 2 will be described.
When the TCP handler 2 is used, the probe card 8 is moved so that all the probes 81 of the probe card 8 are positioned in advance at the center position of the corresponding test pad P before the TCP handler 2 is actually operated. It is necessary to make initial settings. That is, when the TCP type is changed, when a TCP of a different production lot is tested, or when the probe card 8 is changed, the TCP test pad P and the probe 81 of the probe card 8 are in contact with each other. It is necessary to determine and register the reference position of the X-axis position / Y-axis position / θ rotation angle of the probe card stage 7 (this position is referred to as “registered position”). Note that the pusher stage 4 is used when the TCP test is executed, so it is assumed that the pusher stage 4 remains in an uncontrolled state in the initial setting.

  FIGS. 6A to 6C are flowcharts showing the initial setting operation of the TCP handler 2, and FIGS. 7A to 7G are schematic diagrams of monitor display screens when the TCP handler 2 is initially set. is there.

When the TCP handler 2 starts the initial setting operation, the TCP handler 2 transports the reference TCP to the test position (step S01), and a plurality of TCP handlers 2 positioned at one end of a number of test pads P in the TCP by the second camera 6b. The test pad P is photographed (step S02). Based on the captured image (first image), the image processing unit of the TCP handler 2 obtains coordinate data (X _pd1 , Y _pd1 ) of each central portion of the plurality of test pads P included in the first image. While acquiring, the said 1st image is displayed on a monitor (refer step S03, Fig.7 (a)). Note that each coordinate data obtained by this operation is mapped to the coordinate system of the camera stage 61.

Next, the TCP handler 2 moves the second camera 6b by the camera stage 61, and the second camera 6b moves the plurality of test pads P located at different ends of the many test pads P in the TCP. A picture is taken (step S04). Based on the captured image (second image), the image processing unit of the TCP handler 2 _obtains the coordinate data (X _pd2 , Y _pd2 ) of the center portions of the plurality of test pads P included in the second image. The second image is acquired and displayed on the monitor (step S05).

Based on the acquired coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ), the image processing unit of the TCP handler 2 uses the position coordinates and the second coordinate of the center of the test pad P included in the first image. An angle θ _pd with a straight line (array of test pads P) passing through the position coordinates of the center of the test pad P included in the image and a straight line in the X-axis direction (horizontal line in FIG. 7) is calculated (step S06). Then, a first straight line L1 having the angle θ _pd is generated, and the first straight line L1 is overlaid on the second image (current image) on the monitor (see step 07, FIG. 7B). .

Next, the TCP handler 2 inserts the diffuse reflector 11 between the carrier tape 5 and the probe card 8 (step S08). Then, the second camera 6b is moved by the camera stage 61, and the plurality of probes 81 corresponding to the plurality of test pads P included in the first image are photographed by the second camera 6b (step S09). Based on the captured image (third image), the image processing unit of the TCP handler 2 acquires coordinate data (X _pb1 , Y _pb1 ) of the tip portions of the plurality of probes 81 included in the third image. At the same time, the third image is displayed on the monitor (see step S10, FIG. 7C). Here, since the background of the probe 81 is the diffuse reflection plate 11, a high-contrast image of the probe 81 can be obtained. Therefore, the coordinate data of the probe 81 can be acquired with good accuracy, and the alignment between the TCP test pad P and the probe 81 of the probe card 8 can be performed more accurately.

The TCP handler 2 moves the second camera 6b with the camera stage 61, and photographs the plurality of probes 81 corresponding to the plurality of test pads P included in the second image with the second camera 6b (step S11). . The image processing unit of the TCP handler 2 acquires the coordinate data (X _pb2 , Y _pb2 ) of the tip portions of the plurality of probes 81 included in the fourth image based on the captured image (fourth image). At the same time, the fourth image is displayed on the monitor (step S12).

Based on the acquired coordinate data (X _pb1 , Y _pb1 ) and (X _pb2 , Y _pb2 ), the image processing unit of the TCP handler 2 determines the position coordinates and the fourth image of the tip of the probe 81 included in the third image. The angle θ _pb between the straight line (arrangement of the probes 81) passing through the position coordinates of the tip of the probe 81 and the straight line (horizontal line in FIG. 7) in the X-axis is calculated (step S13). Then, a second straight line L2 having the angle θ _pb is generated, and the first straight line L1 and the second straight line L2 are overlaid and displayed on the monitor on the fourth image (current image) (step S14, FIG. 7 (d)). Thus, by displaying the first straight line L1 and the second straight line L2 on the monitor, it is possible to visually confirm the amount of positional deviation around the vertical axis.

Next, the TCP handler 2 calculates a difference value Δθ between the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2 obtained in steps S06 and S13 (step S15). If the absolute value of the obtained difference value Δθ is larger than the predetermined value D (step S16, Yes), the TCP handler 2 rotates and moves the probe card stage 7 based on the difference value Δθ (step S17). ) When the absolute value of the difference value Δθ is equal to or smaller than the predetermined value D (step S18, Yes), the rotational movement of the probe card stage 7 is stopped (step S19), and the color of the second straight line L2 is changed. (See step S20, FIG. 7 (e)). On the other hand, if the absolute value of the difference value Δθ is equal to or smaller than the predetermined value D in step S16 (No in step S16), the color of the second straight line L2 is changed as it is without rotating the probe card stage 7. (Step S20). In this way, by changing the color of the second straight line L2, it is possible to visually confirm on the monitor that the positional deviation around the vertical axis between the test pad P and the probe 81 has been corrected.

Next, the TCP handler 2 moves the second camera 6b with the camera stage 61, and again images the plurality of probes 81 corresponding to the plurality of test pads P included in the first image with the second camera 6b. (Step S21). Thereby, even if the probe card 8 moves around the vertical axis in step S17 and the target probe 81 is out of the field of view of the second camera 6b, it is possible to take an image again. The image processing unit of the TCP handler 2 acquires coordinate data (X _pb3 , Y _pb3 ) of the distal end portions of the plurality of probes 81 included in the fifth image based on the captured image (fifth image). At the same time, the fifth image is overlaid on the monitor and displayed on the monitor (see step S22, FIG. 7 (f)).

Similarly, the TCP handler 2 moves the second camera 6b by the camera stage 61, and again images the plurality of probes 81 corresponding to the plurality of test pads P included in the second image by the second camera 6b. (Step S23). Based on the captured image (sixth image), the image processing unit of the TCP handler 2 acquires coordinate data (X _pb4 , Y _pb4 ) of the tip portions of the plurality of probes 81 included in the sixth image. At the same time, the sixth image is overlaid on the second image and displayed on the monitor (see step S24, FIG. 7F).

Then, TCP handler 2, the coordinate data _{(X pd1, Y} pd1) of 2 points of the test pad P and the _{(X pd2, Y pd2),} coordinate data of the two positions of the probe 81 _{(X pb3, Y} pb3) and Based on (X _pb4 , Y _pb4 ), the difference values ΔX, ΔY between the X component and Y component between the test pad P and the probe 81 are calculated (step S25). Then, when the absolute values of the obtained difference values ΔX and ΔY are larger than the predetermined value P (Yes in step S26), the TCP handler 2 moves the probe card stage 7 in the X-axis direction based on the difference values ΔX and ΔY. And / or moving in the Y-axis direction (step S27), and when the absolute value of the difference values ΔX and ΔY becomes equal to or less than the predetermined value P (step S28, Yes), the movement of the probe card stage 7 is stopped (step S28). S29, see FIG. 7 (g)), the position of the probe card stage 7 is registered (step S30). On the other hand, if the absolute value of the difference values ΔX and ΔY is equal to or smaller than the predetermined value P in step S26 (No in step S26), the position is registered without moving the probe card stage 7 (step S30). .

  Finally, the TCP handler 2 leaves the diffuse reflector 11 between the carrier tape 5 and the probe card 8 (step S31), and the initial setting is completed.

  As described above, according to the TCP handler 2 according to the present embodiment, the TCP test pad P and the probe 81 of the probe card 8 can be automatically aligned. It can be done easily. In particular, in this embodiment, the alignment between the TCP test pad P and the probe 81 of the probe card 8 is performed by sequentially performing the alignment around the vertical axis and the alignment in the X-axis direction and the Y-axis direction separately. It can be done more accurately.

  Next, as another embodiment of the present invention, a description will be given of a TCP handler that manually performs initial settings for alignment between a TCP test pad P and a probe 81 of a probe card 8.

  The TCP handler according to the present embodiment has substantially the same configuration as the TCP handler 2 described above, but the servo motors 711, 722, and 732 that are the drive sources of the probe card stage 7 are driven by the operation of the operator. Alternatively, the servo motors 711, 722, and 732 may be omitted, and the probe card stage 7 may be operated by operating an operation rod or the like.

In the initial setting operation of the TCP handler according to the present embodiment, steps S01 to S15 are executed in the same manner as described above. While the TCP handler is calculating the difference value Δθ between the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2 (step S15), the operator performs the first straight line L1 displayed on the monitor. While looking at the second straight line L2 (see FIG. 7D), the probe card stage 7 is rotated and moved manually.

  Then, the TCP handler changes the color of the second straight line L2 when the absolute value of the difference value Δθ is equal to or less than the predetermined value D (step S101, Yes) (see step S102, FIG. 7E). The operator confirms this and stops the rotational movement of the probe card stage 7. After step S102, the TCP handler causes the diffusive reflector 11 to leave the carrier tape 5 and the probe card 8 (step S103).

  As described above, the operator can move the probe card 8 around the vertical axis by a desired angular amount while viewing the first straight line L1 and the second straight line L2 displayed on the monitor. 8 can be confirmed by changing the color of the second straight line L2, so that the correction of the misalignment around the vertical axis of the vertical axis between the TCP test pad P and the probe 81 of the probe card 8 can be confirmed. The alignment can be performed accurately and easily, and further quickly.

  The correction of the positional deviation in the X-axis direction and / or the Y-axis direction by manual operation may be performed by a method similar to the conventional method. Specifically, the pusher unit 3 is moved to a height at which the TCP can be clearly recognized by the second camera 6b together with the probe 81. The operator manually moves the probe card stage 7 in the X-axis direction and / or the Y-axis direction while looking at the monitor on which the test pads P and the probes 81 are displayed, and all the test pads P of TCP are probed. Check if the probe 81 of the card 8 can be contacted. The position of the probe card stage 7 set in this way is registered (step S104), and the initial setting is completed.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

For example, in the above embodiment, in steps S14 to S20 or S102, the angle θ _{pd of} the first straight line L1 and the second straight line are used together with or instead of the first straight line L1 and the second straight line L2. The angle θ _pb of L2 is numerically displayed on the monitor, or the relative angle between both the straight lines (for example, the angle of the second straight line L2 with respect to the first straight line L1 with respect to the first straight line L1) May be displayed numerically (see FIGS. 7D and 7E). By doing in this way, the amount of position shift between TCP and the probe card 8 can be visually confirmed by a numerical value.

In order to manually align the TCP test pad P and the probe 81 of the probe card 8, the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2 are numerically displayed on the monitor. The probe card stage 7 may be rotated so that the value of the angle θ _pb of the second straight line L2 approaches the value of the angle θ _pd of the first straight line L1, and the relative angle between the two straight lines can be determined. When displaying numerical values, the probe card stage 7 may be rotated so that the angle value approaches 0 (deg).

  Further, in steps S14 to S20 or S102, the coordinate values of the center and both ends of the first straight line L1 and the second straight line L2 may be numerically displayed on the monitor, or the relative values between the two straight lines may be displayed. Coordinate values (for example, the coordinate values of the center and both ends of the second straight line L2 with respect to the center and both ends of the first straight line L1 when the first line L1 is used as a reference) are numerically displayed on the monitor. May be. By doing in this way, the amount of position shift between TCP and the probe card 8 can be visually confirmed by a numerical value.

Further, during the rotational movement of the probe card stage 7 by step S17 or manual operation, a predetermined value is set according to the magnitude of the difference value Δθ between the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2. The operator may be able to easily recognize the alignment state by hearing, for example, by generating a pulse sound having a pulse interval, a sound having a predetermined frequency, or a sound sequentially changed to a predetermined tone color.

In step S20 or S102, when the difference value Δθ between the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2 becomes equal to or smaller than the predetermined value D, the alignment around the vertical axis is performed. In order to notify the completion, a message may be displayed on the monitor, or an external lighting device may be provided in the TCP handler 2 to light up the external lighting device. By issuing the alert in this way, the operator can confirm that the alignment around the vertical axis has been completed.

Further, in the above embodiment, the alignment of the TCP and the probe card 8 around the vertical axis and the alignment in the plane direction are performed separately, but the present invention is not limited to this, and both are performed simultaneously. You may go. Specifically, steps S03, S05 coordinate data _{(X pd1, Y} pd1) of the obtained test pad P in and _{(X pd2, Y} pd2) and the coordinate data _{(X pb1} probe 81 obtained in step S09, S11 , Y _pb1 ) and (X _pb2 , Y _pb2 ), the positional deviation amount around the vertical axis and the positional deviation amounts in the X-axis direction and the Y-axis direction are obtained, and the probe card is obtained based on the positional deviation amounts. The stage 7 may be moved around the vertical axis / X-axis / Y-axis to align the test pad P and the probe 81. Thereby, the work time for correcting the misalignment between the TCP and the probe card 8 is further shortened.

The present invention is extremely useful for accurately and easily aligning the contact terminal of the contact portion and the external terminal of the TCP at the time of initial setting of the TCP handling apparatus.

Claims (32)

By carrying a carrier tape on which a plurality of TCPs are formed, pressing the carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting the external terminals of the TCP to the connection terminals A TCP handling device capable of sequentially attaching a plurality of TCPs to a test,
A moving device capable of moving the contact portion including the plurality of connection terminals around a plane direction and a vertical axis; and an imaging device capable of photographing the external terminal of the TCP under test and the connection terminal. Has
The imaging device captures the external terminal of the TCP under test to acquire the coordinate data of the external terminal, captures the connection terminal to acquire the coordinate data of the connection terminal,
From the coordinate data of the external terminal and the coordinate data of the connection terminal, the amount of positional deviation between the external terminal and the connection terminal is obtained,
A TCP handling device, wherein the contact portion is moved by the moving device on the basis of the displacement amount, and the connection terminal is aligned with the external terminal of the TCP under test. First, the coordinate data of the external terminal and the coordinate data of the connection terminal are obtained, the amount of positional deviation about the vertical axis between the external terminal and the connection terminal is obtained, and the amount of positional deviation about the vertical axis is obtained. On the basis of the movement device to move the contact portion around the vertical axis,
Second, the coordinate data of the connection terminal is obtained again, the amount of positional deviation in the plane direction between the external terminal and the connection terminal is obtained, and the moving device performs the positional deviation amount in the plane direction based on the amount of positional deviation in the plane direction. The TCP handling device according to claim 1, wherein the contact portion is moved in a planar direction.   The amount of positional deviation around the vertical axis between the external terminal and the connection terminal is based on the angle of the first straight line obtained from the coordinate data of two or more locations of the external terminal and the coordinate data of two or more locations of the connection terminal. 2. The TCP handling device according to claim 1, wherein the TCP handling device is obtained from a difference from an angle of the obtained second straight line. The TCP handling device further comprises a display device,
The TCP handling device according to claim 3, wherein the first straight line and / or the second straight line can be displayed on the display device.   5. The TCP handling device according to claim 4, wherein the first straight line can be overlaid on the display device so as to be superimposed on the image of the external terminal photographed by the imaging device.   5. The TCP handling device according to claim 4, wherein the second straight line can be overlaid on the display device so as to be superimposed on an image of the connection terminal photographed by the imaging device.   The TCP handling device according to claim 4, wherein a value of a difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device.   When the contact portion is moved around a vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, the first display is displayed on the display device. The TCP handling device according to claim 4, wherein the straight line and / or the color of the second straight line is changed.   The contact portion is moved about a vertical axis, and a notification sound is emitted when a difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value. The TCP handling device according to claim 4. The TCP handling device further includes an imaging device moving device capable of moving the imaging device,
4. The TCP handling device according to claim 3, wherein the imaging device photographs two or more locations of the external terminal and two or more locations of the connection terminal by movement by the imaging device moving device. 5. The TCP handling device further comprises a movable diffuse reflector,
2. The TCP handling device according to claim 1, wherein when photographing the connection terminal of the contact portion, the diffuse reflector is inserted between the connection terminal and the carrier tape. 3. By carrying a carrier tape on which a plurality of TCPs are formed, pressing the carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting the external terminals of the TCP to the connection terminals A TCP handling device capable of sequentially attaching a plurality of TCPs to a test,
An imaging device capable of photographing the external terminal of the TCP under test and the connection terminal, and a display device;
The contact portion including the plurality of connection terminals is movable around the plane direction and the vertical axis,
A first straight line obtained from the coordinate data of the external terminal obtained by photographing two or more external terminals of the TCP under test by the imaging device and / or two or more locations of the connection terminal by the imaging device. A TCP handling device, characterized in that a second straight line obtained from the coordinate data of the connection terminal obtained in this way can be displayed on the display device.   13. The TCP handling device according to claim 12, wherein the first straight line can be displayed on the display device as an overlay on the external terminal image taken by the imaging device.   13. The TCP handling device according to claim 12, wherein the second straight line can be overlaid on the display device so as to be superimposed on the image of the connection terminal photographed by the imaging device.   13. The TCP handling device according to claim 12, wherein an inclination angle and / or a coordinate value of a predetermined point of the first straight line and / or the second straight line can be further displayed on the display device.   The TCP handling device according to claim 12, wherein a value of a difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device.   When the contact portion is moved around a vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, the first display is displayed on the display device. The TCP handling device according to claim 12, wherein the color of the straight line and / or the color of the second straight line is changed.   The contact portion is moved about a vertical axis, and a notification sound is emitted when a difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value. The TCP handling device according to claim 12. The TCP handling device further includes an imaging device moving device capable of moving the imaging device,
The TCP handling device according to claim 12, wherein the imaging device photographs two or more locations of the external terminal and two or more locations of the connection terminal by movement by the imaging device moving device. The TCP handling device further comprises a movable diffuse reflector,
13. The TCP handling device according to claim 12, wherein when the connection terminal of the contact portion is photographed, the diffuse reflection plate is inserted between the connection terminal and the carrier tape. By carrying a carrier tape on which a plurality of TCPs are formed, pressing the carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting the external terminals of the TCP to the connection terminals A method of aligning connection terminals in a TCP handling device capable of sequentially applying a plurality of TCPs to a test,
First, the coordinate data of the external terminal and the coordinate data of the connection terminal are obtained, the amount of positional deviation about the vertical axis between the external terminal and the connection terminal is obtained, and the amount of positional deviation about the vertical axis is obtained. And moving the contact portion around a vertical axis,
Second, the coordinate data of the connection terminal is obtained again, the amount of positional deviation in the plane direction between the external terminal and the connection terminal is obtained, and the contact portion is planarized based on the amount of positional deviation in the plane direction. A method of aligning connection terminals, characterized by moving in a direction. By carrying a carrier tape on which a plurality of TCPs are formed, pressing the carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting the external terminals of the TCP to the connection terminals A method of aligning connection terminals in a TCP handling device capable of sequentially applying a plurality of TCPs to a test,
Obtaining the coordinate data of the external terminal and the coordinate data of the connection terminal, obtaining the positional deviation amount about the vertical axis and the positional deviation amount in the plane direction between the external terminal and the connection terminal, and calculating the positional deviation amount. Based on this, the contact portion is moved around the vertical axis and / or in the plane direction.   The amount of positional deviation around the vertical axis between the external terminal and the connection terminal is based on the angle of the first straight line obtained from the coordinate data of two or more locations of the external terminal and the coordinate data of two or more locations of the connection terminal. 23. The connection terminal positioning method according to claim 21, wherein the connection terminal alignment method is obtained from a difference from an angle of the obtained second straight line.   The TCP handling device according to claim 23, wherein a difference value between the angle of the first straight line and the angle of the second straight line is displayed on a display device.   The first straight line and the second straight line are displayed on a display device, and the contact portion is moved around a vertical axis so that a difference between the angle of the first straight line and the angle of the second straight line is predetermined. 24. The method for aligning connection terminals according to claim 23, wherein the color of the first straight line and / or the second straight line displayed on the display device is changed when the value becomes smaller than a value. .   The contact portion is moved about a vertical axis, and a notification sound is emitted when a difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value. The method for aligning connection terminals according to claim 23.   23. The connection terminal positioning method according to claim 21, wherein a diffuse reflection plate is inserted between the connection terminal and the carrier tape when photographing the connection terminal of the contact portion. By carrying a carrier tape on which a plurality of TCPs are formed, pressing the carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting the external terminals of the TCP to the connection terminals A method of aligning connection terminals in a TCP handling device capable of sequentially applying a plurality of TCPs to a test,
Two or more external terminals of the TCP under test are photographed by the imaging device, and the first straight line obtained from the acquired coordinate data of the external terminal is displayed on the display device.
Two or more locations of the connection terminal are photographed by the imaging device, and a second straight line obtained from the acquired coordinate data of the connection terminal is displayed on the display device together with the first straight line,
Therefore, the operator can move the contact portion around a vertical axis while viewing the first straight line and the second straight line displayed on the display device.   29. The TCP handling device according to claim 28, wherein a difference value between the angle of the first straight line and the angle of the second straight line is displayed on a display device. When the contact portion is moved around a vertical axis and the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, the first display is displayed on the display device. 29. The connection terminal alignment method according to claim 28, wherein a color of the straight line and / or a color of the second straight line is changed.   The contact portion is moved about a vertical axis, and a notification sound is emitted when a difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value. The method for aligning connection terminals according to claim 28. 29. The connection terminal positioning method according to claim 28, wherein a diffuse reflection plate is inserted between the connection terminal and the carrier tape when photographing the connection terminal of the contact portion.

Images