JP4829889B2 - TCP handling device - Google Patents

Description

  The present invention summarizes devices manufactured by TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC devices. Is related to a TCP handling device used for testing.

  In the manufacturing process of electronic components such as IC devices, an electronic component testing apparatus that tests the performance and functions of the finally manufactured IC devices and devices in its intermediate stage is necessary. In the case of TCP, A test apparatus for TCP is used.

  A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter also referred to as “TCP handler”). This TCP handler transports a carrier tape on which a plurality of TCPs are formed on a tape (including the concept of film; the same applies hereinafter), and the carrier tape is attached to a probe of a probe card that is electrically connected to a test head. Is provided, and a plurality of TCPs are sequentially subjected to a test by contacting the external terminals of the TCP with the probe.

  When performance and functions necessary for TCP are confirmed in the test, a pass determination (non-defective product determination) is made. On the other hand, a failure determination (defect determination) is made when the performance cannot be confirmed. However, in the fail determination, in addition to the case where the TCP itself is a defective product, there may be a failure due to the inaccurate positioning of the TCP with respect to the probe card, and there may also be a failure due to a large contact resistance in the contact state. The TCP that has received a fail determination due to a positioning failure or the like contains a non-defective product. Therefore, if a non-defective product can be found by performing a retest, the yield of TCP can be improved.

  Here, the carrier tape is provided with one or more positioning marks (alignment marks) for each TCP, and positioning is performed with reference to the alignment marks. In other words, the position of the TCP with respect to the probe card is confirmed with reference to the alignment mark using a camera or the like, and the misalignment is corrected as necessary. However, the fail judgment is still made due to the positioning failure. There is a case.

  Further, a large number of probe pins provided on the probe card are subject to variations due to the test of hundreds of thousands of times in which the position of the tip portion that contacts the external terminal of the TCP changes from the initial state. Along with this, a fail determination may be made. In addition, there is a case where a failure determination is made because dust adheres to the tip of the probe pin or the contact resistance at the tip of the probe pin increases and the contact state becomes unstable. Depending on the type of carrier tape and the reflection conditions on the carrier tape surface, the outline of the alignment mark may not be clearly detected by the camera.

  When TCP receives a fail determination, the operator temporarily stops the test apparatus, confirms the positional relationship between the external terminal of the TCP that has received the fail determination and the probe, and if the positional relationship is not appropriate, Re-test after manual alignment to ensure contact. Then, the TCP that has passed the retest is determined to be a non-defective product. Although the yield of TCP can be improved by the confirmation work by such an operator, there is a problem that the throughput of the test is lowered because the stop time of the test apparatus becomes long.

  By the way, there is a test apparatus for TCP including a probe card and a test head that can perform two or more TCP tests at the same time. Thus, by performing two or more TCP tests at the same time, the test throughput can be improved.

  However, if the number of TCPs to be tested at the same time is plural, the contact area at a time becomes wide. In particular, in a TCP test where the number of pins and the pitch are further reduced, it is not easy to accurately position all the TCPs that are subjected to the test at the same time. If a plurality of TCPs are tested at the same time, the frequency with which a non-defective TCP is judged as fail is increased due to poor positioning. When the frequency of fail determination increases, the frequency of the operator temporarily checking the test apparatus and performing manual alignment or manual alignment increases, and the test throughput decreases accordingly. In other words, increasing the number of TCPs attached to the test at the same time to improve the throughput also increases the frequency of temporary suspension of the test apparatus, which reduces the operating time of the test apparatus and does not necessarily have a sufficient throughput improvement effect. I can't get it.

  The present invention has been made in view of such a situation, and a TCP handling device capable of further improving the throughput of a test with respect to a TCP handling device capable of simultaneously attaching two or more TCPs to a test in each test. The purpose is to provide.

  In order to achieve the above object, firstly, the present invention applies a probe card corresponding to a plurality of TCPs to be tested simultaneously, and electrically connects a plurality of TCP external terminals on the carrier tape and a contact terminal of the probe card. TCP handling device capable of simultaneously testing a plurality of TCPs by bringing them into contact with each other, wherein a plurality of TCPs are tested at the same time in the first test, and a failure determination TCP that has received a failure determination in the simultaneous test Is moved to the position of another contact terminal different from the contact terminal with which the defect determination TCP is in contact, and then subjected to the test again (Invention 1).

  According to the said invention (invention 1), the TCP which received the defect determination can be automatically re-tested without stopping the TCP handling device. That is, although TCP is actually a non-defective product, a failure may be determined for various reasons. However, according to the above invention (Invention 1), it may be determined that the product is non-defective by retesting. , Device manufacturing yield is improved. Moreover, according to the said invention (invention 1), since a retest can be automatically performed without stopping a TCP handling apparatus, the throughput of a test improves.

  Note that the retest here includes not only the second test performed after the first test but also the third and subsequent tests as long as different contact terminal groups can be used. For example, when there are three contact terminal groups, the retest can be performed twice.

  In the above invention (Invention 1), a plurality of TCPs arranged in series with respect to the transport direction of the carrier tape, a plurality of TCPs arranged in parallel with respect to the transport direction of the carrier tape, or a transport direction of the carrier tape A plurality of TCPs arranged in series and a plurality of TCPs arranged in parallel in the transport direction may be simultaneously subjected to the test (Invention 2).

  In the above invention (Invention 1), the carrier tape is provided with a positioning alignment mark for specifying the position of each TCP for each TCP, and simultaneously corresponds to a plurality of external terminals of the TCP subjected to the test. The contact terminals may be positioned based on at least one of the alignment marks (Invention 3). According to such a TCP handling device, the carrier tape can be positioned in a short time, and the effects of the present invention are remarkably exhibited in such a TCP handling device.

  In the said invention (invention 1), when the said defect determination TCP is attached | subjected to a test again, you may attach | subject the untested TCP pressed with the said defect determination TCP simultaneously to a test (invention 4).

  For example, when one TCP receives a failure determination when a test is performed, one TCP is subjected to retest in the next test. Therefore, if there are, for example, two positions where the TCP can be contacted with the TCP in the contact portion, the TCP not subjected to the retest is also contacted with the contact portion in addition to the TCP subjected to the retest. At this time, a TCP that has never been attached to the test may come into contact with the contact part. However, if this TCP is attached to the first test at the time of the retest, the first test is performed at the same time as the retest is performed. Can also be performed, further improving test throughput.

  In the said invention (invention 1), when the said defect determination TCP is attached | subjected to a test again, it is preferable to exclude from the test execution the inspected TCP pressed with the said defect determination TCP (invention 5).

  In the said invention (invention 1), it is preferable to perform at least one retest with respect to the defect determination TCP which received the defect determination by the said simultaneous test with the contact terminal which the said defect determination TCP contacted (invention 6). ). Such a retest may make it easy to obtain a non-defective product determination. In this case, it is not necessary to perform a TCP position changing operation, and the test throughput can be further improved.

  In the said invention (invention 1), you may make it change the press conditions of the external terminal of the said defect determination TCP, and the contact terminal which contacts the said external terminal, and may perform the said retest (invention 7). Such a retest may make it easy to obtain a non-defective product determination. In this case, it is not necessary to perform a TCP position changing operation, and the test throughput can be further improved.

  In the above invention (Invention 7), when the contact resistance between the external terminal of the defect determination TCP and the contact terminal in contact with the external terminal is measured, and a contact resistance value exceeding an allowable contact resistance value is detected, The retest may be performed by changing the pressing condition (Invention 8). Such a retest may make it easy to obtain a non-defective product determination. In this case, it is not necessary to perform a TCP position changing operation, and the test throughput can be further improved.

  In the above invention (Invention 1), contact failure of any contact terminal is detected using a contact check function that detects an electrical contact state between the TCP external terminal and the contact terminal that contacts the external terminal. Until the probe card stage for moving the probe card is finely moved in the X-axis direction and / or the Y-axis direction to determine the movable area, and the central position in the movable area is specified, and based on the specified central position TCP positioning may be performed (invention 9). According to this invention, since the contact terminals can be optimally positioned, the frequency of occurrence of defect determination is reduced, and the yield and test throughput are improved.

  In the said invention (invention 1), the said TCP handling apparatus is equipped with the adsorption | suction / pressing member which adsorb | sucks several TCP simultaneously and presses it to the said contact terminal, The said adsorption | suction / pressing member is the arrangement | sequence of TCP to test simultaneously And the divided adsorbing / pressing members may be capable of adjusting the mutual distance so as to correspond to the pitch of the TCP to be tested at the same time (Invention 10). . According to this invention, it is possible to adjust the pitch between the plurality of TCPs to match the pitch of the corresponding contact terminal group.

  Secondly, the present invention is a TCP handling device capable of simultaneously testing a plurality of TCPs, wherein a plurality of TCPs are tested at the same time in the first test, and a failure determination TCP which has received a failure determination in the simultaneous test. A TCP handling device is provided in which another contact terminal different from the contact terminal of the probe card in contact with the defect determination TCP is applied to the test again (Invention 11).

  According to the said invention (invention 11), TCP which received the defect determination can be automatically retested without stopping a TCP handling apparatus. Therefore, the yield of device manufacturing is improved, and it is not necessary to stop the TCP handling apparatus, thereby improving the test throughput.

  According to the TCP handling apparatus of the present invention, when two or more TCPs are tested at the same time, the test throughput can be improved along with the device manufacturing yield.

1 is an overall front view of a test apparatus for TCP including a TCP handler according to an embodiment of the present invention. It is a top view of the probe card stage in the test apparatus for TCP. It is a flowchart figure which shows the operation | movement of the TCP handler which concerns on one Embodiment of this invention. It is a flowchart figure which shows the operation | movement at the time of the retest of the TCP handler based on one Embodiment of this invention. It is a flowchart figure which shows the operation | movement of another aspect at the time of the retest of the TCP handler which concerns on one Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Test apparatus for TCP 2 TCP handler 3 Pusher unit 5 Carrier tape 7 Probe card stage 8 Probe card 10 Test head 21 Unwinding reel 22 Rewinding reel 81 Probe (contact terminal)

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 is an overall front view of a test apparatus for TCP including a TCP handler according to an embodiment of the present invention, FIG. 2 is a plan view of a probe card stage, and FIG. 3 is an embodiment of the present invention. 4 is a flowchart showing the operation of the TCP handler according to the embodiment, FIG. 4 is a flowchart showing the operation at the time of retesting the TCP handler according to the embodiment of the invention, and FIG. 5 is an embodiment of the invention. It is a flowchart figure which shows the operation | movement of another aspect at the time of the retest of the TCP handler which concerns on a form.

  First, the overall configuration of a TCP test apparatus including a handler according to an embodiment of the present invention will be described.

  As shown in FIG. 1, a test apparatus 1 for TCP includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided on the upper side of the test head 10. Is done.

  The TCP handler 2 conveys the carrier tape 5 to subject each TCP formed on the carrier tape 5 in a line along the longitudinal direction to the test sequentially. Some carrier tapes 5 have TCPs formed in an array of two or more rows along the longitudinal direction thereof. For example, when there are four TCPs to be tested at the same time, there are four arrays in one row and two arrays in two rows.

  As shown in FIG. 2, for each TCP in the carrier tape 5, an alignment mark 51 is provided at a predetermined position near the TCP.

  Although the TCP handler 2 of the present embodiment applies two TCPs to the test, the present invention is not limited to an apparatus that applies two TCPs to the test, and the carrier tape 5 It also includes a handler that simultaneously tests three or more TCPs arranged in the serial direction and / or parallel direction.

  The TCP handler 2 includes an unwinding reel 21 and a take-up reel 22. A carrier tape 5 before the test is wound on the unwinding reel 21, and the carrier tape 5 is unwound from the unwinding reel 21 and conveyed so as to be wound on the winding reel 22 after being subjected to the test. Is done.

  Between the unwinding reel 21 and the take-up reel 22, three spacer rolls 23 a, 23 b, and 23 c are provided that bridge the protective tape 52 peeled off from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. It has been. Each spacer roll 23a, 23b, 23c can move up and down so that the tension of the protective tape 52 can be adjusted.

  A tape guide 24a, an unwinding limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided below the unwinding reel 21, and the carrier tape 5 unwound from the unwinding reel 21 is While being guided by the tape guide 24a, it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.

  A tape guide 24b, a take-up limit roller 25f, an out-side sub-sprocket 25e, and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape after being subjected to the test in the pusher unit 3 is provided. 5 is wound around the take-up reel 22 while being guided by the tape guide 24b through the out-side guide roller 25d, the out-side sub-sprocket 25e, and the take-up limit roller 25f.

  A pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d. A first camera 6 a is provided on the front side of the pusher unit 3 (left side in FIG. 1), and a second camera 6 b is provided on the lower side of the pusher unit 3 (inside a probe card stage 7 described later). A third camera 6c is provided on the rear stage side (right side in FIG. 1). A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c.

  The mark punch 26a is one in which one or a plurality of holes are formed at a predetermined position for the corresponding TCP based on the test result, and the reject punch 26b is a TCP that is determined to be a defective product as a result of the test. It is something that punches out. The mark punch 26a and the reject punch 26b can be individually controlled so as not to operate.

  Each camera 6a, 6b, 6c is connected to an image processing device (not shown). The first camera 6a and the third camera 6c are for judging the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a. In addition, the second camera 6b can acquire the position information of the alignment mark on the carrier tape 5 and the information on the positional deviation between the TCP and the probe, and display the photographed image on the monitor so that the operator can grasp the contact status. It is to make. The second camera 6b in the present embodiment can acquire positional deviation information for a plurality of objects within the field of view.

  The second camera 6b has a narrow imaging field of view because it is necessary to accurately acquire the positional relationship between the TCP test pad and the probe 81 (also referred to as a probe pin). For this reason, the second camera 6b is mounted on the camera stage 61, and can be moved in the vertical and horizontal directions (X axis-Y axis direction) and in the vertical direction (Z axis direction) in plan view by an actuator of the camera stage 61. ing. Thereby, since it can move to the whole test area | region in a carrier tape, the positional relationship of the desired test pad and probe 81 in TCP, and the position of the alignment mark 51 can be imaged clearly.

  Here, with respect to the second camera 6b, a high-resolution camera that can capture a field of view that is several times wider than the image processing region used for image processing, for example, while maintaining a desired resolution may be applied. Good. In this case, since the frequency of moving the camera stage 61 can be reduced, the processing time for moving the camera stage 61 is shortened. Further, as the number of movements of the camera stage 61 decreases, the error factor of the movement amount can be reduced. Therefore, even a fine pitch TCP can be accurately positioned. Furthermore, since digital zoom is possible while maintaining the desired resolution, the relative positional relationship between the target test pad, the probe 81 and the alignment mark 51 can be easily grasped and specified, and a large number of test pads can be obtained. And misalignment correction of the probe 81 can be processed. In addition, since the alignment marks 51 at a plurality of locations can be easily detected, positioning can be performed based on the alignment marks 51 at the plurality of locations. In the past, when the operator scrolled the screen displayed on the monitor to check the contact status, the target position was sometimes missed. Can be used for easy monitor display.

  A servo motor 31 capable of rotating the ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361. A pusher main body 33 to which the ball screw 32 is screwed is attached via two linear motion guides (hereinafter referred to as “LM guides”) 37 extending in the Z-axis direction. When the servo motor 31 is driven, the pusher body 33 moves in the vertical direction (Z-axis direction) while being guided by the LM guide 37.

  At the lower end of the pusher body 33, there is provided a suction plate 34 that is connected to a negative pressure source (not shown) and sucks and holds the carrier tape 5 by suctioning the TCP. Yes.

  A tension sprocket 35a is provided on the front side (left side in FIG. 1) of the pusher main body 33, and a main sprocket 35b is provided on the rear side (right side in FIG. 1) of the pusher main body 33.

  Further, under the pusher unit 3 and on the upper part of the test head 10, as shown in FIG. 2, it can be in contact with two TCP external terminals (hereinafter also referred to as “test pads”). A probe card stage 7 on which a probe card 8 having a large number of probes (contact terminals) 81 is mounted is installed. The probe card stage 7 is connected to a servo motor via a plurality of ball screws (not shown), and the probe card 8 can be moved in the horizontal direction (XY plane direction) by driving the servo motor. The card 8 can be rotated around the vertical axis (around the Z axis).

  The probe card 8 having a plurality of probes 81 is detachably attached to the card ring of the probe card stage 7 by pins (not shown). The probe card 8 in the present embodiment has two probe groups (probe group at the front position 8a / probe at the rear position 8b so that two TCPs arranged in series in the transport direction of the carrier tape 5 can be tested simultaneously. Group). In the case of the carrier tape 5 in which two rows of TCPs are arranged on the carrier tape 5, a probe card having four probe groups is applied correspondingly.

  The distance between the front position 8a and the rear position 8b is set to be one pitch of TCP in the transport direction of the carrier tape 5. The interval of one pitch of TCP may vary depending on the type of device under test, shape, type of carrier tape, etc., so the interval between the front position 8a and the rear position 8b can be changed manually or automatically. It is desirable to have a pitch change mechanism that can.

  Each probe 81 of the probe card 8 is electrically connected to the tester main body via the test head 10, and the second camera 6 b is positioned below the probe card 8 and inside the probe card stage 7. is doing.

  In such an apparatus, the pusher unit 3 presses the carrier tape 5 conveyed to the probe card stage 7 against the probe card 8 on the test head 10 while adsorbing and supporting the carrier tape 5. Then, the two TCPs on the carrier tape 5 come into contact with the probes 81 arranged at the corresponding positions 8a and 8b on the probe card 8. In this state, first, a minute direct current is applied to each IC terminal, and a contact check is performed by measuring the presence or absence of a current flowing in the TCP internal circuit (for example, a protective diode) and a voltage value. The electrical contact with the probe 81 and the presence or absence of a short between adjacent pins are confirmed. Thereafter, a test signal from the tester body is applied to the TCP, and a response signal read from the TCP is sent to the tester body through the test head 10. Based on this response signal, TCP performance, test, etc. are tested, and pass determination (non-defective product determination) or fail determination (failure determination) is performed for TCP.

Next, the usage method and operation of the TCP handler 2 will be described.
When the TCP handler is used, it is necessary to make initial settings before the TCP handler 2 is actually operated. That is, when the TCP type and the probe card 8 are changed accordingly, the reference of the pusher stage 4 and the probe card stage 7 so that the TCP test pad and the probe 81 of the corresponding probe card 8 are in contact with each other. The position needs to be determined and registered (this position is referred to as “registered position”).

  For example, an operator manually selects a plurality of (for example, three) probes 81 and corresponding test pads to determine a rough position, and then uses the second camera 6b and the image processing apparatus. The reference position is determined and registered by moving the pusher stage 4 and / or the probe card stage 7 by manual control or automatic control so that each probe 81 is positioned as centrally as possible in each test pad. If desired, the rough position may be determined by automatic control instead of manual operation.

  At this time, the position coordinates of a predetermined target in the field of view of the second camera 6b are also registered. In the present embodiment, the position coordinates of the alignment mark 51 on the carrier tape 5 are registered.

  Next, the operation of the TCP handler 2 during actual operation will be described with reference to the flowchart of FIG. Here, two TCPs arranged in a line along the longitudinal direction of the carrier tape 5 are tested simultaneously. In addition, as shown in FIG. 2, there are two alignment marks 51 for positioning the carrier tape 5 in the vertical direction (Y-axis direction) with respect to one TCP. Although there are four alignment marks 51, in this embodiment, one alignment mark 51 at the front position 8a is applied to perform TCP positioning.

  The TCP handler 2 includes the control means. When the TCP handler 2 is put into a state where it can be actually operated, the pusher stage 4 and the probe card stage 7 first move to the registration positions (step S01). Then, the take-up reel 21 and the take-up reel 22 rotate by a predetermined angle to move the carrier tape 5 and convey the first and second TCPs to a predetermined position below the suction plate 34 (step S02). .

  When the TCP is conveyed to the lower side of the suction plate 34, the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 downward in the Z axis. The moved suction plate 34 sucks the carrier tape 5 and descends to the imaging position (step S03).

  In this state, the second camera 6b performs imaging (step S04), and transmits image information to the image processing apparatus. The image processing apparatus acquires information on the positional deviation between the position coordinates of a predetermined target registered in advance and the position coordinates of the target actually captured from the received image information. For example, in the present embodiment, information on the positional deviation between the registered position coordinates of the alignment mark corresponding to the position 8a and the position coordinates of the alignment mark 51 corresponding to the actually imaged position 8a is acquired.

  The image processing apparatus calculates the amount of misalignment about the X axis direction, the Y axis direction, and the vertical axis based on the earned misregistration information, and determines whether correction is necessary (step S05). If it is determined that correction is necessary, a necessary correction operation is performed (step S06).

  When the correction operation is completed, the servo motor 31 of the pusher unit 3 is operated, and the suction plate 34 is further moved in the Z-axis direction via the pusher main body 33. The suction plate 34 that sucks the carrier tape 5 descends to the contact position, and the first TCP located on the front side in the carrier tape transport direction A (see FIG. 2) is the corresponding front side on the probe card 8. The second TCP, which is pressed against the probe 81 arranged at the position 8a and located on the rear side in the carrier tape conveying direction A, is arranged at the corresponding rear position 8b on the probe card 8. The probe 81 is pressed (step S07).

  Then, when each TCP test pad contacts the probe 81, a first test for each TCP (hereinafter also referred to as “main test”) is executed (step S08). In the test, a contact check is first performed to confirm that all test pads are in electrical contact with the probe 81, and contact failure is detected even if the suction plate 34 is moved up and down a plurality of times. Fail is judged.

  When the contact check is normal, a test signal is applied to each TCP from the tester body through the test head 10, and a response signal read from each TCP is sent to the tester body through the test head 10. Based on this response signal, the tester body determines pass / fail judgment and rank classification of each TCP, and performs pass judgment (good product judgment) or fail judgment (defective product judgment) for TCP (step S09).

  As a result of this test, when there is a TCP that has passed the pass determination, the mark punch 26a is driven only for the TCP that has passed the pass determination (step S10). Note that there is a control form in which the mark punch 26a is not operated.

  Here, referring to the result of the previous main test (step S11), if any one or both of the TCPs have undergone a fail determination, a retest operation (steps S21 to S36) described later is executed. If a failure determination is made, if desired, a re-test may be performed once at this stage, for example, and a control operation for changing to a pass determination may be added.

  On the other hand, if both TCPs have received the path determination, the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 in the Z-axis upward direction via the pusher body 33, and the pusher stage 4 and probe The card stage 7 moves to the registration position (step S12). Then, the suction plate 34 stops the suction of the carrier tape 5 to release the carrier tape 5, and further moves in the Z-axis upward direction (step S13).

  Then, it is determined whether or not the TCP that has performed the test is the last device (step S14). If it is determined that the TCP is the last device, the main operation is terminated and it is determined that the TCP is not the last device. In that case, the process returns to step S02 to test the next two TCPs.

  Next, the retest operation will be described. Here, as a result of the above test, the combination of the two TCP fail judgments is that only the TCP at the front position 8a in the carrier tape transport direction A is a fail judgment, and only the TCP at the rear position 8b is a fail judgment. There are cases where the determination is made and cases where the TCP at both positions 8a and 8b is a failure determination, and the operations are different.

  In the retest operation, first, the same operations as those of Steps S12 and S13 described above are executed to stop the suction of the carrier tape 5 by the suction plate 34 and release the carrier tape 5 (Step S21).

  Next, it is determined whether the TCP (here, the first TCP) positioned at the front position 8a in the carrier tape transport direction A has received a pass determination or a fail determination in the first test (step S22). . Here, when the TCP located at the front position 8a has received a pass determination in the first test, step S28 described later is executed. On the other hand, when the TCP located at the front position 8a has received a fail determination, the carrier tape 5 is moved in the reverse direction by reversing the main sprocket 35b by one pitch of the TCP together with the tension sprocket 35a (step S23). The TCP located at the front position 8a of the probe card 8 is moved to the rear position 8b. Then, the same operations as those from step S03 to step S07 described above are performed, and the external terminal of the TCP is brought into contact with the probe 81 at the rear position 8b (step S24).

  Then, a retest is performed on the TCP that has contacted the probe 81 at the rear position 8b (step S25), and a pass determination or a fail determination is performed on the TCP (step S26). Here, when a contact failure is detected in the retest contact check, the first processing mode immediately for fail determination and the carrier tape 5 side are finely moved, or the probe card stage 7 side is finely moved to cause the contact failure. There is a second processing form in which a trial operation is performed to determine whether there is a position that disappears, but it is desirable to perform the second processing form.

  As a result of the retest, when the TCP attached to the retest receives the second fail determination, it is determined as a defective product and the reject punch 26b is driven (step S27a). On the other hand, when the pass determination is received for the second time, the TCP is determined as a non-defective product and the mark punch 26a is driven (step S27b).

  Next, in step 22 or step 25, when the TCP located at the front position 8a at the beginning receives a path determination, and the TCP located at the rear position 8b receives a path determination, S12 is executed (step S28).

  On the other hand, if the TCP located at the rear position 8b has received a fail determination, the same operation as in steps S12 and S13 described above is executed, and the carrier tape 5 is sucked by the suction plate 34. Is stopped and the carrier tape 5 is released (step S29). Subsequently, the main sprocket 35b is moved forward by one pitch of the TCP together with the tension sprocket 35a, and the TCP located at the rear position 8b is moved to the front position 8a (step S30). Then, the same operations as those from step S03 to step S07 described above are performed to bring the external terminal of the TCP into contact with the probe 81 at the front position 8a (step S31).

  Then, a retest is performed on the TCP that has contacted the probe 81 at the front position 8a (step S32), and a pass determination or a fail determination is performed on the TCP (step S33).

  As a result of this retest, when the TCP subjected to the retest receives the second fail determination, it is determined as a defective product and the reject punch 26b is driven (step S34a). On the other hand, when the pass determination is received for the second time, the TCP is determined as a non-defective product and the mark punch 26a is driven (step S34b). And step S12 is performed.

  As described above, according to the TCP handler 2 of the present embodiment, the TCP that has received the fail determination in the first test can be automatically retested without stopping the TCP handler. Moreover, although there are TCP contact failures and positioning failures caused by the probe 81 at one position as a cause of the failure determination, it differs from the position on the probe card in the first test as in the TCP handler of this embodiment. Retesting with a probe 81 at another position may result in a good contact state. As a result, TCP, which is originally a good product, can be determined to be a good product by retesting. As a result, the yield of TCP can be improved. In addition, as described above, since the retest can be automatically performed without stopping the test apparatus, the operating rate of the test apparatus is improved, so that the test throughput is improved.

  In particular, in the present embodiment, since the TCP is positioned using the alignment mark 51 corresponding to one position 8a, the TCP located at the other position 8b is likely to be relatively poorly positioned. However, even in such a case, after the TCP is moved to the position 8a, the TCP is positioned using the alignment mark 51 of the TCP. As a result, the TCP can obtain a more accurate positioning state. The path determination can be obtained effectively.

  The cause of the fail determination is not only in the case of TCP positioning failure, but also in the case where needle tip deterioration occurs in any of the multiple probes 81 provided at each position 8a, 8b, or when the pressing force is insufficient. However, according to the TCP handler 2 of the present embodiment, it is possible to effectively obtain a path determination by performing a retest on a good position side. As a result, the problem of processing a non-defective TCP as a defective product is solved, and a yield improvement effect is obtained. Furthermore, it is not necessary for the operator to stop the test apparatus once, and the operating rate of the apparatus can be improved.

  Here, the retest in step S32 is a step of performing a retest on the TCP located at the front position 8a on the probe card 8. At this time, the rear position 8b on the probe card 8 has A TCP that has not been tested yet (here, the third one) is contacted. Therefore, when performing the retest in step S32, the TCP located at the rear position 8b on the probe card 8 may be attached to the first test at the same time.

  In this case, instead of the step E1 of steps S32 to S34, a step E2 (steps S41 to S45; see FIG. 5) described below is executed. That is, not only the TCP subjected to the retest (here, the second one) but also the TCP (positioned at the rear position 8b on the probe card 8 at the same time on the rear side in the carrier tape transport direction A ( Here, the test is performed for the third one (step S41).

  First, a determination is made for the TCP subjected to the retest (step S42). As a result, when the TCP subjected to the retest receives a fail determination, it is determined as a defective product, and the reject punch 26b is driven (step S43a). On the other hand, when the TCP attached to the retest receives a pass determination, it is confirmed as a non-defective product and the mark punch 26a is driven (step S43b).

  Then, it is determined whether the TCP attached to the first test performed at the same time as the retest (here, the third TCP) has undergone a path determination (step S44). If the TCP has passed the pass determination, it is determined as a non-defective product, the mark punch 26a is driven (step S45), and then step S12 is executed. On the other hand, if the TCP has received a fail determination, step S29 is executed.

  In this way, if the first test is performed simultaneously with the retest, the test throughput can be further improved.

  The embodiment described above is described for facilitating understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

  For example, in the above-described test operation, TCP determinations at both positions 8a and 8b on the probe card 8 are simultaneously performed. If both TCPs at the positions 8a and 8b are determined to be failed, the preceding and following positions 8a are determined. , 8b may be alternately replaced and the retest operation may be performed. It should be noted that it is desirable to perform the test again by moving the pusher unit 3 up and down a plurality of times before performing the above replacement when both TCPs at both positions 8a and 8b are judged as fail. May be obtained.

  Further, at the time of misalignment correction, information on misalignment between the position coordinates of the registered alignment mark corresponding to the rear position 8b and the position coordinates of the alignment mark 51 corresponding to the rear position 8b actually captured is obtained. You may make it acquire. Alternatively, an average value of the positional deviation amount of the alignment mark 51 corresponding to the front position 8a and the positional deviation amount of the alignment mark 51 corresponding to the rear position 8b may be used.

  In the above embodiment, since the TCP is positioned using the alignment mark 51 corresponding to one position 8a, the TCP located at the other position 8b is likely to be relatively poorly positioned. The other alignment mark 51 corresponding to the position 8b may also be used when necessary. For example, when a fail determination occurs in the TCP at the rear position 8b, after performing positioning based on the alignment mark 51 on the rear side, a retest may be performed without moving the TCP. Depending on the case, a path determination may be obtained. According to this, the movement operation for obtaining the positions of the two alignment marks 51 by largely moving the camera stage 61 can be greatly reduced, and a decrease in throughput due to the movement time of the second camera 6b can be minimized. Therefore, it is practical.

  In addition, since a large number of probes 81 are deformed with tens of thousands of times of pressing stress, all the probes 81 in contact with the TCP test pads are in a variation state shifted from the center of each corresponding test pad. It becomes. Therefore, until a contact failure is detected by any of the probes 81, the probe card stage 7 is sequentially finely moved in the X-axis direction and the Y-axis direction to obtain a movable area, and the best center position in the current probe 81 is specified. To do. By performing the TCP positioning based on this, it is possible to perform the optimum positioning in the current current probe 81. If desired, the movable region information and the central position information obtained can be saved, and the position can be corrected using the information at the time of test execution, so that the optimum positioning can be performed. Thereby, the frequency of occurrence of fail determination is reduced, and the yield and test throughput are improved.

  Further, the contact resistance value generated between each test pad and each probe 81 in contact with the test pad is tens of thousands of times of pressing stress, positional deviation of the tip of the probe 81, shape change, elastic characteristic change, It varies or increases with the state of the electrical contact site. Therefore, for the TCP probe 81 in which the fail determination has occurred, the height condition in the pressing direction of the suction plate 34 of the pusher unit 3 is changed within the allowable range of the probe 81, and the retest is executed. You may do it. When a pass determination is obtained by this retest, the TCP can be determined as a non-defective product.

  In addition, in the case of TCP that can practically measure the contact resistance value by contact check, after the fail judgment is given, the contact check is executed with the current pressed state, and each contact resistance value is measured. You may make it do. Then, based on the maximum allowable resistance value that is different depending on the type of each IC terminal (input pin, output pin, power supply pin) of TCP, it is judged whether the contact resistance value is good or bad. When the probe 81 is detected, the pusher unit 3 is moved up and down to measure the contact resistance of the probe 81 again. When the probe 81 is restored to the normal state, the retest is executed in this state. Secondly, if the contact resistance value is normal, the TCP is likely to be defective, so it is moved to another probe 81 and retested.

  Further, the suction plate 34 may have a structure divided in correspondence with the TCP arrangement direction (X-axis direction, Y-axis direction), and the divided suction plate can be moved relatively. A mechanism (not shown) may be provided. Such a divided moving structure makes it possible to adjust the pitch between the plurality of TCPs to match the pitch of the corresponding probe group. Although the thin film of the carrier tape 5 is curved by adjusting the pitch, the adjustment width is about several tens of microns, and can be practically implemented. However, the pitch between the TCPs of the probes 81 on the probe card side is desirably narrowed, for example, by several tens of microns.

  According to the split moving structure as described above, when a large number (2, 4, 8, 16) of TCPs are tested at the same time, fluctuations in the pitch between TCPs due to thermal expansion and a narrow pitch require positional accuracy. It is possible to accurately cope with the case where the pitch between TCPs of a large TCP with a large number of pins is increased, or the variation in the elongation of the film of the carrier tape 5. As a result, it is possible to further reduce the frequency of occurrence of defect determination due to misalignment, so that a larger number (4, 8, 16) of TCPs can be tested simultaneously, thus improving the reliability and throughput of the test. be able to.

The TCP handling apparatus according to the present invention is effective for improving the yield of device manufacturing and the throughput of testing, and efficiently performing TCP testing.

Claims (11)

By applying a probe card that supports multiple TCPs to be tested at the same time and bringing the external terminals of multiple TCPs on the carrier tape into electrical contact with the contact terminals of the probe card, multiple TCPs can be attached to the test simultaneously. A TCP handling device capable of
After simultaneously testing a plurality of TCPs in the first test, and moving the failure determination TCP that received the failure determination in the simultaneous test to a position of another contact terminal different from the contact terminal that the failure determination TCP is in contact with, A TCP handling device characterized by applying another contact terminal to the test again.   Multiple TCPs arranged in series with respect to the carrier tape conveyance direction, Multiple TCPs arranged in parallel with respect to the carrier tape conveyance direction, or Multiple TCPs arranged in series with respect to the carrier tape conveyance direction and conveyance The TCP handling device according to claim 1, wherein a plurality of TCPs arranged in parallel with respect to a direction are simultaneously subjected to the test. The carrier tape is provided with positioning alignment marks for specifying the position of each TCP for each TCP,
2. The TCP handling device according to claim 1, wherein positioning of contact terminals corresponding to a plurality of TCP external terminals simultaneously subjected to the test is performed based on at least one of the alignment marks.   The TCP handling device according to claim 1, wherein when the defect determination TCP is subjected to the test again, an uninspected TCP pressed together with the defect determination TCP is simultaneously subjected to the test.   The TCP handling apparatus according to claim 1, wherein when the defect determination TCP is subjected to the test again, the inspected TCP that is pressed together with the defect determination TCP is excluded from the execution of the test.   2. The TCP handling device according to claim 1, wherein at least one retest is performed on the failure determination TCP that has received the failure determination in the simultaneous test, using a contact terminal in contact with the failure determination TCP.   The TCP handling apparatus according to claim 6, wherein the retest is performed by changing a pressing condition between an external terminal of the defect determination TCP and a contact terminal that contacts the external terminal.   When the contact resistance between the external terminal of the defect determination TCP and the contact terminal in contact with the external terminal is measured, and a thing exceeding an allowable contact resistance value is detected, the pressing condition is changed, The TCP handling apparatus according to claim 7, wherein a retest is performed. A probe that moves a probe card until contact failure is detected with any contact terminal using a contact check function that detects an electrical contact state between an external terminal of TCP and a contact terminal that contacts the external terminal Finely move the card stage in the X-axis direction and / or Y-axis direction to obtain the movable area,
Identify a central position in the movable region;
2. The TCP handling device according to claim 1, wherein TCP positioning is performed based on the specified center position. The TCP handling device includes an adsorption / pressing member that simultaneously adsorbs a plurality of TCPs and presses them against the contact terminals,
The adsorption / pressing member is divided into at least two parts corresponding to the TCP arrangement to be tested simultaneously,
2. The TCP handling device according to claim 1, wherein a distance between the divided suction / pressing members can be adjusted so as to correspond to a pitch of TCP to be tested at the same time. A TCP handling device capable of simultaneously testing a plurality of TCPs,
Applying another contact terminal different from the contact terminal of the probe card with which the defect determination TCP is in contact with the defect determination TCP that has simultaneously tested a plurality of TCPs in the first test and received the defect determination in the simultaneous test, A TCP handling device that is subjected to a test again.

Images