WO2007023556A1

WO2007023556A1 - Tcp handling apparatus

Info

Publication number: WO2007023556A1
Application number: PCT/JP2005/015479
Authority: WO
Inventors: Takeshi Onishi; Hisashi Murano; Masahito Kondo; Katsuhiro Imaizumi
Original assignee: Advantest Corporation
Priority date: 2005-08-25
Filing date: 2005-08-25
Publication date: 2007-03-01
Also published as: TW200723415A; JPWO2007023556A1; JP4829889B2; TWI321818B

Abstract

A TCP handling apparatus (2) wherein when TCPs determined to be faulty in a first test are brought into contact, for use in a retest, with a probe (81) different from a probe (81) which was brought into contact with an external terminal when it was determined to be faulty, acceptable products can be picked up by the retest, the yielding of the TCPs can be increased, and the retest can be automatically performed without stopping the TCP handling apparatus (2). As a result, the throughput of the test can be increased.

Description

Specification

TCP handling equipment

Technical field

[0001] The present invention is manufactured using TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC device. It relates to a TCP handling device that is used to collectively test devices and test "TCP".

Background art

[0002] In the manufacturing process of electronic components such as IC devices, an electronic component testing device that tests the performance and functions of the final manufactured IC device and devices in its intermediate stage is required. In some cases, test equipment for TCP is used.

A test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter sometimes referred to as “TCP handler”). This TCP handler transports a carrier tape on which multiple TCPs are formed on a tape (including the concept of film; the same shall apply hereinafter) and carries the carrier to the probe card probe that is electrically connected to the test head. By pressing the tape and bringing the external terminal of TCP into contact with the probe, it has the function of sequentially attaching multiple TCPs to the test.

[0004] Then, during the test, when the performance and functions necessary for TCP are confirmed, a pass determination (non-defective product determination) is made, whereas if it cannot be confirmed, a fail determination (defect determination) is made. However, in the fail judgment, in addition to the case where the TCP itself is a defective product, there may be a failure due to the inaccurate positioning of the TCP with respect to the probe card, or a failure due to a large contact resistance in the contact state. is there. TCPs that have failed due to poor positioning, etc. contain non-defective products, so if you can re-test and find non-defective products, you can improve the TCP yield.

Here, the carrier tape is provided with positioning mark (alignment mark) force si or a plurality of positions for each TCP, and positioning is performed with reference to the alignment mark. In other words, the TCP position relative to the probe card can be A force that checks the alignment mark as a reference and corrects misalignment as necessary. In some cases, however, a failure determination may be made due to positioning errors.

[0006] In addition, in many probe pins provided on the probe card, the position of the tip portion that contacts the external terminal of the TCP changes in the initial state force due to hundreds of thousands of tests, resulting in variations. . Along with this, a fail determination may be made. In addition, there is a case where a failure determination is made because the contact state becomes unstable due to dust adhering to the tip of the probe pin or an increase in contact resistance at the tip of the probe pin. Also, depending on the type of carrier tape and the reflection conditions on the carrier tape surface, the alignment mark outline may not be clearly detected by the camera.

[0007] When TCP receives a fail determination, the operator temporarily stops the test equipment, confirms the positional relationship between the external terminal of the TCP that has received the fail determination and the probe, and the positional relationship is not appropriate. In case of ヽ, perform the retest after manual alignment to ensure that both are in contact. Then, the TCP that has passed the retest is judged as a good product. Although the yield of TCP can be improved by such confirmation work by the operator, there is a problem that the throughput of the test is lowered because the stop time of the test apparatus becomes longer.

[0008] By the way, there is a test apparatus for TCP equipped with a probe card and a test head that can perform two or more TCP tests at the same time. By testing two or more TCPs at the same time, the test throughput can be improved.

Disclosure of the invention

Problems to be solved by the invention

[0009] However, if the number of TCPs to be tested simultaneously is plural, the contact area at a time becomes wider. In particular, in the TCP test where the number of pins and the pitch are further reduced, it is not easy to accurately position all the TCPs attached to the test at the same time. When multiple TCPs are tested at the same time, the frequency with which a good TCP is judged as fail is increased due to poor positioning. As the frequency of fail judgments increases, the frequency at which the test equipment is temporarily stopped and the operator confirms or aligns manually increases, and the test throughput decreases accordingly. In other words, if you try to improve throughput by increasing the number of TCPs that are attached to the test at the same time, the frequency of suspension of the test equipment will increase accordingly. As a result, the operating time of the test apparatus is reduced, and a sufficient throughput improvement effect cannot always be obtained.

[0010] The present invention has been made in view of such a situation, and it is possible to further improve the test throughput of a TCP handling device capable of attaching two or more TCPs to the test simultaneously in each test. The purpose is to provide a secure TCP handling device. Means for solving the problem

[0011] In order to achieve the above object, first, the present invention applies a probe card corresponding to a plurality of TCPs to be tested at the same time, and contacts a plurality of TCP external terminals on the carrier tape with the probe card. A TCP handling device that allows multiple TCPs to be tested at the same time by making electrical contact with the terminals. In the first test, multiple TCPs are tested at the same time. Provided is a TCP handling device characterized in that the received defect determination TCP is moved to a different contact terminal position from the contact terminal that the defect determination TCP is in contact with and then subjected to the test again (Invention 1). .

[0012] According to the above invention (Invention 1), a TCP that has been judged to be defective can be automatically retested without stopping the TCP handling device. In other words, despite the fact that TCP is actually a non-defective product, it is possible to determine that it is defective for various reasons. According to the above invention (Invention 1), it can be determined that the product is non-defective by retesting. Yes, the yield of device manufacturing is improved. In addition, according to the above invention (Invention 1), since the retest can be automatically performed without stopping the TCP handling device, the throughput of the test is improved.

[0013] It should be noted that the retest here includes not only the second test performed after the first test but also the third and subsequent tests as long as different contact terminal groups can be used. For example, if there are three contact terminals, the retest can be performed twice.

[0014] In the above invention (Invention 1), a plurality of TCPs arranged in series with respect to the transport direction of the carrier tape, a plurality of TCPs arranged in parallel with respect to the transport direction of the carrier tape, or a transport direction of the carrier tape A plurality of TCPs arranged in series and a plurality of TCPs arranged in parallel with respect to the transport direction may be simultaneously subjected to the test! (Invention 2).

[0015] In the above invention (Invention 1), the carrier tape specifies the position of each TCP for each TCP. The positioning alignment mark to be determined is provided, and the positioning of the contact terminals corresponding to the plurality of TCP external terminals simultaneously subjected to the test should be performed based on at least one alignment mark. Anyway 発明 (Invention 3). According to the powerful TCP handling apparatus, it is possible to position the carrier tape in a short time, and the effects of the present invention are significantly exhibited in the powerful TCP handling apparatus.

In the above invention (Invention 1), when the defect determination TCP is subjected to the test again, an uninspected TCP pressed together with the defect determination TCP may be simultaneously applied to the test (Invention 4). ).

[0017] For example, when one TCP receives a failure determination when a test is performed, one TCP is subjected to retest in the next test. Therefore, if there are, for example, two positions that can contact the TCP in the contact section, in addition to the TCP subjected to the retest, the TCP that is not subject to the retest will also be contacted to the contact section. At this time, the TCP that has never been attached to the test may come into contact with the contact part.If this TCP is attached to the first test during the retest, the first test will be performed at the same time as the retest is performed. Can also be performed, further improving test throughput.

[0018] In the above invention (Invention 1), when the defect determination TCP is subjected to the test again, it is preferable to exclude the inspected TCP that is pressed together with the defect determination TCP from the execution of the test (Invention). Five).

[0019] In the above invention (Invention 1), it is preferable that at least one retest is performed with respect to the failure determination TCP that has received the failure determination in the simultaneous test, with a contact terminal in contact with the failure determination TCP. (Invention 6). In some cases, a good test can be easily obtained by a powerful retest. In this case, it is possible to further improve the throughput of a test that does not require a TCP position change operation.

[0020] In the above invention (Invention 1), the retest may be performed by changing a pressing condition between the external terminal of the failure determination TCP and the contact terminal in contact with the external terminal. 7). In some cases, a good test can be easily obtained by a powerful retest. In this case, the throughput of the test that does not require the TCP position change operation can be further improved. [0021] In the above invention (Invention 7), the contact resistance between the external terminal of the defect determination TCP and the contact terminal in contact with the external terminal was measured, and an object exceeding an allowable contact resistance value was detected. In this case, the retest may be performed by changing the pressing condition (Invention 8). In some cases, it is possible to easily obtain a non-defective product by re-testing. In this case, it is possible to further improve the throughput of the test that does not require a TCP position change operation.

[0022] In the above invention (Invention 1), the contact check function for detecting the electrical contact state between the external terminal of TCP and the contact terminal in contact with the external terminal is used to make contact of any contact terminal. Until a defect is detected, the probe card stage that moves the probe card is finely moved in the X-axis direction and the Z-axis or Y-axis direction to obtain the movable area, and the center position in the movable area is identified, and the identification is performed. TCP positioning may be performed based on the center position (invention 9). According to the powerful invention, since the contact terminals can be optimally positioned, the frequency of occurrence of defect determination is reduced, and the yield and test throughput are improved.

[0023] In the above invention (Invention 1), the TCP handling device includes an adsorption / pressing member that simultaneously adsorbs and presses a plurality of TCPs against the contact terminal, and the adsorption / pressing member is tested simultaneously. The at least one divided suction / pressing member may be adjustable so as to correspond to the TCP pitch to be tested at the same time. (Invention 10). According to the powerful invention, it is possible to adjust the pitch between the plurality of TCPs to match the pitch of the corresponding contact terminal group.

[0024] Secondly, the present invention is a TCP handling device capable of simultaneously testing a plurality of TCPs, testing a plurality of TCPs simultaneously in the first test, and receiving a failure determination in the simultaneous test. The TCP handling device is characterized in that another defect contact terminal different from the contact terminal of the probe card that is in contact with the defect determination TCP is applied to the defect determination TCP and subjected to the test again (Invention 11). .

[0025] According to the above invention (Invention 11), it is possible to automatically re-test a TCP that has received a failure determination without stopping the TCP handling device. Therefore, the device manufacturing yield is improved and the TCP handling device does not need to be stopped. Throughput is improved.

The invention's effect

[0026] According to the TCP handling apparatus of the present invention, when two or more TCPs are tested at the same time, it is possible to improve the test throughput as well as the device manufacturing yield.

Brief Description of Drawings

FIG. 1 is an overall front view of a test apparatus for TCP including a TCP handler according to an embodiment of the present invention.

FIG. 2 is a plan view of a probe card stage in the TCP test apparatus.

FIG. 3 is a flowchart showing the operation of a TCP handler according to an embodiment of the present invention.

FIG. 4 is a flowchart showing the operation at the time of retest of the TCP handler according to one embodiment of the present invention.

FIG. 5 is a flowchart showing the operation of another aspect at the time of retesting the TCP handler according to one embodiment of the present invention. Explanation of symbols

[0028] 1 TCP test equipment

2 TCP handler

3 Pusher unit

5 Carrier tape

7 Probe card stage

8 Probe card

10 Test head

21 brewing reel

22 Toray reel

81 Probe (Contact terminal)

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is an overall front view of a test apparatus for TCP including a TCP handler according to an embodiment of the present invention, FIG. 2 is a plan view of a probe card stage, and FIG. FIG. 4 is a flowchart showing the operation of the TCP handler according to the embodiment. FIG. 4 is a flowchart showing the operation at the time of retesting the TCP handler according to the embodiment of the present invention. FIG. 10 is a flowchart showing another mode of operation when retesting a TCP handler according to an embodiment of the present invention.

[0030] First, the overall configuration of a test apparatus for TCP including a handler according to an embodiment of the present invention will be described.

As shown in FIG. 1, a test apparatus 1 for TCP includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler provided on the upper side of the test head 10. Consists of two and others.

[0032] The TCP handler 2 is formed in a line along the longitudinal direction on the carrier tape 5 by conveying the carrier tape 5, and sequentially applies each TCP to the test. Note that some carrier tapes 5 have TCPs formed in an array of two or more rows along the longitudinal direction. For example, in the case of TCP forces to be tested at the same time, there are 4 rows in 1 row and 2 rows in 2 rows.

As shown in FIG. 2, alignment marks 51 are provided at predetermined positions in the vicinity of the TCP for each TCP on the carrier tape 5.

[0034] Although the TCP handler 2 of the present embodiment applies two TCPs to the test, the present invention is not limited to a device that applies two TCPs to the test. It also includes a handler that simultaneously tests three or more TCPs arranged in series and Z or parallel on tape 5.

The TCP handler 2 includes a feed reel 21 and a take-up reel 22. The carrier tape 5 before the test is wound around the reel 21 and the carrier tape 5 is also wound around the reel 21 after being subjected to the test. Be done

[0036] The space between the feed reel 21 and the take-up reel 22 is a protective tape peeled off from the carrier tape 5. Three spacers 23a, 23b, and 23c are provided to bridge the loop 52 from the brewed linole 21 force to the toritori linole 22. Each spacer narrower 23a, 23b, 23c can be moved up and down so that the tension of the protective tape 52 can be adjusted.

[0037] Below the feed reel 21, a tape guide 24a, a feed limit roller 25a, an in-side sub sprocket 25b, and an in-side guide roller 25c are provided and are fed out from the feed reel 21. While being guided by the tape guide 24a, the carrier tape 5 is conveyed to the pusher unit 3 through the squeeze limit roller 25a, the in-side sub sprocket 25b, and the in-side guide roller 25c.

[0038] Under the take-up reel 22, a tape guide 24b, a take-up limit roller 25f, an out-side sub sprocket 25e and an out-side guide roller 25d are provided. After being subjected to the test in the pusher unit 3, The carrier tape 5 is wound around the take-up reel 22 while being guided by the tape guide 24b through the out-side guide roller 25d, the out-side sub-sprocket 25e and the take-up limit roller 25f.

A pusher unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d. The first camera 6a is on the front side of the pusher unit 3 (left side in FIG. 1), and the second camera 6b is on the lower side of the pusher unit 3 (inside the probe card stage 7 described later). A third camera 6c is provided on the rear side (right side in FIG. 1). Also, a mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c.

[0040] Based on the test results, the mark punch 26a is one in which one or a plurality of holes are opened at a predetermined position in the corresponding TCP, and the reject punch 26b is determined to be a defective product as a result of the test. This is to punch out TCP. Note that the mark punch 26a and the rigid punch 26b can be individually controlled so as not to operate.

[0041] Each camera 6a, 6b, 6c is connected to an image processing device (not shown). The first camera 6a and the third camera 6c are for judging the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a. In addition, the second camera 6b obtains information on the position of the alignment mark on the carrier tape 5 and information on the positional deviation between the TCP and the probe, and displays the photographed image on the monitor to display the contact status of the operator. So that you can understand To do. The second camera 6b in the present embodiment is capable of acquiring positional deviation information for a plurality of objects in the field of view.

[0042] The second camera 6b has a narrow imaging field of view because it is necessary to accurately acquire the positional relationship between the TCP test pad and the probe 81 (also referred to as a probe pin). Therefore, the second camera 6b is mounted on the camera stage 61, and can be moved in the vertical and horizontal directions (X-axis Y-axis direction) and the vertical direction (Z-axis direction) in plan view by an actuator provided in the camera stage 61. ing. Thus, since the entire test area of the carrier tape can be moved, the positional relationship between the desired test pad and the probe 81 in TCP and the position of the alignment mark 51 can be clearly imaged.

[0043] Here, with respect to the second camera 6b, in a state where a desired resolution is maintained, for example, several times wider than the image processing area used for image processing! Degree camera may be applied. In this case, since the frequency of moving the camera stage 61 can be reduced, the processing time for moving the camera stage 61 is shortened. In addition, as the number of movements of the camera stage 61 decreases, the error factor of the movement amount can be reduced, and therefore a fine pitch TCP can be positioned with high accuracy. In addition, since digital zoom is possible while maintaining the desired resolution, the relative positional relationship between the target test pad, probe 81 and alignment mark 51 can be easily identified and identified, and multiple tests can be performed. The displacement correction between the pad and the probe 81 can be processed. In addition, since the alignment marks 51 at a plurality of locations can be easily detected, positioning can be performed based on the alignment marks 51 at a plurality of locations. Also, in the past, when the operator scrolled the screen displayed on the monitor to check the contact status, the force that sometimes overlooked the target position. Can be used for easy monitor display.

A servo motor 31 capable of rotating the ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361. The pusher body 33 to which the ball screw 32 is screwed is attached via two linear motion guides (hereinafter referred to as “LM guides”) that extend in the Z-axis direction! When the servo motor 31 is driven, the pusher body 33 moves up and down while being guided by the LM guide 37. Move in the direction (z-axis direction).

[0045] At the lower end of the pusher main body 33, a suction plate that is connected to a negative pressure source (not shown) and sucks and holds the carrier tape 5 by sucking the TCP so as to be fixed. 34 is provided.

[0046] A tension sprocket 35a is provided on the front side (left side in FIG. 1) of the pusher body 33, and the main sprocket 35b is provided on the rear side (right side in FIG. 1) of the pusher body 33. It is

[0047] Further, as shown in FIG. 2, below the pusher unit 3 and above the test head 10, there are two TCP external terminals (hereinafter sometimes referred to as "test pads"). A probe card stage 7 on which a probe card 8 having a large number of probes (contact terminals) 81 capable of contacting with each other is mounted. The probe card stage 7 is connected to a servo motor through a plurality of ball screws (not shown), and the probe card 8 can be moved in the horizontal direction (XY plane direction) by driving the servo motor. The probe card 8 can be rotated around the vertical axis (around the Z axis).

[0048] The probe card 8 including the plurality of probes 81 is detachably attached to the card ring of the probe card stage 7 by pins (not shown). The probe card 8 in the present embodiment has two probe groups (front position 8a probe group Z rear position so that two TCPs arranged in series in the transport direction of the carrier tape 5 can be tested simultaneously. 8b probe group). In the case of the carrier tape 5 in which two rows of TCP are arranged on the carrier tape 5, a probe card having four probe groups is applied correspondingly.

[0049] The distance between the front position 8a and the rear position 8b is set to one TCP pitch with respect to the transport direction of the carrier tape 5. The interval of one TCP pitch may vary depending on the device type, shape, carrier tape type, etc. of the device under test, so the interval between the front position 8a and the rear position 8b can be changed manually or automatically. It is desirable to have a pitch change mechanism that can be further improved.

[0050] Each probe 81 of the probe card 8 is electrically connected to the tester body via the test head 10, and is below the probe card 8 and inside the probe card stage 7. The second camera 6b is located on the side.

[0051] In such an apparatus, the pusher unit 3 presses the carrier tape 5 conveyed to the probe card stage 7 against the probe card 8 on the test head 10 while adsorbing and supporting it. Then, the two TCPs on the carrier tape 5 come into contact with the probes 81 arranged at the corresponding positions 8a and 8b on the probe card 8. In this state, first, a small direct current is applied to each IC terminal, and the presence or absence of current flowing in the internal circuit of TCP (for example, a protective diode) and the measuring ability of the voltage value are checked. Check that the probe 81 is in electrical contact with the pin and whether there is a short between adjacent pins. After that, the test signal from the tester main body is applied to the TCP, and the response signal read out by the TCP camera is sent to the tester main body through the test head 10. Based on this response signal, the TCP performance and test are tested, and the path judgment (non-defective product judgment) or file judgment (defective judgment) is performed for the TCP.

Next, the usage method and operation of TCP handler 2 will be described.

When using the TCP handler, it is necessary to perform the initial setting before operating the TCP handler 2. In other words, when the TCP type and the probe card 8 are changed accordingly, the standard of the pusher stage 4 and the probe card stage 7 is set so that the TCP test pad contacts the probe 81 of the corresponding probe card 8. The position needs to be determined and registered (this position is referred to as “registered position”).

[0053] For example, by manual operation, an operator selects a plurality of (for example, three) probes 81 and corresponding test pads to determine rough positions, and then installs the second camera 6b and the image processing apparatus. The reference position is determined by moving the pusher stage 4 and Z or the probe card stage 7 manually or automatically so that each probe 81 is located in the center of each test pad as much as possible. sign up. If desired, the rough position may be determined by automatic control instead of manual operation.

At this time, the position coordinates of a predetermined target in the field of view of the second camera 6b are also registered. In this embodiment, the position coordinates of the alignment mark 51 on the carrier tape 5 are registered. Next, the operation of the TCP handler 2 during actual operation will be described with reference to the flowchart of FIG. Here, two TCPs arranged in a line along the longitudinal direction of the carrier tape 5 are tested at the same time. Also, as shown in Fig. 2, there are two alignment marks 51 for positioning the carrier tape 5 in the vertical direction (Y-axis direction), so two TCPs to be tested simultaneously. In this embodiment, a force with four alignment marks 51 is present. In this embodiment, one alignment mark 51 at the front position 8a is applied to position the TCP.

[0056] The TCP handler 2 includes the control means. When the TCP handler 2 is put into a state where it can be actually operated, the pusher stage 4 and the probe card stage 7 first move to the registration positions (step S01). Then, the feed reel 21 and the take-up reel 22 rotate by a predetermined angle to move the carrier tape 5 and transport the first and second TCPs to a predetermined position below the suction plate 34 (step S02). .

[0057] When TCP is transported to the lower side of the suction plate 34, the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 downward in the Z-axis. The moved suction plate 34 sucks the carrier tape 5 and descends to the imaging position (step S03).

In this state, the second camera 6b performs imaging (step S04), and transmits image information to the image processing apparatus. The image processing apparatus acquires information on the positional deviation between the position coordinates of a predetermined target registered in advance and the position coordinates of the target actually captured from the received image information. For example, in the present embodiment, information on the positional deviation between the registered coordinate position of the alignment mark corresponding to the position 8a and the position coordinate of the alignment mark 51 corresponding to the actually imaged position 8a is acquired.

[0059] The image processing apparatus is based on the earned positional deviation information! Then, the amount of positional deviation around the X-axis direction, Y-axis direction, and vertical axis is calculated to determine the force that needs to be corrected (step S05). If correction is necessary as a result of the determination, the necessary correction operation is performed (step S06).

When the correction operation is completed, the servo motor 31 of the pusher unit 3 is operated, and the suction plate 34 is further moved in the Z-axis direction via the pusher main body 33. The suction plate 34 adsorbing the carrier tape 5 is lowered to the contact position, and the first TCP located on the front side in the carrier tape transport direction A (see Fig. 2) corresponds to the probe card 8 The second TCP, which is pressed against the probe 81 placed at the front position 8a and is located behind the carrier tape transport direction A, is placed at the corresponding rear position 8b on the probe card 8. The pressed probe 81 is pressed (step S07).

[0061] When each TCP test pad contacts probe 81, the first test for each TCP (hereinafter sometimes referred to as "main test") is executed (step S08). In the test, a contact check is first performed to confirm that all test pads are in electrical contact with the probe 81, and contact failure is detected even if the suction plate 34 is moved up and down a plurality of times. In the case of failure, the failure is judged.

[0062] When the contact check is normal, a test signal is applied to each TCP through the test head 10 as well as a tester body force, and a response signal read from each TCP passes through the test head 10 to the tester. Sent to the body. Based on this response signal, the tester main body determines pass / fail judgment and rank classification of each TCP, and performs pass judgment (non-defective product judgment) or fail judgment (defective product judgment) for TCP (step S09).

As a result of this test, when there is a TCP that has passed the path determination, the mark punch 26a is driven only for the TCP that has passed the path determination (step S10). Note that the mark punch 26a is not operated! /, And there is a control form.

[0064] Here, referring to the result of the previous main test (Step SI 1), if V, one or both of the TCPs have received a fail determination, a retest operation (step S21 described later) is performed. Execute ~ step S36). If a fail determination is made, if desired, a re-test may be performed once at this stage, for example, and a control operation for changing to a pass determination may be added.

[0065] On the other hand, if both TCPs have undergone a path determination, the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 in the Z-axis upward direction via the pusher body 33. The pusher stage 4 and the probe card stage 7 move to the registration position (step S12). Then, the suction plate 34 stops the suction of the carrier tape 5 to release the carrier tape 5, and further moves upward in the Z-axis (step S13).

[0066] Then, it is determined whether or not the TCP subjected to this test is the last device (step S1 4). If it is determined that the TCP is the last device, the main operation is terminated and the last device is terminated. If not, return to step S02 and test the next two TCPs. Next, the retest operation will be described. Here, as a result of the above test, the combination of the two TCP fail judgments is that only the TCP at the front position 8a in the carrier tape transport direction A is judged as fail, and only the TCP at the rear position 8b is used. There are cases where the fail judgment is performed and the TCPs at both positions 8a and 8b are judged as fail judgment, and the operations are different.

[0068] In the retest operation, first, the same operation as in Step S12 and Step S13 described above is executed, and the suction of the carrier tape 5 by the suction plate 34 is stopped and the carrier tape 5 is released ( Step S21).

[0069] Next, determine whether the TCP (in this case, the first TCP) located at the front position 8a in the carrier tape transport direction A has received the pass / fail judgment in the first test. (Step S22). Here, when the TCP located at the front position 8a has received a no determination in the first test, step S28 described later is executed. On the other hand, if the TCP located in the front position 8a receives a fail judgment! /, The main sprocket 35b is rotated together with the tension sprocket 35a by one TCP pitch to reverse the carrier tape 5 in the reverse direction. Move (step S23) and move the TCP that was located at the front position 8a of the probe card 8 to the rear position 8b. Then, the same operations as those from step SO3 to step S07 described above are performed, and the external terminal of the TCP is brought into contact with the probe 81 of the rear position 8b (step S24).

[0070] Then, a retest is performed on the TCP that has contacted the probe 81 at the rear position 8b (step S25), and a path determination or a fail determination is performed on the TCP (step S26). Here, if contact failure is detected in the retest contact check, contact failure is detected by first moving the carrier tape 5 side slightly or the probe force stage 7 side finely. It is desirable to perform the second processing form, which has a certain force with the second processing form that performs a trial operation to determine whether there is a position where it disappears.

[0071] As a result of the retest, when the TCP subjected to the retest receives the second fail determination, it is determined as a defective product and the reject punch 26b is driven (step S27a). On the other hand, when the pass determination is received for the second time, the TCP is determined as a non-defective product and the mark punch 26a is driven (step S27b). [0072] Next, in Step 22 or Step 25, when the TCP located at the front position 8a at the beginning receives a path determination, and the TCP located at the rear position 8b receives a path determination. Executes step S12 (step S28).

[0073] On the other hand, if the TCP located at the rear position 8b has received a fail determination, the same operations as in steps S12 and S13 described above are performed, and the carrier by the suction plate 34 is executed. Stop sucking tape 5 and release carrier tape 5 (step S29). Subsequently, the main sprocket 35b is moved forward by one pitch of the TCP together with the tension sprocket 35a, and the carrier tape 5 is moved forward to move the TCP located at the rear position 8b to the front position 8a (step S30). Then, the same operations as those from step SO3 to step S07 described above are executed, and the external terminal of the TCP is brought into contact with the probe 81 of the front position 8a (step S31).

[0074] Then, a retest is performed on the TCP that has contacted the probe 81 at the front position 8a (step S32), and a path determination or a fail determination is performed on the TCP (step S33).

As a result of this retest, when the TCP attached to the retest receives the second fail determination, it is determined as a defective product and the reject punch 26b is driven (step S34a). On the other hand, when the second determination is received, the TCP is determined as non-defective and the mark punch 26a is driven (step S34b). Then, Step S12 is executed.

[0076] Thus, according to the TCP handler 2 of the present embodiment, the TCP that received the fail judgment in the first test is automatically subjected to the retest without stopping the TCP handler. be able to. In addition, as a cause of fail judgment, there is a TCP contact failure or positioning failure caused by the probe 81 in one position. Unlike the TCP handler of this embodiment, it is different from the position on the probe card in the first test. Retesting with a probe 81 in another position may result in good contact. As a result, TCP, which is originally a good product, can be judged as a good product by retesting, so that the yield of TCP can be improved. As described above, the test force can be automatically re-tested without stopping the test equipment. As a result, the availability of the test equipment is improved, resulting in an increase in test throughput. [0077] In particular, in the present embodiment, the TCP is positioned using the alignment mark 51 corresponding to one position 8a! /, So the TCP located in the other position 8b is relatively poorly positioned. It is easy to become. Even in this case, after moving the TCP to position 8a, the TCP is positioned using the alignment mark 51 of the TCP. As a result, the TCP is more accurately positioned. Therefore, it is possible to effectively obtain a path determination.

[0078] Further, the cause of the fail determination is not only in the case of TCP positioning failure, but also in the case where needle tip deterioration has occurred in any of the multiple probes 81 provided in each of the positions 8a and 8b, Although the contact resistance value may increase due to insufficient pressing force, according to the TCP handler 2 of this embodiment, a pass judgment can be obtained effectively by retesting at a good position. Can do. This eliminates the problem of treating non-defective TCP as a defective product, and improves yield. Furthermore, it is not necessary for the operator to stop the test apparatus once, and the operating rate of the apparatus can be improved.

[0079] Here, the retest in step S32 is a process for performing a retest on the TCP located at the front position 8a on the probe card 8. At this time, the rear position 8b on the probe card 8 is used. Is contacted with a TCP that has not yet been tested (here, the third). Therefore, when performing the retest in step S32, TCP located at the rear position 8b on the probe card 8 may be attached to the first test at the same time.

[0080] In this case, instead of the process E1 in steps S32 to S34, a process E2 described below is performed.

(Step S41 to Step S45; see FIG. 5). In other words, at the same time as the TCP (second one here) attached to the retest, at the same time, the TCP (located at the rear position 8b on the probe card 8 is located at the rear side in the carrier tape transport direction A ( Here's the third one)! Perform a test (step S41).

[0081] First, a determination is made for the TCP subjected to the retest (step S42). As a result, when the TCP subjected to the retest receives a fail determination, it is determined as a defective product and the reject punch 26b is driven (step S43a). On the other hand, when the TCP attached to the retest receives a pass judgment, it is confirmed as a non-defective product and the mark punch 26a is driven (step S43b). [0082] Then, a determination is made as to whether the TCP (here, the third TCP) attached to the first test performed simultaneously with the retest receives a path determination (step S44). If the TCP has received a pass determination, it is determined as a non-defective product, the mark punch 26a is driven (step S45), and then step S12 is executed. On the other hand, if the TCP has received a fail determination, step S29 is executed.

As described above, when the first test is performed simultaneously with the retest, the test throughput can be further improved.

The embodiments described above are described for facilitating the understanding of the present invention, and are not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

[0085] For example, in the above test operation, if TCP determination is performed at both positions 8a and 8b on the probe card 8 at the same time, and both TCPs at both positions 8a and 8b both fail, The retest operation may be performed by alternately switching the TCP at positions 8a and 8b. Note that it is desirable that the pusher unit 3 be moved up and down several times before performing the above replacement at the stage when both positions 8a and 8b have both failed. May be obtained.

[0086] At the time of misalignment correction, the position coordinates of the registered alignment mark corresponding to the rear position 8b and the position coordinates of the alignment mark 51 corresponding to the rear position 8b actually captured. Information on deviation may be acquired. Alternatively, the average value of the displacement amount of the alignment mark 51 corresponding to the front position 8a and the displacement amount of the alignment mark 51 corresponding to the rear position 8b may be used.

[0087] In the above embodiment, the TCP is positioned using the alignment mark 51 corresponding to one position 8a! /, So that the TCP positioned at the other position 8b is relatively positioned. Although it tends to be defective, the other alignment mark 51 corresponding to the other position 8b may also be used when necessary. For example, if a fail judgment occurs in the TCP at the rear position 8b, after performing the positioning based on the alignment mark 51 on the rear side, perform a retest without moving the TCP. It's okay Depending on the case, a path determination may be obtained. According to this, it is possible to greatly reduce the movement operation for obtaining the position of the alignment mark 51 at the two power points by moving the camera stage 61 greatly, and minimize the decrease in throughput due to the movement time of the second camera 6b. This is practical.

[0088] In addition, since a large number of probes 81 are deformed due to tens of thousands of pressing stresses, all the probes 81 in contact with the test pads of the CCP are moved from the center of the corresponding test pads. The state of deviation is shifted. Therefore, until a contact failure is detected by any of the probes 81, the probe card stage 7 is sequentially finely moved in the X-axis direction and the Y-axis direction to obtain a movable area, and the best center position in the current probe 81 is determined. Identify. Based on this, it is possible to determine the optimum position of the current probe 81 by positioning the TCP. If desired, the movable area information and the center position information obtained can be saved, and the position can be corrected using the information at the time of test execution, so that optimum positioning can be performed. This reduces the frequency of fail judgments and improves yield and test throughput.

[0089] Further, the contact resistance value generated between each test pad and each probe 81 in contact with the test pad is tens of thousands of pressing stresses, positional deviation of the tip of the probe 81, shape change, elasticity It fluctuates or increases with fluctuations in characteristics and the state of electrical contact parts. Therefore, change the height condition in the pressing direction of the suction plate 34 of the pusher unit 3 within the allowable range of the probe 81 for the TCP probe 81 that has failed, and perform a retest. You may make it perform. If this retest results in a pass, the TCP can be confirmed as good.

[0090] In addition, in the case of TCP that can practically measure the contact resistance value by contact check, after the fail judgment is issued, the contact check is performed with the current pressed state, and each contact resistance is measured. The value may be measured. Then, based on the maximum allowable resistance value that varies depending on the type of each IC terminal of TCP (input pin, output pin, power supply pin), the contact resistance value is judged as good or bad. First, abnormal contact resistance value When the probe 81 is detected, the pusher unit 3 is moved up and down to measure the contact resistance of the probe 81 again. When the probe 81 returns to the normal state, the retest is performed in this state. Second, contact resistance If the resistance is normal, the TCP is likely to be defective, so move to another probe 81 and retest.

[0091] The suction plate 34 may have a structure divided in correspondence with the TCP arrangement direction (X-axis direction, Y-axis direction). A movable fine movement mechanism (not shown) may be provided. With such a divided moving structure, it is possible to adjust the pitch between a plurality of TCPs to match the pitch of the corresponding probe group. Although the thin film of the carrier tape 5 is bent by the pitch adjustment, the adjustment width is about several tens of microns, and can be practically implemented. However, it is desirable that the pitch between the TCPs of the probes 81 on the probe card side be narrow, for example, about several tens of microns.

[0092] According to the divided moving structure as described above, when testing a large number (2, 4, 8, 16) of TCP simultaneously, the variation in the pitch between TCPs due to thermal expansion or the narrow pitch It is possible to accurately cope with TCP where position accuracy is required, when the pitch between TCPs of a large TCP with a large pin is widened, or when the carrier tape 5 film changes. As a result, it is possible to further reduce the frequency of occurrence of defect determination due to misalignment, so that a larger number (4, 8, 16) of TCPs can be tested simultaneously, thus improving the reliability and throughput of the test. be able to.

Industrial applicability

The TCP handling device according to the present invention is effective in improving the yield of device manufacturing and the throughput of testing, and efficiently performing TCP testing.

Claims

The scope of the claims

[1] By applying a probe card that supports multiple TCPs to be tested at the same time, and connecting the external terminals of multiple TCPs on the carrier tape and the contact terminals of the probe card, multiple TCPs can be connected. A TCP handling device that can be tested at the same time.

After testing multiple TCPs in the first test at the same time, and moving the bad judgment TCP that received the failure judgment in the simultaneous test to a different contact terminal position from the contact terminal that the failure judgment TCP contacted A TCP handling device characterized by being subjected to the test again.

[2] Multiple TCPs arranged in series in the carrier tape transport direction, Multiple TCPs arranged in parallel in the carrier tape transport direction, or Multiple in series in the carrier tape transport direction 2. The TCP handling device according to claim 1, wherein the TCP and a plurality of TCPs arranged in parallel in the transport direction are subjected to the test at the same time.

[3] The carrier tape is provided with positioning mark to identify the position of each TCP for each TCP.

2. The TCP handling device according to claim 1, wherein positioning of contact terminals corresponding to a plurality of TCP external terminals simultaneously subjected to the test is performed based on at least one alignment mark.

4. The TCP handling device according to claim 1, wherein when the defect determination TCP is subjected to the test again, an uninspected TCP pressed together with the defect determination TCP is simultaneously subjected to the test.

5. The TCP handling apparatus according to claim 1, wherein when the defect determination TCP is subjected to the test again, the inspected TCP pressed together with the defect determination TCP is excluded from the execution of the test.

[6] The defect determination TCP that has received the defect determination in the simultaneous test is subjected to at least one re-test with a contact terminal in contact with the defect determination TCP. TCP handling device.

[7] The TCP handling according to [6], wherein the retest is performed by changing a pressing condition between the external terminal of the TCP and the contact terminal that contacts the external terminal. apparatus.

[8] Defect determination When the contact resistance between the external terminal of TCP and the contact terminal in contact with the external terminal is measured, and an object exceeding the allowable contact resistance value is detected, the pressing condition is changed. The TCP handling apparatus according to claim 7, wherein the retest is performed.

[9] Using the contact check function that detects the electrical contact state between the TCP external terminal and the contact terminal that contacts the external terminal, remove the probe card until a contact failure is detected on any of the contact terminals. Finely move the probe card stage to be moved in the X axis direction and the Z or Y axis direction to obtain the movable area,

Identify a central position in the movable region;

2. The TCP handling apparatus according to claim 1, wherein TCP positioning is performed based on the specified center position.

[10] The TCP handling device includes an adsorption / pressing member that simultaneously adsorbs a plurality of TCPs and presses them against the contact terminals,

The adsorption / pressing member is divided into at least two parts corresponding to the TCP arrangement to be tested at the same time,

2. The TCP handling apparatus according to claim 1, wherein the distance between the divided suction / pressing members can be adjusted so as to correspond to the pitch of TCP to be tested at the same time.

[11] A TCP handling device that can simultaneously test a plurality of TCPs. A plurality of TCPs are tested at the same time in the first test, and a defective TCP that receives a failure test in the simultaneous test is Defect determination A TCP handling device characterized in that another contact terminal different from the contact terminal of the probe card with which the TCP is in contact is applied and subjected to the test again.