CN1745311A - TCP handling device and positional deviation correcting method for the same - Google Patents
TCP handling device and positional deviation correcting method for the same Download PDFInfo
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- CN1745311A CN1745311A CNA03826028XA CN03826028A CN1745311A CN 1745311 A CN1745311 A CN 1745311A CN A03826028X A CNA03826028X A CN A03826028XA CN 03826028 A CN03826028 A CN 03826028A CN 1745311 A CN1745311 A CN 1745311A
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- osculating element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
Abstract
A TCP handler (2) is provided with a pusher stage (4) capable of moving a carrier tape (5) adsorbed by an adsorption plate (34) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2), and a probe card stage (7) capable of moving a probe card (8) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2). With the TCP handler (2) having such arrangement, it is possible to achieve accurate positioning between the TCP and the probe card (8) to reduce the occurrence of poor contact.
Description
Technical field
The present invention relates to test as a kind TCP of IC device (Tape CarrierPackage: the strip-like carrier encapsulation) and COF (Chip On Film) (below, device with TCP, COF, other TAB (Tape Automated Bonding) field engineering manufacturing is referred to as " TCP ") the middle TCP treating apparatus that uses, and the position correction method of the TCP of TCP treating apparatus and osculating element.
Background technology
In the manufacture process of the electronic product of IC device etc., need the final IC device of making of test and the performance of the device etc. in stage and the device for testing electronic parts of function therebetween, when TCP, use TCP test unit.
The test unit that TCP uses generally is made of trial body, test head, TCP treating apparatus (below be sometimes referred to as " TCP message handler ").This TCP message handler possesses such function: be transmitted in belt and (suppose also to comprise the notion of film.Down together.) on be formed with the carrying band of a plurality of TCP, on the probe of the probe that is electrically connected with the test head, push the carrying band, make the outside terminal of probe contact TCP, in view of the above in proper order a plurality of TCP submitted for tests.
In order to use such TCP message handler correctly to test expeditiously, the outside terminal of TCP and each probe of probe are reliably contacted.
In the past, counter-point as TCP and probe, known have make carrying band and thruster and clamping plate or contact method (the fair 6-2271 communique of reality that pressurizer one coexists and moves on the XY direction, Te Kaiping 9-92695 communique, spy open flat 8-29484 communique), with the method (spy opens flat 10-185996 communique, and the spy opens the 2002-181888 communique) that probe is moved on the XY direction.
But, only in 2 controls on such XY direction, differ and correctly carry out the contraposition of TCP and probe surely, it is many to come in contact condition of poor.Particularly along with the narrow chipization of multiway of device in the future, the generation frequency that can predict this loose contact increases.
On the other hand, open in the 2002-181889 communique, put down in writing by the relative TCP of probe that is placed on the rotation microscope carrier is only rotated revisal angle θ, the invention of the angular deviation of revisal TCP and probe the spy.
But, open the invention put down in writing in the 2002-181889 communique because be to make the probe rotation carry out contraposition during at initial setting after all the spy, so when in the actual motion of TCP test unit, having produced the departing from of TCP and probe or initial setting the incorrect solution of just having no idea when in the actual motion of TCP test unit, being found itself.
Summary of the invention
Existence in view of the above problems the objective of the invention is to: provide a kind of and can correctly carry out the contraposition of TCP and osculating element, reduce the TCP treating apparatus of loose contact generation and malposition (position deviation) correction method of TCP treating apparatus.
To achieve these goals, the 1st, the invention provides a kind of TCP treating apparatus, it is transmitted in the carrying band that forms a plurality of TCP on the belt, with osculating element that test head is electrically connected on push carrying and be with, contact with above-mentioned osculating element by the outside terminal that makes TCP, a plurality of TCP of energy sequential testing is characterized in that possessing the carrying band that can make by being pressed on the above-mentioned osculating element and rotate the band Z-axis whirligig (1) that moves around its Z-axis.
In in this manual " osculating element ", suppose to comprise the splicing ear (for example, probe) of the outside terminal that connects TCP itself and be equipped with parts (for example probe) both sides' of such splicing ear notion.
If adopt foregoing invention (1), then, center on the TCP of Z-axis displacement and the contraposition of osculating element by the carrying band is moved around the Z-axis rotation with band Z-axis whirligig, can reduce the generation of loose contact.
The TCP treating apparatus of foregoing invention (1) it is desirable to also comprise: can make the band 2 D shifting unit (2) that moves at its in-plane by the carrying band that is pressed on the above-mentioned osculating element.
If adopt foregoing invention (2), then by making the carrying band move and/or on in-plane, move around the Z-axis rotation with band Z-axis whirligig and/or band 2 D shifting unit, carry out the contraposition of TCP and osculating element reliably, can reduce the generation of loose contact.
In foregoing invention (2), above-mentioned band Z-axis whirligig and/or above-mentioned band 2 D shifting unit it is desirable to: with carrying band by the press device that is pressed on the above-mentioned osculating element, the carrying band is rotated around Z-axis move and/or move (3) on in-plane.
And, not only push the carrying band at this said " press device ", can also have the function that keeps the carrying band.
If adopt foregoing invention (3), then do not carry band and push malposition between its press device.
Foregoing invention (2,3) above-mentioned TCP treating apparatus it is desirable to: the malposition information acquisition device that also comprises the malposition information that can obtain TCP and above-mentioned osculating element, drive above-mentioned band Z-axis whirligig and/or above-mentioned band 2 D shifting unit according to the malposition information that obtains by above-mentioned malposition information acquisition device, automatically the above-mentioned malposition of revisal (4).
In in this manual " malposition information ", suppose to comprise the direction (XY θ) of malposition and the amount of malposition.
As the malposition information acquisition device, for example can enumerate and take carrying band and the camera of osculating element and the combination of image processing apparatus etc.
If adopt foregoing invention (4), then unattended operation person's technical ability etc. how, can both automatically correct revisal TCP and the malposition of osculating element.
The 2nd, the invention provides a kind of TCP treating apparatus, it transmits the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, by the outside terminal of TCP is connected with above-mentioned osculating element, can a plurality of TCP submitted for tests be is characterized in that, comprise, can obtain the malposition information acquisition device of the malposition information of TCP and above-mentioned osculating element; The osculating element Z-axis whirligig that above-mentioned osculating element is moved around its Z-axis rotation, in actual motion, (not at initial setting, be actually in order to test in the process of operation), drive above-mentioned osculating element Z-axis whirligig according to the malposition information that obtains by above-mentioned malposition information acquisition device, above-mentioned osculating element is moved, automatically the above-mentioned malposition of revisal (5) around the Z-axis rotation.
If adopt the present invention (5), then in the execution of TCP treating apparatus, because move by make osculating element center on the Z-axis rotation with osculating element Z-axis whirligig, can be tested TCP to each carries out in the contraposition of being tested TCP and osculating element around the Z-axis displacement, so can significantly reduce the generation of loose contact.
The TCP treating apparatus of foregoing invention (5) it is desirable to: also comprise the osculating element 2 D shifting unit that above-mentioned osculating element is moved on its in-plane, in actual motion, drive above-mentioned osculating element Z-axis whirligig and/or above-mentioned osculating element 2 D shifting unit according to the malposition information that obtains by above-mentioned malposition information acquisition device, make above-mentioned osculating element move and/or on in-plane, move, automatically the above-mentioned malposition of revisal (6) around the Z-axis rotation.
If adopt the present invention (6) then in the actual motion of TCP treating apparatus, because move and/or on in-plane, move by make osculating element center on the Z-axis rotation with osculating element Z-axis whirligig and/or osculating element 2 D shifting unit, can be tested the contraposition that TCP carries out being tested TCP and osculating element reliably to each, so can significantly reduce the generation of loose contact.
The 3rd, the invention provides a kind of TCP treating apparatus, it transmits the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, be connected with above-mentioned osculating element by the outside terminal that makes TCP, can a plurality of TCP submitted for test be successively is characterized in that, comprise, can obtain the malposition information acquisition device of information of the malposition (position deviation) of TCP and above-mentioned osculating element; Can make the band Z-axis whirligig that moves around its Z-axis rotation by the carrying band that is pressed on the above-mentioned osculating element; The osculating element Z-axis whirligig that above-mentioned osculating element is moved around this Z-axis rotation, state malposition amount (positional offset amount) that the malposition information acquisition device obtains when bigger or the time when using more than or equal to setting than setting, drive above-mentioned osculating element Z-axis whirligig, above-mentioned osculating element is moved around the Z-axis rotation, when above-mentioned malposition amount smaller or equal to setting the time or when satisfying setting, by driving above-mentioned band Z-axis whirligig above-mentioned carrying band is moved around the Z-axis rotation, automatically the above-mentioned malposition of revisal (7).
If adopt foregoing invention (7), then by rotating band Z-axis whirligig or osculating element Z-axis whirligig, center on the TCP of Z-axis displacement and the contraposition of osculating element, can reduce the generation of loose contact.
At this, textural at the TCP treating apparatus possesses the osculating element Z-axis whirligig that osculating element that the flexible cord that a plurality of and trial body get in touch is arranged moves and compares with making, and band Z-axis whirligig can carry out the malposition revisal in the short time.But, band Z-axis whirligig is because make the carrying Tape movement that is supported by guiding roller and sprocket wheel etc., if so its amount of movement greatly then on carrying is with, produce stress, might damage carrying with on TCP (particularly tongue or trial liner) and carry band itself (particularly the pawl of sprocket wheel enter hole part or its peripheral part).
Therefore, if adopt foregoing invention (7), when then positive quantity is not big in the position, drive the damage that osculating element Z-axis whirligig prevents TCP and carrying band, in malposition hour, rotating band Z-axis whirligig, can shorten the time of malposition revisal, and then shorten the productive temp time.
The TCP treating apparatus of foregoing invention (7) it is desirable to: also comprise making the band 2 D shifting unit that moves by the carrying band that is pressed on the above-mentioned osculating element on its in-plane; The osculating element 2 D shifting unit that above-mentioned osculating element is moved on its in-plane, when the malposition amount that is obtained by above-mentioned malposition information acquisition device is bigger than setting or the time more than or equal to setting, drive above-mentioned osculating element Z-axis whirligig and/or above-mentioned osculating element 2 D shifting unit, make above-mentioned osculating element move and/or on in-plane, move around the Z-axis rotation, when above-mentioned malposition amount smaller or equal to setting the time or during not enough setting, drive above-mentioned band Z-axis whirligig and/or above-mentioned band 2 D shifting unit, move and/or on in-plane, move by above-mentioned carrying band is rotated around Z-axis, automatically the above-mentioned malposition of revisal (8).
If adopt foregoing invention (8), then by using band Z-axis whirligig and/or band 2 D shifting unit, perhaps osculating element Z-axis whirligig and/or osculating element 2 D shifting unit, make carrying band or osculating element move and/or on in-plane, move around the Z-axis rotation, carry out the contraposition of TCP and osculating element reliably, can reduce the generation of loose contact.In addition, if adopt foregoing invention (8), then when the malposition amount is big, drive osculating element Z-axis whirligig and/or osculating element 2 D shifting unit, prevent the damage of TCP and carrying band, when malposition amount hour, rotating band Z-axis whirligig and/or band 2 D shifting unit can shorten the time of the revisal of malposition, and then shorten the productive temp time.
The 4th, the invention provides a kind of malposition correction method of TCP treating apparatus, be to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, contact with above-mentioned osculating element by the outside terminal that makes TCP, can be the malposition correction method of TCP in the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, rotate the malposition (9) that moves revisal TCP and above-mentioned osculating element around its Z-axis by making by the carrying band that is pressed on the above-mentioned osculating element.
If adopt foregoing invention (9), then, center on the TCP of Z-axis displacement and the contraposition of osculating element by the carrying band is moved around the Z-axis rotation, can reduce the generation of loose contact.
The 5th, the invention provides a kind of malposition correction method of TCP treating apparatus, be to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, contact with above-mentioned osculating element by the outside terminal that makes TCP, can be the malposition correction method of the TCP in treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, mobile and/or mobile on its in-plane by making around its Z-axis rotation by the carrying band that is pressed on the above-mentioned osculating element, the malposition of revisal TCP and above-mentioned osculating element (10).
If adopt foregoing invention (10), then, carry out the contraposition of TCP and osculating element reliably by making the carrying band move and/or on in-plane, move around the Z-axis rotation, can reduce the generation of loose contact.
The 6th, the invention provides a kind of malposition correction method of TCP treating apparatus, be to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, contact with above-mentioned osculating element by the outside terminal that makes TCP, can be the malposition correction method of TCP in the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, obtain the information of the malposition of TCP and above-mentioned osculating element, according to the above-mentioned malposition information that obtains, move the above-mentioned malposition of revisal (11) by making around its Z-axis rotation by the carrying that is pressed on the above-mentioned osculating element.
If adopt foregoing invention (11), then move by make the carrying band center on the Z-axis rotation according to the malposition information that obtains, can reliable revisal center on the TCP of Z-axis displacement and the malposition of osculating element.
The 7th, the invention provides a kind of malposition correction method of TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, obtain the information of the malposition of TCP and above-mentioned osculating element, according to the above-mentioned malposition information that obtains, mobile and/or mobile on its plane by making around this Z-axis rotation by the carrying band that is pressed on the above-mentioned osculating element, the above-mentioned malposition of revisal (12).
If adopt foregoing invention (12), then move and/or on in-plane, move, reliably the malposition of revisal TCP and osculating element by make the carrying band center on the Z-axis rotation according to acquired malposition information.
The 8th, the invention provides a kind of malposition correction method of TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, handle in the actual motion for the treatment of apparatus at TCP, obtain the malposition information of TCP and above-mentioned osculating element, according to the above-mentioned malposition information that obtains, make above-mentioned osculating element move the above-mentioned malposition of revisal (13) around the Z-axis rotation.
If adopt foregoing invention (13), then move by make osculating element center on the Z-axis rotation TCP treating apparatus in service, because can be tested the contraposition of being tested TCP and osculating element that TCP centers on the Z-axis displacement to each, so can significantly reduce the generation of loose contact.
The 9th, the invention provides a kind of malposition correction method of TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, in the actual motion of TCP treating apparatus, obtain the malposition information of TCP and above-mentioned osculating element, according to above-mentioned acquired malposition information, mobile and/or mobile on its in-plane by making above-mentioned osculating element center on the Z-axis rotation, revisal malposition (14).
If adopt foregoing invention (14), then in the actual motion of TCP treating apparatus, move and/or on in-plane, move by making osculating element center on the Z-axis rotation, because can be tested the contraposition that TCP reliably carries out being tested TCP and osculating element to each, so can significantly reduce the generation of loose contact.
The 10th, the invention provides a kind of malposition correction method of TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, obtain the information of the malposition of TCP and above-mentioned osculating element, when the malposition amount that obtains is bigger than setting or the time more than or equal to setting, above-mentioned osculating element is moved around the Z-axis rotation, when the malposition amount that obtains smaller or equal to setting the time or during not enough setting, rotate the above-mentioned malposition of revisal (15) around its Z-axis by making by the carrying band that is pressed on the above-mentioned osculating element.
If adopt foregoing invention (15), then center on the TCP of Z-axis displacement and the contraposition of osculating element, can reduce the generation of loose contact.
At this, textural at the TCP treating apparatus, generally be with make possess the osculating element that the flexible cord that a plurality of and trial body get in touch is arranged move forward into line position not the time of positive revisal compare, time one side who still makes the carrying Tape movement carry out the malposition revisal lacks.But, because the carrying band is usually with supports such as guiding roller and sprocket wheels, if so the amount of movement of carrying band greatly then on carrying is with, produce stress, might damage carrying with on TCP (particularly tongue (reed) or trial liner (pad)) and carry band itself (particularly the pawl of sprocket wheel enter hole part or its peripheral part).
Therefore, if adopt foregoing invention (15), when then positive quantity is not big in the position, making osculating element center on the Z-axis rotation moves, prevent the damage of TCP and carrying band, the positive quantity hour not in the position makes the carrying band move around the Z-axis rotation, can shorten the time of malposition revisal, and then shorten the productive temp time.
The 11st, the invention provides a kind of malposition correction method of TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that, obtain the information of the malposition of TCP and above-mentioned osculating element, during when the malposition amount that obtains is bigger than setting or more than or equal to setting, driving above-mentioned osculating element moves on Z-axis rotation and/or its in-plane, in the malposition amount that obtains smaller or equal to setting the time or during not enough setting, mobile and/or mobile on its in-plane by making around the Z-axis rotation by the carrying band that is pressed on the above-mentioned osculating element, the above-mentioned malposition of revisal (16).
If adopt foregoing invention (16), then, carry out the contraposition of TCP and osculating element by making osculating element or carrying band move and/or on in-plane, move around the Z-axis rotation, can reduce the generation of loose contact.In addition, if adopt foregoing invention (16), when then positive quantity is not big in the position, making osculating element center on the Z-axis rotation moves and/or moves on in-plane, prevent the damage of TCP and carrying band,, make the carrying band move and/or on in-plane, move around the Z-axis rotation when malposition amount hour, can shorten the time of position revisal, and then shorten the productive temp time.
Description of drawings
Fig. 1 is the front view of TCP test unit that the TCP message handler of one embodiment of the present invention has been used in expression.
Fig. 2 is the side view of propulsion component of the TCP message handler of same embodiment.
Fig. 3 is the planimetric map of propulsion component of the TCP message handler of same embodiment.
Fig. 4 is the planimetric map of the probe microscope carrier in the TCP message handler of same embodiment.
Fig. 5 is the front view of the probe microscope carrier in the TCP message handler of same embodiment.
Fig. 6 is the process flow diagram of main action of the TCP message handler of the same embodiment of explanation.
Embodiment
Below, describe embodiments of the present invention with reference to the accompanying drawings in detail.
Fig. 1 has represented to use the TCP test unit of the TCP message handler of one embodiment of the present invention.
TCP test unit 1 is made of not shown trial body, the test that is electrically connected with trial body 10, the TCP message handler 2 that is set at the upside of test 10.
TCP message handler 2 is a plurality ofly to be formed on carrying with each TCP on 5 equipment of submitted for test successively, in the present embodiment, for the simplification that illustrates, supposes that each 1 is carried out the TCP test.But the present invention is not limited to this, also can to carrying with 5 on the polyphone direction and/or and column direction on a plurality of TCP of arranging test simultaneously.
TCP message handler 2 possesses around following tape spool 21 with around last tape spool 22, is being with 5 around the carrying before the test on following tape spool 21.Carrying be with 5 from following tape spool 21 around down, after testing, be wound up into around on the tape spool 22.
Around following tape spool 21 and around on be provided with between the tape spool 22 from carrying with the boundary belt 51 of 5 upper glasses from cross around tape spool 21 down around on 3 roller 23a of intermediary, 23b, the 23c of tape spool 22.The tension force that each roller 23a of intermediary, 23b, 23c if can adjust boundary belt 51 can move up and down like that respectively.
At the downside around following tape spool 21 conduction band being set rolls 24a, rolls 25a, inboard subchain wheel 25b and inboard guiding roller 25c around limiting down, from around following tape spool 21 around under carrying be with 5 usefulness conduction bands to roll the 24a guiding, via rolling 25a, inboard subchain wheel 25b around restriction down and inboard guiding roller 25c is sent to propulsion component 3.
In addition, around on the downside of tape spool 22 be provided with conduction band pulley 24b, around on restriction roll 25f, outside subchain wheel 25e and outside survey guiding roller 25d, testing later carrying is with 5 via outer survey guiding roller 25d, surveys subchain wheel 25e outward and rolls 25f around last restriction, with guiding roller 24b guiding, be wound on last tape spool 22.
Inboard guiding roller 25c and outside survey propulsion component 3 be set between the guiding roller 25d, on the leading portion side (left side among Fig. 1) of propulsion component 3, the 1st camera 6a is set, on the downside (inboard of the probe microscope carrier 7 of narration later on) of propulsion component 3, the 2nd camera 6b is set, on the rear section side (right side among Fig. 1) of propulsion component 3, the 3rd camera 6c is set.In addition, sign tapping machine 26a and waste product tapping machine 26b are set between propulsion component 3 and the 3rd camera 6c.
Sign tapping machine 26a opens the device in 1 or a plurality of holes according to the result of test to the TCP that meets on the position of regulation, waste product tapping machine 26b punches to be judged as test findings by the device for the TCP of substandard products.
Each camera 6a, 6b, 6c are connected with not shown image processing apparatus, the 1st camera 6a and the 3rd camera 6c be used to judge the TCP of carrying on 5 have or not and indicate the position of perforation of tapping machine 26a and the equipment of number, the 2nd camera 6b is used to obtain the equipment of carrying with the information of the malposition of TCP on 5 and probe.The 2nd camera 6b in the present embodiment can obtain the information of the malposition of a plurality of objects in the relevant visual field.
The 2nd camera 6b is installed on the camera microscope carrier 61, can see on the plane in length and breadth direction (X-axis-Y direction) and above-below direction (Z-direction) are gone up by the driver that camera microscope carrier 61 has and move.
As Fig. 1 and shown in Figure 2, on the framework (propeller frame) 36 of propulsion component 3, when the servomotor 31 that can make ball-screw 32 rotations being installed, the thruster main unit 33 that ball-screws 32 are threaded is installed via the linear feeding guides (hereinafter referred to as " LM guides ") 37 of 2 Z-directions via carriage 361.This thruster main unit 33 can upward move at above-below direction (Z-direction) under by 37 guiding of linear feeding guides by driving servomotor 31.
On the end portion of this thruster main unit 33, be provided with by attracting air can attract maintenance to carry adsorption plate 34 with 5.
On leading portion one side (left side among Fig. 1) of thruster main unit 33, driving chain sprocket 35a is set, on the rear section side (right side among Fig. 1) of thruster main unit 33, head sprocket 35b is set.
As Fig. 2 and shown in Figure 3, on the rear side of the thruster main unit 33 in thruster space 36, loaded by base station 38 thruster microscope carrier 4 is set, be fixed on the propeller frame 36 as the top worktable 48 of the universal stage of thruster 4.
The pedestal 40 of thruster microscope carrier 4 is provided with: the servomotor 41a that makes the ball-screw 42a rotation that has axle on X-direction; Make the servomotor 41b of the ball-screw 42b rotation that on Y direction, has axle; Make the servomotor 41c of the ball-screw 42c rotation that has axle on Y direction, servomotor 41b and servomotor 41c lay respectively at the two end portions on the pedestal 40.
On leading screw 42a, be threaded by LM guides 43a, the 43a of the X-direction guiding sliding shoe 44a that can on X-direction, slide.LM guides 45a via Y direction on sliding shoe 44a is installed in sliding panel 46a on the Y direction and can slides.Upside at sliding panel 46a is fixed on the rotary part 47a that inside has collars, and rotary part 47a is installed on the top worktable 48 and can rotates freely.
On leading screw 42b, be threaded by LM guides 43b, the 43b of the Y direction guiding sliding shoe 44b that can on Y direction, slide.LM guides 45b via X-direction on sliding shoe 44b is installed in sliding panel 46b on the X-direction and can slides.Upside at sliding panel 46b is fixed on the rotary part 47b that inside has collars, and rotary part 47b is installed on the top worktable 48 and can rotates freely.
On leading screw 42c, be threaded by LM guides 43c, the 43c of the Y direction guiding sliding shoe 44c that can on Y direction, slide.LM guides 45c via X-direction on sliding shoe 44c is installed in sliding panel 46c on the X-direction and can slides.Upside at sliding panel 46c is fixed on the rotary part 47c that inside has collars, and rotary part 47c is installed on the top worktable 48 and can rotates freely.
Have on the thruster microscope carrier 4 of such structure,, sliding shoe 44a, sliding panel 46b and sliding panel 46c are slided on X-direction, top worktable 48 is moved on X-direction by driving servomotor 41a.In addition,, sliding shoe 44b, sliding shoe 44c and sliding panel 46a are slided on Y direction, top worktable 48 is moved on the Y direction by driving servomotor 41b and servomotor 41c.And, 41a makes sliding shoe 44a when X-direction is slided at the driving servomotor, drive servomotor 41b and servomotor 41c, sliding shoe 44b and sliding shoe 44c are moved on the Y-axis reverse direction mutually, then, can make top worktable 48 around this Z-axis rotation by making each rotating part 47a, 45b, 45c rotation.
If adopt this thruster microscope carrier 4, propulsion component 3 is moved on X-axis-Y direction, and can move around the Z-axis rotation.And, thruster microscope carrier 4 in the present embodiment can carry out moving and moving around the rotation of Z-axis of X-axis-Y direction simultaneously textural, in addition, since low weight as propulsion component 3 weight of mobile object, can be so have in the feature of short time revisal malposition.
On the other hand, as shown in Figure 1,, be provided with the probe microscope carrier 7 that probe 8 is installed on the top of test 10 at the downside of propulsion component 3.
As Fig. 4 and shown in Figure 5, the LM guides 713 of 711,4 X-directions of servomotor that make leading screw 712 rotations that have axle on X-direction is set on the base station 71 of probe microscope carrier 7.On these 4 LM guidess 713, the X pedestal 72 of the rectangle that can slide with each LM guides 713 is set on X-direction.On the side part of this X pedestal 72, form the unit 721 that is threaded that ball-screw 712 is threaded.
The LM guides 724 of 722,2 Y directions of servomotor that make ball-screw 723 rotations that have axle on Y direction is set on X pedestal 72.On these 2 LM guidess 724, be provided with each LM guides 724 can be on Y direction the Y pedestal 73 of the rectangle of slide-and-guide.On the side part of this Y pedestal 73, form the unit 731 that is threaded that ball-screw 723 is threaded.
On Y pedestal 73, servomotor 732 that makes ball-screw 733 rotations that have axle on Y direction and the abutment ring 734 that support guide ring 735 can rotate freely are set.On the part of guide ring 735, form the unit 736 that is threaded that ball-screw 733 is threaded.4 pins 82 of probe 8 usefulness that possess a plurality of probes 81 are installed on the guide ring 735 and can freely install and remove.
And though not shown on Fig. 4 and Fig. 5, each probe 81 of probe 8 is electrically connected with probe body via test 10, and at the downside of probe 8, the 2nd camera is positioned at the inboard of probe microscope carrier 7.
In having the probe microscope carrier 7 of this spline structure, by driving servomotor 711, can make X pedestal 72, probe 8 is moved on X-direction, by driving servomotor 722, can make Y pedestal 73, and then probe 8 is moved on Y direction.In addition, drive servomotor 732 and make ball-screw 733 rotations, move, can make guide ring 735 and probe 8 around this Z-axis rotation by making the unit 736 that is threaded.
At this, above-mentioned thruster microscope carrier 3 can carry out the malposition revisal in the short time textural, and possesses a plurality of parts on in-plane, and the size of in-plane increases.Probe microscope carrier 7 is because the space of restriction in-plane, so be arranged to the configurations difficult same with thruster microscope carrier 3, because suppose and thruster microscope carrier 3 are same structures, if so miniaturization servomotor 711,722,732, then a little less than the driving force of servomotor 711,722,733, can not drive the probe 8 that possesses many flexible cords of getting in touch with trial body reliably.Promptly, probe microscope carrier 7 in the present embodiment is on its structure, must carry out moving and moving of X-axis-Y direction respectively, compare with thruster microscope carrier 3 still that the malposition revisal needs the time around the rotation of Z-axis, but have can be on narrow space the feature of reliable traveling probe card 8.
Below, the using method and the action of TCP message handler 2 are described.
When using TCP message handler 2, before making TCP message handler 2 actual motions, need carry out initial setting in advance.Promptly, kind as change TCP, when changing probe 8 thereupon, need as the outside terminal of TCP (below be sometimes referred to as " trial liner (pad) ") and the probe 81 of probe 8 contacts, definite and register the reference position (this position is called " registration location ") of thruster microscope carrier 4 and probe microscope carrier 7.
For example, in manual operation, select the probe 81 of a plurality of positions (for example 3 positions) and corresponding with it trial liner to determine the position roughly, then, by utilizing the 2nd camera 6b and graphic processing facility, as making each probe 81 as far as possible like that in the central authorities of each trial liner, mobile thruster microscope carrier 4 and/or probe microscope carrier 7 under control automatically can determine to register the reference position.And, as required, the determining also not carry out manual operation of above-mentioned rough position undertaken by automatic control.
At this moment, be registered in the position coordinates of the object of the regulation in the visual field of the 2nd camera 6b in the lump.Position coordinates it is desirable to for a plurality of positions, makes the object registration that departs from the visual field of camera more than or equal to 3 positions especially.In view of the above, can obtain malposition information accurately.As the guiding of regulation, for example, can be chosen in carrying with grading on the diagonal line of the witness marker in 5, TCP more than or equal to 2 trial liner or characteristic tongue (reed), probe 81 leading sections more than or equal to 2 corresponding with them.
Active with reference to the TCP message handler 2 of flowchart text when making TCP message handler 2 actual motions of Fig. 6 is done.
If 2 beginnings of TCP message handler are initiatively done, then thruster microscope carrier 4 and probe microscope carrier 7 move to registration location (step S01).Then, by making carrying be with 5 to move, the 1st TCP is sent to the assigned position (step S02) of the downside of adsorption plate 34 around following tape spool 21 and around last tape spool 22 rotation predetermined angulars.
Attracted to the following rear flank of adsorption plate 34 at TCP, the servomotor 31 of propulsion component 3 drives, and via thruster main unit 33 adsorption plate 34 direction under the Z axle is moved.Adsorption plate 34 attracts carrying to be with 5, drops to camera position (step S03).And, driving chain sprocket 35a by with the carrying direction opposite with 5 direct of travel on rotate, add that in carrying the tractive force of regulation improves carrying with 5 positional precision on 5.
The 2nd camera 6b makes a video recording (step S04) under this state, and image information is sent to image processing apparatus.Image processing apparatus is obtained in advance the information (amount of direction of malposition (XY θ) and malposition) of malposition of position coordinates of the object of the position coordinates of object of regulation of registration and actual photographed from the image information that receives.For example, if registration witness marker, more than or equal to the position coordinates of 2 trial liner and corresponding with them the probe front part more than or equal to 2 is then obtained the witness marker of the position coordinates of these registrations, actual shooting, more than or equal to the information of the malposition of the position coordinates of 2 trial liner and corresponding with them the probe front part more than or equal to 2.
Image processing apparatus is according to acquired malposition information, calculates X-direction, Y direction and around the amount (step S05) of the malposition of Z-axis.
And, when testing a plurality of TCP simultaneously, suppose the mean value of output to the malposition amount of each TCP.
Result calculated, when being judged to be the revisal that does not need malposition (step S06-No), the step S10 of narration after entering into.
Result calculated when being judged as (step S06-Yes) when needing the malposition revisal, judges that whether the malposition amount is more than or equal to setting T (step S07).In this case " malposition amount " can be only around the amount of the malposition of Z-axis as object, also can around the malposition amount of the malposition amount of Z-axis and Y direction as object, can also around the malposition amount of the malposition amount of the malposition amount of Z-axis, Y direction and X-direction as object.When the key element of a plurality of malposition amounts, judge as long as make up their aptly.
As malposition amount (the positive S07-Yes of step) the time more than or equal to setting T, the servomotor 711,722,732 of probe microscope carrier 7 drives, make X pedestal 72, Y pedestal 73 or guide ring 735 actions, by probe 8 being moved and/or rotating mobile revisal malposition (step S08) around Z-axis on X-axis-Y direction.
In contrast, when malposition quantity not sufficient setting T (step S07-No), servomotor 41a, the 41b of thruster microscope carrier 4,41c drive, make top worktable 48, and then propulsion component 3 is moved, be with 5 to move and/or move revisal malposition (step S09) by the carrying of using adsorption plate 34 to attract around the Z-axis rotation in X-direction-Y direction.
When the malposition amount is big, if make carrying be with 5 to move with thruster microscope carrier 4, then with inboard guiding roller 25c, driving chain sprocket 35a, head sprocket 35b and outside survey the carrying that guiding roller 25d supports and be with stress application on 5, might damage carrying with the TCP on 5, particularly tongue (reed) or trial liner (pad)), the hole part or its peripheral part that enter with the pawl of carrying band itself, particularly driving chain sprocket 35a and head sprocket 35b.Such problem occurs in especially easily and makes carrying be with 5 to rotate when mobile around Z-axis, also occurs in addition to make carrying be with 5 on Y direction when mobile.
In the present embodiment, when the malposition amount is big (more than or equal to T time), because make probe 8 move forward into the positive revisal of line position, so there is not problem as described above with probe microscope carrier 7.The value of T is different because of the size (the particularly hole dimension of X-direction and trial liner size) of TCP etc., but as mentioned above, as long as consider that TCP and carrying are with dangerous suitable setting of 5 damage.Usually, as around the value of the T of the malposition amount (degree) of Z-axis in 0.1 (degree).
On the other hand, as malposition amount hour (during not enough T),, can shorten the productive temp time (time from the off-test to the on-test) by making carrying be with 5 to move with short thruster microscope carrier 4 of needed time of malposition revisal.
After carrying out the revisal of malposition with step S08 or step S09, the servomotor of propulsion component 3 31 drives, via thruster main unit 33 make adsorption plate 34 further under the Z axle direction move.The adsorption plate 34 that is attracting to carry with 5 drops to contact position, makes TCP push (step S10) to the probe 81 of probe 8.
With after probe 81 contacts, apply test signal from trial body by test 10 in the trial liner of TCP on TCP, the answer signal of reading from TCP is delivered to the trial body by test 10.Test the performance of TCP and function etc. in view of the above, drive according to this test findings sign perforator 26a or waste product perforator 26b.
TCP message handler 2 judges whether the TCP that tests is last device (step S11), when being judged as (step S11-Yes) when being last device, finishes initiatively to do.On the other hand, when being judged as the device that is not last (step S11-No), the servomotor 31 of propulsion component 3 drives, when making adsorption plate 34 via thruster main unit 33 direction moves on the Z axle, thruster microscope carrier 4 and probe microscope carrier 7 move to registration location (step S12).Then, adsorption plate 34 is stopping to attract to carry to be with 5 liberation carryings to be with in 5, and further direction moves (step S13) on the Z axle.Return step S02 thereafter.
If adopt the TCP message handler 2 of present embodiment, because with thruster microscope carrier 4 and/or probe microscope carrier 7, in the actual motion of TCP message handler 2, can not only be on X-direction-Y direction, and can around Z-axis make carrying be with 5 and/or probe 8 move forward into the positive revisal of line position, so carry out the contraposition of TCP and probe 81 reliably, can reduce the generation of loose contact.In addition,, can not damage TCP and carrying band, can shorten the productive temp time as far as possible by separately using thruster microscope carrier 4 and probe microscope carrier 7.
More than Shuo Ming embodiment is put down in writing in order to understand the present invention easily, does not limit the present invention.Therefore, disclosed in the above-described embodiment each key element is to comprise the whole design alteration that belongs to technical scope of the present invention and the aim of equivalent.
For example, the structure of thruster microscope carrier 4 and probe microscope carrier 7 is not particularly limited, and can change both structures, also can the both be arranged to same structure.
In addition, in above-mentioned TCP message handler 2, also can omit probe microscope carrier 7, only carry out the malposition revisal with probe microscope carrier 4.Even in this case because can make carrying be with 5 to move with thruster microscope carrier 4 around Z-axis rotation, so and be that 2 controls of X-axis-Y direction are compared, can correctly carry out the contraposition of TCP and probe 81.
And, in above-mentioned TCP message handler 2, also can omit thruster microscope carrier 4, only carry out the malposition revisal with probe microscope carrier 7.Even in this case, because can in the actual motion of TCP message handler 2, make probe 8 move and move, so can alleviate the generation of the loose contact of TCP and probe 81 with probe microscope carrier 7 around the Z-axis rotation in X-direction-Y direction.
And, in the probe microscope carrier 7 of above-mentioned TCP message handler 2, just the rotation travel mechanism around Z-axis has been arranged to use the automatic control of the 2nd camera 6b and image processing apparatus, the travel mechanism of X-axis-Y direction also can be arranged to seeing the manual operation formula of the image of using the 2nd camera 6b shooting.In addition in this case, thruster microscope carrier 3 also can omit the rotation travel mechanism around Z-axis, only controls the travel mechanism of X-axis-Y direction automatically.
In sum,, then can correctly carry out the contraposition of TCP and osculating element, reduce the generation of loose contact if adopt TCP treating apparatus of the present invention or malposition correction method.Be that TCP treating apparatus of the present invention and malposition correction method are used for correctly, carry out reliably, efficiently the test of TCP.
Claims (16)
1. TCP treating apparatus, it transmits the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is connected with above-mentioned osculating element, in view of the above a plurality of TCP submitted for test successively, it is characterized in that, comprising: can make the band Z-axis whirligig that moves around its Z-axis rotation by the carrying band that is pressed on the above-mentioned osculating element.
2. TCP treating apparatus as claimed in claim 1 is characterized in that, above-mentioned TCP treating apparatus also comprises: can make the band 2 D shifting unit that moves on its in-plane by the carrying band that is pressed on the above-mentioned osculating element.
3. TCP treating apparatus as claimed in claim 2, it is characterized in that, above-mentioned band Z-axis whirligig and/or above-mentioned band 2 D shifting unit make the carrying band rotate around Z-axis and move and/or move on in-plane with carrying band by the press device that is pressed on the above-mentioned osculating element.
4. as claim 2 or 3 described TCP treating apparatus, it is characterized in that above-mentioned TCP treating apparatus also comprises the malposition information acquisition device of the malposition information that can obtain TCP and above-mentioned osculating element,
Drive above-mentioned band Z-axis whirligig and/or above-mentioned band 2 D shifting unit according to the malposition information that obtains by above-mentioned positional information acquisition device, automatically the above-mentioned malposition of revisal.
5. TCP treating apparatus, its transmits the carrying band that is formed with a plurality of TCP on tape, with osculating element that the test head is electrically connected on push carrying and be with, the outside terminal of TCP is connected with above-mentioned osculating element, a plurality of TCP submitted for test successively, it is characterized in that in view of the above, comprising:
Can obtain the malposition information acquisition device of the malposition information of TCP and above-mentioned osculating element; With
Make above-mentioned osculating element rotate the osculating element Z-axis whirligig that moves around its Z-axis,
In actual motion, drive above-mentioned osculating element Z-axis whirligig according to the malposition information that obtains by above-mentioned malposition information acquisition device, above-mentioned osculating element is moved, automatically the above-mentioned malposition of revisal around the Z-axis rotation.
6. TCP treating apparatus as claimed in claim 5 is characterized in that, above-mentioned TCP treating apparatus also comprises the osculating element 2 D shifting unit that above-mentioned osculating element is moved on its in-plane,
In actual motion, drive above-mentioned osculating element Z-axis whirligig and/or above-mentioned osculating element 2 D shifting unit according to the malposition information that obtains by above-mentioned malposition information acquisition device, make above-mentioned osculating element move and/or on in-plane, move, automatically the above-mentioned malposition of revisal around the Z-axis rotation.
7. TCP treating apparatus, its transmits the carrying band that is formed with a plurality of TCP on tape, with osculating element that the test head is electrically connected on push carrying and be with, the outside terminal of TCP is connected with above-mentioned osculating element, a plurality of TCP submitted for test successively, it is characterized in that in view of the above, comprising:
Can obtain the malposition information acquisition device of the malposition information of TCP and above-mentioned osculating element;
Can make the band Z-axis whirligig that moves around this Z-axis rotation by the carrying band that is pressed on the above-mentioned osculating element; With
The osculating element Z-axis whirligig that above-mentioned osculating element is moved around its Z-axis rotation,
State malposition amount that the malposition information acquisition device obtains when bigger or the time when using more than or equal to setting than setting, drive above-mentioned osculating element Z-axis whirligig, above-mentioned osculating element is moved around the Z-axis rotation, when above-mentioned malposition amount during smaller or equal to setting or during not enough setting, drive above-mentioned band Z-axis whirligig, make above-mentioned carrying band around the Z-axis rotation, the automatic in view of the above above-mentioned malposition of revisal.
8. TCP treating apparatus as claimed in claim 7 is characterized in that, above-mentioned TCP treating apparatus also comprises: make the band 2 D shifting unit that can move on its in-plane by the carrying band that is pressed on the above-mentioned osculating element; With the osculating element 2 D shifting unit that above-mentioned osculating element can be moved on its in-plane,
When using when stating malposition amount that the malposition information acquisition device obtains when bigger or more than or equal to setting than setting, drive above-mentioned osculating element Z-axis whirligig and/or above-mentioned osculating element 2 D shifting unit, make above-mentioned osculating element around Z-axis rotation move and or on in-plane, move, when above-mentioned malposition amount during smaller or equal to setting or during not enough setting, drive above-mentioned band Z-axis whirligig and/or above-mentioned band 2 D shifting unit, make above-mentioned carrying band move and/or on in-plane, move, the automatic in view of the above above-mentioned malposition of revisal around the Z-axis rotation.
9. the malposition correction method of a TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
Rotate the malposition that moves revisal TCP and above-mentioned osculating element around its Z-axis by making by the carrying band that is pressed on the above-mentioned osculating element.
10. the malposition correction method of a TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
Mobile and/or mobile on its in-plane by making around its Z-axis rotation by the carrying band that is pressed on the above-mentioned osculating element, the malposition of coming revisal TCP and above-mentioned osculating element.
11. the malposition correction method of a TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
Obtain the information of the malposition of TCP and above-mentioned osculating element,, move the above-mentioned malposition of revisal around its Z-axis rotation by making by the carrying band that is pressed on the above-mentioned osculating element according to the above-mentioned malposition information that obtains.
12. the malposition correction method of a TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
Obtain the information of the malposition of TCP and above-mentioned osculating element, according to the above-mentioned malposition information that obtains, move and/or on its in-plane, move around its Z-axis rotation by making, come the above-mentioned malposition of revisal by the carrying band that is pressed on the above-mentioned osculating element.
13. the malposition correction method of a TCP treating apparatus, it is to pass the carrying band that repeatedly is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
In the actual motion of TCP treating apparatus, obtain the information of the malposition of TCP and above-mentioned osculating element, according to the above-mentioned malposition information that obtains, move around its Z-axis rotation by making above-mentioned osculating element, come the above-mentioned malposition of revisal.
14. the malposition correction method of a TCP treating apparatus, be to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, contact with above-mentioned osculating element by the outside terminal that makes TCP, can be the malposition correction method of TCP in the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
In the actual motion of TCP treating apparatus, obtain the information of the malposition of TCP and above-mentioned osculating element, according to the above-mentioned malposition information that obtains, move and/or on its in-plane, move around its Z-axis rotation by making above-mentioned osculating element, come the above-mentioned malposition of revisal.
15. the malposition correction method of a TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
Obtain the information of the malposition of TCP and above-mentioned osculating element, during when the malposition amount that obtains is bigger than setting or more than or equal to setting, above-mentioned osculating element is moved around its Z-axis rotation, when the malposition amount that obtains during smaller or equal to setting or during not enough setting, move the above-mentioned malposition of revisal around its Z-axis rotation by making by the carrying band that is pressed on the above-mentioned osculating element.
16. the malposition correction method of a TCP treating apparatus, it is to transmit the carrying band that is formed with a plurality of TCP on tape, with osculating element that test head is electrically connected on push carrying and be with, the outside terminal of TCP is contacted with above-mentioned osculating element, in view of the above can be the malposition correction method of the TCP of the TCP treating apparatus of a plurality of TCP submitted for test successively and above-mentioned osculating element, it is characterized in that
Obtain the information of the malposition of TCP and above-mentioned osculating element, during when the malposition amount that obtains is bigger than setting or more than or equal to setting, make above-mentioned osculating element move and/or on its in-plane, move around its Z-axis rotation, when the malposition amount that obtains during smaller or equal to setting or during not enough setting, move and/or on its in-plane, move around its Z-axis rotation by making, come the above-mentioned malposition of revisal by the carrying band that is pressed on the above-mentioned osculating element.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2003/001033 WO2004068154A1 (en) | 2003-01-31 | 2003-01-31 | Tcp handling device and positional deviation correcting method for the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1745311A true CN1745311A (en) | 2006-03-08 |
| CN100472220C CN100472220C (en) | 2009-03-25 |
Family
ID=32800848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB03826028XA Expired - Fee Related CN100472220C (en) | 2003-01-31 | 2003-01-31 | TCP handling device and positional deviation correcting method for the same |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4098306B2 (en) |
| CN (1) | CN100472220C (en) |
| AU (1) | AU2003303828A1 (en) |
| TW (1) | TWI247122B (en) |
| WO (1) | WO2004068154A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102053400B (en) * | 2009-10-27 | 2013-04-24 | 塔工程有限公司 | Array substrate detecting device and method thereof |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101346635A (en) * | 2005-12-27 | 2009-01-14 | 株式会社爱德万测试 | TCP processing equipment and contraposition method for connection terminal in TCP processing equipment |
| WO2007077621A1 (en) * | 2006-01-04 | 2007-07-12 | Advantest Corporation | Tcp handling apparatus |
| JP5047188B2 (en) * | 2006-11-09 | 2012-10-10 | 株式会社アドバンテスト | TCP handling apparatus and connection terminal positioning method in the apparatus |
| KR20100005067A (en) * | 2007-03-13 | 2010-01-13 | 가부시키가이샤 아드반테스트 | Tcp handling device |
| KR20090132617A (en) * | 2007-03-29 | 2009-12-30 | 가부시키가이샤 아드반테스트 | Tcp handling apparatus |
| KR20090122306A (en) * | 2007-03-29 | 2009-11-26 | 가부시키가이샤 아드반테스트 | Tcp handling apparatus |
| KR20090132623A (en) * | 2007-03-29 | 2009-12-30 | 가부시키가이샤 아드반테스트 | Tcp handling apparatus |
| WO2008132935A1 (en) * | 2007-04-19 | 2008-11-06 | Advantest Corporation | Tcp handling apparatus |
| JP2012068032A (en) * | 2010-09-21 | 2012-04-05 | Tesetsuku:Kk | Tcp testing device |
| KR101273523B1 (en) * | 2010-12-22 | 2013-06-14 | 주식회사 루셈 | Apparatus for correcting array of Tape Carrier Package using Motor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282831A (en) * | 1988-05-09 | 1989-11-14 | Nec Corp | Handling device for tabic |
| JPH10185996A (en) * | 1996-12-25 | 1998-07-14 | Ando Electric Co Ltd | Contact position determination mechanism for ic chip of tab handler |
| TW523854B (en) * | 2001-03-27 | 2003-03-11 | Ando Electric | TCP handler |
-
2003
- 2003-01-31 AU AU2003303828A patent/AU2003303828A1/en not_active Abandoned
- 2003-01-31 CN CNB03826028XA patent/CN100472220C/en not_active Expired - Fee Related
- 2003-01-31 WO PCT/JP2003/001033 patent/WO2004068154A1/en active Application Filing
- 2003-01-31 JP JP2004567555A patent/JP4098306B2/en not_active Expired - Fee Related
-
2004
- 2004-01-28 TW TW093101820A patent/TWI247122B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102053400B (en) * | 2009-10-27 | 2013-04-24 | 塔工程有限公司 | Array substrate detecting device and method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004068154A1 (en) | 2004-08-12 |
| AU2003303828A1 (en) | 2004-08-23 |
| JPWO2004068154A1 (en) | 2006-05-25 |
| TW200422631A (en) | 2004-11-01 |
| CN100472220C (en) | 2009-03-25 |
| AU2003303828A8 (en) | 2004-08-23 |
| TWI247122B (en) | 2006-01-11 |
| JP4098306B2 (en) | 2008-06-11 |
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