TW200422631A - TCP handling device and position deviation correcting method for the same - Google Patents

Abstract

A TCP handler (2) is provided with a pusher stage (4) capable of moving a carrier tape (5) adsorbed by an adsorption plate (34) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2), and a probe card stage (7) capable of moving a probe card (8) in the X- and Y-axis directions and driving it for rotation around a vertical axis during operation of the TCP handler (2). With the TCP handler (2) having such arrangement, it is possible to achieve accurate positioning between the TCP and the probe card (8) to reduce the occurrence of poor contact.

Description

200422631 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention is not related to the TCP (Tape) used to test one of the 1C components.

Carrier Package) or COF (Chip On Film) (hereinafter, the components manufactured using TCP, COF, and other TAB (Tape Automated Bonding) assembly technology are collectively referred to as "TCP") TCP processing devices and TCP and Method for compensating the position deviation of the contact part. [Previous technology] In the process of manufacturing electronic components such as IC components, it is necessary to test the performance or function of the final manufactured IC components or components in the middle stage, etc. Electronic component test equipment. In the case of TCP, use TCP for Test device. The test device for TCP is generally composed of a tester body, a test head, and a Tcp processing device (hereinafter referred to as an rTcp processor). The Tcp processing device is functionally transported to form a plurality of TCp bearing tapes on the tape, and the pressing tape is pressed against the needle of the probe card which is electrically connected to the test head. Needle contact, a plurality of Tcp are delivered to the test in turn. In order to use this TCP processing device for efficient and accurate testing, the external terminals of the TCP and the probes of the probe must be in contact with each other. -In the method of winning π r "c, it is known that the load volume f and the advancement benefit the fortress or the contact pressure plate together toward the χγ side (Actual Fairness No. 6-2271, JP 9-9 2695, Special ^ 8-29484 M), or move the probe card in the direction of Chihei 10-1 85996, Japanese Patent Laid-Open No. 2000-1 8 1 888).

I Page 6 2192-6119-PF (N2); Ahddub.ptd 200422631 V. The description of the invention (2) is only controlled by two pumps in the XY direction, which may not be correct, and there are many feet. Narrow pitch / frequency increases. At first intervals, the preparatory order for this kind of poor contact is installed in ϊϊ20 02- 1 8 1 88 No. 9 describes an invention that, by means of θ, the Up probe probe card only rotates to compensate the angle relative to TCP. D. Angle deviation between CP and probe card. All are 1 = 2 inventions described in JP 2002_1 81 889, because the TCP test needle is completed after the movement; ㈣ alignment, brother, 在 in the position where TCP and probe card occur If the deviation H or the initial setting itself is incorrect and found during Tcp operation, it cannot be handled. "置 之 K 间 [Content of the invention] Reason for the description of the facts' The object of the present invention is to provide a method for compensating the position deviation of Tcp at ρτγρ 4 iTCP processing device. , + Reduce the occurrence of poor contact. In order to achieve the above object, the first invention provides a TCP processing device, which forms a plurality of TCP bearing tapes on the tape. The bearing tapes are placed at the contact portion electrically connected to the test head. By ordering to connect the contact part outside TCP 2, multiple TCPs can be sequentially delivered for testing. Its A feature is that it includes a reel vertical axis rotation device, which can make the bearing reel pressed by the contact to revolve vertically. The shaft rotates (丨). The "contact part" in this patent specification includes the external end connected to the TCp ill 1! Page 7 2192-6ll9-PF (N2); Ahddub.ptd 200422631

Includes two concepts of the kind of connection to the ^ terminal (for example, a connection terminal (such as a probe) and a probe card, for example). According to the invention (1), by using the tape-like vertical load-bearing tape to rotate around the vertical axis, the position of the garment setting section around the vertical car can be adjusted to reduce the occurrence of poor contact. According to the invention, the TCP processing device of (1) further includes a coil, which can make the carrier tape pressed on the contact portion toward (2). With plane moving device to move in the plane direction

According to the invention (2), by using the vertical axis of the tape to rotate the PEI and / or the tape plane moving device to rotate the bearing tape around the vertical axis and / or move in a plane direction, the RTCP and contact are surely entered. The alignment of the parts can reduce the occurrence of poor contact. . In the invention (2), the reel vertical axis rotation device and / or the reel plane moving device and the pressing device for pressing the reel to the contact portion cause the reel to rotate around the vertical axis and / or toward the vertical axis. Plane movement is better (3). In addition, the "pushing device" referred to herein may have a function of not only pressing the carrier tape but also holding the carrier tape.

According to the invention (3), no positional deviation will occur between the carrier tape and the pressing device that presses the carrier tape. Preferably, the TCP processing device of the invention (2, 3) further includes a position deviation information acquisition device, which can obtain the position deviation information of the TCP and the contact portion; according to the position deviation information obtained by the position deviation information acquisition device, drive The reel vertical axis rotation device and / or the reel plane moving device can automatically compensate the position deviation.

2192-6119-PF (N2); Ahddub.ptd Page 8 V. Description of the invention (4) Contains the position deviation in the "direction of position deviation (X · Y · and the amount of position deviation.) In this patent specification. On the position deviation information acquisition device, for example, a camera and image processing that can be rolled up and contacted, and Pei Zhizhi, and a single photo bearing, according to the invention (4), can automatically compensate for the gap and position deviation, and the operator The technology is irrelevant. For the TCP processing device of the invention (1 ~ 4), the rotating device can hold the reel under suction ~ ▼ The vertical axis reel is rotated around its vertical direction. Adherence to adsorption

Second, the present invention provides a Tcp processing device, which transports a number of TCP carrier tapes on the tape, and presses the carrier tapes to the contact part connected to the test head on the electrical side, by making the TCP outside The terminal is connected to the contact part, and the plural TCPs are sequentially delivered for testing. It is characterized by including a position deviation information acquisition device, which can obtain the position deviation information of TCP and the contact part, and a vertical axis rotation device of the contact part. The contact portion is rotated around its vertical axis; in actual operation (not at the initial setting, but in operation for actual testing), the contact portion is driven according to the position deviation obtained by the position deviation information acquisition device, and the contact portion is driven. The vertical axis rotation device causes the contact portion to rotate around its vertical axis, and automatically compensates for the position deviation (6). According to the invention (6), by using the contact portion vertical axis rotation device in actual operation of the TCP processing device, The contact part rotates around the vertical axis, and the position of the tested TCP and the contact part can be aligned with each tested TCP offset about the vertical axis, which can significantly reduce the occurrence of poor contact. The TCP processing device of the invention (6) also includes a contact plane moving device 11 _ II Η 2192-6119-PF (N2); Ahddub.ptd Page 9 200422631 V. Description of the invention (5) can make the contact follow the Position deviation data; j moves in the plane direction; in actual operation, the position deviation information obtained by the device according to the vertical axis of the contact portion is driven to drive the contact portion around the position and / or the contact portion plane moving device to compensate When the position deviation (7) axis rotates and / or moves in the plane direction, according to the invention (7), in the actual operation of the TCP processing device, the order is set:: I: I Ϊaxis rotation device and / Or the contact part is moved 9 planes: the vertical axis rotates and / or moves in the plane direction, because the MM can be tilted to perform a test 1 that is offset about the vertical axis and the position of the contact part =, which can significantly reduce the contact failure. The third invention provides a Tcp processing device, which carries a plurality of TCP-shaped carrier tapes on the tape, and presses the carrier tapes to a contact portion electrically connected to the test head, by making the external terminals of the TCP Connected to this contact, ^ will send plural TCPs in turn The test is characterized in that: the position deviation information acquisition device 'can obtain the position deviation information of the TCP and the contact portion; the reel vertical axis rotation device can cause the load reel in the contact portion to rotate about its vertical axis; And the vertical axis rotation device of the contact part can make the continuous contact part rotate around its vertical axis; by the position deviation ^ ϋ obtained when the position deviation amount is larger than the predetermined value or the heart :::: condition, drive the The vertical axis rotation device of the contact part rotates the vertical axis of the contact, and the amount of f in the position is the following value: a second; if the value is ^, drive the volume = the vertical axis rotation device to make the load The tape is rotated around the vertical axis, and the position deviation is automatically compensated (8). According to the invention (8), by driving the vertical axis rotation device of the tape or

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2192-6119-PF (N2); Ahddub.ptd 200422631 V. Description of the invention (6) " --------- 1 ~ The vertical axis of the contact part is a Korean moving device, i ^ + Pingjiang Leyi 1 into Aligning the position of the TCP and the contact part offset around the vertical axis can reduce the occurrence of poor contact. Here, the structure of the TCP processing device can compensate the position deviation in a short time compared with the vertical axis rotation device that moves the contact portion including the contact portions of a plurality of wires connected to the tester body. However, the vertical axis rotation device of the reel is caused to move the supporting reel using a guide wheel or a sprocket. When the amount of movement is large, stress acts on the reel, which may damage the TCP (especially the wire or the Test base) or the carrier tape itself (especially the hole or its peripheral part where the claw of the sprocket enters). Therefore, if according to the invention (8), in the case of large position deviation, the vertical axis rotation device of the contact portion is driven to prevent damage to the TCP or the carrier tape; and in the case of small position deviation, the vertical axis of the tape is driven to rotate The device 'can shorten the time for position deviation compensation', thereby shortening the indexing time. Preferably, the TCP processing device of the invention (8) further includes a tape reel plane moving device, which can move the bearing reel pressed by the contact portion toward its plane direction; and a contact portion plane moving device, which can make the contact portion toward It moves in the plane direction; by the case where the position deviation amount obtained by the position deviation information obtaining device is larger than the predetermined value or above the predetermined value, the contact portion vertical axis rotation device and / or the contact portion plane moving device are driven , Make the contact part rotate around the vertical axis and / or move in the plane direction, and drive the reel vertical axis rotation device and / or the reel when the position deviation is below the set value or under the set value. Plane moving device, which makes the carrier tape rotate around the vertical axis and / or move in the plane direction, and automatically compensate the position deviation

2192-6119-PF (N2); Ahddub.ptd Page 11 ZUO4Z2b31

If according to the invention (9), by using the coupling * and / or the tape plane moving device, or the :, the straight axis rotating device and / or the contact plane moving device make the bearing coil :: f axis rotate Install the straight axis to rotate and / or move in the direction of the plane, and make sure that the contact position is aligned every I or the contact part, which can reduce the contact failure, TCP, and contact part. Also, if based on this

And / or tape plane moving device, which can shorten the straight-drawing rotating device and thus shorten the index time / position deviation compensation time. 'Niu' m: Provide a position deviation compensation method for tcp processing device. Tcp and the position deviation compensation method of the contact part, carrying a plurality of Tcp bearing reels formed on the reel, pressing the bearing reel to the contact part electrically connected to the test head, and by making Tcp outside, The connection between the contact part and the contact part can sequentially deliver multiple TCPs for testing. The special purpose is to make up the position of the TCP and the contact part by rotating the carrier tape pressed on the contact part around its vertical axis. Deviation (10).

/ If according to the invention (10), by rotating the carrier tape around the vertical axis, τCP offset about the vertical axis and the position alignment of the contact portion can reduce the occurrence of poor contact. The fifth aspect of the present invention provides a position deviation compensation method of the TCP processing device, which is a method of compensating the position deviation of the TCP of the TCP processing device and the contact portion.

200422631 V. Description of the invention (8) f is pressed on the contact part which is electrically connected with the test head, by order 7 [? The external terminal is connected to the contact part, and a plurality of Tcps can be sequentially delivered for testing. It is characterized by: by rotating the carrier tape pressed on the contact part about its vertical axis and / or moving it in the plane direction, the compensation is compensated. Deviation from the position of the contact (11). According to the invention (11), by rotating the carrier tape around the vertical axis and / or moving it in the plane direction, aligning the position of the TCp and the contact portion offset about the vertical axis can reduce the occurrence of poor contact. . 6. The present invention provides a position deviation compensator for a TCP processing device. The TCP of the TCP processing device and the positional deviation compensation of the contact part form a plurality of TCP carrier tapes, and the carrier roller π ^ The contact part of the hoe that is electrically connected. By connecting the contact part other than TCP ', plural TCPs can be sequentially delivered for testing. After the deviation information obtained according to the obtained information, it is rotated by the tape around its vertical axis by two: The load 4 pressed on the contact part and w rotates to compensate the position deviation (1 2). Let the bearing rotate = the position deviation information obtained by the TCP and the position of the contact part ~: differential, a method of accurately compensating the deviation around the vertical axis, 7: A position deviation compensation method in a TCP processing device, carried in a roll 1 / Place the TCP and the position deviation compensation side of the contact part on the tape and test: on the carrier tape, connect the terminals of the carrier roll part; A contact part connected electrically, by making the TCP outside and Beta Hai contact part connection 'can deliver multiple TCPs in sequence for testing, which

2192-6119-PF (N2); Ahddub. Ptd Page 13 200422631

=== Yu, after the position deviation information of TCP and the contact part, by the volume :::: f position deviation information, the load that is pressed on the contact part is rotated and / or moved in the direction of its plane, Compensate for this order :: Τ ::! (13) 'By turning and / or moving in the direction of Ir according to the obtained position deviation information, it can be sure, unreliable, and% lucky that the offset TCP and The position of the contact is deviated. , Go ,! Provide a position deviation compensator for the TCP processing device! ', Tcp for the process device and the position deviation compensation method for the contact part

: The second carrier forms a plurality of κρ load reels on the reel, and presses the load reel ▼ to the contact part which is electrically connected to the test head. By connecting the outside of the Tcp to the contact part, the plural number can be connected. Tcp successively delivers tests. Its special feature is that in the actual operation of the TCP processing device, after obtaining the position deviation information of [? And the contact part, by pressing the obtained position deviation information, the pressure is placed on the contact. The load-bearing tape of the part is rotated around its vertical axis to compensate the position deviation (1 4). According to the invention (14), according to the invention (14), by turning the contact portion around the vertical axis during the actual operation of the TCP processing device, each tested Tcp can be vertically rotated.

The alignment of the tested TCP and the contact portion of the shaft offset can significantly reduce the occurrence of poor contact. 9. The present invention provides a method for compensating the position deviation of a TCP processing device. 'The position deviation compensation method of the TCP of the TCP processing device and the contact part = θ' is carried to form a plurality of TCP bearing tapes on the tape. The load coil can be pressed on the contact part which is electrically connected with the test head.

200422631 V. Description of the invention (10) Connected to the contact part, a plurality of TCPs can be sequentially delivered for testing. Qiu # Yu · In the actual operation of the 1 processing device, after obtaining the TCP and the contact I = deviation error, borrow According to the obtained position deviation information ^: the bearing tape pressed on the contact portion is rotated about its vertical axis and / or moved in the direction of: plane to compensate the position deviation (15). If according to the invention (1 5), by actually turning the contact portion around the vertical axis during the actual operation of the TCP processing device, the carrier tape and / or the plane direction can be shifted by 2 because each test Tcp can be deviated about the vertical axis. The alignment of the tested TCP and contact ^ can significantly reduce the occurrence of poor contact. The tenth invention provides a position deviation compensator of the TCP processing device. The position deviation compensator of the TCP processing device and the contact portion of the contact portion forms a plurality of TGP carrying tapes on the tape. The contact part of the test head which is electrically connected, by connecting the outside of the TCP to the contact part, a plurality of TCPs can be sequentially delivered to the test, which is characterized by obtaining position deviation information of the TCP and the contact part. Then, if the position deviation obtained by t is larger than the predetermined value or above the predetermined value, the contact portion is rotated about its vertical axis, and the position deviation 1 obtained is the case below the predetermined value or less than the predetermined value. In the case of the value, the bearing reel being pressed at the contact part is rotated around its vertical axis to compensate the position deviation (16). You nong 艨 this ice π ice… Θ ~~% $ Alignment of the position of the TCP and contact part of the straight glaze offset can reduce the occurrence of poor contact. Therefore, in terms of the structure of the TCP processing device, the time ratio for compensating the position deviation of the carrier tape is generally included, including a plurality of connections with the tester body.

2192-6119-PF (N2); Ahddub.ptd $ 15 200422631 V. Description of the invention (11) The time for compensating the position deviation of the contact portion of the wire is short. However, due to the use of guide rollers or sprocket wheels to support the reel, when the amount of movement of the reel is large, stress acts on the reel, which may damage the TCP (especially the wire or the test base) or the load on the reel. The tape itself (especially the hole or its peripheral part where the claw of the sprocket enters). Therefore, 'If according to the invention (16), if the position deviation is large, the contact portion is rotated around the vertical axis to prevent damage to the TCP or the carrier tape; and when the position deviation is small, the carrier tape is wound. The rotation of the vertical axis can shorten the time for position deviation compensation, thereby shortening the indexing time. The eleventh invention provides a position deviation compensation method for a TCP processing device, which is a method for compensating the position deviation between the TCP of the TCP processing device and the contact part. By pressing the contact part that is electrically connected to the test head, by connecting the external terminal of TCp to the contact part, multiple TCPs can be sequentially delivered to the test. The special purpose is to obtain the position deviation information of TCP and the contact part. By making the obtained position deviation larger than the predetermined value or above the predetermined value, the contact portion is rotated around its vertical axis and / or moved in the plane direction, and the obtained position deviation is If the value is lower than the predetermined value or less than the predetermined value, the load reel pressed on the contact part moves around its vertical axis and / or moves in the direction of its plane to compensate the position deviation (17). ^ According to the invention (17), by making the carrier tape or the contact portion around the vertical: turning the soil and / or moving in a plane direction, the position T of the contact portion κρ and the contact portion can reduce the occurrence of poor contact. In addition, according to the invention (17), if the position deviation is large, the contact portion is rotated around the vertical axis and / or toward page 16 2192-6119-PF (N2); Ahddub.ptd 200422631 V. Description of the invention ( 12) Move in the plane direction to prevent damage to TCP or the carrier tape; while the small f in the position deviation, rotating the carrier tape around the vertical axis and / or moving in the plane direction can shorten the time for position deviation compensation, This shortens the indexing time. [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a TCP test apparatus using a TCp processing apparatus according to an embodiment of the present invention. The TCP test device 1 is composed of the following components, the tester body, which is not shown in the figure; the test head 10 is electrically connected to the tester body; and the TCp processing device 2 is provided on the upper side of the test head 10. The TCP processing device 2 sequentially tests a plurality of TCPs formed on the carrier tape 5. In this embodiment, in order to simplify the description, the TCp is delivered to the test one by one. However, the present invention is not limited to this, so that a plurality of Tcps arranged in the tandem direction and / or the side-by-side direction on the carrier tape 5 can be delivered and tested simultaneously. The TCP processing device 2 includes an unwinding reel 21 and a winding reel 22. Carry the reel 5 before the unwinding reel 21 is wound up. The carrier tape 5 is taken out from the take-up reel 2m, and is wound on the take-up reel 22 after the delivery test. Between the take-up reel 21 and the take-up reel 22, a protective tape 51 for peeling off the self-supporting reel 5 is provided. The self-take-out take-up reel 21 is mounted on three take-up reels 22, 23a, 23b, 23c. Each of the interval rollers 23a, 23b, and 23c can be moved up and down independently, so that the tension of the protective tape 51 can be adjusted.

200422631

On the lower side of the take-up reel 21, a take-up guide, a take-off limit roll entry side auxiliary key wheel coffee and an inlet-side guide wheel 25c are provided. The carrying roll 5 from the take-out roll f is guided on the take-up guide 24a. The lower side is moved to the secondary side sprocket 2 5 b and the secondary side guide wheel 2 5 c through the winding-out pole, and a winding guide 24 b is provided under the winding reel 22, and the winding-out pole PF: 衮Wheel 2 5 f 口 Secondary side sprocket 2 5 e and outlet side guide wheel 2 d. After the delivery test, the carrier tape 5 is guided by the tape guide 24b through the outlet side guide wheel 25d and the outlet side chain. The wheel 25e and the take-off limit roller 25f are wound around the roll 1. A thruster unit 3 is provided between the entrance-side guide wheel 25c and the exit-side guide wheel 25d. The first camera 6 ^ is provided with a second camera 6b under the pusher unit 3 (inside of the probe card table 7 ^ described later), and the rear side (right side in FIG. I) e of the pusher unit 3 is set to the second position. Two cameras. . A mark punch 26a and a defect punch 2613 are provided between the thruster unit 3 and the third camera 6C. The mark punching machine 26a drills one or more holes for the TCp at a predetermined position according to the test results, and the defective punching machine 26b drills the TCP of the judgment. Each of the cameras 6a, 6b, 6c is connected to an image processing device not shown in the figure. The first camera 6a and the third camera 6c are used to determine whether there is a TCP and a punching machine 26a processed on the bearing volume. The position or number of holes τ The two cameras 6b are used to obtain the information of the position of the Tcp and the probe on the carrier tape 5. In the second camera 6b of this embodiment,

2192-6119-PF (N2); Ahddub.ptd Page 18 V. Description of the invention (14) Plurality, information on the position deviation of the image Ding Cong camera 6b is mounted on the camera work 2 61 ... The actuation of Tian Zuo Kou 61 The device can be moved on the plane: using the camera M⑷ and the vertical direction (z-axis direction) ;. The ㈣ direction is shown in Figure 1 and Figure 2. On the push-to-cry shelf) 36, the temple clothes motor that rotates through the bracket 3 frame (the propeller machine 31, and through the two 2-axis square two bead screw cups 32, L Beer Z fork season Z is guided by the linear motion of the direction (Γ; 丁 p 炎 「心

"Guide") 37 installation and installation of the glass plate ♦ (hereinafter referred to as "LM command drive drive / bead screw combination of the propeller body 33. Raise the bottom down; H31, this thruster body 33 can be Move the LM guide 37 in the up and down direction (Z-axis direction). Wait until the bottom of the main body 33 of the thruster is provided with an adsorption plate 3 that can adsorb and hold the carrier tape 5. The attachment plate 34 uses suction dry 35a ^ Push / ^ A tension chain is provided at the front section of the main body 33 (left side in FIG. 1). A main chain is provided at the rear section of the main body 33 (right side in FIG. I). As shown in FIG. 2 and FIG. The main body of the thruster is 33 months, and the side is pushed into the workbench 4 again, so that it is placed on the base 38, and the top workbench 48 of the turntable of the propeller workbench 4 is fixed to the propeller rack 3 6 ° On the base 4 of the propeller table 4, a servo motor 41 a for rotating the ball screw cup 4 2 a having an axis in the X-axis direction and a servo motor for rotating a ball screw 42 b having a shaft in the γ-axis direction are provided. 4ib and servo motor 41c for turning ball screw 42c having a shaft in the Y-axis direction, servo motor 4ib and servo motor 41C They are located at both ends of the base 40. 2192-6119-PF (N2); Ahddub.ptd Page 19 200422631 y V. Description of the invention (15) The ball screw 42a is screwed and received the LM guide 43a in the X-axis direction The sliding block 44a guided by 43a and slidable in the X-axis direction. The sliding plate 46a is slidable in the Y-axis direction through the LM guide 45a in the Y-axis direction at the sliding block 44a. The movable plate 4 6 a The upper side is fixed with a rotating member 47a having a rolling ring inside, and the rotating member 47a is mounted on the top table 48 so as to rotate freely.

The ball screw 42b is screwed with a slide block 44b which is guided by the LM guides 43b and 43b in the Y-axis direction and slides in the Y-axis direction. A slide plate 46b is mounted on the slide block 44b so as to be slidable in the X-axis direction via an LM guide 45b in the X-axis direction. A rotating member 47b having a rolling ring inside is fixed on the upper side of the sliding plate 46b, and the rotating member 47b is mounted on the top table 48 so as to freely rotate. The ball screw 42c is screwed with a slide block 4 4 c which is guided by the LM guides 43c and 43c in the Y-axis direction and slides in the Y-axis direction. A slide plate 46c is mounted on the slider 4 4c via the LM guide 45c in the X-axis direction so as to be slidable in the X-axis direction. A rotating member 47c having a rolling ring inside is fixed on the upper side of the sliding plate 46c, and the rotating member 47c is mounted on the top table 48 so as to freely rotate.

In the thruster table 4 having such a structure, the servo motor 4 1 a 'is driven by sliding the sliding block 4 4 a, the sliding plate 4 6 b, and the sliding plate 4 6 c in the X-axis direction to make the top table 4 8 Move in the X axis direction. The servo motor 41b and the servo motor 41c are driven, and the top table 48 can be moved in the Y-axis direction by sliding the slider 44b, the slider 44c, and the slide plate 46a in the same direction as the Y-axis. In addition, the temple clothing motor 4 1 a is driven to slide the sliding block 4 4 a in the X-axis direction, and the servo motor 41 b and the servo motor 4 1 c are driven to slide the sliding block 44 b and the sliding block 44 c in the opposite direction of the Y axis. Then, by rotating each of the rotating members 47a, 45b, 45c, the top table 48 can be suspended around it.

2192-6119-PF (N2); Ahddub.ptd Page 20 200422631 V. Description of the invention (16) Straight axis rotation. If it moves and hangs in the direction of the axis according to this propulsion axis, the propeller unit 3 can be rotated on the X axis-γ table 4 in its structure. Then, the rotation of the propeller vertical axis in this embodiment Because of the movement / ordering of the x-axis and the γ-axis direction, the position deviation can be compensated in a short period of time = enter 15 early and 3 is relatively light '. As shown in Figure 1, a load is set on the injured girl and the upper part. Probes of the probe card 8 ;: 3 sets of sides ... head 10 Αχ I, ^ .LM ί ^ Γ # ^ 1 ^ ΙΜ ^ # 713 # ^, each of the 4 1 ^ guides 713 is set to use each LMV piece 713 is guided into a rectangular base π slidable in the X-axis direction. On the -side portion of the X base 72, a screwing portion 7 21 which is screwed with the ball screw 712 is formed on the X base 72. A ball screw ⑺ having a shaft in the γ-axis direction is provided with a servo motor 722 and two X-axises for rotation. Direction guide 724. A rectangular Y base 73 guided by each of the LM guides 724 to be movable in the γ-axis direction is provided on the LM guide 724. One of the side-shaped rods 723 of the γ base 73 is screwed together. Screwing section 731. $ The Y base 73 is provided with a servo motor 73 2 that rotates a ball screw 733 having a shaft in the Y-axis direction, and a connection product 734 that supports the snap ring 735 to rotate freely. The snap ring 73 5 One part is formed into a fitting part 73 6 which is screwed with the ball screw 733. The probe card 8 including a plurality of probes 81 is detachably mounted on the snap ring 735 by using four pins 82.

1 2192-6119-PF (N2); Ahddub.ptd Page 21 200422631 V. Description of the invention (17) -Pl / H 'Although not shown in Figs. 4 and 5, each probe 81 of the probe card 8 passes through: = The Erhe tester body is electrically connected, and the second camera 6b is located inside the probe card table 7 on the lower side of the pin card 8. By driving the servo motor 711 on the probe card table 7 having such a structure, the X base 72 and the probe card 8 can be moved in the direction of the y-axis, and the servo horse 722 can be driven to make the γ base 73 and further The probe card 8 is on the ¥ axis: 'By driving the servo motor 732', the ball screw 733 is rotated: = the joint 73 6 moves, and the snap ring 73 5 and the probe card 8 can be rotated about their vertical rotation axis. Here, the position is deviated and the size becomes large. With the same structure as the propeller, the motor 7 11 of the tester body embodiment has the characteristics of the forward movement and the actual movement of the thruster. The thruster unit 3 can be structurally compensated in a short time but includes in the plane direction. For multiple components, the plane of the needle card table 7 is limited due to the space in the plane direction, and it is difficult to adopt the same structure of the unit 3. If it is used for the thruster unit 3,

When the servo motors 71 1, 7, 22, and 73 2 are miniaturized, the driving forces of S ′ 72 2, 732 are weakened, and the probe card 8 including a plurality of and connected wires cannot be reliably moved. That is, in the structure of the present pin card table 7, the X-axis to γ-axis rotations about the vertical axis must be performed separately. Although it is time-consuming, it can be detected in a narrow space. τ 卞 8 can Next, the method and operation of using TCP processing Pei Zhi 2 will be described. f When TCP processing device 2 is used, 'command Tcp processing equipment operation type' needs to be initialized in advance. That is, when the Tcp ^ interval type is changed, as the probe card 8 is changed, it is necessary to determine and register the propeller.

200422631 V. Description of the invention (18) The reference positions of workbench 4 and probe card workbench 7 (this position is referred to as the "registered position"), so that the external terminals of TCP (hereinafter referred to as "test base ”) Make contact with the probe 81 of the probe card 8. For example, a manual operation is used to select multiple (for example, three) probes 81 and corresponding test bases to determine the approximate position. Then, the second camera 6b and the image processing device are used to make the thruster work by automatic control. The stage 4 and / or the probe card table 7 are moved so that the respective probes 81 & the center of each test base can determine the reference position and register. In addition, according to the need, the approximate position can be determined by automatic control instead of manual operation. At this time, the predetermined targets within the field of view of the second camera 6b are registered together. The position coordinates are registered in a plurality of places, and it is particularly preferable to register more than three places in a camera image. Therefore, the position deviation can be obtained with high accuracy. On a predetermined object, for example, an alignment mark of J band 5, two or more on the diagonal of Tcp, a wire of Guangsizheng, two or more probes 81 corresponding thereto; side reference to FIG. 6 The flowchart describes the main operation of the TCP processing device 2 when the TCp is processed. When the main operation of the TCP processing device 2 of the clothing set 2 is started, the push card table 7 is moved to the registration position (step so). Wide; probe 21 and winding reel 2 2 rotate the predetermined bar. 8: Rewind, reeling out the roll. The first TCP is moved to the adsorption plate 34 and 7 to move the bearing belt 5. Then S02). < Until the previous position on the lower side (step

200422631 V. Description of the invention (19) After moving the TCP to the lower side of the suction plate 34, the servo motor 31 of the thruster unit 3 is driven, and the suction plate 34 is moved downward in the Z axis via the thruster body portion 33. After the suction plate 34 holds the carrier tape 5, it is lowered to the photographing position (step S03). In addition, by rotating the tension sprocket 35a in the opposite direction to the running direction of the carrier tape 5, a predetermined tension is applied to the carrier tape 5 to improve the positional accuracy of the carrier tape 5. After the second camera 6b takes a picture in this state (step S04), it transmits image data to the image processing device. The image processing device obtains the position deviation information (the direction of the position deviation (X · γ · 0) and the position deviation amount) of the position coordinates of the predetermined object registered in advance and the position coordinates of the actual photographed object from the received image data. For example, if registration marks, position coordinates of the tip of two or more test bases and two or more probes 8 1 corresponding thereto are registered, those registered position coordinates, the actually registered alignment marks, Position deviation information of the position coordinates of the tip of two or more test bases and corresponding two or more probes 8 丨. The image processing device calculates the position deviation amount of the X-car from the direction, the Y-axis direction, and the vertical axis according to the obtained and obtained position deviation information (step S 05). In addition, in the case where plural TCPs are tested at the same time, an average value of the positional deviation amounts for each Tcp is obtained. As a result of the calculation, when it is judged that it is not necessary to compensate for the position deviation (step S 0 6 —N 0), skip to step s 1 〇 described later. As a result of the calculation, when it is judged that it is necessary to compensate the position deviation (SO6 —Yes), it is determined whether the position deviation amount is equal to or greater than a predetermined value τ (step S 0 7). Position deviation in this case ", only the position around the vertical axis

2192-6119-PF (N2); Ahddub.ptd Page 24 200422631 V. Description of the invention (20) '" " Instrument --- The amount of deviation i can also be used as the position deviation around the vertical axis and Y The position deviation amount in the axial direction may be the object, and the position deviation amount around the vertical axis, the position deviation amount in the Y t direction, and the position deviation amount in the X axis direction may be the objects. When there are many kinds of elements of the position deviation amount, it may be determined by combining those elements appropriately. -In the case where the position deviation is greater than the predetermined value T (step SO7 ~

Yes) ′ Drive the servo motors m, 722, and 7 32 of the probe card table 7 so that the X base 72, Y base 73, or the snap ring 735 is moved, and by setting the probe card 8 on the X axis

A Y-axis direction movement and / or rotation around a vertical axis compensates for position deviation S08). And 'in the case where the position deviation amount is less than the predetermined value T (step $ 〇7—No)', the servo motor 4 J &, 4 丨 b, 4 丨 c of the propeller table 4 is driven to make the top table 48, Further, the pusher unit 3 is operated, and the positional deviation is compensated by moving the carrier tape 5 adsorbed by the adsorption plate 34 in the X-axis and γ-axis directions and / or rotating about the vertical axis (step S09).

When the positional deviation is large, when the propeller table 4 is used to move the carrying belt 5, the stress is applied to the support by the entrance side guide wheel 25c, tension sprocket 35a, main sprocket 351) and exit side guide wheel 25d. The carrying tape $ may damage the TCP on the carrying tape 5, especially the hole portion or the peripheral portion where the claws of the tension sprocket 35 & and the main sprocket 35b enter. Such a problem is particularly likely to occur when the carrying reel 5 is rotated about the vertical axis, and may also occur when the carrying reel 5 is moved in the ¥ axis direction. In this embodiment, in the case where the position deviation amount is large (in the case of τ or more), the probe card table 7 is used to move the probe card 8 to compensate the position deviation.

200422631

Poor 'without the above problems. The T value varies depending on the size of Tcp (especially the size in the x-axis direction or the size of the test base), but as shown above, the hole 1 A can be set appropriately after the risk of damage to the tape 5 is damaged. — Generally, the T value of the positional deviation around the vertical axis is within 0.1 (degrees). — In the case where the position deviation is small (less than T), Mengji. Mind use = short time required for offset compensation. The propeller table 4 allows the moving load roll f 5 'to shorten the indexing time (from the test end to the test point, or after compensating the position deviation according to step S08 or step S09, Drive thruster

The servo motor 31 of the single 7 moves the suction plate 34 in the downward direction of the Z axis via the thruster main body 33. After the suction plate 34 holding the carrier tape 5 is lowered to the contact position ', the TCP is pressed against the probe 81 of the probe card 8 (step S10). After a tcp test base contacts the probe 81, the test signal is transmitted from the tester body, and the test head 10 acts on the TCP. The response signal read from the TCP is transmitted to the tester body via the test head 10. Therefore, test the performance or function of TCp, etc. 'according to the test results to drive the mark punch 26a or the defective punch 26b. The TCP processing device 2 judges whether the tested TCP is the last component (step si 1) ′ When it is judged that it is the last component (step sn — Yes), the main action is ended. If it is judged that it is not the last component (step S jj —No), the servo motor 31 of the thruster unit 3 is driven, and the suction plate 34 is moved in the direction of the Z axis via the thruster body portion 3 3, and is further advanced. The robot table 4 and the probe card table 7 are moved to the registration position (step s 1 2). Then, the adsorption plate 3 4 stops adsorbing the carrier tape 5, releases the carrier tape 5 and moves in the z-axis direction again.

2192-6119-PF (N2); Ahddub.ptd Page 26 200422631 V. Description of the invention (22) Move (step S13). Then, it returns to step S02. If the TCP processing device 2 according to this embodiment uses the propeller table 4 and / or the probe card table 7, in the actual operation of the TCP processing device 2, because the carrying tape 5 and / or the probe card 8 not only In the X axis-γ axis direction, and moving around the vertical axis, position deviation can be compensated, and the position alignment of Tcp and probe 8 ′ can be performed to reduce the occurrence of poor contact. In addition, by using the advancer workbench 4 and the probe card workbench 7 separately, the indexing time can be shortened as much as possible without damaging the TCP or the carrier tape.

The embodiments described above are described for easy understanding of the present invention and are not intended to limit the present invention. Therefore, the gist of each element disclosed in this embodiment also includes all changes or equivalents to which the technical scope of the present invention belongs. < Example = Propeller table 4 and probe card table? The structure is not particularly limited. The two structures are also interchangeable. Both use the same structure and set 2 and omit the probe card table 7. It is also possible to set the deviation. In this case, the carrier tape 5 is also rotated around the vertical vehicle, and compared with that, the TCP and probe can be correctly performed.

In the above-mentioned TCP processing device, only the thruster table 4 is used to compensate the position. Because the thruster table 4 can be used to align the position of the two-axis control phase 81 bearing the X-axis and Y-axis directions. In addition, in the above-mentioned TCP processing device 2, it is possible to omit the detection 4 'and only use the needle card table 7 to compensate the position deviation. Department :: Workbench Because the needle card guard workbench 7 is used to rotate in the TCP processing device 2, ^ ′ is also moved to the direction of the γ-axis and rotated about the vertical axis to turn two

200422631

Poor contact with the probe 81 occurred. In addition, in this TCP processing Dongshi strike 9々 ... μ The vertical axis rotation mechanism is changed to use a needle: the table 7 'will only be automatically controlled around it, and the X-axis-Z axis two: = =; = J 理 装置The hand of the image taken by the camera 6b is also called ",", and the first thruster unit 3 is omitted while looking straight. In this case, the moving mechanism is subject to automatic axis control. Industrially, The applicability is shown in the above description. If the TCp processing device or position deviation compensation method of the present invention is used, correct alignment of Tp and the position of the contact portion can reduce the occurrence of poor contact. That is, the TCp processing device and position deviation compensation method of the present invention are useful for testing TCP accurately, reliably, and efficiently.

2192-6119-PF (N2); Ahddub.ptd Page 28 200422631 Brief Description of Drawings Figure 1 is a front view of a TCP test device using a TCP processing device according to an embodiment of the present invention. Fig. 2 is a diagram of a thruster unit of the TCP processing device in this embodiment. Fig. 3 is a diagram of a thruster unit of the TCp processing device in this embodiment. Ten Sides FIG. 4 is a top view of a probe card working table of the TCp processing apparatus in this embodiment. Figure 5 is a substitute for this embodiment? View of the probe card workbench of the processing unit. Fig. 6 is a flowchart illustrating the main operation of the TCP processing device of this embodiment. [Symbol description] 1 ~ TCP test device; 3 ~ thruster unit; 6a ~ first camera; 6c ~ third camera; 8 ~ probe card; 2 1 ~ roll out reel; 23a, 23b, 23c ~ interval 2 5a ~ Roll-out limit roller 25c ~ Inlet side guide wheel; 25e ~ Exit side sprocket; 2 ~ TCP processing device; 5 ~ Carrier tape; 6b ~ Second camera; 7 ~ Probe card workbench; 1 0 ~ test head; 22 ~ winding reel; wheels, 24a, 24b ~ tape guide 2 5b ~ inlet side auxiliary key wheel · 2 5d ~ outlet side guide wheel; 2 5f ~ roll out limit roller ;

2192-6119-PF (N2); Ahddub.ptd

200422631 Brief description of drawings 2 6 a ~ Mark punching machine: 3 1 ~ Servo motor; 3 3 ~ Propulsor body 35a ~ Tension sprocket; 3 6 ~ Propeller frame; 5 1 ~ Protection tape; 8 1 ~ probe; 26b ~ defective punching machine; 3 2 ~ ball screw; 3 4 ~ suction plate; 3 5b ~ main key wheel, 37 ~ LM guide; 6 1 ~ camera table; 3 6 1 ~ support frame. t

2192-6119-PF (N2); Ahddub.ptd Page 30

Claims (1)

200422631 ι: A tcp processing device, carrying a carrier tape on the tape, pressing the carrier tape to the test section, and by connecting the TGP terminal and the material contact part, the upper m contact is sequentially delivered for testing. The plurality of TCPs are characterized in that: the bearing being pressed on the contact portion can include a reel vertical axis rotating device, and the reel can rotate around its vertical axis. 2. The TCP processing device according to item 1 of the patent application scope, wherein the TCP processing device further comprises a tape reel moving device, which can move the bearing reel pressed on the contact portion in a planar direction. / 3. If the TCP processing device of item 2 of the patent application scope, wherein the tape vertical axis rotation device and / or the tape plane moving device and the pressing device that presses the bearing tape on the contact portion make the bearing The tape is rotated around a vertical axis and / or moved in a planar direction. 4. The TCP processing device according to item 2 of the patent application scope, wherein the TCP processing device further includes a position deviation poor information acquisition device, which can obtain the position deviation information of rpcp and the contact part; According to the position deviation information obtained by the position deviation information obtaining device, the reel vertical axis rotation device and / or the reel plane moving device are driven to automatically compensate the position deviation. 5. For example, the TCP processing device in the scope of the patent application, wherein the vertical axis rotation device of the reel can rotate the adsorbed and held load reel around its vertical axis under the suction and holding load reel. 6. —A kind of TCP processing device, which forms a plurality of TCP on the tape. 2192-6119-PF (N2); Ahddub.ptd Page 31 200422631 VI. Patent application scope Carrier tape, press the carrier tape to the electrical connection with the test head, by making the TCP external terminal and the contact It can be delivered in sequence for testing. It is characterized by including: position deviation information acquisition device, which can be used to obtain deviation information; A τ obtains TCP and the vertical axis rotation device of the contact portion. Xi Guzag g 4 ”7 The contact part rotates around its vertical axis, and in the interim operation, it is biased according to the position of A Fan Hold-Under Run: Red bucket obtained from Chabei 5 Li Fu Fu Zhi Zhi Position: Deviation-Bei, which drives the vertical axis rotation device of the far contact part, makes the contact part rotate around its vertical axis, and automatically compensates for the position deviation. 7. If the CP processing device of item 6 of the patent application scope, the CP processing device also includes a planar shift of the contact portion γ /, " moving toward its plane direction; + surface shift ... can make the contact portion ^ in actual operation, According to the position deviation information of the position deviation information, the vertical axis of the contact part is driven to rotate = the second flat movement device of the contact part, so that the contact A 乂 5 6 ^ rotates around its vertical axis and / or toward the thousand planes Move and automatically compensate the position deviation. 8. A kind of TCP processing device is transported to the suspected carrier tape, and the carrier tape is pressed into a part of a plurality of TCPs. The external terminals of the TCP are delivered and tested in order and contacted. The P connection can be plural TCP, which is characterized by including: a position deviation information acquisition device, which can take the position of the TCP and the contact part; 2192-6119-PF (N2); Ahddub.ptd Page 32 6. Information on deviations in the scope of patent application; belt movement 2f, which can cause the dust to be carried in the contact portion; the vertical axis rotation device of the contact portion can cause the contact portion to rotate around its vertical sleeve. If the position stubble times are larger than the predetermined value, if the position deviation amount obtained by the information acquisition device is a straight-axis rotation device, and if two = two or more values, the vertical difference of the contact portion is driven to the predetermined value to make the contact portion around it. The vertical axis rotates, and the vertical axis rotates the device in the position deviation zone. 2: If the predetermined value is not reached, the volume is driven to compensate the position deviation. 7 Μ bearing tape revolves around the vertical axis, and automatically adds: such as the Tcp processing device of the eighth patent scope of the patent, which also wraps the plane of the tape to move the equipment, move it toward the plane 7 and can make The plane of the contact portion of the carrier tape that is pressed by the contact portion is moved dreamily; The contact portion can be moved toward its plane direction. By the situation where the deviation information at the position is greater than the predetermined value or the predetermined value is :: situation, : The position is offset by a straight axis rotating device and / or the contact surface is moved monthly: the contact portion is vertically rotated around the vertical axis and / or toward the plane side :: The situation where the set value is reached or the set value is not reached The vertical deviation ^ is a value h condition, the vertical 5 moving device of the reel and the plane moving device are driven, so that the dynamic load reel is rotated around the vertical axis and / or moved in the plane direction, and the position is automatically compensated. Partial 2192-6119-PF (N2); Ahddub.ptd 200422631 6. The scope of patent application is poor. 10 · —A position deviation compensation method for a TCP processing device, which is a method for compensating the position deviation of the TCP of the f device at the TCp and the contact portion, and carrying a plurality of TCP bearing tapes on the tape, and pressing the bearing tape In the contact part that is electrically connected to the test head, by connecting the external terminal of the TCP to the contact part, a plurality of TCPs can be sequentially delivered to the test, which is characterized by: The carrier tape is rotated around its vertical axis to compensate for the positional deviation between the TCP and the contact portion. 11. · A position deviation compensation method of a TCP processing device, which is at Tcp = TCP of the device and the position deviation compensation method of the contact part. It carries a plurality of TCP carrier tapes formed on 5 belts, and presses the carrier tapes at The contact part that is electrically connected to the measuring head is connected to the external terminal of the TCp to connect the contact part, and a plurality of TCPs can be sequentially delivered for testing. It is characterized by: The belt is rotated about its vertical axis and / or moved in its plane direction to compensate for the positional deviation between TCp and the contact portion. 1 2 · — A position deviation compensation method of a TCP processing device, which is based on the Tcp of the TCp processing device and the position deviation compensation method of the contact portion. A plurality of TCP bearing tapes are formed on 5 belts, and the bearing tapes are pressed. By connecting the external terminal of Tcp to the contact part which is electrically connected to the test 5 head, the plural TCPs can be sequentially delivered to the test. Μ is characterized by: obtaining position deviation information of TCP and the contact part Then, by following 200422631 VI. Scope of patent application The position deviation information obtained makes the vertical axis pressed by the contact to compensate the position deviation. The load coil can be% " ^^ TCP of the TCP processing device and the position deviation compensation method of the contact part ΐ Ϊ i The bearing coil of fTCP is pressed to connect the bearing coil to the test head on the electric rolling By connecting the contact portions of Tcp, the contact portions of the TCP can be sequentially delivered to the test. Σ is characterized by: After obtaining the position deviation information of the TCP and the contact portion, by obtaining the position deviation information according to the obtained, The load-bearing tape pressed on the contact portion is caused to rotate and / or move in the direction of its vertical axis to compensate for the position deviation. 1 4. A position deviation compensation method of a TCP processing device is a method for compensating the position deviation of the TCP of the τ cp processing device and the contact portion, and carrying a plurality of TCP bearing tapes on the tape, and pressing the bearing tape In the contact part electrically connected to the test head, by connecting the external terminal of the TCp to the contact part, a plurality of TCPs can be sequentially delivered to the test, which is characterized in that the TCP and the contact are obtained during the actual operation of the TCP processing device. After the positional deviation information of the part, according to the obtained positional deviation information, the carrier tape pressed on the contact part is rotated about its vertical axis to compensate the positional deviation. 15. — A position deviation compensation method for a TCP processing device, which is based on the TCP of the TCp processing device and the position deviation compensation method of the contact part, which is carried in 2192-6119-PF (N2); Ahddub.ptd Page 35 200422631 VI. Patent Application Range A number of TCP bearing tapes are formed on a tape. The tape is pressed against the electrical connection with the test head. By connecting the external terminals of the TCP to the contact part, a plurality of TCPs can be sequentially delivered for testing, which is characterized in that, in actual operation of the TCP processing device, after obtaining position deviation information of the TCP and the contact part, The obtained position deviation information makes the carrier tape pressed on the contact portion rotate around its vertical axis and / or move toward its plane direction to compensate the position deviation. 1 6 · A position deviation compensation method for a TCP processing device, which is a method for compensating the position deviation between the TCP of the DCP processing device and the contact part, and carrying a plurality of TCP bearing tapes on the roll τ to carry the bearing tapes By pressing the contact part which is electrically connected to the test head, by connecting the external terminal of the TCP to the contact part, a plurality of TCPs can be sequentially delivered to the test, which is characterized by: e After obtaining the position deviation information of the TCP and the contact part By turning the contact around its vertical axis when the obtained position deviation is larger than the predetermined value or above the predetermined value, the obtained position deviation is less than the predetermined value or not. In the case of a full set value, the carrier tape pressed on the contact portion is rotated around its vertical axis to compensate for the position deviation. 17 · —A position deviation compensation method for a TCP processing device, which is a method for compensating the position deviation between the TCP of the Tcp processing device and the contact portion, and carrying a plurality of TCP bearing tapes on the tape, and pressing the bearing tape The contact part that is electrically connected to the measuring head is connected to an external terminal of the TC p to connect the contact part, so that a plurality of TCp can be sequentially delivered for testing. 200422631 VI. The scope of patent application is characterized by: After obtaining the position deviation information of TCP and the contact part, by making the obtained position deviation amount larger than the predetermined value or above the predetermined value, make the contact part around it The vertical axis rotates and / or moves in the direction of its plane, and when the obtained position deviation is below the predetermined value or is less than the predetermined value, the bearing tape at the contact portion is rotated around its vertical axis. And / or move in the direction of its plane to compensate for this position deviation. 2192-6119-PF (N2); Ahddub.ptd p. 37