TWI241457B - Photoimageable waveguide composition and waveguide formed therefrom - Google Patents

Photoimageable waveguide composition and waveguide formed therefrom Download PDF

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Publication number
TWI241457B
TWI241457B TW092133661A TW92133661A TWI241457B TW I241457 B TWI241457 B TW I241457B TW 092133661 A TW092133661 A TW 092133661A TW 92133661 A TW92133661 A TW 92133661A TW I241457 B TWI241457 B TW I241457B
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TW
Taiwan
Prior art keywords
composition
weight
substituted
group
layer
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TW092133661A
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English (en)
Chinese (zh)
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TW200424745A (en
Inventor
James G Shelnut
Matthew L Moynihan
Omari Patterson
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Shipley Co Llc
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Application filed by Shipley Co Llc filed Critical Shipley Co Llc
Publication of TW200424745A publication Critical patent/TW200424745A/zh
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Publication of TWI241457B publication Critical patent/TWI241457B/zh

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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04—Polysiloxanes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045—Light guides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/14—Polysiloxanes containing silicon bound to oxygen-containing groups
    • C08G77/16—Polysiloxanes containing silicon bound to oxygen-containing groups to hydroxyl groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/70—Siloxanes defined by use of the MDTQ nomenclature
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/80—Siloxanes having aromatic substituents, e.g. phenyl side groups
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12069—Organic material

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Silicon Polymers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
TW092133661A 2002-12-02 2003-12-01 Photoimageable waveguide composition and waveguide formed therefrom TWI241457B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/307,904 US6842577B2 (en) 2002-12-02 2002-12-02 Photoimageable waveguide composition and waveguide formed therefrom

Publications (2)

Publication Number Publication Date
TW200424745A TW200424745A (en) 2004-11-16
TWI241457B true TWI241457B (en) 2005-10-11

Family

ID=32312212

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092133661A TWI241457B (en) 2002-12-02 2003-12-01 Photoimageable waveguide composition and waveguide formed therefrom

Country Status (7)

Country Link
US (2) US6842577B2 (https=)
EP (1) EP1426793B1 (https=)
JP (1) JP2004184999A (https=)
KR (1) KR101064338B1 (https=)
CN (1) CN1523447A (https=)
DE (1) DE60326307D1 (https=)
TW (1) TWI241457B (https=)

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JP5459929B2 (ja) * 2005-11-14 2014-04-02 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． ケイ素含有ポリマーおよびそのポリマーから形成される光導波路
US20070202435A1 (en) * 2005-12-29 2007-08-30 Rohm And Haas Electronic Materials Llc Methods of forming optical waveguides
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JP5680848B2 (ja) * 2009-12-28 2015-03-04 東レ・ダウコーニング株式会社 フェニル基含有オルガノポリシロキサン組成物、それからなる化粧料原料および光沢化粧料
CN102262266A (zh) * 2010-05-27 2011-11-30 欣兴电子股份有限公司 光电基板的制作方法
US9045668B2 (en) * 2010-09-22 2015-06-02 Dow Corning Corporation Organosiloxane block copolymer
JP2013540169A (ja) * 2010-09-22 2013-10-31 ダウ コーニング コーポレーション 樹脂−直鎖状オルガノシロキサンブロックコポリマーの調製方法
WO2012040457A1 (en) * 2010-09-22 2012-03-29 Dow Corning Corporation High refractive index compositions containing resin-linear organosiloxane block copolymers
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JP5946657B2 (ja) * 2011-03-08 2016-07-06 株式会社ダイセル フォトレジスト製造用溶剤または溶剤組成物、及びフォトレジスト製造用組成物
EP2785767A1 (en) * 2011-12-02 2014-10-08 Dow Corning Corporation Curable compositions of resin-linear organosiloxane block copolymers
JP6001676B2 (ja) * 2011-12-30 2016-10-05 ダウ コーニング コーポレーションＤｏｗ Ｃｏｒｎｉｎｇ Ｃｏｒｐｏｒａｔｉｏｎ 固体ライト及び形成方法
WO2013130574A1 (en) * 2012-02-29 2013-09-06 Dow Corning Corporation Compositions of resin-linear organosiloxane block copolymers
JP2015513362A (ja) * 2012-03-12 2015-05-11 ダウ コーニング コーポレーションＤｏｗ Ｃｏｒｎｉｎｇ Ｃｏｒｐｏｒａｔｉｏｎ 樹脂−直鎖状オルガノシロキサンブロックコポリマーの組成物
KR102063029B1 (ko) * 2012-03-20 2020-02-11 다우 실리콘즈 코포레이션 광 가이드 및 관련된 광 어셈블리
WO2013142140A1 (en) * 2012-03-21 2013-09-26 Dow Corning Corporation Process for preparing resin- linear organosiloxane block copolymers
EP2828319B1 (en) * 2012-03-21 2018-09-12 Dow Silicones Corporation Compositions comprising resin-linear organosiloxane block copolymers and organopolysiloxanes
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KR102086317B1 (ko) * 2012-03-21 2020-03-09 다우 실리콘즈 코포레이션 수지-선형 오가노실록산 블록 공중합체의 조성물
CN104321366B (zh) * 2012-03-21 2017-08-25 道康宁公司 树脂‑线性有机硅氧烷嵌段共聚物的组合物
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Also Published As

Publication number Publication date
TW200424745A (en) 2004-11-16
JP2004184999A (ja) 2004-07-02
EP1426793A1 (en) 2004-06-09
DE60326307D1 (de) 2009-04-09
EP1426793B1 (en) 2009-02-25
KR20040048313A (ko) 2004-06-07
KR101064338B1 (ko) 2011-09-14
CN1523447A (zh) 2004-08-25
US20040105652A1 (en) 2004-06-03
US20050180712A1 (en) 2005-08-18
US6842577B2 (en) 2005-01-11

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