DE60326307D1 - Photodefinierbare Zusammensetzung aus einem Silsesquioxanpolymer und optischer Lichtwellenleiter, welcher daraus geformt wird - Google Patents

Photodefinierbare Zusammensetzung aus einem Silsesquioxanpolymer und optischer Lichtwellenleiter, welcher daraus geformt wird

Info

Publication number
DE60326307D1
DE60326307D1 DE60326307T DE60326307T DE60326307D1 DE 60326307 D1 DE60326307 D1 DE 60326307D1 DE 60326307 T DE60326307 T DE 60326307T DE 60326307 T DE60326307 T DE 60326307T DE 60326307 D1 DE60326307 D1 DE 60326307D1
Authority
DE
Germany
Prior art keywords
optical waveguide
formed therefrom
waveguide formed
silsesquioxane polymer
photodefinable composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60326307T
Other languages
English (en)
Inventor
James G Shelnut
Matthew L Moynihan
Omari Patterson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Application granted granted Critical
Publication of DE60326307D1 publication Critical patent/DE60326307D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/04Polysiloxanes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045Light guides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001Phase modulating patterns, e.g. refractive index patterns
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/14Polysiloxanes containing silicon bound to oxygen-containing groups
    • C08G77/16Polysiloxanes containing silicon bound to oxygen-containing groups to hydroxyl groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/70Siloxanes defined by use of the MDTQ nomenclature
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/80Siloxanes having aromatic substituents, e.g. phenyl side groups
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035Materials
    • G02B2006/12069Organic material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Silicon Polymers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE60326307T 2002-12-02 2003-12-01 Photodefinierbare Zusammensetzung aus einem Silsesquioxanpolymer und optischer Lichtwellenleiter, welcher daraus geformt wird Expired - Lifetime DE60326307D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/307,904 US6842577B2 (en) 2002-12-02 2002-12-02 Photoimageable waveguide composition and waveguide formed therefrom

Publications (1)

Publication Number Publication Date
DE60326307D1 true DE60326307D1 (de) 2009-04-09

Family

ID=32312212

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60326307T Expired - Lifetime DE60326307D1 (de) 2002-12-02 2003-12-01 Photodefinierbare Zusammensetzung aus einem Silsesquioxanpolymer und optischer Lichtwellenleiter, welcher daraus geformt wird

Country Status (7)

Country Link
US (2) US6842577B2 (de)
EP (1) EP1426793B1 (de)
JP (1) JP2004184999A (de)
KR (1) KR101064338B1 (de)
CN (1) CN1523447A (de)
DE (1) DE60326307D1 (de)
TW (1) TWI241457B (de)

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Also Published As

Publication number Publication date
KR101064338B1 (ko) 2011-09-14
JP2004184999A (ja) 2004-07-02
EP1426793B1 (de) 2009-02-25
CN1523447A (zh) 2004-08-25
TWI241457B (en) 2005-10-11
KR20040048313A (ko) 2004-06-07
US20050180712A1 (en) 2005-08-18
EP1426793A1 (de) 2004-06-09
US20040105652A1 (en) 2004-06-03
TW200424745A (en) 2004-11-16
US6842577B2 (en) 2005-01-11

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