TWI234659B - Acceleration sensor - Google Patents

Acceleration sensor Download PDF

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Publication number
TWI234659B
TWI234659B TW093110193A TW93110193A TWI234659B TW I234659 B TWI234659 B TW I234659B TW 093110193 A TW093110193 A TW 093110193A TW 93110193 A TW93110193 A TW 93110193A TW I234659 B TWI234659 B TW I234659B
Authority
TW
Taiwan
Prior art keywords
acceleration sensor
frame
sensor element
groove
layer
Prior art date
Application number
TW093110193A
Other languages
English (en)
Chinese (zh)
Other versions
TW200510727A (en
Inventor
Yasuo Yamaguchi
Kunihiro Nakamura
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200510727A publication Critical patent/TW200510727A/zh
Application granted granted Critical
Publication of TWI234659B publication Critical patent/TWI234659B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0045—Packages or encapsulation for reducing stress inside of the package structure
    • B81B7/0051—Packages or encapsulation for reducing stress inside of the package structure between the package lid and the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/026—Housings for speed measuring devices, e.g. pulse generator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0109—Bonding an individual cap on the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Pressure Sensors (AREA)
TW093110193A 2003-09-03 2004-04-13 Acceleration sensor TWI234659B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003311066A JP2005077349A (ja) 2003-09-03 2003-09-03 加速度センサ

Publications (2)

Publication Number Publication Date
TW200510727A TW200510727A (en) 2005-03-16
TWI234659B true TWI234659B (en) 2005-06-21

Family

ID=34214245

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093110193A TWI234659B (en) 2003-09-03 2004-04-13 Acceleration sensor

Country Status (6)

Country Link
US (1) US6988407B2 (enExample)
JP (1) JP2005077349A (enExample)
KR (1) KR100555617B1 (enExample)
CN (1) CN100380129C (enExample)
DE (1) DE102004028927B4 (enExample)
TW (1) TWI234659B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006125887A (ja) * 2004-10-26 2006-05-18 Fujitsu Media Device Kk 加速度センサ
US7406870B2 (en) * 2005-01-06 2008-08-05 Ricoh Company, Ltd. Semiconductor sensor
JP4839747B2 (ja) * 2005-09-20 2011-12-21 三菱電機株式会社 静電容量型加速度センサ
JP4486103B2 (ja) * 2007-03-19 2010-06-23 Ｏｋｉセミコンダクタ株式会社 加速度センサ、及び加速度センサの製造方法
JP4922856B2 (ja) * 2007-07-23 2012-04-25 セイコーインスツル株式会社 気密パッケージ、角速度センサ及び気密パッケージの製造方法
JP5446107B2 (ja) * 2008-03-17 2014-03-19 三菱電機株式会社 素子ウェハおよび素子ウェハの製造方法
JP5083247B2 (ja) * 2008-11-13 2012-11-28 株式会社デンソー 半導体装置およびその製造方法
JP5547054B2 (ja) * 2010-12-16 2014-07-09 日本航空電子工業株式会社 静電容量型加速度センサ
WO2012133087A1 (ja) * 2011-03-30 2012-10-04 株式会社村田製作所 固体酸化物形燃料電池用接合材、固体酸化物形燃料電池及び固体酸化物形燃料電池モジュール
CN103063876B (zh) * 2013-01-05 2014-08-20 中国科学院上海微系统与信息技术研究所 变面积型电容式横向加速度传感器及制备方法
US10131540B2 (en) * 2015-03-12 2018-11-20 Taiwan Semiconductor Manufacturing Co., Ltd. Structure and method to mitigate soldering offset for wafer-level chip scale package (WLCSP) applications
WO2018003353A1 (ja) * 2016-07-01 2018-01-04 株式会社デンソー 半導体装置
JP6729423B2 (ja) 2017-01-27 2020-07-22 三菱電機株式会社 半導体装置、半導体装置の製造方法
JP6922788B2 (ja) * 2018-03-05 2021-08-18 三菱電機株式会社 半導体圧力センサ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI81915C (fi) * 1987-11-09 1990-12-10 Vaisala Oy Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
JP2000022169A (ja) * 1998-06-29 2000-01-21 Matsushita Electric Works Ltd 半導体加速度センサ及びその製造方法
JP2000187040A (ja) 1998-12-22 2000-07-04 Matsushita Electric Works Ltd 加速度センサおよびその製造方法
JP2001337103A (ja) 2000-05-26 2001-12-07 Matsushita Electric Works Ltd 半導体加速度センサ
JP4386559B2 (ja) * 2000-10-20 2009-12-16 三菱電機株式会社 加速度センサ及びその製造方法
JP4156946B2 (ja) * 2003-02-26 2008-09-24 三菱電機株式会社 加速度センサ

Also Published As

Publication number Publication date
DE102004028927B4 (de) 2008-07-24
KR100555617B1 (ko) 2006-03-03
US20050044953A1 (en) 2005-03-03
JP2005077349A (ja) 2005-03-24
KR20050025224A (ko) 2005-03-14
DE102004028927A1 (de) 2005-04-07
US6988407B2 (en) 2006-01-24
CN100380129C (zh) 2008-04-09
CN1591023A (zh) 2005-03-09
TW200510727A (en) 2005-03-16

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MM4A Annulment or lapse of patent due to non-payment of fees