DE102004028927B4 - Beschleunigungssensor - Google Patents

Beschleunigungssensor Download PDF

Info

Publication number
DE102004028927B4
DE102004028927B4 DE102004028927A DE102004028927A DE102004028927B4 DE 102004028927 B4 DE102004028927 B4 DE 102004028927B4 DE 102004028927 A DE102004028927 A DE 102004028927A DE 102004028927 A DE102004028927 A DE 102004028927A DE 102004028927 B4 DE102004028927 B4 DE 102004028927B4
Authority
DE
Germany
Prior art keywords
acceleration sensor
area
frame
sensor element
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102004028927A
Other languages
German (de)
English (en)
Other versions
DE102004028927A1 (de
Inventor
Yasuo Yamaguchi
Kunihiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE102004028927A1 publication Critical patent/DE102004028927A1/de
Application granted granted Critical
Publication of DE102004028927B4 publication Critical patent/DE102004028927B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0045—Packages or encapsulation for reducing stress inside of the package structure
    • B81B7/0051—Packages or encapsulation for reducing stress inside of the package structure between the package lid and the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/026—Housings for speed measuring devices, e.g. pulse generator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0109—Bonding an individual cap on the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Pressure Sensors (AREA)
DE102004028927A 2003-09-03 2004-06-15 Beschleunigungssensor Expired - Fee Related DE102004028927B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003311066A JP2005077349A (ja) 2003-09-03 2003-09-03 加速度センサ
JP2003/311066 2003-09-03

Publications (2)

Publication Number Publication Date
DE102004028927A1 DE102004028927A1 (de) 2005-04-07
DE102004028927B4 true DE102004028927B4 (de) 2008-07-24

Family

ID=34214245

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102004028927A Expired - Fee Related DE102004028927B4 (de) 2003-09-03 2004-06-15 Beschleunigungssensor

Country Status (6)

Country Link
US (1) US6988407B2 (enExample)
JP (1) JP2005077349A (enExample)
KR (1) KR100555617B1 (enExample)
CN (1) CN100380129C (enExample)
DE (1) DE102004028927B4 (enExample)
TW (1) TWI234659B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006125887A (ja) * 2004-10-26 2006-05-18 Fujitsu Media Device Kk 加速度センサ
US7406870B2 (en) * 2005-01-06 2008-08-05 Ricoh Company, Ltd. Semiconductor sensor
JP4839747B2 (ja) * 2005-09-20 2011-12-21 三菱電機株式会社 静電容量型加速度センサ
JP4486103B2 (ja) * 2007-03-19 2010-06-23 Ｏｋｉセミコンダクタ株式会社 加速度センサ、及び加速度センサの製造方法
JP4922856B2 (ja) * 2007-07-23 2012-04-25 セイコーインスツル株式会社 気密パッケージ、角速度センサ及び気密パッケージの製造方法
JP5446107B2 (ja) * 2008-03-17 2014-03-19 三菱電機株式会社 素子ウェハおよび素子ウェハの製造方法
JP5083247B2 (ja) * 2008-11-13 2012-11-28 株式会社デンソー 半導体装置およびその製造方法
JP5547054B2 (ja) * 2010-12-16 2014-07-09 日本航空電子工業株式会社 静電容量型加速度センサ
WO2012133087A1 (ja) * 2011-03-30 2012-10-04 株式会社村田製作所 固体酸化物形燃料電池用接合材、固体酸化物形燃料電池及び固体酸化物形燃料電池モジュール
CN103063876B (zh) * 2013-01-05 2014-08-20 中国科学院上海微系统与信息技术研究所 变面积型电容式横向加速度传感器及制备方法
US10131540B2 (en) * 2015-03-12 2018-11-20 Taiwan Semiconductor Manufacturing Co., Ltd. Structure and method to mitigate soldering offset for wafer-level chip scale package (WLCSP) applications
WO2018003353A1 (ja) * 2016-07-01 2018-01-04 株式会社デンソー 半導体装置
JP6729423B2 (ja) 2017-01-27 2020-07-22 三菱電機株式会社 半導体装置、半導体装置の製造方法
JP6922788B2 (ja) * 2018-03-05 2021-08-18 三菱電機株式会社 半導体圧力センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
US6441450B1 (en) * 2000-10-20 2002-08-27 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor and method of manufacturing the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI81915C (fi) * 1987-11-09 1990-12-10 Vaisala Oy Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
JP2000022169A (ja) * 1998-06-29 2000-01-21 Matsushita Electric Works Ltd 半導体加速度センサ及びその製造方法
JP2000187040A (ja) 1998-12-22 2000-07-04 Matsushita Electric Works Ltd 加速度センサおよびその製造方法
JP2001337103A (ja) 2000-05-26 2001-12-07 Matsushita Electric Works Ltd 半導体加速度センサ
JP4156946B2 (ja) * 2003-02-26 2008-09-24 三菱電機株式会社 加速度センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
US6441450B1 (en) * 2000-10-20 2002-08-27 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor and method of manufacturing the same

Also Published As

Publication number Publication date
US6988407B2 (en) 2006-01-24
CN1591023A (zh) 2005-03-09
JP2005077349A (ja) 2005-03-24
KR20050025224A (ko) 2005-03-14
KR100555617B1 (ko) 2006-03-03
DE102004028927A1 (de) 2005-04-07
CN100380129C (zh) 2008-04-09
US20050044953A1 (en) 2005-03-03
TW200510727A (en) 2005-03-16
TWI234659B (en) 2005-06-21

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8364 No opposition during term of opposition
R084 Declaration of willingness to licence
R084 Declaration of willingness to licence
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee