TWI226691B - Selective C4 connection in IC packaging - Google Patents

Selective C4 connection in IC packaging Download PDF

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Publication number
TWI226691B
TWI226691B TW092120017A TW92120017A TWI226691B TW I226691 B TWI226691 B TW I226691B TW 092120017 A TW092120017 A TW 092120017A TW 92120017 A TW92120017 A TW 92120017A TW I226691 B TWI226691 B TW I226691B
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TW
Taiwan
Prior art keywords
contact
selected position
array
substrate
top surface
Prior art date
Application number
TW092120017A
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English (en)
Other versions
TW200406050A (en
Inventor
Stephen W Macquarrie
Irving Memis
Original Assignee
Ibm
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Publication date
Application filed by Ibm filed Critical Ibm
Publication of TW200406050A publication Critical patent/TW200406050A/zh
Application granted granted Critical
Publication of TWI226691B publication Critical patent/TWI226691B/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/485—Adaptation of interconnections, e.g. engineering charges, repair techniques
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    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
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    • H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
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    • H01L24/10—Bump connectors ; Manufacturing methods related thereto
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    • H01L24/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001—Core members of the bump connector
    • H01L2224/13099—Material
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    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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    • H01L2224/8119—Arrangement of the bump connectors prior to mounting
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    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H05K1/02—Details
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K2201/09036—Recesses or grooves in insulating substrate
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    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10674—Flip chip

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Wire Bonding (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

1226691 玖、發明說明： 【發明所屬之技術領域】 本發明係有關於封裝積體電路，更明確地說，有關於 被稱為”覆晶接合”或C 4之連接技術。 【先前技術】 於製造用以連接積體電路（IC)組之基材的製程中，製 造者有時在積體電路的底部上，完成與銲錫凸塊連接點之 選擇接觸。例如，λ中可能有—組類似產品，其具有與標 準晶片不同之連接點，使得在晶片上之第k個凸塊在部份 封裝中被使用，而在其他封裝中則不被使用。 刀 於過去，如第3圖之剖面圖所示，一具有銲錫凸塊接 觸30之錫球陣列的晶片1〇(稱為，，覆晶接合，，技術或以技 術）將全部被銲接至在基材頂表面135上之對應接觸陣列 中之金屬接觸* 11 〇。於此時，該晶片將必須只針對所用 之接觸加以设計及製造。美國專利第6,229,21 9號案例示 具有不規則組之接觸在底部之不同晶#。所有在每一晶片 上^接觸係被黏結至在封I上之對應接觸。該封裝藉由令 在阳片上有空位’即晶片上之第k槽有一空位，而容許兩 不同曰日片’因此’在第k位置之接觸與在該晶片上之空位 槽間並未形成黏結。 或者’一晶片將被黏結至在封裝上之一接觸，但未被 使用之接觸將為”浮置”，即未連接至封裝的其他層。這表 丁、接觸t* 110有電位，以短路至其他接觸。另外，在基 3 1226691 材上之金屬代表可能影響晶片操作的電容值。對於形成 片接觸之不同掩模，去除在晶片底部上之接觸將很浪費 本。在晶片成形後去除接觸將需要額外之處理，並可能 損及該晶片。去除在該位置之接觸墊1 1 0為一可能，但 可能使銲錫凸塊 3 0流動以短路鄰近接觸，或已經製造 接觸墊11 0下之導孔，甚至以銲錫掩模1 3 0之出現，一 統介電層被沉積並以微影方式作出圖案。於此先前技藝 之銲錫掩模係如傳統被顯示為分離銲錫凸塊3 0及與銲 凸塊接觸之對應金屬墊1 1 0。 【發明内容】 本發明關係於一種絕緣開在 1C之底部上之未使用 錫凸塊的結構，藉由配合上銲錫掩模，對基材之頂面上 金屬内連線作出圖案，以隔離開未使用之銲錫凸塊。 本發明之一特性為改變在未使用晶片接觸下通過之 屬内連線之形狀，以在介電銲錫掩模中形成一下凹，以 低在選定位置之銲錫掩模之高度。 本發明之另一特性為將銲錫掩模作出圖案，以將一 電層放置於晶片上之一接觸與在封裝上之對應接觸之間 【實施方式】 再次參考第3圖，其中顯示一 1C封裝基材一部份 剖面圖，其中，晶片1 〇係經由一組C4銲錫凸塊3 0連 至該封裝，凸塊黏結至一陣列之連接墊1 1 〇。連接墊被 晶 成 會 有 於 傳 中 錫 銲 之 金 降 介 之 接 連 4 1226691 接至内連線，其向下延伸穿過基材的頂面1 3 5並連接該所 不1C至其他1C及/或外面世界。銲錫掩模130為一介電 層’其係在頂面上之導體被作出圖案後並在晶片被黏結之 月·J被放下。其藉由包圍接觸墊1 1 〇而隔離開銲錫凸塊3 0。 鲜錫掩模130在金屬層110被作出圖案後被放下，然 後藉由曝露至適當特徵之光而作出圖案，然後，在作出 圖案後顯影。可以由第3圖看出，將銲錫掩模作出圖案的 方式為在銲錫凸塊間之分割及隔離特性，在每一接觸塾 旁形成一壁。於第3圖之剖面圖中，這些銲錫球均未 為金屬110所短路。如果，有金屬110延伸於接觸間之情 形’層30將於其通過金屬11〇層上之處略高。 先前技藝之特性為IC腳位排列之修改（或至銲錫凸塊 之連接）很昂貴，成本因素之考量指示仍保有銲錫接觸ιι〇 連接。因此，接著表示附著至晶# 10之錫球係被銲接至 在該表面上之接觸110,因此，表示藉由在基材上之連接 作用’而具有電容加至晶片上的問題。熟習於本技藝者得 知-接㈣U0典型被連接至—向下延伸穿過基材的導 孔，使得有相當量之區域係與錫球30作電氣接觸。 依據本發明，在不改變IC的配置下，可容許在基材 上之不同連接，藉由一不會干擾晶片操作之圖案化介電 質，以隔離開在晶片上之未使用銲錫凸塊。 被使用。於 現參考第1圖，其中顯示依據本發明之封裝基材區域 的平面圖’其中’有一 3x7 p車列之接觸墊"0,以配人一 特定1C之標準1/0。然而，並非所有接觸均 ° 1226691 此例子中，中間列之兩接觸未使用。 一由左至右沿著陣列中間列通過的粗線i 2〇代表一導 電内連線’其係依據予以實施之系統需要（連接接觸1、3、 4、6及7)。於此例子中，該線通過七個鄰接之接觸位置。 於此例子中，兩個為編號1 2 2所表示之接觸位置未使用， 並且位在具有六角形之線120區域中。所示佈局之功能為 導電内連線件120偏移開晶片1〇上之銲錫凸塊之位置； 即，其分開，在兩側間界定一六角形開口。在晶圓黏結操 作前被放下之銲錫掩模填入該六角開口並在銲錫掩模i 2 5 之頂表面的該位置中形成一下凹。該下凹包圍在晶片1〇 上之錫球並將之與周圍之連接器隔離，使得當加熱及銲錫 迴流程序時’任何轉為炼化態導電材料被侷限。於黏結操 作中’在晶片1 0底部上之錫球3 0將會改變形狀，略微降 低晶片1 0。於錫球3 0與接觸墊丨丨〇間之介電材料丨2 $防 土電氣路徑之形成。因此’在IC10之下面之連接未被干 擾，但未使用連接並未影響基材連接（例如藉由不想要之 短路）或者晶片之操作（藉由改變電容值）。 參考第2圖之側視圖，通過内連線12〇所取之面A_a , 因此，並未顯示其剖面，即當該線通過墊丨丨〇時被標示為 110’及當通過六角形122時，被標示為122。因此，於 第2圖中’兩區域135均顯示在每一側上之凸塊，其中， 銲錫掩模在内連線1 2 2上。 在第1圖之最上一列，盒子124界定在一接觸位置旁 之區域，其將密封一由銲錫掩模材料所形成之介電質墊 1226691 1 2 5者。此墊防止一路徑形成於在該位置之接觸1 1 0及在 該位置上之晶片接觸之間。此配置係有用於當在晶片上有 一接觸，其在此特定系統中並未使用，及在該基材中之接 觸並未連接或可能短路至在該基材上或之中之另一内連 線。 因此，本發明可以使用較大等級之晶片及/或基材， 因為一具有一接觸110連接至基材中之其他接線之堆疊基 材仍可以被使用，及該基材將增加於晶片中之電路上之電 容性負載（若有接觸的話）。同樣地，一短路於一系統版本 中之晶片接觸Κ及L之基材中之内連線可能封閉，使得 不具該短路之系統仍可以使用相同基材。 熟習於本技藝者可知並不需要一閉合六角形及單側結 構將用以保留線1 2 0之連續性。線1 2 0並不必要為一直線， 其可以具有一直角或其他形狀。一鑽石形、矩形、平行四 邊形或其他形狀（較佳一閉合曲線）可以使用以替代六角 形。 較佳地，銲錫掩模之厚度係足夠地厚，以防止電氣接 觸，同時，也足夠薄，以使其他銲錫凸塊不會不與所黏結 之墊11 0作接觸。因為銲錫凸塊將於黏結製程中迴流，所 以，其也可允許部份公差本發明已經針對由IBM所開發 之覆晶接合製程加以說明，但也可以使用其他技術，其中 1C底部之一組接觸係被黏結至基材頂部上之一陣列者。 雖然，本發明已經以單一實施例方式加以說明，但熟 習於本技藝可以了解到本發明也可以在不脫離以下申請專 7 1226691 利範圍之精神及範圍下加以以各種版本實施。 1 【圖式簡單說明】 第1圖為依據本發明之結構的俯視圖。 w 第2圖為第1圖之剖面圖。 % 第3圖為對應於第2圖之先前技藝之剖面圖。 · 【元件代表符號簡單說明】 φ 10 晶片 30 銲錫凸塊 110 接觸墊 120 粗線 122 接觸位置 124 盒子 125 銲錫掩模層 130 銲錫掩模 135 頂面
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Claims (1)

1226691 第f十〇。7號專f喋θ年I。月修正 拾、申請專利範圍： 其至少包含：一； κ一種用以連接積體電路的基材 面，具有至少一標準圖案陣列之接觸形成於其上，以及， 一圖案介電層，安排於該頂面上，該有圖案介電層被作 出圖案，以包圍並彼此隔離開一次組標準圖案陣列之接 觸其中，一導電接觸内連線件係安排在該頂面上並電 氣連接至少部份之該陣列接觸，該接觸内連線件係由該 至少一陣列中之接觸位置的至少一選定位置位移，及該 有圖案介電層覆蓋該至少一選擇位置，其中在頂面之選 定位置之積體電路接觸係與位在選定位置之接觸陣列之 接觸隔離開。 2. 如申請專利範圍第1項所述之基材，其中上述之接觸内 連線件係由包圍該至少一選定位置之閉合曲線中之至少 選疋位置位移開，其中，該介電層在該閉合曲線内之 該至少一選定位置處有一下凹。 3. 如申請專利範圍第1項所述之基材，其中安排在頂面及 電氣連接至一次組接觸之該導電内連線件延伸通過至少 一其所未連接之未連接接觸。 4·如申請專利範圍第3項所述之基材，其中上述之導電内 連線件形成一閉合曲線，包圍住該至少一未連接接觸。 1226691 5·如申請專利範圍第4項所述之基材，其中上述之導電内 連線件形成一六角形，包圍住該至少一未連接接觸。 6·如申請專利範圍第4項所述之基材，其中上述之導電内 連線件形成一四邊形，包圍住該至少一未連接接觸。 / 7· —種用以連接積體電路的基材，其具有一基材頂面，具 有至少一標準圖案陣列之接觸形成於其上及一圖案化介 電層安排於該頂面上，該圖案化介電層係作出圖案以包 圍並隔離開一次組之標準圖案陣列之接觸，其中該圖案 化之介電層覆蓋該至少一選定位置，其中一在該頂面之 選定位置的積體電路接觸係與位在該選定位置之陣列接 觸之一接觸隔絕。 8·如申請專利範圍第7項所述之基材，其中上述之圖案化 介電質係為一形成一閉合曲線之導電内連線件所閉合， 該曲線包圍該至少一未連接接觸。 9·如申請專利範圍第8項所述之基材，其中上述之導電内 連線件形成一六角形，包圍住該至少一未連接接觸。 1〇·如申請專利範圍第9項所述之基材，其中上述之導電内 連線件形成一四邊形，包圍住該至少一未連接接觸。 10 1226691 11. 一種製造一基材的方法，該基材用以連接具有一基材頂 面之積體電路，具有至少一標準圖案陣列之接觸形成於 其上及一圖案介電層安排於該頂面上，該方法至少包含 步驟： 提供一組内連線給一基材，該内連線連接至少部份之 標準圖案陣列之接觸，形成一導電接觸内連線件安排於 該頂面上並電氣連接該至少陣列接觸之部份，該接觸内 連線件係由在該至少一陣列中之接觸位置的至少一選定 位置位移開； 對一介電層作出圖案，以包圍並與該標準圖案陣列之 接觸的一次組分隔，並覆蓋該玉少一選定位置，其中在 一 1C之底面上之一積體電路接觸在該頂面之選定位置 處係與位在該選定位置之陣列接觸之接觸隔離。 1 2.如申請專利範圍第1 1項所述之方法，其中上述之接觸 内連線件係位移開在一包圍住該至少一選定位置之閉合 曲線中的該至少.一選定位置。 1 3 ·如申請專利範圍第11項所述之方法，其中上述之介電 層在該至少一選定位置之閉合曲線内具有一下凹。 11
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JP2006501661A (ja) 2006-01-12

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