TWD230464S - 基板處理裝置用基板移動具 - Google Patents

基板處理裝置用基板移動具 Download PDF

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Publication number
TWD230464S
TWD230464S TW112300492F TW112300492F TWD230464S TW D230464 S TWD230464 S TW D230464S TW 112300492 F TW112300492 F TW 112300492F TW 112300492 F TW112300492 F TW 112300492F TW D230464 S TWD230464 S TW D230464S
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TW
Taiwan
Prior art keywords
substrate
moving tool
processing equipment
substrate processing
article
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TW112300492F
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English (en)
Inventor
神田達輝
森田慎也
Original Assignee
日商國際電氣股份有限公司 (日本)
日商國際電氣股份有限公司
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Application filed by 日商國際電氣股份有限公司 (日本), 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司 (日本)
Publication of TWD230464S publication Critical patent/TWD230464S/zh

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Abstract

【物品用途】;本設計的物品是基板處理裝置用基板移動具，為一種在基板處理裝置的反應室中，安裝在設置有複數片基板的基板保持具的內側使用的基板處理裝置用基板移動具。本設計之物品的底面之呈環狀突出的部分，用於嵌入基板保持具的底板的孔以進行定位，並藉由向上推動基板移動具的底板，就可將複數片基板從基板保持具的爪片往上抬起進行上下移動。;【設計說明】;(無)

Description

基板處理裝置用基板移動具
本設計的物品是基板處理裝置用基板移動具，為一種在基板處理裝置的反應室中，安裝在設置有複數片基板的基板保持具的內側使用的基板處理裝置用基板移動具。本設計之物品的底面之呈環狀突出的部分，用於嵌入基板保持具的底板的孔以進行定位，並藉由向上推動基板移動具的底板，就可將複數片基板從基板保持具的爪片往上抬起進行上下移動。
(無)
TW112300492F 2022-09-14 2023-02-07 基板處理裝置用基板移動具 TWD230464S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022019754F JP1741512S (zh) 2022-09-14 2022-09-14
JP2022-019754 2022-09-14

Publications (1)

Publication Number Publication Date
TWD230464S true TWD230464S (zh) 2024-03-21

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TW112300492F TWD230464S (zh) 2022-09-14 2023-02-07 基板處理裝置用基板移動具

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US (1) USD1063875S1 (zh)
JP (1) JP1741512S (zh)
TW (1) TWD230464S (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD218088S (zh) 2020-03-10 2022-04-11 日商國際電氣股份有限公司 基板處理裝置用晶舟

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Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD218088S (zh) 2020-03-10 2022-04-11 日商國際電氣股份有限公司 基板處理裝置用晶舟

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JP1741512S (zh) 2023-04-11
USD1063875S1 (en) 2025-02-25

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