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US3796182A
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1971-12-16 |
1974-03-12 |
Applied Materials Tech |
Susceptor structure for chemical vapor deposition reactor
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US5242501A
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1982-09-10 |
1993-09-07 |
Lam Research Corporation |
Susceptor in chemical vapor deposition reactors
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US4499354A
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*
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1982-10-06 |
1985-02-12 |
General Instrument Corp. |
Susceptor for radiant absorption heater system
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JPS63186422A
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1987-01-28 |
1988-08-02 |
Tadahiro Omi |
ウエハサセプタ装置
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1988-03-31 |
1990-12-18 |
Materials Technology Corporation, Subsidiary Of The Carbon/Graphite Group, Inc. |
Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same
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US4986215A
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1988-09-01 |
1991-01-22 |
Kyushu Electronic Metal Co., Ltd. |
Susceptor for vapor-phase growth system
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JPH0834187B2
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*
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1989-01-13 |
1996-03-29 |
東芝セラミックス株式会社 |
サセプタ
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1994-02-25 |
1997-07-08 |
Applied Materials, Inc. |
Susceptor for deposition apparatus
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JPH0878347A
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1994-09-06 |
1996-03-22 |
Komatsu Electron Metals Co Ltd |
エピタキシャル成長装置のサセプタ
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US5584936A
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1995-12-14 |
1996-12-17 |
Cvd, Incorporated |
Susceptor for semiconductor wafer processing
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1996-07-31 |
1999-01-26 |
Lucent Technologies Inc. |
Wafer holder for thermal processing apparatus
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2002-08-30 |
2007-08-14 |
Asm International N.V. |
Susceptor plate for high temperature heat treatment
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2003-03-04 |
2013-02-05 |
Cree, Inc. |
Susceptor apparatus for inverted type MOCVD reactor
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USD525127S1
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2004-03-01 |
2006-07-18 |
Kraft Foods Holdings, Inc. |
Susceptor ring
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EP1772901B1
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2005-10-07 |
2012-07-25 |
Rohm and Haas Electronic Materials, L.L.C. |
Wafer holding article and method for semiconductor processing
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2008-08-07 |
2013-03-12 |
Asm America, Inc. |
Susceptor ring
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USD600223S1
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2008-08-07 |
2009-09-15 |
Ravinder Aggarwal |
Susceptor ring
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2011-10-28 |
2021-08-10 |
Asm Ip Holding B.V. |
Susceptor with ring to limit backside deposition
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2012-03-30 |
2017-06-20 |
Applied Materials, Inc. |
Substrate processing system having susceptorless substrate support with enhanced substrate heating control
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USD743357S1
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2013-03-01 |
2015-11-17 |
Asm Ip Holding B.V. |
Susceptor
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US10068791B2
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2013-03-08 |
2018-09-04 |
Semiconductor Components Industries, Llc |
Wafer susceptor for forming a semiconductor device and method therefor
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USD784276S1
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2013-08-06 |
2017-04-18 |
Applied Materials, Inc. |
Susceptor assembly
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USD830981S1
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2017-04-07 |
2018-10-16 |
Asm Ip Holding B.V. |
Susceptor for semiconductor substrate processing apparatus
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USD864134S1
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2018-10-24 |
2019-10-22 |
Asm Ip Holding B.V. |
Susceptor
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USD948463S1
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2018-10-24 |
2022-04-12 |
Asm Ip Holding B.V. |
Susceptor for semiconductor substrate supporting apparatus
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USD920936S1
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2019-01-17 |
2021-06-01 |
Asm Ip Holding B.V. |
Higher temperature vented susceptor
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USD914620S1
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2019-01-17 |
2021-03-30 |
Asm Ip Holding B.V. |
Vented susceptor
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USD1035598S1
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2020-09-02 |
2024-07-16 |
Applied Materials, Inc. |
Gas distribution plate for a semiconductor processing chamber
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