TWD211969S - A collimator for use in a physical vapor deposition (pvd) chamber - Google Patents

A collimator for use in a physical vapor deposition (pvd) chamber Download PDF

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Publication number
TWD211969S
TWD211969S TW107305407D01F TW107305407D01F TWD211969S TW D211969 S TWD211969 S TW D211969S TW 107305407D01 F TW107305407D01 F TW 107305407D01F TW 107305407D01 F TW107305407D01 F TW 107305407D01F TW D211969 S TWD211969 S TW D211969S
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TW
Taiwan
Prior art keywords
pvd
collimator
chamber
vapor deposition
physical vapor
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Application number
TW107305407D01F
Other languages
Chinese (zh)
Inventor
馬丁李 萊克
仲蘭蘭
張富宏
征 王
Original Assignee
美商應用材料股份有限公司
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Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD211969S publication Critical patent/TWD211969S/en

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Abstract

【物品用途】;本設計所請求係用於物理氣相沉積(PVD)腔室中的準直器。;【設計說明】;圖式所揭露之虛線部分，為本案不主張設計之部分。[Use of article]; This design is requested to be used as a collimator in a physical vapor deposition (PVD) chamber. ;[Design Description];The dotted line portion disclosed in the drawing is the part of this case that does not require design.

Description

用於物理氣相沉積(PVD)腔室中的準直器Collimator used in physical vapor deposition (PVD) chambers

本設計所請求係用於物理氣相沉積(PVD)腔室中的準直器。The design requested is a collimator used in a physical vapor deposition (PVD) chamber.

圖式所揭露之虛線部分，為本案不主張設計之部分。The dotted line exposed in the diagram is the part that is not recommended for design in this case.

TW107305407D01F 2018-03-16 2018-09-13 A collimator for use in a physical vapor deposition (pvd) chamber TWD211969S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/640,788 USD859333S1 (en) 2018-03-16 2018-03-16 Collimator for a physical vapor deposition chamber
US29/640,788 2018-03-16

Publications (1)

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TWD211969S true TWD211969S (en) 2021-06-11

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TW107305407D01F TWD211969S (en) 2018-03-16 2018-09-13 A collimator for use in a physical vapor deposition (pvd) chamber
TW107305407F TWD210127S (en) 2018-03-16 2018-09-13 A collimator for use in a physical vapor deposition (pvd) chamber

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TW107305407F TWD210127S (en) 2018-03-16 2018-09-13 A collimator for use in a physical vapor deposition (pvd) chamber

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US (1) USD859333S1 (en)
TW (2) TWD211969S (en)

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Also Published As

Publication number Publication date
TWD210127S (en) 2021-03-01
USD859333S1 (en) 2019-09-10

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