TWD197468S - 基板處理裝置用晶舟之部分 - Google Patents

基板處理裝置用晶舟之部分

Info

Publication number
TWD197468S
TWD197468S TW107306772F TW107306772F TWD197468S TW D197468 S TWD197468 S TW D197468S TW 107306772 F TW107306772 F TW 107306772F TW 107306772 F TW107306772 F TW 107306772F TW D197468 S TWD197468 S TW D197468S
Authority
TW
Taiwan
Prior art keywords
design
substrate processing
wafer boat
case
wafer
Prior art date
Application number
TW107306772F
Other languages
English (en)
Chinese (zh)
Inventor
Makoto Sambu
Makoto Tsuti
Original Assignee
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD197468S publication Critical patent/TWD197468S/zh

Links

TW107306772F 2018-09-20 2018-11-19 基板處理裝置用晶舟之部分 TWD197468S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2018-20434F JP1638282S (cs) 2018-09-20 2018-09-20

Publications (1)

Publication Number Publication Date
TWD197468S true TWD197468S (zh) 2019-05-11

Family

ID=67474810

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107306772F TWD197468S (zh) 2018-09-20 2018-11-19 基板處理裝置用晶舟之部分

Country Status (3)

Country Link
US (1) USD920935S1 (cs)
JP (1) JP1638282S (cs)
TW (1) TWD197468S (cs)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6915037B2 (ja) * 2017-02-27 2021-08-04 ミライアル株式会社 基板収納容器
JP1663818S (cs) * 2018-12-26 2020-07-20
USD936025S1 (en) * 2018-12-26 2021-11-16 Lg Chem, Ltd. Flexible printed circuit board for battery module
TWD202895S (zh) * 2019-03-27 2020-02-21 家登精密工業股份有限公司 光罩盒組裝件
USD954666S1 (en) * 2019-05-03 2022-06-14 Lumileds Holding B.V. Flexible circuit board
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
JP1731670S (cs) * 2022-03-04 2022-12-08
JP1731673S (cs) * 2022-05-30 2022-12-08
JP1731675S (cs) * 2022-05-30 2022-12-08
JP1731674S (cs) * 2022-05-30 2022-12-08
JP1741512S (cs) * 2022-09-14 2023-04-11
JP1741513S (cs) 2022-09-14 2023-04-11

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
US9343304B2 (en) * 2014-09-26 2016-05-17 Asm Ip Holding B.V. Method for depositing films on semiconductor wafers
JP1537313S (cs) * 2014-11-20 2015-11-09
JP1537312S (cs) * 2014-11-20 2015-11-09
JP1537629S (cs) * 2014-11-20 2015-11-09
JP1537630S (cs) * 2014-11-20 2015-11-09
JP1563649S (cs) * 2016-02-12 2016-11-21
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD836572S1 (en) * 2016-09-30 2018-12-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
JP1584241S (cs) * 2017-01-31 2017-08-21
JP1584784S (cs) * 2017-01-31 2017-08-28
JP1605462S (cs) * 2017-08-10 2021-05-31
JP1597807S (cs) * 2017-08-21 2018-02-19
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
USD920935S1 (en) 2021-06-01
JP1638282S (cs) 2019-08-05

Similar Documents

Publication Publication Date Title
TWD197468S (zh) 基板處理裝置用晶舟之部分
TWD208179S (zh) 基板處理裝置用晶舟之部分
TWD212726S (zh) 基板處理裝置用晶舟之部分
TWD217765S (zh) 具有電子裝置之配件
TWD183010S (zh) 基板處理裝置用晶舟
TWD189313S (zh) 用於半導體製造設備的承載器
TWD179095S (zh) 基板保持環
TWD218093S (zh) 基板處理裝置用晶舟之部分
USD774382S1 (en) Holder and holder support with lever-actuated suction membrane
TWD165429S (zh) 半導體製造裝置用晶舟
TWD166332S (zh) 基板處理裝置用晶舟之部分
TWD163542S (zh) 基板處理裝置用晶舟
TWD234862S (zh) 連接器
TWD225035S (zh) 基板處理裝置用晶舟之部分
TWD223955S (zh) 連接器
TWD202463S (zh) 基板處理裝置用晶舟之部分
TWD213399S (zh) 基座軸
TWD170400S (zh) 晶舟用填縫構件
TWD208955S (zh) 淋洗頭用真空運輸裝置
TWD184278S (zh) 基板洗淨用海綿之部分
TWD180126S (zh) 密封環
TWD170399S (zh) 晶舟用填縫構件
TWD218088S (zh) 基板處理裝置用晶舟
TWD164162S (zh) 半導體晶圓硏磨裝置用彈性膜之部分
JP1795957S (ja) 基板処理システム用ペデスタル