TW565467B - Process for fabricating a gas storage and dispensing system - Google Patents
Process for fabricating a gas storage and dispensing system Download PDFInfo
- Publication number
- TW565467B TW565467B TW088113376A TW88113376A TW565467B TW 565467 B TW565467 B TW 565467B TW 088113376 A TW088113376 A TW 088113376A TW 88113376 A TW88113376 A TW 88113376A TW 565467 B TW565467 B TW 565467B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- physical
- sorbent
- sorbent material
- foreign
- Prior art date
Links
- 238000003860 storage Methods 0.000 title claims abstract description 68
- 238000000034 method Methods 0.000 title claims abstract description 67
- 239000002594 sorbent Substances 0.000 claims abstract description 228
- 238000003795 desorption Methods 0.000 claims abstract description 30
- 238000001179 sorption measurement Methods 0.000 claims abstract description 29
- 238000007599 discharging Methods 0.000 claims abstract 2
- 239000007789 gas Substances 0.000 claims description 201
- 239000000463 material Substances 0.000 claims description 187
- 238000009826 distribution Methods 0.000 claims description 127
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 51
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 41
- 239000003463 adsorbent Substances 0.000 claims description 27
- 239000003795 chemical substances by application Substances 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 26
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 20
- 239000001569 carbon dioxide Substances 0.000 claims description 19
- 238000011049 filling Methods 0.000 claims description 19
- 239000011261 inert gas Substances 0.000 claims description 19
- 229910002090 carbon oxide Inorganic materials 0.000 claims description 18
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 14
- 238000010521 absorption reaction Methods 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052704 radon Inorganic materials 0.000 claims description 11
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000011324 bead Substances 0.000 claims description 10
- 150000002431 hydrogen Chemical class 0.000 claims description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 8
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 8
- 239000008267 milk Substances 0.000 claims description 7
- 235000013336 milk Nutrition 0.000 claims description 7
- 210000004080 milk Anatomy 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 241001674048 Phthiraptera Species 0.000 claims description 6
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 claims description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 claims description 5
- 239000002250 absorbent Substances 0.000 claims description 5
- -1 diborane Chemical compound 0.000 claims description 5
- 150000004678 hydrides Chemical class 0.000 claims description 5
- 229910052722 tritium Inorganic materials 0.000 claims description 5
- 229910015900 BF3 Inorganic materials 0.000 claims description 4
- 230000002745 absorbent Effects 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 238000011068 loading method Methods 0.000 claims description 4
- WSWCOQWTEOXDQX-MQQKCMAXSA-M (E,E)-sorbate Chemical compound C\C=C\C=C\C([O-])=O WSWCOQWTEOXDQX-MQQKCMAXSA-M 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 3
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 3
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 3
- 229910052743 krypton Inorganic materials 0.000 claims description 3
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 3
- 229940075554 sorbate Drugs 0.000 claims description 3
- 229910000059 tellane Inorganic materials 0.000 claims description 3
- VTLHPSMQDDEFRU-UHFFFAOYSA-N tellane Chemical class [TeH2] VTLHPSMQDDEFRU-UHFFFAOYSA-N 0.000 claims description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims description 2
- PPMWWXLUCOODDK-UHFFFAOYSA-N tetrafluorogermane Chemical compound F[Ge](F)(F)F PPMWWXLUCOODDK-UHFFFAOYSA-N 0.000 claims description 2
- 229910017843 NF3 Chemical class 0.000 claims 2
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 claims 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 claims 2
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical class FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 claims 2
- 229910052762 osmium Inorganic materials 0.000 claims 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims 2
- 230000001590 oxidative effect Effects 0.000 claims 2
- 230000008961 swelling Effects 0.000 claims 2
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 1
- 239000005909 Kieselgur Substances 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 1
- 229910052776 Thorium Inorganic materials 0.000 claims 1
- 238000002835 absorbance Methods 0.000 claims 1
- 239000011358 absorbing material Substances 0.000 claims 1
- 229910000323 aluminium silicate Inorganic materials 0.000 claims 1
- 208000022531 anorexia Diseases 0.000 claims 1
- 229910000085 borane Inorganic materials 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 206010061428 decreased appetite Diseases 0.000 claims 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- 210000005069 ears Anatomy 0.000 claims 1
- 230000009969 flowable effect Effects 0.000 claims 1
- 238000009472 formulation Methods 0.000 claims 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 claims 1
- 229910000058 selane Inorganic materials 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 239000011593 sulfur Substances 0.000 claims 1
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 11
- 238000005468 ion implantation Methods 0.000 description 7
- 241000894007 species Species 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000011148 porous material Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000008187 granular material Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 230000006378 damage Effects 0.000 description 3
- 238000002309 gasification Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 238000002411 thermogravimetry Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000004580 weight loss Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 235000013162 Cocos nucifera Nutrition 0.000 description 2
- 244000060011 Cocos nucifera Species 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical group O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 230000029305 taxis Effects 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 239000002023 wood Substances 0.000 description 2
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- 241000237519 Bivalvia Species 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 241001507939 Cormus domestica Species 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 241000282326 Felis catus Species 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910006160 GeF4 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052778 Plutonium Inorganic materials 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
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- 239000003610 charcoal Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 235000020639 clam Nutrition 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 235000013766 direct food additive Nutrition 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 239000000796 flavoring agent Substances 0.000 description 1
- 235000019634 flavors Nutrition 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical group [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 229940040145 liniment Drugs 0.000 description 1
- 239000000865 liniment Substances 0.000 description 1
- 150000002632 lipids Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- IAIWVQXQOWNYOU-FPYGCLRLSA-N nitrofural Chemical compound NC(=O)N\N=C\C1=CC=C([N+]([O-])=O)O1 IAIWVQXQOWNYOU-FPYGCLRLSA-N 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- OYEHPCDNVJXUIW-UHFFFAOYSA-N plutonium atom Chemical compound [Pu] OYEHPCDNVJXUIW-UHFFFAOYSA-N 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/16—Alumino-silicates
- B01J20/18—Synthetic zeolitic molecular sieves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
- B01J20/28002—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their physical properties
- B01J20/28004—Sorbent size or size distribution, e.g. particle size
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
- B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
- B01J20/28016—Particle form
- B01J20/28019—Spherical, ellipsoidal or cylindrical
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C11/00—Use of gas-solvents or gas-sorbents in vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/104—Alumina
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/20—Organic adsorbents
- B01D2253/202—Polymeric adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/30—Physical properties of adsorbents
- B01D2253/302—Dimensions
- B01D2253/308—Pore size
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/50—Carbon oxides
- B01D2257/502—Carbon monoxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/50—Carbon oxides
- B01D2257/504—Carbon dioxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2220/00—Aspects relating to sorbent materials
- B01J2220/50—Aspects relating to the use of sorbent or filter aid materials
- B01J2220/66—Other type of housings or containers not covered by B01J2220/58 - B01J2220/64
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0388—Arrangement of valves, regulators, filters
- F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/40—Capture or disposal of greenhouse gases of CO2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Separation Of Gases By Adsorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/143,809 US6083298A (en) | 1994-10-13 | 1998-08-31 | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW565467B true TW565467B (en) | 2003-12-11 |
Family
ID=22505743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW088113376A TW565467B (en) | 1998-08-31 | 1999-08-05 | Process for fabricating a gas storage and dispensing system |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6083298A (enExample) |
| EP (1) | EP1109613A4 (enExample) |
| JP (2) | JP2002523707A (enExample) |
| KR (1) | KR100618072B1 (enExample) |
| AU (1) | AU5904799A (enExample) |
| MY (1) | MY133994A (enExample) |
| TW (1) | TW565467B (enExample) |
| WO (1) | WO2000012196A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| US6500238B1 (en) * | 2000-08-10 | 2002-12-31 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system |
| JP2003080019A (ja) * | 2001-09-10 | 2003-03-18 | Morikawa Co Ltd | 吸着された有機化合物の脱着装置および脱着方法 |
| US6592653B2 (en) * | 2001-11-12 | 2003-07-15 | Advanced Technology Materials, Inc. | Fluid storage and delivery system utilizing low heels carbon sorbent medium |
| RU2215688C2 (ru) * | 2001-11-13 | 2003-11-10 | Федеральное государственное унитарное предприятие "Сибирский химический комбинат" | Способ извлечения трифторида бора из газовых смесей |
| US6620225B2 (en) * | 2002-01-10 | 2003-09-16 | Advanced Technology Materials, Inc. | Adsorbents for low vapor pressure fluid storage and delivery |
| US6716271B1 (en) | 2002-10-29 | 2004-04-06 | Advanced Technology Materials, Inc. | Apparatus and method for inhibiting decomposition of germane |
| US6991671B2 (en) * | 2002-12-09 | 2006-01-31 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
| DE10306344B8 (de) * | 2003-02-15 | 2013-11-21 | Pharmpur Gmbh | Gasspeicher zur Speicherung einer vorgegebenen Gasmenge und Freigabe des Gases für eine medizinische Applikation |
| JP2005024068A (ja) * | 2003-07-02 | 2005-01-27 | Toyo Tanso Kk | ハロゲンガス又はハロゲン含有ガスの供給装置 |
| WO2005054742A1 (en) * | 2003-12-03 | 2005-06-16 | Chemviron Carbon Limited | Storage of gases and their use in dispensing fluids |
| US7253413B2 (en) * | 2004-11-15 | 2007-08-07 | Smiths Detection Inc. | Gas identification system |
| KR101297917B1 (ko) | 2005-08-30 | 2013-08-27 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 대안적인 불화 붕소 전구체를 이용한 붕소 이온 주입 방법,및 주입을 위한 대형 수소화붕소의 형성 방법 |
| CN101410164B (zh) * | 2006-01-30 | 2012-05-02 | 高级技术材料公司 | 纳米多孔碳材料,以及利用其的系统和方法 |
| DE202008000810U1 (de) * | 2007-11-04 | 2008-12-24 | BLüCHER GMBH | Sorptionsfiltermaterial |
| US8598022B2 (en) | 2009-10-27 | 2013-12-03 | Advanced Technology Materials, Inc. | Isotopically-enriched boron-containing compounds, and methods of making and using same |
| US8858819B2 (en) | 2010-02-15 | 2014-10-14 | Air Products And Chemicals, Inc. | Method for chemical mechanical planarization of a tungsten-containing substrate |
| CN102091591A (zh) * | 2010-12-29 | 2011-06-15 | 广东工业大学 | 一种硅藻土改性吸附材料及其制备方法和应用 |
| US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
| US9073005B2 (en) | 2011-06-09 | 2015-07-07 | Sri International | Falling microbead counter-flow process for separating gas mixtures |
| EP3295075A4 (en) * | 2015-05-12 | 2019-03-20 | Entegris, Inc. | VALVE ARRANGEMENTS AND LIQUID STORAGE AND PACKING THEREFORE |
| CN105664662B (zh) * | 2016-03-31 | 2018-07-13 | 威格气体纯化科技(苏州)股份有限公司 | 在线更换吸附材料的净化柱及手套箱 |
| CN111093802B (zh) * | 2017-09-25 | 2021-08-17 | 纽麦特科技公司 | 高反应性气体的吸附剂辅助稳定化 |
| KR102785430B1 (ko) * | 2017-11-17 | 2025-03-21 | 라시크 아이엔씨. | 기재로부터의 프로세스 가스의 저장 및 전달을 위한 방법, 시스템, 및 디바이스 |
| KR102796847B1 (ko) * | 2019-10-17 | 2025-04-15 | 현대자동차주식회사 | 판상 유도 자기장 코일을 이용하는 자기 유도 열 제어 고체 수소 저장 시스템 |
| CN116391090A (zh) * | 2020-10-23 | 2023-07-04 | 恩特格里斯公司 | 具有高纯度输送气体的吸附型储运容器和相关方法 |
| JP7012189B1 (ja) | 2021-09-02 | 2022-01-27 | 東京瓦斯株式会社 | ガス供給方法 |
Family Cites Families (84)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US240423A (en) * | 1881-04-19 | Alexander james | ||
| US1608155A (en) * | 1920-08-02 | 1926-11-23 | American Solvent Recovery Corp | Means for transporting and storing gases |
| US1714245A (en) * | 1927-12-23 | 1929-05-21 | American Signs Corp | Gas-purifying trap and method of restoring same |
| US2283989A (en) * | 1938-06-04 | 1942-05-26 | Guy J Henry | Method of charging and conditioning dehydrators |
| US2356334A (en) * | 1941-12-18 | 1944-08-22 | Hooker Electrochemical Co | Means for storing and concentrating anhydrous hydrogen chloride |
| US2450289A (en) * | 1944-04-15 | 1948-09-28 | Little Inc A | Gas treating apparatus |
| US2663626A (en) * | 1949-05-14 | 1953-12-22 | Pritchard & Co J F | Method of storing gases |
| NL112548C (enExample) * | 1953-09-25 | 1900-01-01 | ||
| US3287432A (en) * | 1957-04-11 | 1966-11-22 | Texaco Inc | Selective sorption process |
| US3080307A (en) * | 1957-10-21 | 1963-03-05 | Westinghouse Electric Corp | Radioactive fluid handling system |
| US3093564A (en) * | 1957-10-21 | 1963-06-11 | Westinghouse Electric Corp | Gas handling systems for radioactive gases |
| NL241272A (enExample) * | 1958-07-14 | |||
| US2997371A (en) * | 1958-12-01 | 1961-08-22 | Standard Oil Co | Recovering of bf3 from admixture with hydrocarbons |
| US3037338A (en) * | 1958-12-30 | 1962-06-05 | Union Carbide Corp | Method for molecular sieve adsorption and desorption |
| US3116132A (en) * | 1960-01-22 | 1963-12-31 | Olin Mathieson | Process for the adsorption and desorption of diborane |
| US3006153A (en) * | 1960-08-29 | 1961-10-31 | Union Carbide Corp | Method and apparatus for storing and transporting ozone |
| NL297067A (enExample) * | 1962-09-04 | 1900-01-01 | ||
| US3144200A (en) * | 1962-10-17 | 1964-08-11 | Clyde E Taylor | Process and device for cryogenic adsorption pumping |
| US3264803A (en) * | 1963-01-21 | 1966-08-09 | Gen Electric | Sorption vacuum pump |
| US3415069A (en) * | 1966-10-31 | 1968-12-10 | Nasa | High pressure helium purifier |
| US3469375A (en) * | 1967-10-16 | 1969-09-30 | Nasa | Sorption vacuum trap |
| FR2064540A5 (en) * | 1969-09-23 | 1971-07-23 | Sigma Plastique | Moulding of packing for lpg storage bottles |
| US3675392A (en) * | 1970-01-30 | 1972-07-11 | Ite Imperial Corp | Adsorption-desorption method for purifying sf{11 |
| GB1385922A (en) * | 1971-03-31 | 1975-03-05 | Yatsurugi Y Kuratomi T | Preparation and use of 4-5a zeolite |
| US3713273A (en) * | 1971-05-03 | 1973-01-30 | R Coffee | Method and apparatus for storing gases and fueling internal combustion engines |
| US3719026A (en) * | 1971-06-01 | 1973-03-06 | Zeochem Corp | Selective sorption of non-polar molecules |
| US3788036A (en) * | 1972-07-26 | 1974-01-29 | D Stahl | Pressure equalization and purging system for heatless adsorption systems |
| US4023701A (en) * | 1974-03-04 | 1977-05-17 | Dockery Denzel J | Breathing apparatus for underwater use |
| JPS5272373A (en) * | 1975-12-15 | 1977-06-16 | Chiyoda R & D | Adsorption and separation apparatus |
| US4099936A (en) * | 1976-12-16 | 1978-07-11 | Union Carbide Corporation | Process for the purification of silane |
| GB1594454A (en) * | 1976-12-23 | 1981-07-30 | Boc Ltd | Gas separation |
| US4158639A (en) * | 1977-11-14 | 1979-06-19 | Autoclave Engineers, Inc. | Method of storing gases |
| US4343770A (en) * | 1977-12-19 | 1982-08-10 | Billings Energy Corporation | Self-regenerating system of removing oxygen and water impurities from hydrogen gas |
| US4263018A (en) * | 1978-02-01 | 1981-04-21 | Greene & Kellogg | Pressure swing adsorption process and system for gas separation |
| NL8005645A (nl) * | 1980-10-13 | 1982-05-03 | Euratom | Werkwijze voor het omkeerbaar opsluiten van gassen of dampen in een natuurlijk of synthetisch zeoliet. |
| DE3139781A1 (de) * | 1981-10-07 | 1983-04-21 | Nyby Uddeholm AB, 64480 Torshälla | Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gases |
| US4477265A (en) * | 1982-08-05 | 1984-10-16 | Air Products And Chemicals, Inc. | Argon purification |
| JPS6071040A (ja) * | 1983-09-27 | 1985-04-22 | Takeda Chem Ind Ltd | 有害ガス吸着剤 |
| SU1181692A1 (ru) * | 1983-11-14 | 1985-09-30 | Московский ордена Ленина и ордена Трудового Красного Знамени химико-технологический институт им.Д.И.Менделеева | Способ очистки газов от примесей фосфина и арсина |
| DE3344228A1 (de) * | 1983-12-07 | 1985-06-20 | Bergwerksverband Gmbh, 4300 Essen | Vorrichtung und verfahren zum regenerieren von trockenen, pulverfoermigen beladenen kohlenstoffhaltigen adsorptionsmitteln u. verfahren zum thermischen regenerieren mit dieser vorrichtung |
| JPS60208699A (ja) * | 1984-03-30 | 1985-10-21 | Sekisui Chem Co Ltd | 金属水素化物反応容器の製造方法 |
| US4552571A (en) * | 1984-04-05 | 1985-11-12 | Vbm Corporation | Oxygen generator with two compressor stages |
| JPS61133116A (ja) * | 1984-11-30 | 1986-06-20 | Nippon Paionikusu Kk | ガス精製装置 |
| FR2580947B1 (fr) * | 1985-04-25 | 1989-09-01 | Air Liquide | Procede et installation d'epuration par adsorption sur charbon actif, et pot adsorbeur correspondant |
| US4869733A (en) * | 1986-05-22 | 1989-09-26 | Vbm Corporation | Super-enriched oxygen generator |
| US4673415A (en) * | 1986-05-22 | 1987-06-16 | Vbm Corporation | Oxygen production system with two stage oxygen pressurization |
| JPH06104177B2 (ja) * | 1986-10-02 | 1994-12-21 | 大阪瓦斯株式会社 | 高純度ガス貯蔵用圧力容器 |
| JPS63156542A (ja) * | 1986-12-19 | 1988-06-29 | Kuraray Chem Kk | 活性炭再生法 |
| US5094830A (en) * | 1987-03-24 | 1992-03-10 | Novapure Corporation | Process for removal of water and silicon mu-oxides from chlorosilanes |
| US4761395A (en) * | 1987-03-24 | 1988-08-02 | Advanced Technology Materials, Inc. | Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom |
| US5151395A (en) * | 1987-03-24 | 1992-09-29 | Novapure Corporation | Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor |
| US4749384A (en) * | 1987-04-24 | 1988-06-07 | Union Carbide Corporation | Method and apparatus for quick filling gas cylinders |
| US4723967A (en) * | 1987-04-27 | 1988-02-09 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| US4738693A (en) * | 1987-04-27 | 1988-04-19 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| JPS63315146A (ja) * | 1987-06-16 | 1988-12-22 | Koko Res Kk | 炭素質吸着体の再生方法 |
| US4744221A (en) * | 1987-06-29 | 1988-05-17 | Olin Corporation | Zeolite based arsine storage and delivery system |
| DE3729517A1 (de) * | 1987-09-03 | 1989-03-16 | Siemens Ag | Adsorptionseinrichtung zur gastrennung |
| SU1544475A1 (ru) * | 1987-12-07 | 1990-02-23 | Предприятие П/Я Г-4567 | Способ получени сорбента дл очистки газов |
| SU1583151A1 (ru) * | 1988-05-23 | 1990-08-07 | Государственный научно-исследовательский и проектный институт редкометаллической промышленности "Гиредмет" | Способ очистки газов от арсина |
| DE3842930A1 (de) * | 1988-12-21 | 1990-06-28 | Bayer Ag | Verfahren zur adsorptiven sauerstoffanreicherung von luft mit mischungen aus ca-zeolith a molekularsieben mittels vakuum-swing-adsorption |
| DE3843313A1 (de) * | 1988-12-22 | 1990-06-28 | Wacker Chemitronic | Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen |
| FR2652346B1 (fr) * | 1989-09-22 | 1991-11-29 | Air Liquide | Procede de preparation de disilane. |
| JPH03127606A (ja) * | 1989-10-09 | 1991-05-30 | Hitachi Ltd | 充填塔構造 |
| US5202096A (en) * | 1990-01-19 | 1993-04-13 | The Boc Group, Inc. | Apparatus for low temperature purification of gases |
| FR2659030B1 (fr) * | 1990-03-02 | 1993-01-08 | Air Liquide | Enceinte et installation d'absorption pour separation des melanges gazeux. |
| US5238469A (en) * | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
| US5224350A (en) * | 1992-05-11 | 1993-07-06 | Advanced Extraction Technologies, Inc. | Process for recovering helium from a gas stream |
| GB9220975D0 (en) * | 1992-10-06 | 1992-11-18 | Air Prod & Chem | Apparatus for supplying high purity gas |
| JPH06233915A (ja) * | 1993-02-10 | 1994-08-23 | Mitsubishi Heavy Ind Ltd | 燃焼排ガスの脱硝設備 |
| US5385689A (en) * | 1993-06-29 | 1995-01-31 | Novapure Corporation | Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom |
| US5417742A (en) * | 1993-12-03 | 1995-05-23 | The Boc Group, Inc. | Removal of perfluorocarbons from gas streams |
| CA2147112A1 (en) * | 1994-05-26 | 1995-11-27 | Kishor Purushottam Gadkaree | Electrically heatable activated carbon bodies for adsorption and desorption applications |
| US5707424A (en) * | 1994-10-13 | 1998-01-13 | Advanced Technology Materials, Inc. | Process system with integrated gas storage and delivery unit |
| US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
| US5518528A (en) * | 1994-10-13 | 1996-05-21 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds |
| US5704967A (en) * | 1995-10-13 | 1998-01-06 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
| DE19536992A1 (de) * | 1995-10-04 | 1997-04-10 | Sued Chemie Ag | Verfahren zum Regenerieren von gebrauchten anorganischen Adsorbentien sowie Verwendung der Regenerate |
| JP3807634B2 (ja) * | 1995-10-18 | 2006-08-09 | 住友重機械工業株式会社 | 炭素質触媒の再生方法及び再生器 |
| US5761910A (en) * | 1996-05-20 | 1998-06-09 | Advanced Technology Materials, Inc. | High capacity gas storage and dispensing system |
| US5837027A (en) * | 1996-05-20 | 1998-11-17 | Advanced Technology Materials, Inc. | Manufacturing process for gas source and dispensing systems |
| WO1997044118A1 (en) * | 1996-05-20 | 1997-11-27 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
| US5858067A (en) * | 1996-05-20 | 1999-01-12 | Advanced Technology Materials, Inc. | Ex situ degassing and sorbate loading system for manufacture of sorbent-based fluid storage and dispensing apparatus |
| JPH1066823A (ja) * | 1996-08-27 | 1998-03-10 | Mitsui Petrochem Ind Ltd | 気相化学蒸着装置 |
| US5676735A (en) * | 1996-10-31 | 1997-10-14 | Advanced Technology Materials, Inc. | Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas |
-
1998
- 1998-08-31 US US09/143,809 patent/US6083298A/en not_active Expired - Lifetime
-
1999
- 1999-08-05 TW TW088113376A patent/TW565467B/zh not_active IP Right Cessation
- 1999-08-25 MY MYPI99003632A patent/MY133994A/en unknown
- 1999-08-30 KR KR1020017002536A patent/KR100618072B1/ko not_active Expired - Lifetime
- 1999-08-30 AU AU59047/99A patent/AU5904799A/en not_active Abandoned
- 1999-08-30 JP JP2000567292A patent/JP2002523707A/ja active Pending
- 1999-08-30 WO PCT/US1999/019868 patent/WO2000012196A1/en not_active Ceased
- 1999-08-30 EP EP99946692A patent/EP1109613A4/en not_active Withdrawn
-
2010
- 2010-12-16 JP JP2010280915A patent/JP2011099562A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| KR20010073040A (ko) | 2001-07-31 |
| WO2000012196A1 (en) | 2000-03-09 |
| US6083298A (en) | 2000-07-04 |
| JP2011099562A (ja) | 2011-05-19 |
| EP1109613A4 (en) | 2004-06-30 |
| WO2000012196A9 (en) | 2001-07-19 |
| MY133994A (en) | 2007-11-30 |
| KR100618072B1 (ko) | 2006-08-30 |
| EP1109613A1 (en) | 2001-06-27 |
| AU5904799A (en) | 2000-03-21 |
| JP2002523707A (ja) | 2002-07-30 |
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