SU1181692A1 - Способ очистки газов от примесей фосфина и арсина - Google Patents

Способ очистки газов от примесей фосфина и арсина Download PDF

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Publication number
SU1181692A1
SU1181692A1 SU833680071A SU3680071A SU1181692A1 SU 1181692 A1 SU1181692 A1 SU 1181692A1 SU 833680071 A SU833680071 A SU 833680071A SU 3680071 A SU3680071 A SU 3680071A SU 1181692 A1 SU1181692 A1 SU 1181692A1
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SU
USSR - Soviet Union
Prior art keywords
phosphine
impurities
cleaning gases
arsine
admixtures
Prior art date
Application number
SU833680071A
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English (en)
Inventor
Виктор Михайлович Богданов
Юрий Исаакович Шумяцкий
Ольга Васильевна Мойсейчук
Вера Николаевна Сучкова
Зинаида Арсеньевна Жукова
Светлана Петровна Нешумова
Вера Васильевна Федоровская
Галина Ивановна Чугунова
Original Assignee
Московский ордена Ленина и ордена Трудового Красного Знамени химико-технологический институт им.Д.И.Менделеева
Предприятие П/Я Р-6831
Всесоюзный Научно-Исследовательский И Конструкторский Институт Автогенного Машиностроения
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Application filed by Московский ордена Ленина и ордена Трудового Красного Знамени химико-технологический институт им.Д.И.Менделеева, Предприятие П/Я Р-6831, Всесоюзный Научно-Исследовательский И Конструкторский Институт Автогенного Машиностроения filed Critical Московский ордена Ленина и ордена Трудового Красного Знамени химико-технологический институт им.Д.И.Менделеева
Priority to SU833680071A priority Critical patent/SU1181692A1/ru
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Publication of SU1181692A1 publication Critical patent/SU1181692A1/ru

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  • Carbon And Carbon Compounds (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)

Abstract

1. СПОСОБ ОЧИСТКИ ГАЗОВ ОТ ПРИМЕСЕЙ ФОСФИНА И АРСИНА пропусканием через слой предварительно обработанного активированного угл , отличающийс  тем, что, с целью обеспечени  возможности очистки ацетилена от указанных примесей, используют уголь торф ной сернисто-калиевой активации, обработанньй водными растворами минеральных кислот и высушенный до концентрации воды 40-60 г на 100 г сухого угл . 2, Способ ПОП.1, отличаюS щийс  тем, что используют уголь с концентрацией поверхностных (Л основных групп не более 0,2 мг-экв/г.

Description

00 О)
со ю

Claims (2)

1. СПОСОБ ОЧИСТКИ ГАЗОВ ОТ ПРИМЕСЕЙ ФОСФИНА И АРСИНА пропусканием через слой предварительно обработанного активированного угля, отличающийся тем, что, с целью обеспечения возможности очистки ацетилена от указанных примесей, используют уголь торфяной сернисто-калиевой активации, обработанный водными растворами минеральных кислот и высушенный до концентрации воды 40-60 г на 100 г сухого угля.
2. Способ поп.1, отличающийся тем, что используют уголь с концентрацией поверхностных основных групп не более 0,2 мг-экв/г.
SU „1181692 >
1 1181692
SU833680071A 1983-11-14 1983-11-14 Способ очистки газов от примесей фосфина и арсина SU1181692A1 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU833680071A SU1181692A1 (ru) 1983-11-14 1983-11-14 Способ очистки газов от примесей фосфина и арсина

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU833680071A SU1181692A1 (ru) 1983-11-14 1983-11-14 Способ очистки газов от примесей фосфина и арсина

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SU1181692A1 true SU1181692A1 (ru) 1985-09-30

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5851270A (en) * 1997-05-20 1998-12-22 Advanced Technology Materials, Inc. Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
US5980608A (en) * 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US5985008A (en) * 1997-05-20 1999-11-16 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium
US6019823A (en) * 1997-05-16 2000-02-01 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members
US6027547A (en) * 1997-05-16 2000-02-22 Advanced Technology Materials, Inc. Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US6070576A (en) * 1998-06-02 2000-06-06 Advanced Technology Materials, Inc. Adsorbent-based storage and dispensing system
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US7857880B2 (en) 2002-10-31 2010-12-28 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US9468901B2 (en) 2011-01-19 2016-10-18 Entegris, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Авторское свидетельство СССР № 413968, кл. В 01 D 53/04, 1972. 2. Николаев В.Ф. Газоспасательна служба на промьшшенных предпри ти х. М.: Металлурги , 1971, с. 30-44. *

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5704965A (en) * 1994-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system utilizing carbon sorbent medium
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US5935305A (en) * 1994-10-13 1999-08-10 Advanced Technology Materials, Inc. Storage and delivery system for gaseous compounds
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US6125131A (en) * 1994-10-13 2000-09-26 Advanced Technology Materials, Inc. Laser system utilizing sorbent-based gas storage and delivery system
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
US6019823A (en) * 1997-05-16 2000-02-01 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members
US6027547A (en) * 1997-05-16 2000-02-22 Advanced Technology Materials, Inc. Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US5851270A (en) * 1997-05-20 1998-12-22 Advanced Technology Materials, Inc. Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means
US5985008A (en) * 1997-05-20 1999-11-16 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium
US5980608A (en) * 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6540819B2 (en) * 1998-03-27 2003-04-01 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6070576A (en) * 1998-06-02 2000-06-06 Advanced Technology Materials, Inc. Adsorbent-based storage and dispensing system
US7857880B2 (en) 2002-10-31 2010-12-28 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US9468901B2 (en) 2011-01-19 2016-10-18 Entegris, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same

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