TW531818B - Resin encapsulated BGA-type semiconductor device - Google Patents

Resin encapsulated BGA-type semiconductor device Download PDF

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Publication number
TW531818B
TW531818B TW90121129A TW90121129A TW531818B TW 531818 B TW531818 B TW 531818B TW 90121129 A TW90121129 A TW 90121129A TW 90121129 A TW90121129 A TW 90121129A TW 531818 B TW531818 B TW 531818B
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TW
Taiwan
Prior art keywords
pattern
semiconductor device
patent application
dielectric film
metal plate
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Application number
TW90121129A
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English (en)
Inventor
Yoshihiro Ono
Takehiko Maeda
Original Assignee
Nec Electronics Corp
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Publication of TW531818B publication Critical patent/TW531818B/zh

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Description

531818 五、發明説明（1 ) 發明背景 發明領域 本發明係有關一種樹脂封裝之球柵陣列（BGA)式半導 體裝置，且更特別的是有關一種適用於減小半導體裝置 之厚度及所佔據面積的半導體結構。 相關技術說明 近年來BGA式半導體裝置已因爲其較小的尺寸而變 得很普遍。第1圖顯示的是一種習知樹脂封裝之球柵陣 列（BGA}式半導體裝置。半導體晶片41係裝設於插入 基板42的中央面積上，且該半導體晶片4 1的底部係以 黏著劑43固定在該插入基板42之上。該插入基板42 係由聚亞醯胺樹脂、玻璃-環氧（樹脂）、或鉬酸鉍樹脂 (BT resin)之類有機介電材料製成的。於該插入基板42 上，形成有由諸如銅之類金屬材料製成的內連圖案44 黏著劑43係由其主要組成爲熱塑性環氧樹脂的材料製 成的。 ， 於上述習知球柵陣列（BGA)式半導體裝置中，該插入 基板42具有包含有機介電材料45及由製成而形成於該 有機介電材料45上之內連襯墊44的二層結構。如是， 很難進一步減小具有這類插入基板42之BGA式半導體 裝置的厚度。 曰本公開專利第Hei 2-240940號、第10-116935 號、第11-195733號文件說明的是藉由拋光該插入基板 之底部表面減小該樹脂插入基板的厚度以解決上述問題 产 531818 五、發明説明（2 ) 的技術。 前述文件中所說明的技術使用的是稍後將要藉由拋 光法加以去除的樹脂插入基板。通常於BGA式半導體 裝置中，一旦定出其上連接有接合電線之縫合區段的幾 何形狀，也會使構成外部端子之金屬凸塊的位置受限在 該縫合區段外圍附近之內。結果，該外部端子會相對於 其位置具有很差的彈性，且很難進一步減小該電子元件 以及承載有這種BG A式半導體裝置之電子裝置的二維 尺寸。 特別是，隨著對更小電子元件及電子裝置之需求的 曰益增長，強烈需求各半導體裝置之外部端子的配置具 有較小的節距。半導體晶片之電極襯墊內的圖形節距會 因爲微影術的進展而有某些程度的窄化。不過，仍然需 要充分的空間以便形成該半導體晶片之金屬凸塊，因此 無法依令人滿意的方式獲致減小各外部端子之節距的效 用。 發明之簡單說明 因此’本發明的目的是減小半導體裝置的尺寸，特 別是藉由改良其結構減小半導體裝置的厚度及其平面尺 寸。 本發明的另一目的是減小各BGA式半導體裝置之成 本及尺寸，並改良各電子元件以及承載有這種BGA式 半導體裝置之各電子裝置的可靠度，因此在各外部端子 的配置上提供足夠彈性。 -4- 531818 五、發明説明（3 ) 本發明提供了一種半導體裝置，係包含：第一內連 圖案；第一介電膜，係覆蓋於該第一內連圖案的頂部及 各側邊表面且其內含有各穿孔；第二內連圖案，係經由 各穿孔與該第一內連圖案達成電氣連接；半導體晶片， 係含有許多晶片電極且係裝設於該第一介電膜上；、內連 構件’係用於使各晶片電極連接到該第二內連圖案上； 封裝樹脂，係用於將該半導體晶片及各內連構件封裝於 該第一介電膜上；以及第二介電膜，係用於覆蓋住該第 一內連圖案的底部表面。 本發明也提供了一種用於製造該半導體裝置的方 法’係包含下列步驟：於金屬板上形成第一內連圖案； 於該第一內連圖案上形成具有許多穿孔的第一介電膜； 於該第一介電膜上形成第二內連圖案；使該第二內連圖 案經由各穿孔與該第一內連圖案達成電氣連接；於該第 一介電膜上裝設具有許多晶片電極的半導體晶片；使各 晶片電極連接到該第二內連圖案上；使半導體晶片封裝 於該第一介電膜上；選擇性地從該第一內連圖案的底部 表面上去除該金屬板；以及於該第一內連圖案的底部表 面上形成第二介電膜。 本發明也提供了一種用於製造該半導體裝置的方 法’係包含下列步驟：於金屬板的頂部表面上形成第一 內連圖案；於該金屬板的底部表面上形成第二內連圖 案；於該金屬板的頂部表面上裝設具有許多晶片電極的 半導體晶片；使各晶片電極連接到該第一內連圖案上； 531818 五、發明説明（4 ) 使半導體晶片封裝於該金屬板的頂部表面上；藉由利用 該第二內連圖案當作遮罩去除該金屬板；於該第二內連 圖案上形成許多外部電極；以及於該第二內連圖案上形 成介電膜並去除其上某一面積的金屬板，使各外部電極 露出於該介電膜上。 根據本發明的半導體裝置以及藉由本發明的方法所 製造的半導體裝置，能夠在不致於製造處理期間降低其 機械穩定度下，藉由結合會在裝設並封裝半導體晶片之 後去除掉的金屬板，顯著地改良該半導體裝置的厚度及 其二維尺寸。 本發明的上述及其他目的、特性、及優點將會因爲 以下參照所附圖示對顯示用實施例的詳細說明而變得更 明顯。 圖式之簡單說明 第1圖係用以顯示一種習知BGA式半導體裝置的截 面圖示。 第2圖係用以顯示一種根據本發明第一實施例之 BGA式半導體裝置的截面圖示。 第3圖係用以顯示第2圖中第一內連圖案的頂部平 面圖示。 第4A到第4B圖分別係用以顯示第2圖中第一內連 圖案及第二內連圖案內各穿孔圖形的頂部平面圖示。 第5圖係用以顯示第2圖中半導體裝置的底部平面 圖不，其中顯示的是各金屬凸塊的配置。 6- 531818 五、發明説明（5 ) 第6A到6G圖係用以顯示半導體裝置的各截面圖 示，其中係連續地顯示出一種根據本發明第五實施例之 製造方法中的各步驟。 第7圖係用以顯示一種根據本發明第二實施例之 BGA式半導體裝置的截面圖示。 第8圖係用以顯示一種根據本發明第三實施例之 BGA式半導體裝置的截面圖示。 第9圖係用以顯示一種根據本發明第四實施例之 BGA式半導體裝置的截面圖示。 第10A到10E圖係用以顯示半導體裝置的各截面圖 示，其中係連續地顯示出一種根據本發明第六實施例之 製造方法中的各步驟。 第1 1 A到1 1 E圖係用以顯示半導體裝置的各截面圖 示，其中係連續地顯示出一種根據本發明第七實施例之 製造方法中的各步驟。 較佳實施例的詳細說明 現在，吾人將參照各附圖以各實施例爲基礎說明本 發明，其中類似的構成元件係以相似的符號標示出。 參照第2圖，根據本發明第一實施例之半導體裝置 係含有第一內連圖案11以及覆蓋住該第一內連圖案11 之頂部及側邊表面的第一介電層12。第二內連圖案14 係形成於該第一介電層1 2上且係經由形成於該第一介 電層12內而穿透該第一介電層12的穿孔13連接到該 第一內連圖案11上。半導體晶片15係裝設於該第一介 531818 五、發明説明（6 ) 電層1 2上，而各接合電線1 7會使形成於該半導體晶片 15上的各晶片電極ι6與該第二內連圖案14連接在一 起。封裝樹脂1 8會將該半導體晶片1 5及各接合電線 封裝於該第一介電層12上，且構成外部電極的金屬 凸塊1 9係形成於該第一內連圖案11之底部表面上。構 成第二介電層的黏著介電薄片20會覆蓋住該第一內連 圖案Π的底部表面而露出各金屬凸塊19的底部表面。 參照第3圖，其中顯示的是該第一內連圖案之實例 的頂部平面圖示。該第一內連圖案11係包含極大數目 之多邊形外側襯墊3 1。每一個外側襯墊3 1都是耦合於 覆蓋用穿孔13上，且係耦合於底下各金屬凸塊19上。 由於位於各穿孔1 3之上的該第二內連圖案1 4係形成於 裝設有該半導體晶片1 5之外的面積上，各穿孔1 3也是 形成於裝設有該半導體晶片1 5之外的面積上。各金屬 凸塊1 9係依陣列方式配置在該半導體裝置底部表面的 幾乎全部面積上。第4A到4B圖顯示的分別是該第一 介電層12內所形成各穿孔13的位置以及該第二內連圖 案1 4的位置。該第一內連圖案1 1的各外側襯墊3 1都 是相對於它們的位置具有極高彈性的，因爲各外側襯墊 31足以使各穿孔13與金屬凸塊19形成電氣連接。該 第一內連圖案Π係由諸如銅及42-合金之類的材料製成 的。 於第4B圖中’該第二內連圖案14係包含極大數目 之多邊形內側襯墊32(其中每一個內側襯墊32都是連 531818 五、發明説明（7 ) 接於接合電線上）以及數個使各內側襯墊32與各穿孔 1 3連接在一起的內連結構27。每一個內側襯墊32都含 有落在裝設有該半導體晶片1 5位置附近的內側部分且 係連接於各穿孔1 3上，以及從該內側部分朝外延伸且 連接於接合電線1 7上的縫合部分。 第5圖顯示的是形成於該第一內連圖案π之底部表 面上各金屬凸塊1 9的配置。各金屬凸塊1 9係依陣列方 式配置在該半導體裝置底部表面的幾乎全部面積上。這 種配置係藉由使連接於該半導體晶片1 5上的該第二內 連圖案14以及連接於各金屬凸塊19上的該第一內連圖 案1 1分開而得到的。各金屬凸塊1 9形成這種配置的結 果，使半導體裝置設計的彈性獲致改良。 吾人能夠減小根據本實施例之半導體裝置的厚度， 因爲該半導體裝置在其底部表面上只含有兩個很薄的內 連圖案11和1 4以及由各金屬凸塊1 9構成的陣列。 接合電線1 7係由例如金、銅、鋁、或鈀製成的。使 用焊料或導電黏糊以連接各接合電線。較佳的是使用熱 塑性聚合物當作用於黏著介電薄片20的材料。 第6 A到6 G圖係用以顯示一種根據本發明實施例之 製造方法的各接續步驟。這種製造方法是一種製造出如 第2圖所示第一實施例中半導體裝置之修正型式的實 例。於這種修正型式中，該第二內連圖案本身是一種多 位準內連圖案。於此製造方法中，首先係藉由蝕刻法將 該第一內連圖案11形成於金屬板21的頂部表面上。 -9- 531818 五'發明説明（8 ) 於第6A圖中，含有落在由聚亞醯胺樹脂或環氧樹脂 製成之介電基板內許多內連層的多位準內連層23，係 以黏著劑22貼在該金屬板21上形成有該第一內連圖案 Η處。在溫度落在100 °C與200 °C之間而推進壓力爲每 平方厘米數十公斤（Kg/cm2)的條件下係使用諸如聚亞醯 胺樹脂之類熱塑性聚合物黏著劑當作黏著劑22。如是 將該黏著劑黏貼於該第一介電層1 2的頂部及側邊表面 之上。 如第6B圖所示，各穿孔24係藉由使用微影術將該 多位準內連層23製作成圖形而形成於該第一內連圖案 1 1上。於該微影術，例如可能塗佈有光阻材料且可能 在使該光阻材料曝光之前黏貼有介電薄膜。可以在將該 多位準內連層23黏貼於該金屬板2 1上之前以壓印鑄模 或是鑽孔機藉由對該多位準內連層23施行鑽孔而形成 各穿孔24。 接下來如第6C圖所示，延伸穿透各穿孔24的各接 合電線25會使該多位準內連層23的外部端子與該第一 內連圖案U連接在一起。然後，該半導體晶片15係裝 設於該多位準內連層23上，而該半導體晶片1 5的各晶 片電極1 6係以各接合電線1 7連接於該多位準內連層 23的各內部電極上，如第6D圖所示。 隨後如第6E圖所示，該半導體晶片1 5及各接合電 線1 7和2 5係封裝有封裝樹脂1 8。之後，藉由拋光法 自其底部表面將該金屬板2 1去除掉，如第6E圖所示 -10- 531818 五、發明説明（9 ) 留下該金屬板2 1的內連圖案1 1。藉由例如化學機械拋 光（C Μ P)技術執行該金屬板2 1的去除作業。然後在該 第一內連圖案1 1的必要位置亦即藉由去除該金屬板2 j 而露出的位置上形成各金屬凸塊1 9當作各外部電極。 隨後，藉由使該第一內連圖案11的底部表面覆蓋有該 第二介電層20而得到該半導體裝置。 於上述實施例中，該第一介電層12以及該第二內連 圖案14係藉由使該多位準內連層23接合於該第一內連 圖案1 1上而形成的。不過，可以依序將該第一介電層 12然後再將該第二內連圖案14形成於該金屬板21 上，如第2圖所示。 例如，第一實施例之半導體裝置內的第一介電層12 可能是以旋塗器（spin-coater)藉由塗佈諸如聚亞醯胺樹 脂或環氧樹脂之類光敏介電樹脂而形成的。這允許吾人 藉由曝光及顯影步驟形成各穿孔1 3。另外，各穿孔1 3 可能是以旋轉塗佈器藉由塗佈平常的介電材料並藉由利 用光阻遮罩蝕刻該介電材料而形成的。 同時能夠藉由屏幕列印方法形成該第一介電層1 2。 此例中，係藉由橡皮海棉將諸如胺甲酸酯之類介電材料 黏貼於該金屬板之上，且係藉由高溫烘烤方法或UV(紫 外線）照射方法進行烘烤。這種方法係在將屏幕遮罩裝 設於該第一內連圖案1 1上之後施行的，以覆蓋住將要 形成各穿孔13的位置並露出將要形成該第一介電層12 的面積。 -11- 531818 五、發明説明（10 ) 該第二內連圖案1 4可能是藉由例如濺鍍法在形成其 內含有各穿孔1 3的第一介電層1 2之後形成的。此例 中，係將阻抗層形成於該第一介電層1 2上然後再藉由 濺鍍法於其上形成導電層。吾人係在藉由於該阻抗層及 該導電層上形成必要圖案之後，藉由電解電鍍法將鋁、 鎳、銅之類埋入該圖案內。之後，將該阻抗層去除掉， 並藉由蝕刻法將藉由濺鍍法製成的導電層去除掉。 同時該第二內連圖案1 4也可能藉由屏幕列印方法利 用導電黏糊形成的。此例中，可能使用諸如銀和銅之類 金屬當作導電黏劑。吾人係在藉由屏幕列印方法塗佈導 電黏糊之後，藉由高溫或UV(紫外線）照射法進行烘烤。 至於本實施例中用來去除該金屬板21的方法，除了 化學機械拋光法之外可能使用化學蝕刻、機械硏磨、及 機械剝除技術。於其他方法中，機械剝除技術能夠利用 兩個金屬層之間在熱膨脹係數上的差異且能夠在高溫下 使任一金屬層軟化的優點。於化學蝕刻技術中，例如金 屬板係由銅或4 2 -合金形成的，且該蝕刻液可能是一種 氯化鐵溶液。在使用機械剝除技術時，較佳的是該第一 內連圖案係藉由電鍍法形成於該金屬板上，且在該電鍍 層的邊界上將該金屬板剝除。 第7圖顯示的是一種根據本發明第二實施例的半導 體裝置。與第一實施例的差異之一係將第一實施例中半 導體晶片15的晶片電極16替代爲該第二內連圖案14 上所形成的金屬凸塊26。另一差異是本實施例係在使 -12- 531818 五、發明説明（11 ) 半導體晶片1 5封裝有封裝樹脂！ 8之後藉由拋光法將封 裝樹脂1 8及半導體晶片丨5的頂部去除掉。 第8圖顯示的是一種根據本發明第三實施例的半導 體裝置。本實施例與第一實施例的差異是使用第一實施 例的部分第一內連圖案1 1當作本實施例的外部電極 1 1 A 〇 第9圖顯不的是一種根據本發明第四實施例的半導 體裝置。本實施例與第三實施例的差異係以各金屬凸塊 26將本實施例的半導體晶片1 5連接到第二內連圖案i 4 上。 第10A到10E圖係用以顯示一種根據本發明另一實 施例之製造方法。於本實施例中，係藉由電鍍法分別將 由金製成的第一內連圖案33及由金製成的第二'內連圖 案3 4形成於由銅製成之金屬板2 1的頂部及底部表面 上，如第10A圖所示。接下來，係將介電黏著劑35塗 佈到該金屬板2 1之上並將半導體晶片1 5裝設其上以便 施行接合。如第10B圖所示，係以各接合電線17將該 半導體晶片15的各晶片電極16連接到該第一內連圖案 33的縫合部分上。然後’以封裝樹脂18將該半導體晶 片1 5及各接合電線1 7封裝於該金屬板2 1的頂部表面 上。 隨後，利用該第二內連圖案3 4當作遮罩藉由蝕刻法 選擇性地去除該金屬板2 1，而將該金屬板2 1上除了該 第二內連圖案34之頂部表面以外的面積去除掉，如第 -13- 531818 五 '發明説明（12 ) 10D圖所示。將用來形成介電層20的介電樹脂塗佈到 該半導體裝置底部表面上除了將要形成該第二內連圖案 34之各金屬凸塊的面積以外的整個面積之上。 關於藉由上述方法製造成的半導體裝置，該金屬板 21會餘留在該第二內連圖案34之頂部表面上當作支撐 結構。由於這種金屬板21具有極高的機械強度，故本 實施例之半導體裝置的機械強度是高於具有膠帶基板之 習知半導體裝置之機械強度的。除此之外，優點是較之 習知半導體裝置這種型式的半導體裝置需要更少的元件 而具有包含內連圖案、基板材料、及內連圖案的三-層 結構。另外，將藉由電鍍法形成於該金屬板21上的內 連圖案33和34留下當作最後結構中的各內連圖案。考 量一般而言能夠藉由電鍍法以比藉由例如蝕刻法之類其 他技術更大的準確度形成該內連圖案，吾人能夠藉由本 實施例提供具有更微細圖案的內連結構。同時，由於根 據本發明的上述方法不會涉及穿孔形成方法，故能夠以 更高的產量製造半導體裝置。 由於只於用來當作該半導體晶片1 5上各晶片電極i 6 之接點面積的該縫合部分內形成該第一內連圖案3 3， 而使該第二內連圖案34及其頂部金屬板21延伸覆蓋住 更大的面積，故各金屬凸塊19的配置具有更大彈性， 且改良了該半導體裝置的整體機械強度。 該第一和第二內連圖案係以例如鎳/金、金、銀、 钯、或焊料電鍍材料形成的。 -14- 531818 五、發明説明（13 ) 第U A到1 1 E圖係用以顯示一種根據本發明另一實 施例之製造方法。於本實施例中，係藉由電鍍法分別將 由金製成的第一內連圖案33及由金製成的第二內連圖 案3 4形成於由銅製成之金屬板2 1的頂部及底部表面 上’如第1 1A圖所不。隨後如第1 1 B圖所示，係以導 電黏著劑將底部表面上含有各金屬凸塊2 6亦即各焊料 凸塊的半導體晶片1 5接合到該第一內連圖案33之上。然 後以封裝樹脂1 8將該半導體晶片1 5封裝於該金屬板 21上。 接下來，利用該第二內連圖案34當作遮罩將金屬板 2 1蝕刻掉，並選擇性地將該金屬板2 1上除了該第二內 連圖案3 4之頂部表面以外的面積去除掉，如第丨丨d圖 所示。將用來形成介電層20的介電樹脂塗佈到該半導 體裝置底部表面上除了將要形成該第二內連圖案34之 各金屬凸塊19的面積以外的整個面積之上。如第UE 圖所示’各金屬凸塊19係形成於該第二內連圖案34上 未形成介電層20處。 根據本實施例的製造方法，該第一內連圖案3 3需要 較小的佔據面積。 本發明中能夠使用的介電材料實例係包含聚亞醯胺 樹脂 '環氧樹脂、酚樹脂、及聚矽氧樹脂。能夠用於內 連圖案的材料實例係包含鎳、銅、及金。可以於列印方 法中使用包含例如銀和銅之類的導電黏糊。能夠用於各 接合電線的材料實例係包含金、銅、鋁、及鈀。能夠用 -15- 531818 五、發明説明（14) 於各金屬凸塊的材料實例係包含焊料、各向異性導電材 料、以及導電黏糊。能夠使用的黏著劑實例係包含諸如 聚亞醯胺樹脂和環氧樹脂之類的熱塑性聚合物黏著劑。 由於以上所說明的各實施例只是用來當作實例，故 本發明並不受限於上述實施例，且熟悉習用技術的人應 該能在不偏離本發明所附申請專利範圍之精神及架構下 作各種修正。 參考符號說明 11· · • · •第一內連圖案 1 1 A - • · · •外部電極 12 · · • · •第一介電層 13 · · • · •穿孑L 14 · · • · •第二內連圖案 15 · · • · •半導體晶片 16 · · • · •晶片電極 17 · · • · •接合電線 18· · • · ·封裝樹脂 19· · .· •金屬凸塊 20 · · • · •黏著介電薄片 21 · · • · •金屬板 22 · · • · •黏著劑 23 · · • ••多位準內連層 24 · · • ·.穿孔 25 · · • ·.接合電線 -16- 531818 五、發明説明（15 ) 26 .....金屬凸塊 27 .....內連結構 3 1.....外側襯墊 3 2.....內側襯墊 3 3.....第一內連圖案 34.....第二內連圖案 3 5.....介電黏著劑 4 1.....半導體晶片 4 2......插入基板 4 3.....黏著劑 4 4.....內連圖案 4 5.....有機介電材料 -17-

Claims (1)

  1. 531818 ~、申請專利範圍 ι· 一種半導體裝置，其特徵爲包括：第一內連圖案；第 一介電膜，係覆蓋於該第一內連圖案的頂部及各側邊 表面且其內含有各穿孔；第二內連圖案，係經由各穿 孔與該第一內連圖案達成電氣連接；半導體晶片，係 含有許多晶片電極且係裝設於該第一介電膜上；內連 構件’係用於使各晶片電極連接到該第二內連圖案上 ;封裝樹脂，係用於將該半導體晶片及各內連構件封 裝於該第一介電膜上；以及第二介電膜，係用於覆蓋 住該第一內連圖案的底部表面。 2.如申請專利範圍第丨項之半導體裝置，更包括形成於 該第一內連圖案之底部表面上且從該第二內連圖案露 出的許多外部端子。 3 .如申請專利範圍第2項之半導體裝置，其中各外部端 子都是金屬凸塊。 4.如申請專利範圍第丨項之半導體裝置，其中係將該第 一內連圖案的各部分形成爲許多外部端子。 5 ·如申請專利範圍第1項之半導體裝置，其中各內連構 件都是金屬凸塊。 6.如申請專利範圍第丨項之半導體裝置，其中各內連構 件都是接合電線。 7· —種用於製造半導體裝置之方法，其特徵爲包括下列 步驟：於金屬板上形成第一內連圖案；於該第一內連 圖案上形成具有許多穿孔的第一介電膜；於該第一介 電膜上形成第二內連圖案；使該第二內連圖案經由各 -18- 531818 六、申請專利範圍 芽孔與該弟一內連圖案達成電氣連接；於該第一'介電 膜上裝設具有許多晶片電極的半導體晶片；使各晶片 電極連接到該第二內連圖案上；使半導體晶片封裝於 該第一介電膜上；選擇性地從該第一內連圖案的底部 表面上去除該金屬板；以及於該第一內連圖案的底部 表面上形成第二介電膜。 8.如申請專利範圍第7項之方法，更包括於該第一內連 圖案上形成許多外部端子的步驟。 9 ·如申請專利範圍第7項之方法，其中係藉由蝕刻該金 屬板形成該第一內連圖案。 1 〇.如申請專利範圍第9項之方法，其中該蝕刻法係藉 由化學蝕刻、化學機械蝕刻、機械硏磨、及機械剝除 技術之一而施行的。 1 1 .如申請專利範圍第7項之方法，其中該第二介電膜 是一種黏著劑薄片。 12· —種用於製造半導體裝置的方法，其特徵爲包括下 列步驟：於金屬板的頂部表面上形成第一內連圖案； 於該金屬板的底部表面上形成第二內連圖案；於該金 屬板的頂部表面上裝設具有許多晶片電極的半導體晶 片；使各晶片電極連接到該第一內連圖案上；使半導 體晶片封裝於該金屬板的頂部表面上；藉由利用該第 一*內連Η案^作遮罩去除g亥金屬板；於該第二內連圖 案上形成許多外部電極；以及於該第二內連圖案上形 成介電膜並去除其上某一面積的金屬板，使各外部電 -19- 531818 六、申請專利範圍 極露出於該介電膜上。 1 3 .如申請專利範圍第1 2項之方法，其中該連接步驟使 用的是金屬凸塊或接合電線。 1 4.如申請專利範圍第1 2項之方法，其中該第一內連圖 案係藉由電鍍形成的。 1 5 .如申請專利範圍第1 2項之方法，其中該金屬板是一 種銅板且該第二內連圖案係藉由電鍍形成的。 -20-
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