TW396377B - Joint for fluid controller - Google Patents

Joint for fluid controller Download PDF

Info

Publication number
TW396377B
TW396377B TW087106972A TW87106972A TW396377B TW 396377 B TW396377 B TW 396377B TW 087106972 A TW087106972 A TW 087106972A TW 87106972 A TW87106972 A TW 87106972A TW 396377 B TW396377 B TW 396377B
Authority
TW
Taiwan
Prior art keywords
passage
coupling
holding member
valve
fluid
Prior art date
Application number
TW087106972A
Other languages
English (en)
Chinese (zh)
Inventor
Tadahiro Ohmi
Michio Yamaji
Tsutomu Shinohara
Shigeru Itoi
Keiji Hirao
Original Assignee
Tadahiro Ohmi
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tadahiro Ohmi, Fujikin Kk filed Critical Tadahiro Ohmi
Application granted granted Critical
Publication of TW396377B publication Critical patent/TW396377B/zh

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B21/00Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/003Housing formed from a plurality of the same valve elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L25/00Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00Branching pipes; Joining pipes to walls
    • F16L41/02Branch units, e.g. made in one piece, welded, riveted
    • F16L41/021T- or cross-pieces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00Devices or appurtenances for use in, or in connection with, pipes or pipe systems

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Non-Disconnectible Joints And Screw-Threaded Joints (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
TW087106972A 1997-05-08 1998-05-06 Joint for fluid controller TW396377B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11770297A JP3814704B2 (ja) 1997-05-08 1997-05-08 流体制御器用継手

Publications (1)

Publication Number Publication Date
TW396377B true TW396377B (en) 2000-07-01

Family

ID=14718205

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087106972A TW396377B (en) 1997-05-08 1998-05-06 Joint for fluid controller

Country Status (8)

Country Link
US (1) US6039360A (ja)
EP (1) EP0877170B1 (ja)
JP (1) JP3814704B2 (ja)
KR (1) KR19980086856A (ja)
CA (1) CA2236984A1 (ja)
DE (1) DE69815593T2 (ja)
IL (1) IL124370A (ja)
TW (1) TW396377B (ja)

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JP2002174400A (ja) * 2000-12-06 2002-06-21 Motoyama Eng Works Ltd 集積化ユニット
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
US6953048B2 (en) * 2001-09-07 2005-10-11 Circle Seal Controls, Inc. Modular surface-mount fluid-flow system
KR20060017577A (ko) * 2002-08-27 2006-02-24 셀레리티 인크. 공통 평면 내에 매니폴드 연결부를 갖는 모듈형 기판 가스패널
CN100422569C (zh) * 2002-11-26 2008-10-01 斯瓦戈洛克公司 模块化表面安装的流体系统
AU2003291156A1 (en) * 2002-11-26 2004-06-18 Swagelok Company Modular surface mount fluid system
US20050005981A1 (en) * 2003-03-26 2005-01-13 Paul Eidsmore Modular fluid components and assembly
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
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US7048008B2 (en) * 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
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US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
US7299825B2 (en) * 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
JP4780558B2 (ja) * 2005-12-09 2011-09-28 株式会社フジキン 流体制御装置用継手およびそれを用いた流体制御装置
US20070224708A1 (en) * 2006-03-21 2007-09-27 Sowmya Krishnan Mass pulse sensor and process-gas system and method
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
WO2008030501A2 (en) * 2006-09-06 2008-03-13 Ultra Clean Holdings, Incorporated Pre-certified process chamber and method
US7789107B2 (en) 2006-11-16 2010-09-07 Talon Innovations Fluid transport in monolithic structures
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
JP5020758B2 (ja) * 2007-09-25 2012-09-05 東京エレクトロン株式会社 ガス供給装置、半導体製造装置及びガス供給装置用部品
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
NL2001263C2 (nl) * 2008-02-07 2009-08-11 Wth Vloerverwarming B V Verdelersamenstel voor aansluiting van een veelheid leidingen voor vloeistof van een verwarmings- en/of koel-systeem.
FR2938622B1 (fr) * 2008-11-14 2013-01-18 Jtekt Hpi Systeme d'etablissement d'agencements de distribution d'un fluide hydraulique destine a des installations hydrauliques d'utilisation de ce fluide
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
SG176152A1 (en) * 2009-06-10 2011-12-29 Vistadeltek Llc Extreme flow rate and/or high temperature fluid delivery substrates
DE102010043865A1 (de) * 2009-11-30 2011-07-14 Horiba Stec Co., Ltd. Fluid device
US8336573B2 (en) * 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) * 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
JP2012037050A (ja) * 2010-07-12 2012-02-23 Ihara Science Corp 流体システム
JP5277278B2 (ja) * 2011-03-29 2013-08-28 株式会社フジキン 流体制御装置用継手
WO2012151292A2 (en) 2011-05-02 2012-11-08 Advantage Group International Inc. Manifold system for gas and fluid delivery
DE102011111055B4 (de) * 2011-08-24 2014-06-18 Viega Gmbh & Co. Kg System aus einer Befestigungsvorrichtung und einem Fitting
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6186271B2 (ja) * 2013-12-26 2017-08-23 株式会社フジキン 下段部材の固定装置およびこれを備えた流体制御装置
JP6518501B2 (ja) * 2015-04-28 2019-05-22 株式会社フジキン 流体制御装置用継手、流体制御装置用開閉弁および流体制御装置
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN108386606B (zh) * 2018-01-15 2019-11-26 江苏宁江文化科技有限公司 一种用于地下水管铺设的支撑装置

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Also Published As

Publication number Publication date
JP3814704B2 (ja) 2006-08-30
US6039360A (en) 2000-03-21
CA2236984A1 (en) 1998-11-08
IL124370A (en) 2001-01-11
DE69815593D1 (de) 2003-07-24
KR19980086856A (ko) 1998-12-05
JPH10311450A (ja) 1998-11-24
IL124370A0 (en) 1998-12-06
EP0877170B1 (en) 2003-06-18
EP0877170A1 (en) 1998-11-11
DE69815593T2 (de) 2004-05-06

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees