DE69815593D1 - Kupplungen für Durchflussregler - Google Patents

Kupplungen für Durchflussregler

Info

Publication number
DE69815593D1
DE69815593D1 DE69815593T DE69815593T DE69815593D1 DE 69815593 D1 DE69815593 D1 DE 69815593D1 DE 69815593 T DE69815593 T DE 69815593T DE 69815593 T DE69815593 T DE 69815593T DE 69815593 D1 DE69815593 D1 DE 69815593D1
Authority
DE
Germany
Prior art keywords
couplings
flow regulators
regulators
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69815593T
Other languages
English (en)
Other versions
DE69815593T2 (de
Inventor
Tadahiro Ohmi
Michio Yamaji
Tsutomu Shinohara
Shigeru Itoi
Keiji Hirao
Yuji Kawano
Shigeaki Tanaka
Kosuke Yokoyama
Hiroshi Morokoshi
Nobukazu Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Application granted granted Critical
Publication of DE69815593D1 publication Critical patent/DE69815593D1/de
Publication of DE69815593T2 publication Critical patent/DE69815593T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00—Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L25/00—Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F16L41/021—T- or cross-pieces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Non-Disconnectible Joints And Screw-Threaded Joints (AREA)
DE69815593T 1997-05-08 1998-05-05 Kupplungen für Durchflussregler Expired - Fee Related DE69815593T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11770297 1997-05-08
JP11770297A JP3814704B2 (ja) 1997-05-08 1997-05-08 流体制御器用継手

Publications (2)

Publication Number Publication Date
DE69815593D1 true DE69815593D1 (de) 2003-07-24
DE69815593T2 DE69815593T2 (de) 2004-05-06

Family

ID=14718205

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69815593T Expired - Fee Related DE69815593T2 (de) 1997-05-08 1998-05-05 Kupplungen für Durchflussregler

Country Status (8)

Country Link
US (1) US6039360A (de)
EP (1) EP0877170B1 (de)
JP (1) JP3814704B2 (de)
KR (1) KR19980086856A (de)
CA (1) CA2236984A1 (de)
DE (1) DE69815593T2 (de)
IL (1) IL124370A (de)
TW (1) TW396377B (de)

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US7048007B2 (en) * 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
EP1571381B1 (de) 1998-03-05 2009-12-02 The Swagelok Company Verteiler mit modularer Oberflächenmontierung
CN1107830C (zh) 1998-03-05 2003-05-07 斯瓦戈洛克公司 按标准形式设计的表面安装歧管
DE69933899T2 (de) 1998-05-18 2007-05-31 Swagelok Co., Cleveland Oberflächenmontierbarer Verteiler
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
US6729353B2 (en) * 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus
JP2001082609A (ja) 1999-09-09 2001-03-30 Motoyama Eng Works Ltd シールガスケット
US6640835B1 (en) * 2000-03-03 2003-11-04 Creative Pathways, Inc. Micromount™ system
IT249485Y1 (it) * 2000-03-17 2003-05-19 Dalmec Spa Elemento di supporto e distribuzione per una valvola pneumatica.
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
JP2002174400A (ja) * 2000-12-06 2002-06-21 Motoyama Eng Works Ltd 集積化ユニット
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
US6953048B2 (en) * 2001-09-07 2005-10-11 Circle Seal Controls, Inc. Modular surface-mount fluid-flow system
CN100396980C (zh) * 2002-08-27 2008-06-25 迅捷公司 在公共平面中有歧管连接的模块式衬底配气板
US7258139B2 (en) 2002-11-26 2007-08-21 Swagelok Company Modular surface mount fluid system
CN101372991B (zh) * 2002-11-26 2012-06-27 斯瓦戈洛克公司 模块化表面安装的流体系统
US20050005981A1 (en) * 2003-03-26 2005-01-13 Paul Eidsmore Modular fluid components and assembly
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2006022926A (ja) * 2004-07-09 2006-01-26 Ckd Corp 集積弁用下部ブロック
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7299825B2 (en) * 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
JP4780558B2 (ja) * 2005-12-09 2011-09-28 株式会社フジキン 流体制御装置用継手およびそれを用いた流体制御装置
US20070224708A1 (en) * 2006-03-21 2007-09-27 Sowmya Krishnan Mass pulse sensor and process-gas system and method
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
US20100112814A1 (en) * 2006-09-06 2010-05-06 Sowmya Krishnan Pre-certified process chamber and method
US7789107B2 (en) 2006-11-16 2010-09-07 Talon Innovations Fluid transport in monolithic structures
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
JP5020758B2 (ja) * 2007-09-25 2012-09-05 東京エレクトロン株式会社 ガス供給装置、半導体製造装置及びガス供給装置用部品
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
NL2001263C2 (nl) * 2008-02-07 2009-08-11 Wth Vloerverwarming B V Verdelersamenstel voor aansluiting van een veelheid leidingen voor vloeistof van een verwarmings- en/of koel-systeem.
FR2938622B1 (fr) * 2008-11-14 2013-01-18 Jtekt Hpi Systeme d'etablissement d'agencements de distribution d'un fluide hydraulique destine a des installations hydrauliques d'utilisation de ce fluide
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
KR101779849B1 (ko) * 2009-06-10 2017-10-10 비스타델텍, 엘엘씨 극 유량 및/또는 고온 유체 전달 기판
DE102010043865A1 (de) * 2009-11-30 2011-07-14 Horiba Stec Co., Ltd. Fluid device
US8336573B2 (en) * 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) * 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
JP2012037050A (ja) * 2010-07-12 2012-02-23 Ihara Science Corp 流体システム
JP5277278B2 (ja) * 2011-03-29 2013-08-28 株式会社フジキン 流体制御装置用継手
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
DE102011111055B4 (de) * 2011-08-24 2014-06-18 Viega Gmbh & Co. Kg System aus einer Befestigungsvorrichtung und einem Fitting
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6186271B2 (ja) * 2013-12-26 2017-08-23 株式会社フジキン 下段部材の固定装置およびこれを備えた流体制御装置
JP6518501B2 (ja) * 2015-04-28 2019-05-22 株式会社フジキン 流体制御装置用継手、流体制御装置用開閉弁および流体制御装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN108386606B (zh) * 2018-01-15 2019-11-26 江苏宁江文化科技有限公司 一种用于地下水管铺设的支撑装置

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US2286105A (en) * 1940-04-17 1942-06-09 Cherry Burrel Corp Sanitary pipe coupling
US2658776A (en) * 1950-03-14 1953-11-10 Burr C Wilcox Structural rod joint
US3012581A (en) * 1958-08-28 1961-12-12 Gen Controls Co Pipe coupling system for valves
FR1579506A (de) * 1968-01-31 1969-08-29
US3486771A (en) * 1968-09-30 1969-12-30 Tech Aero Inc Connector fitting
FR2250907A1 (en) * 1973-11-09 1975-06-06 Bouteille Daniel Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block
US3975068A (en) * 1973-12-20 1976-08-17 Speckin Leonard A Column mounted tool holder
FR2267467B1 (de) * 1974-04-11 1976-12-17 Telemecanique Electrique
DE2518465A1 (de) * 1975-04-25 1976-11-04 Hydromatik Gmbh Verkettungssystem fuer hydraulische ventile
DE3131336A1 (de) * 1981-08-07 1983-02-24 Helmut 7000 Stuttgart Schlaich Rohrverteilerstueck fuer vakuum- und gasleitungen
JPS6030488A (ja) * 1983-07-29 1985-02-16 Toshiba Corp 密閉型圧縮機
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FR2647522B1 (fr) * 1989-05-29 1991-07-19 Legris Sa Ensemble comprenant un organe pilote par une electrovanne pneumatique
US5266740A (en) * 1992-04-29 1993-11-30 Hsu Cheng S Protecting cover for a coaxial connector
US5205520A (en) * 1992-05-26 1993-04-27 Hydro-Craft, Inc. Retaining block for clamping system
JP3486238B2 (ja) * 1994-09-21 2004-01-13 Ｓｍｃ株式会社 切換弁
DE4443081A1 (de) * 1994-12-03 1996-06-05 Mueller A & K Gmbh Co Kg Einrichtung zum Zusammenschalten mehrerer Elektromagnetventile
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US5732744A (en) * 1996-03-08 1998-03-31 Control Systems, Inc. Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components
US5860676A (en) * 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components

Also Published As

Publication number Publication date
JPH10311450A (ja) 1998-11-24
DE69815593T2 (de) 2004-05-06
EP0877170B1 (de) 2003-06-18
US6039360A (en) 2000-03-21
TW396377B (en) 2000-07-01
IL124370A0 (en) 1998-12-06
EP0877170A1 (de) 1998-11-11
KR19980086856A (ko) 1998-12-05
IL124370A (en) 2001-01-11
JP3814704B2 (ja) 2006-08-30
CA2236984A1 (en) 1998-11-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee