TW202207498A - Flat display device and manufacturing method of flat display device - Google Patents

Flat display device and manufacturing method of flat display device Download PDF

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TW202207498A
TW202207498A TW110108336A TW110108336A TW202207498A TW 202207498 A TW202207498 A TW 202207498A TW 110108336 A TW110108336 A TW 110108336A TW 110108336 A TW110108336 A TW 110108336A TW 202207498 A TW202207498 A TW 202207498A
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substrate
wire
layer
display device
wires
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TW110108336A
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TWI758124B (en
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呂智文
莊皓安
侯君岳
陳錫宏
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友達光電股份有限公司
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Abstract

A flat display device including a substrate and a plurality of side wires is provided. The substrate has a top surface and a bottom surface opposite to the top surface and a side surface connecting between the top surface and the bottom surface. The side surface has at least one wire disposing part. The wire disposing part extends along an arc trace on a plane of the substrate. The side wires extend from the top surface, passing through the wire disposing part of the side surface to the bottom surface. A manufacturing method of a flat display device is also provided herein.

Description

平面顯示裝置及平面顯示裝置的製造方法Flat display device and method of manufacturing the same

本發明是有關於一種平面顯示裝置及平面顯示裝置的製造方法。The present invention relates to a flat display device and a manufacturing method of the flat display device.

因應顯示裝置的多元化應用,各種製造技術及產品設計都不斷推陳出新。為了提供更多元的應用,適用弧形顯示面板的產品更是陸續被提出。然而,目前適用弧形顯示面板的產品通常需要寬、長的邊框以接合主動元件或被動元件等類似元件。如此,導致顯示裝置的尺寸受到限制。In response to the diversified applications of display devices, various manufacturing technologies and product designs are constantly being introduced. In order to provide more diverse applications, products suitable for curved display panels have been proposed one after another. However, products currently suitable for curved display panels generally require wide and long bezels to engage active elements or passive elements and the like. As such, the size of the display device is limited.

本發明提供一種平面顯示裝置,利用側導線的設計來縮減邊框。The present invention provides a flat display device, which utilizes the design of side wires to reduce the frame.

本發明提供一種平面顯示裝置的製造方法,可製作達成窄邊框設計需求的平面顯示裝置。The present invention provides a manufacturing method of a flat display device, which can produce a flat display device that meets the requirements of narrow frame design.

本發明的平面顯示裝置包括基板以及多條側導線。基板具有相對的頂面及底面、以及連接於頂面與底面之間的側面。側面具有導線設置部,且導線設置部在基板的平面上沿弧形軌跡分布。側導線連續地由基板的頂面經過導線設置部而延伸至底面。The flat display device of the present invention includes a substrate and a plurality of side wires. The substrate has opposite top and bottom surfaces, and side surfaces connected between the top and bottom surfaces. The side surface has wire setting parts, and the wire setting parts are distributed along arc-shaped tracks on the plane of the substrate. The side lead wires extend continuously from the top surface of the substrate to the bottom surface through the lead wire setting portion.

在本發明的一實施例中,平面顯示裝置還包括多個導線接墊。導線接墊配置於基板的頂面及底面的至少其中一者的周邊區。多個導線接墊的每一者具有接合面,且接合面與多條側導線的其中一者接觸。In an embodiment of the present invention, the flat panel display device further includes a plurality of wire pads. The wire pads are disposed in a peripheral area of at least one of the top surface and the bottom surface of the substrate. Each of the plurality of wire pads has a bonding surface, and the bonding surface is in contact with one of the plurality of side wires.

在本發明的一實施例中,上述多條側導線的末端大致上沿著直線軌跡並排成列。越靠近列中心的側導線的線寬越寬,越靠近列邊緣的側導線的線寬越窄。In an embodiment of the present invention, the ends of the plurality of side wires are arranged in a row substantially along a straight line. The line width of the side conductors closer to the center of the column is wider, and the line width of the side conductors closer to the edge of the column is narrower.

在本發明的一實施例中,上述多條側導線的每一者具有側面段。側面段包括側面抗蝕刻層以及側面導體層。側面抗蝕刻層配置於基板的側面上。側面導體層夾設於側面抗蝕刻層及基板的側面之間。越靠近列邊緣的側面段具有越厚的側面抗蝕刻層,越靠近列中心的側面段具有越薄的側面抗蝕刻層。側面段的側面導體層具有實質相同的厚度。In one embodiment of the present invention, each of the plurality of side conductors has a side segment. The side segment includes a side etch resist layer and a side conductor layer. The side etching resist layer is disposed on the side surface of the substrate. The side conductor layer is sandwiched between the side etching resist layer and the side surface of the substrate. Side sections closer to the column edge have thicker side etch resists, and side sections closer to the center of the column have thinner side etch resists. The side conductor layers of the side segments have substantially the same thickness.

在本發明的一實施例中,上述多條側導線的每一者具有彎曲的末端。多條側導線的末端朝相同側彎曲,且多條側導線的末端大致上沿著弧線軌跡排列。In one embodiment of the present invention, each of the plurality of side wires has a curved end. The ends of the plurality of side wires are bent toward the same side, and the ends of the plurality of side wires are generally arranged along an arc trajectory.

在本發明的一實施例中,上述多條側導線的每一者包括導體層與抗蝕刻層,導體層夾設於抗蝕刻層及基板之間。導體層相對於抗蝕刻層內縮而使基板、導體層與抗蝕刻層構成沿著導體層周緣的底切結構。In an embodiment of the present invention, each of the plurality of side wires includes a conductor layer and an etch-resistant layer, and the conductor layer is sandwiched between the etch-resistant layer and the substrate. The conductor layer shrinks inwardly relative to the etch-resistant layer, so that the substrate, the conductor layer and the etch-resistant layer form an undercut structure along the periphery of the conductor layer.

在本發明的一實施例中,上述平面顯示裝置還包括至少一電路板。電路板配置於基板的底面,且與多條側導線電性連接。In an embodiment of the present invention, the above flat panel display device further includes at least one circuit board. The circuit board is arranged on the bottom surface of the substrate, and is electrically connected with the plurality of side wires.

在本發明的一實施例中,上述導線設置部包括第一導線設置部及第二導線設置部。第一導線設置部的曲率半徑大於第二導線設置部的曲率半徑。多條側導線在第一導線設置部的排列間距大於在第二導線設置部的排列間距。In an embodiment of the present invention, the wire setting portion includes a first wire setting portion and a second wire setting portion. The radius of curvature of the first wire setting portion is larger than the radius of curvature of the second wire setting portion. The arrangement pitch of the plurality of side wires in the first wire arrangement portion is greater than the arrangement pitch of the second wire arrangement portion.

本發明的平面顯示裝置的製造方法包括以下步驟,但不以此為限。提供一基板,其中基板具有相對的頂面及底面、以及連接於頂面與底面之間的側面,側面具有導線設置部,導線設置部在基板的平面上呈弧形。形成導體材料層,其中導體材料層連續地覆蓋基板的頂面、側面的導線設置部及底面。將抗蝕刻圖案設置於轉印工具上。使基板的側面抵靠轉印工具,並使基板相對於轉印工具旋轉,以將抗蝕刻圖案沿著導線設置部轉印於導體材料層上。移除未被抗蝕刻圖案遮蔽的部分的導體材料層,以形成多條側導線。The manufacturing method of the flat display device of the present invention includes the following steps, but is not limited thereto. A base plate is provided, wherein the base plate has opposite top and bottom surfaces, and a side surface connected between the top surface and the bottom surface, the side surface has a wire setting part, and the wire setting part is arc-shaped on the plane of the base plate. A conductor material layer is formed, wherein the conductor material layer continuously covers the top surface of the substrate, the wire arrangement portions on the side surfaces, and the bottom surface. A resist pattern is placed on the transfer tool. The side surface of the substrate is abutted against the transfer tool, and the substrate is rotated relative to the transfer tool to transfer the anti-etching pattern onto the conductor material layer along the wire arrangement portion. A portion of the conductor material layer not shielded by the etch-resistant pattern is removed to form a plurality of side wires.

在本發明的一實施例中,上述多條側導線的末端沿基板的旋轉方向彎曲。In an embodiment of the present invention, the ends of the plurality of side wires are bent along the rotation direction of the substrate.

基於上述,本發明實施例的平面顯示裝置包括設置於基板邊緣的側導線,且側導線連續地由基板的頂面經過側面的導線設置部而延伸至底面,從而可適用於具有弧形顯示面板的平面顯示裝置,且可縮減平面顯示裝置的邊框寬度以達到窄邊框的設計。Based on the above, the flat display device according to the embodiment of the present invention includes side wires arranged on the edge of the substrate, and the side wires continuously extend from the top surface of the substrate to the bottom surface through the wire setting portions on the side surfaces, so that it can be applied to a display panel with an arc shape. The flat-panel display device can reduce the frame width of the flat-panel display device to achieve a narrow frame design.

圖1A至圖1E呈現本發明一些實施例的製造平面顯示裝置的側導線的部分步驟的俯視示意圖;圖2A至圖2E分別呈現沿圖1A至圖1E中線A-A’的剖面示意圖。1A to FIG. 1E are schematic top views of some steps of manufacturing side wires of a flat display device according to some embodiments of the present invention;

請參照圖1A與圖2A,提供基板100,並於基板100上預先形成驅動電路結構110。基板100為具有一定機械強度而可以承載物件,以供多個膜層及/或多個物件配置其上的弧形基板。在一些實施例中,基板100的材質包括玻璃、高分子材料、陶瓷等。在另外一些實施例中,基板100可以為多層基板,其由多個子層堆疊而成。Referring to FIG. 1A and FIG. 2A , a substrate 100 is provided, and a driving circuit structure 110 is pre-formed on the substrate 100 . The substrate 100 is an arc-shaped substrate having a certain mechanical strength and capable of supporting objects for disposing a plurality of film layers and/or objects thereon. In some embodiments, the material of the substrate 100 includes glass, polymer materials, ceramics, and the like. In other embodiments, the substrate 100 may be a multi-layer substrate, which is formed by stacking multiple sub-layers.

基板100具有頂面102及相對於頂面102的底面104、以及連接於頂面102與底面104之間的側面106。在本實施例中,圖1A是以基板100的頂面102呈圓形為例,但本發明不以此為限。在其他實施例中,頂面102的形狀可以是具有直線輪廓與曲線輪廓之組合或僅具有曲線輪廓的形狀。在本實施例中,側面106大致由頂面102的輪廓邊緣沿Z方向延伸,因此圖1A中將側面106標註於頂面102的輪廓上以便於說明。側面106具有至少一導線設置部106c,且導線設置部106c在基板100的平面上沿弧形軌跡分布。頂面102為圓形時,側面106構成為以頂面102的圓心為軸心的環狀面。另一方面,側面106的法線方向不同於頂面102,也不同於底面104。在一些實施例中,頂面102與底面104的法向量可彼此平行,但不以此為限。舉例而言,頂面102及底面104例如分別為平行於X方向-Y方向的平面且側面106例如平行於Z方向,則頂面102、底面104及側面106例如構成一圓柱體。The substrate 100 has a top surface 102 and a bottom surface 104 opposite to the top surface 102 , and a side surface 106 connected between the top surface 102 and the bottom surface 104 . In this embodiment, FIG. 1A takes an example in which the top surface 102 of the substrate 100 is circular, but the invention is not limited to this. In other embodiments, the top surface 102 may be shaped with a combination of straight and curvilinear profiles or with only curvilinear profiles. In this embodiment, the side surface 106 is substantially extended along the Z direction by the contour edge of the top surface 102 , so the side surface 106 is marked on the contour of the top surface 102 in FIG. 1A for the convenience of description. The side surface 106 has at least one wire arrangement portion 106c, and the wire arrangement portion 106c is distributed along an arc-shaped track on the plane of the substrate 100 . When the top surface 102 is circular, the side surface 106 is configured as an annular surface with the center of the top surface 102 as the axis. On the other hand, the normal direction of the side surface 106 is different from that of the top surface 102 and also different from that of the bottom surface 104 . In some embodiments, the normal vectors of the top surface 102 and the bottom surface 104 may be parallel to each other, but not limited thereto. For example, the top surface 102 and the bottom surface 104 are respectively planes parallel to the X direction and the Y direction, and the side surface 106 is parallel to the Z direction, for example, the top surface 102 , the bottom surface 104 and the side surface 106 form a cylinder, for example.

驅動電路結構110可包括畫素接墊112以及導線接墊114。在本實施例中,畫素接墊112與導線接墊114都配置於基板100的頂面102上。具體而言,畫素接墊112例如陣列排列於基板100的頂面102的顯示區適用於接合例如發光二極體或類似的顯示元件,導線接墊114例如配置於基板100的頂面102的周邊區。在一些實施例中,驅動電路結構110還可包括電性連接於畫素接墊112與導線接墊114的畫素電路(圖1A未示出)。舉例而言,畫素電路(圖1A未示出)可包括訊號線、主動元件、被動元件等,其中主動元件例如為電晶體而被動元件例如為電容結構,但不以此為限。在一些實施例中,畫素電路(圖1A未示出)可以是採用膜層沉積搭配微影蝕刻的方式或是印刷的方式製作於基板100的頂面102上。因此,上述的電晶體可以為薄膜電晶體,而電容結構可以由導電層與介電層堆疊而成。另外,在一些實施例中,驅動電路結構110還可包括配置於基板100的底面104上的導線接墊(圖1A未示出)及/或對應的導線。The driving circuit structure 110 may include pixel pads 112 and wire pads 114 . In this embodiment, the pixel pads 112 and the wire pads 114 are both disposed on the top surface 102 of the substrate 100 . Specifically, the pixel pads 112 arranged in an array such as a display area on the top surface 102 of the substrate 100 are suitable for bonding, such as light emitting diodes or similar display elements, and the wire pads 114 are, for example, arranged on the top surface 102 of the substrate 100 . surrounding area. In some embodiments, the driving circuit structure 110 may further include a pixel circuit (not shown in FIG. 1A ) electrically connected to the pixel pads 112 and the wire pads 114 . For example, the pixel circuit (not shown in FIG. 1A ) may include signal lines, active elements, passive elements, etc., wherein the active elements are transistors, and the passive elements are capacitors, but not limited thereto. In some embodiments, the pixel circuit (not shown in FIG. 1A ) may be fabricated on the top surface 102 of the substrate 100 by means of film deposition and lithography or printing. Therefore, the above-mentioned transistor can be a thin film transistor, and the capacitor structure can be formed by stacking a conductive layer and a dielectric layer. In addition, in some embodiments, the driving circuit structure 110 may further include wire pads (not shown in FIG. 1A ) and/or corresponding wires disposed on the bottom surface 104 of the substrate 100 .

在圖1A中,導線接墊114的數量為多個,且多個導線接墊114可沿著X方向排列設置。導線接墊114位於頂面102上,且導線接墊114的設置位置相較於畫素接墊112更鄰近側面106,特別是,更鄰近導線設置部106c。具體而言,各導線接墊114可具有接合面114a。接合面114a可以是導線接墊114與後續欲形成的側導線(圖1A未示出)接觸的面。導線接墊114的接合面114a例如沿著鄰近側面106的直線軌跡L1排成一列。需說明的是,圖式中的直線軌跡L1是為了便於更清楚的說明本實施方式的虛擬線段,其並非實際存在於基板100上的線段。In FIG. 1A , the number of the wire bonding pads 114 is multiple, and the plurality of wire bonding pads 114 can be arranged along the X direction. The wire pads 114 are located on the top surface 102 , and the arrangement positions of the wire pads 114 are closer to the side surface 106 than the pixel pads 112 , especially, closer to the wire arrangement portion 106 c . Specifically, each wire pad 114 may have a bonding surface 114a. The bonding surface 114a may be the surface where the wire pad 114 contacts with the side wire (not shown in FIG. 1A ) to be formed subsequently. The bonding surfaces 114 a of the wire bonding pads 114 are arranged in a line along a straight line L1 adjacent to the side surface 106 , for example. It should be noted that the linear trajectory L1 in the drawings is a virtual line segment in the present embodiment for the convenience of clearer description, and is not a line segment that actually exists on the substrate 100 .

舉例來說,直線軌跡L1可重疊頂面102的圓形輪廓的一假想弦,但不以此為限。在本實施例中,導線接墊114可規則排列於直線軌跡L1上。在可替代實施例中,導線接墊114可不規則的沿直線軌跡L1排列或交錯地排列成兩列,不過預定要與後續製作的側導線接觸的接合面114a可大致位於直線軌跡L1上。在一些實施例中,導線接墊114上還可形成一保護層(圖1A未示出)。舉例來說,保護層(圖1A未示出)可具有分別對應於各導線接墊114的多個開口,各導線接墊114在多個開口的面積中並未被保護層覆蓋從而定義出接合面114a,使後續製作的側導線可在對應的開口中與導線接墊114接觸。For example, the linear trajectory L1 may overlap an imaginary chord of the circular outline of the top surface 102, but is not limited thereto. In this embodiment, the wire pads 114 can be regularly arranged on the straight track L1. In an alternative embodiment, the wire pads 114 may be irregularly arranged along the straight line L1 or staggered into two rows, but the bonding surfaces 114a intended to be in contact with the subsequently fabricated side wires may be substantially located on the straight line L1. In some embodiments, a protective layer (not shown in FIG. 1A ) may also be formed on the wire pads 114 . For example, the protective layer (not shown in FIG. 1A ) may have a plurality of openings respectively corresponding to each wire pad 114 , each wire pad 114 is not covered by the protective layer in the area of the plurality of openings to define a bond The surface 114a enables the side wires to be fabricated subsequently to be in contact with the wire pads 114 in the corresponding openings.

請參照圖1B與圖2B,於基板100上形成導體材料層122。導體材料層122可以覆蓋基板100的頂面102的周邊區。在一些實施例中,導體材料層122還可局部覆蓋基板100的頂面102的顯示區。在另外一些實施例中,形成導體材料層122之前可進一步使用保護膜或是類似結構覆蓋位於顯示區中的畫素接墊112,使得導體材料層122不接觸畫素接墊112。如俯視圖1B所示,導體材料層122例如呈環形。舉例而言,導體材料層122例如呈現以頂面102的圓心為中心的環形。如剖視圖2B所示,導體材料層122連續地覆蓋基板100的頂面102、側面106的導線設置部106c及底面104。導體材料層122可採用邊緣濺鍍的方式形成於基板100上。導體材料層122的材質包括銅、鋁、鉬、銀、金、鎳、鈦、銦錫氧化物(Indium Tin Oxide,ITO)、氧化銦鎵鋅(IGZO)等。導體材料層122可以接觸且直接覆蓋住導線接墊114。在底面104上設置有接墊(例如導線接墊,未示出)時,導體材料層122可以接觸且直接覆蓋住底面104上的導線接墊。Referring to FIG. 1B and FIG. 2B , a conductor material layer 122 is formed on the substrate 100 . The conductor material layer 122 may cover the peripheral area of the top surface 102 of the substrate 100 . In some embodiments, the conductor material layer 122 may also partially cover the display area of the top surface 102 of the substrate 100 . In other embodiments, a protective film or a similar structure may be used to cover the pixel pads 112 in the display area before forming the conductive material layer 122 , so that the conductive material layer 122 does not contact the pixel pads 112 . As shown in the top view of FIG. 1B , the conductor material layer 122 is, for example, annular. For example, the conductor material layer 122 presents a ring shape centered on the center of the top surface 102 . As shown in cross-sectional view 2B , the conductor material layer 122 continuously covers the top surface 102 of the substrate 100 , the lead wire installation portion 106 c of the side surface 106 , and the bottom surface 104 . The conductor material layer 122 may be formed on the substrate 100 by edge sputtering. The material of the conductor material layer 122 includes copper, aluminum, molybdenum, silver, gold, nickel, titanium, indium tin oxide (ITO), indium gallium zinc oxide (IGZO), and the like. The conductor material layer 122 may contact and directly cover the wire pads 114 . When pads (eg, wire pads, not shown) are provided on the bottom surface 104 , the conductor material layer 122 may contact and directly cover the wire pads on the bottom surface 104 .

請參照圖1C與圖2C,將抗蝕刻圖案P1設置於轉印工具130上。具體而言,轉印工具130可包括輥132以及載體134,抗蝕刻圖案P1例如以塗佈、印刷或是沾附等方式形成於載體134上。之後,使輥132沿移動方向D1移動而將載體134抵壓基板100的側面106的導線設置部106c,使得載體134上的抗蝕刻圖案P1在導線設置部106c處附著於導體材料層122上。在一些實施例中,抗蝕刻圖案P1例如為併排於載體134上的條狀的圖案。抗蝕刻圖案P1的材質可為導電材,例如銀膠等。在一些實施例中,抗蝕刻圖案P1的材質可為絕緣材,例如聚酯類樹脂(polyester resins)、酚醛樹脂(phenolic resins)、醇酸樹脂(alkyd resins)、聚碳酸酯樹脂(polycarbonate resins)、聚醯胺樹脂(polyamide resins)、聚胺酯樹脂(polyurethane resins)、矽氧樹脂(silicone resins)、環氧樹脂(epoxy resins)、聚乙烯樹脂(polyethylene resins)、丙烯酸樹脂(acrylic resins)、聚苯乙烯樹脂(polystyrene resins)、聚丙烯樹脂(polypropylene resins)等。Referring to FIG. 1C and FIG. 2C , the etching resist pattern P1 is disposed on the transfer tool 130 . Specifically, the transfer tool 130 may include a roller 132 and a carrier 134 , and the anti-etching pattern P1 is formed on the carrier 134 by, for example, coating, printing, or adhesion. After that, the roller 132 is moved along the moving direction D1 to press the carrier 134 against the wire setting portion 106c of the side surface 106 of the substrate 100, so that the etching resist pattern P1 on the carrier 134 is attached to the conductor material layer 122 at the wire setting portion 106c. In some embodiments, the anti-etching patterns P1 are, for example, strip-shaped patterns arranged side by side on the carrier 134 . The material of the anti-etching pattern P1 can be a conductive material, such as silver glue. In some embodiments, the material of the etching resist pattern P1 may be an insulating material, such as polyester resins, phenolic resins, alkyd resins, and polycarbonate resins. , Polyamide resins, Polyurethane resins, Silicone resins, Epoxy resins, Polyethylene resins, Acrylic resins, Polyphenylene Polystyrene resins, polypropylene resins, etc.

在一些實施例中,載體134可採用彈性材質,例如橡膠等。如此,載體134抵壓基板100的導線設置部106c時會產生形變,使載體134的一部份可以抵壓到頂面102與底面104上的導體材料層122,而將抗蝕刻圖案P1壓印於頂面102與底面104上的導體材料層122上。舉例而言,轉印工具130的輥132在轉印過程中可沿移動方向D1朝向基板100的導線設置部106c水平移動而將抗蝕刻圖案P1轉印於側面106的導線設置部106c、頂面102與底面104上的導體材料層122上。在此,移動方向D1例如平行於Y方向,但本發明不以此為限。在其他實施例中,移動方向D1可平行於側面106的導線設置部106c上任一點所對應之切面法向量。在另一些實施例中,轉印工具130也可在沿移動方向D1朝向基板100移動至抵壓側面106後,進一步以垂直於移動方向D1的方向為軸旋轉,而將對應的抗蝕刻圖案P1轉印到頂面102與底面104上的導體材料層122上。舉例而言,當移動方向D1平行於Y方向時,垂直於移動方向D1的方向例如為X方向。In some embodiments, the carrier 134 can be made of an elastic material, such as rubber. In this way, when the carrier 134 is pressed against the wire setting portion 106c of the substrate 100, deformation occurs, so that a part of the carrier 134 can be pressed against the conductor material layers 122 on the top surface 102 and the bottom surface 104, and the etching resist pattern P1 is imprinted on On the conductor material layer 122 on the top surface 102 and the bottom surface 104 . For example, the roller 132 of the transfer tool 130 can move horizontally along the moving direction D1 toward the wire arrangement portion 106c of the substrate 100 during the transfer process to transfer the anti-etching pattern P1 to the wire arrangement portion 106c and the top surface of the side surface 106 . 102 and the conductor material layer 122 on the bottom surface 104 . Here, the moving direction D1 is, for example, parallel to the Y direction, but the present invention is not limited to this. In other embodiments, the moving direction D1 may be parallel to the normal vector of the tangent plane corresponding to any point on the wire arrangement portion 106 c of the side surface 106 . In other embodiments, after the transfer tool 130 is moved toward the substrate 100 along the moving direction D1 to the pressing side 106 , the transfer tool 130 may be further rotated in a direction perpendicular to the moving direction D1 as an axis to transfer the corresponding anti-etching pattern P1 Transferred to the conductor material layer 122 on the top surface 102 and the bottom surface 104 . For example, when the moving direction D1 is parallel to the Y direction, the direction perpendicular to the moving direction D1 is, for example, the X direction.

經轉印後,條狀的抗蝕刻圖案P1可附著於導體材料層122上且抗蝕刻圖案P1可連續的由頂面102經過導線設置部106c而延伸至底面104。請參照圖1D與圖2D,移除轉印工具130後,可對附著於導體材料層122上的抗蝕刻圖案P1進行固化步驟而形成抗蝕刻層124。抗蝕刻層124可具有條狀的圖案,且抗蝕刻層124可由頂面102經過側面106的導線設置部106c連續的延伸到底面104。多個條狀的抗蝕刻層124可沿X方向排列,且多個條狀的抗蝕刻層124可以對應於導線接墊114設置。在一些實施例中,抗蝕刻層124沿Z方向在頂面102上的正投影可以重疊導線接墊114沿Z方向在頂面102上的正投影。甚至,導線接墊114沿Z方向在頂面102上的正投影可以完全位於抗蝕刻層124沿Z方向在頂面102上的正投影內。多個條狀抗蝕刻層124以一對一的方式對應於導線接墊114設置,因此每個抗蝕刻層124都僅重疊一個導線接墊114。在一些實施例中,條狀的抗蝕刻層124具有一末端124t且抗蝕刻層124的末端124t的連線大致平行於直線軌跡L1。After the transfer, the strip-shaped anti-etching pattern P1 can be attached to the conductor material layer 122 and the anti-etching pattern P1 can continuously extend from the top surface 102 to the bottom surface 104 through the wire arrangement portion 106c. Referring to FIG. 1D and FIG. 2D , after removing the transfer tool 130 , a curing step may be performed on the etching resist pattern P1 attached to the conductor material layer 122 to form the etching resist layer 124 . The anti-etching layer 124 may have a stripe pattern, and the anti-etching layer 124 may continuously extend from the top surface 102 to the bottom surface 104 through the wire arrangement portion 106 c of the side surface 106 . A plurality of strip-shaped anti-etching layers 124 can be arranged along the X direction, and a plurality of strip-shaped anti-etching layers 124 can be disposed corresponding to the wire pads 114 . In some embodiments, the orthographic projection of the etch resist layer 124 on the top surface 102 in the Z direction may overlap the orthographic projection of the wire pads 114 on the top surface 102 in the Z direction. Even, the orthographic projection of the wire pads 114 on the top surface 102 in the Z direction may lie completely within the orthographic projection of the etch resist layer 124 on the top surface 102 in the Z direction. The plurality of strip-shaped anti-etching layers 124 are disposed corresponding to the wire pads 114 in a one-to-one manner, so each anti-etching layer 124 only overlaps one wire pad 114 . In some embodiments, the strip-shaped etch-resistant layer 124 has an end 124t, and the connection between the end 124t of the etch-resistant layer 124 is substantially parallel to the straight track L1.

請參照圖1E與圖2E,在抗蝕刻層124製作完成之後,可進行圖案化步驟,移除未被抗蝕刻層124遮蔽的導體材料層122,以形成導體層126。圖案化導體材料層122的方法包括等向性蝕刻法。舉例而言,圖案化步驟例如是使得未被抗蝕刻層124覆蓋的導體材料層122接觸蝕刻劑。在此,圖案化導體材料層122的蝕刻劑對導體材料層122與抗蝕刻層124具有選擇性。也就是說,圖案化步驟採用的蝕刻劑例如具有不會與抗蝕刻層124反應的組成,因此抗蝕刻層124在蝕刻步驟中大致上不會受損。Referring to FIGS. 1E and 2E , after the etch-resistant layer 124 is fabricated, a patterning step may be performed to remove the conductor material layer 122 not shielded by the etch-resistant layer 124 to form the conductor layer 126 . Methods of patterning the conductor material layer 122 include isotropic etching. For example, the patterning step is, for example, contacting the conductive material layer 122 not covered by the etch-resistant layer 124 with the etchant. Here, the etchant for patterning the conductor material layer 122 is selective to the conductor material layer 122 and the etch-resistant layer 124 . That is, the etchant used in the patterning step has, for example, a composition that does not react with the etching resist layer 124, so the etching resist layer 124 is substantially not damaged during the etching step.

導體層126配置於基板100上,且對應於抗蝕刻層124而具有條狀圖案。條狀的導體層126的數量可相同於條狀的抗蝕刻層124的數量。導體層126由基板100的頂面102經過側面106的導線設置部106c而延伸至基板100的底面104,而抗蝕刻層124設置於導體層126的遠離基板100的一側。在本實施例中,彼此疊置的抗蝕刻層124與導體層126可構成一條側導線120。換言之,側導線120可包括抗蝕刻層124與導體層126,且導體層126夾設於抗蝕刻層124及基板100之間。抗蝕刻層124可完全覆蓋導體層126。The conductor layer 126 is disposed on the substrate 100 and has a stripe pattern corresponding to the etching resist layer 124 . The number of the strip-shaped conductor layers 126 may be the same as the number of the strip-shaped anti-etching layers 124 . The conductor layer 126 extends from the top surface 102 of the substrate 100 to the bottom surface 104 of the substrate 100 through the wire arrangement portion 106 c of the side surface 106 . In this embodiment, the anti-etching layer 124 and the conductor layer 126 stacked on each other can form a side wire 120 . In other words, the side wires 120 may include the anti-etching layer 124 and the conductor layer 126 , and the conductor layer 126 is sandwiched between the anti-etching layer 124 and the substrate 100 . The etch-resistant layer 124 may completely cover the conductor layer 126 .

側導線120可包括頂面段120A、底面段120B與側面段120C。頂面段120A設置於基板100的頂面102上,且例如沿著Y方向由頂面102與側面106之間的轉角朝向導線接墊114延伸,甚至超出導線接墊114。頂面段120A接觸基板100上的導線接墊114,且可完全包覆導線接墊114。底面段120B設置於底面104上,且例如由底面104與側面106之間的轉角沿著Y方向延伸。The side wire 120 may include a top surface segment 120A, a bottom surface segment 120B, and a side surface segment 120C. The top surface segment 120A is disposed on the top surface 102 of the substrate 100 , and extends from the corner between the top surface 102 and the side surface 106 toward the wire pads 114 along the Y direction, or even beyond the wire pads 114 . The top surface section 120A contacts the wire pads 114 on the substrate 100 and can completely cover the wire pads 114 . The bottom surface segment 120B is disposed on the bottom surface 104 and extends along the Y direction, for example, from the corner between the bottom surface 104 and the side surface 106 .

圖1D的導體材料層122在圖1E的步驟中可受到過蝕刻以確保相鄰的導體層126彼此斷開。由於過蝕刻,導體層126的輪廓可相對於抗蝕刻層124的輪廓內縮,而使基板100、導體層126與抗蝕刻層124構成沿著導體層126周緣的底切結構UC。如圖2E所示,抗蝕刻層124的末端124t可相對導體層126的末端126t朝向畫素接墊112凸出,或是導體層126的末端126t可相對抗蝕刻層124的末端124t內縮而形成底切結構UC。The conductor material layer 122 of FIG. 1D may be overetched in the step of FIG. 1E to ensure that adjacent conductor layers 126 are disconnected from each other. Due to the over-etching, the outline of the conductor layer 126 can shrink relative to the outline of the etch-resistant layer 124 , so that the substrate 100 , the conductor layer 126 and the etch-resistant layer 124 form an undercut structure UC along the periphery of the conductor layer 126 . As shown in FIG. 2E , the end 124t of the etch-resistant layer 124 may protrude toward the pixel pad 112 relative to the end 126t of the conductor layer 126 , or the end 126t of the conductor layer 126 may be retracted relative to the end 124t of the etch-resistant layer 124 An undercut structure UC is formed.

以下,以圖3A至圖3C舉例說明適用於一些實施例之側導線的具體結構,且圖3A至圖3C的導線結構例如可採用圖1A至圖1E(以及圖2A至圖2E)的步驟來製作,但本揭露不以此為限。Below, FIGS. 3A to 3C are used to illustrate the specific structures of the side wires suitable for some embodiments, and the wire structures of FIGS. 3A to 3C can be obtained by, for example, the steps of FIGS. 1A to 1E (and FIGS. 2A to 2E ). production, but this disclosure is not limited to this.

由圖3A至圖3C可知,基板100的頂面102上可設置有導線接墊114以及側導線120。側導線120連續地由基板100的頂面102經過側面106的導線設置部106c而延伸至底面104。在一些實施例中,導線接墊114的接合面114a可與側導線120接觸。具體而言,側導線120覆蓋導線接墊114的接合面114a,因此側導線120在頂面102上例如可沿著Y方向延伸至重疊導線接墊114的接合面114a,甚至側導線120的末端120t可超出導線接墊114。在一些實施例中,側導線120的末端120t大致上可沿著平行於直線軌跡L1的直線排列。As can be seen from FIGS. 3A to 3C , the top surface 102 of the substrate 100 may be provided with wire pads 114 and side wires 120 . The side wires 120 extend continuously from the top surface 102 of the substrate 100 to the bottom surface 104 through the wire setting portions 106 c of the side surfaces 106 . In some embodiments, the bonding surfaces 114a of the wire pads 114 may be in contact with the side wires 120 . Specifically, the side wires 120 cover the bonding surfaces 114 a of the wire pads 114 , so the side wires 120 may extend on the top surface 102 to the bonding faces 114 a of the overlapping wire pads 114 , for example, along the Y direction, and even the ends of the side wires 120 . 120t may extend beyond the wire pads 114 . In some embodiments, the ends 120t of the side wires 120 may be arranged substantially along a straight line parallel to the straight line track L1.

在一些實施例中,如圖3A至圖3C所示,多條側導線120可分別具有不同線寬W1,且不同線寬W1的多條側導線120大致上沿著線I-I’的直線軌跡並排成列。在本實施例中,各側導線120的線寬W1是指各側導線120沿X方向的寬度。具體而言,越靠近列中心Rc的側導線120的線寬W1越寬,越靠近列邊緣Rb的側導線120的線寬W1越窄。舉例而言,相鄰並排的三條側導線120中,線寬W1最窄的側導線120不會排列於中央。換言之,相鄰並排的三條側導線120中,中央的側導線120的線寬W1不會同時比兩側的側導線120的線寬W1更窄。In some embodiments, as shown in FIG. 3A to FIG. 3C , the plurality of side wires 120 may respectively have different line widths W1 , and the plurality of side wires 120 with different line widths W1 are substantially along a straight line of line II′ Tracks are arranged side by side in columns. In this embodiment, the line width W1 of each side wire 120 refers to the width of each side wire 120 along the X direction. Specifically, the line width W1 of the side conducting wire 120 closer to the column center Rc is wider, and the line width W1 of the side conducting wire 120 closer to the column edge Rb is narrower. For example, among the three adjacent side wires 120, the side wire 120 with the narrowest line width W1 is not arranged in the center. In other words, among the three adjacent side conductors 120, the line width W1 of the central side conductor 120 is not simultaneously narrower than the line width W1 of the side conductors 120 on both sides.

在一些實施例中,可因為製作方法而造成側導線120的不同線寬W1。舉例而言,於圖1C與圖2C的步驟中,在將轉印工具130抵壓至基板100的導線設置部106c時,由於導線設置部106c為弧形而轉印工具130大致為直線狀,導線設置部106c的不同部分與轉印工具130的接觸時間不同,且對應的,不同位置的抗蝕刻圖案P1所受到的壓力也有所不同。在圖1C中,導線設置部106c的越遠離轉印工具130的區段所受到的壓力越小,而越靠近轉印工具130的區段所受到的壓力越大。在受到較大壓力的區段上,抗蝕刻圖案P1會被壓得更扁,使得附著於導體材料層122上的抗蝕刻圖案P1的寬度變大。對應的,在受到較小壓力的區段上,抗蝕刻圖案P1的寬度相對較小。如此一來,利用上述分別具有不同寬度的抗蝕刻圖案P1製作出來的側導線120即可對應於抗蝕刻圖案P1而具有不同的線寬。抗蝕刻圖案P1的寬度變化可以如圖3A至圖3C所示,越往列中心Rc越寬。In some embodiments, different line widths W1 of the side wires 120 may be caused by the fabrication method. For example, in the steps of FIG. 1C and FIG. 2C , when the transfer tool 130 is pressed against the wire setting portion 106c of the substrate 100, since the wire setting portion 106c is arc-shaped and the transfer tool 130 is substantially linear, Different parts of the wire arrangement portion 106c have different contact times with the transfer tool 130, and correspondingly, the pressures received by the anti-etching patterns P1 at different positions are also different. In FIG. 1C , the portion of the wire arrangement portion 106 c that is farther from the transfer tool 130 is subjected to less pressure, and the portion closer to the transfer tool 130 is subjected to greater pressure. On the section subjected to greater pressure, the anti-etching pattern P1 will be flattened, so that the width of the anti-etching pattern P1 attached to the conductor material layer 122 becomes larger. Correspondingly, the width of the etching resist pattern P1 is relatively small on the section subjected to less pressure. In this way, the side wires 120 fabricated by using the above-mentioned anti-etching patterns P1 with different widths can have different line widths corresponding to the anti-etching patterns P1. The width of the etching resist pattern P1 may vary as shown in FIGS. 3A to 3C , and the width becomes wider toward the center Rc of the column.

另一方面,多條側導線120的末端120t大致上也是沿著平行於直線軌跡L1的直線排列,因此多條側導線120可分別具有不同的延伸長度EL1。在本實施例中,各側導線120的延伸長度EL1是指各側導線120在頂面102或底面104上沿Y方向延伸的長度。具體而言,越靠近列中心Rc的側導線120具有越長的延伸長度EL1,越靠近列邊緣Rb的側導線120具有越短的延伸長度EL1。因此,線寬W1越寬的側導線120具有越長的延伸長度EL1,線寬W1越窄的側導線120具有越短的延伸長度EL1。如此一來,可使多條側導線120的阻抗彼此匹配,從而具有大致相近的導電傳輸能力,這有助於維持顯示裝置的品質。On the other hand, the ends 120t of the plurality of side wires 120 are also generally arranged along a straight line parallel to the straight track L1, so the plurality of side wires 120 can respectively have different extension lengths EL1. In this embodiment, the extension length EL1 of each side wire 120 refers to the length of each side wire 120 extending along the Y direction on the top surface 102 or the bottom surface 104 . Specifically, the side conductors 120 closer to the column center Rc have longer extension lengths EL1 , and the side conductors 120 closer to the column edge Rb have shorter extension lengths EL1 . Therefore, the side wire 120 with the wider line width W1 has the longer extension length EL1, and the side wire 120 with the narrower line width W1 has the shorter extension length EL1. In this way, the impedances of the plurality of side wires 120 can be matched with each other, so as to have substantially similar conductive transmission capabilities, which helps to maintain the quality of the display device.

圖2E的剖面結構可應用於本實施例中。由圖2E、圖3A至圖3C可知,頂面段120A與底面段120B可具有對應的結構。舉例來說,頂面段120A沿Y方向延伸的長度可實質上等於底面段120B沿Y方向延伸的長度;頂面段120A沿X方向的寬度可實質上等於底面段120B沿X方向的寬度。在其他實施例中,可依據製程設計的需求調整頂面段120A與底面段120B的結構,本發明不以此為限。側面段120C設置於側面106上且沿著Z方向延伸而連接至頂面段120A與底面段120B,且側面段120C在基板100的側面106並排成列。因此,如圖3A所示,側導線120為立體導線,其具有立體的U型結構而包圍基板100的邊緣。The cross-sectional structure of FIG. 2E can be applied to this embodiment. It can be seen from FIGS. 2E and 3A to 3C that the top surface segment 120A and the bottom surface segment 120B may have corresponding structures. For example, the length of the top surface segment 120A along the Y direction can be substantially equal to the length of the bottom surface segment 120B along the Y direction; the width of the top surface segment 120A along the X direction can be substantially equal to the width of the bottom surface segment 120B along the X direction. In other embodiments, the structures of the top surface segment 120A and the bottom surface segment 120B can be adjusted according to the requirements of process design, but the present invention is not limited thereto. The side segment 120C is disposed on the side 106 and extends along the Z direction to connect to the top segment 120A and the bottom segment 120B, and the side segments 120C are arranged side by side on the side 106 of the substrate 100 . Therefore, as shown in FIG. 3A , the side wires 120 are three-dimensional wires having a three-dimensional U-shaped structure surrounding the edge of the substrate 100 .

相似地,抗蝕刻層124可包括頂面抗蝕刻層124A、底面抗蝕刻層124B與側面抗蝕刻層124C。導體層126可包括頂面導體層126A、底面導體層126B與側面導體層126C。換言之,頂面段120A可包括頂面抗蝕刻層124A與頂面導體層126A;底面段120B可包括底面抗蝕刻層124B與底面導體層126B;側面段120C可包括側面抗蝕刻層124C與側面導體層126C。Similarly, the etch resist layer 124 may include a top etch resist layer 124A, a bottom etch resist layer 124B, and a side etch resist layer 124C. The conductor layer 126 may include a top conductor layer 126A, a bottom conductor layer 126B and a side conductor layer 126C. In other words, the top segment 120A may include a top etch resist layer 124A and a top conductor layer 126A; the bottom segment 120B may include a bottom etch resist 124B and a bottom conductor layer 126B; the side segment 120C may include a side etch resist 124C and a side conductor Layer 126C.

如圖3B與圖3C所示,頂面導體層126A、底面導體層126B與側面導體層126C彼此的厚度t1實質上相等。舉例來說,藉由邊緣濺鍍所形成的導體材料層122包圍基板100的邊緣且可具有均勻的厚度。因此,由導體材料層122圖案化形成的導體層126也具有均勻的厚度。換句話說,以同一條側導線120來說,位於頂面102的頂面導體層126A的厚度t1、位於底面104的底面導體層126B的厚度t1與位於側面106的側面導體層126C的厚度t1實質上相等。另外,靠近列中心Rc的側導線120的頂面導體層126A的厚度t1實質上等於靠近列邊緣Rb的側導線120的頂面導體層126A的厚度t1。相似地,不同側導線120的底面導體層126B具有實質相同的厚度t1,且不同側導線120的側面導體層126C具有實質相同的厚度t1。As shown in FIGS. 3B and 3C , the thicknesses t1 of the top conductor layer 126A, the bottom conductor layer 126B, and the side conductor layer 126C are substantially equal to each other. For example, the conductive material layer 122 formed by edge sputtering surrounds the edge of the substrate 100 and may have a uniform thickness. Therefore, the conductor layer 126 patterned from the conductor material layer 122 also has a uniform thickness. In other words, for the same side conductor 120 , the thickness t1 of the top conductor layer 126A located on the top surface 102 , the thickness t1 of the bottom conductor layer 126B located on the bottom surface 104 , and the thickness t1 of the side conductor layer 126C located on the side surface 106 substantially equal. In addition, the thickness t1 of the top conductor layer 126A of the side conductor 120 near the column center Rc is substantially equal to the thickness t1 of the top conductor layer 126A of the side conductor 120 near the column edge Rb. Similarly, the bottom conductor layers 126B of the wires 120 on different sides have substantially the same thickness t1 , and the side conductor layers 126C of the wires 120 on different sides have substantially the same thickness t1 .

頂面抗蝕刻層124A的厚度t2及底面抗蝕刻層124B的厚度t2可以是近似的。具體而言,靠近列中心Rc的頂面抗蝕刻層124A的厚度t2實質上等於靠近列邊緣Rb的頂面抗蝕刻層124A的厚度t2。靠近列中心Rc的底面抗蝕刻層124B的厚度t2實質上等於靠近列邊緣Rb的底面抗蝕刻層124B的厚度t2。另一方面,頂面抗蝕刻層124A與底面抗蝕刻層124B可具有對應的結構。舉例而言,頂面抗蝕刻層124A的厚度t2實質上等於底面抗蝕刻層124B的厚度t2。The thickness t2 of the top etch resist layer 124A and the thickness t2 of the bottom etch resist layer 124B may be approximate. Specifically, the thickness t2 of the top etch resist layer 124A near the column center Rc is substantially equal to the thickness t2 of the top etch resist 124A near the column edge Rb. The thickness t2 of the bottom etch resist layer 124B near the column center Rc is substantially equal to the thickness t2 of the bottom etch resist 124B near the column edge Rb. On the other hand, the top etch resist layer 124A and the bottom etch resist layer 124B may have corresponding structures. For example, the thickness t2 of the top etch resist layer 124A is substantially equal to the thickness t2 of the bottom etch resist layer 124B.

在一些實施例中,如圖3C所示,側面段120C的側面抗蝕刻層124C的厚度t3可以是有差異的。舉例而言,在圖1C的步驟中,越靠近列中心Rc的側導線120所對應的抗蝕刻圖案P1受到較大的壓力因而越靠近列中心Rc的側導線120的側面段120C具有較薄的側面抗蝕刻層124C。同時,越靠近列邊緣Rb的側導線120的側面段120C具有越厚的側面抗蝕刻層124C。舉例而言,相鄰並排的三條側導線120的側面段120C中,具有厚度t3最厚的側面抗蝕刻層124C的側面段120C不會排列於中央。換言之,相鄰並排的三條側導線120的側面段120C中,中央的側面抗蝕刻層124C的厚度t3不會同時比兩側的側面抗蝕刻層124C的厚度t3更厚。In some embodiments, as shown in FIG. 3C , the thickness t3 of the side etch resist layer 124C of the side segment 120C may be different. For example, in the step of FIG. 1C , the etching resist pattern P1 corresponding to the side conductors 120 closer to the row center Rc is subjected to greater pressure, so the side segments 120C of the side conductors 120 closer to the row center Rc have thinner The side etching resist layer 124C. Meanwhile, the side section 120C of the side wire 120 which is closer to the column edge Rb has the thicker side etch resist layer 124C. For example, among the side segments 120C of the three adjacent side wires 120 , the side segment 120C with the side etching resist layer 124C having the thickest thickness t3 is not arranged in the center. In other words, in the side segments 120C of the three adjacent side conductors 120 , the thickness t3 of the central side etch resist layer 124C is not simultaneously thicker than the thickness t3 of the side etch resist layers 124C on both sides.

根據上述製作步驟,如圖3B與圖3C所示,導體層126的側壁可相對抗蝕刻層124的側壁內縮,而構成沿著導體層126的側壁的底切結構UC。圖2E的沿著導體層126的末端126t的底切結構UC以及圖3B與圖3C的沿著導體層126的側壁的底切結構UC可以為連續一體。因此,底切結構UC實質上是沿著導體層126的輪廓分布的結構。According to the above manufacturing steps, as shown in FIG. 3B and FIG. 3C , the sidewall of the conductor layer 126 can be retracted relative to the sidewall of the etch-resistant layer 124 to form an undercut structure UC along the sidewall of the conductor layer 126 . The undercut structure UC along the end 126t of the conductor layer 126 in FIG. 2E and the undercut structure UC along the sidewall of the conductor layer 126 in FIGS. 3B and 3C may be a continuous body. Therefore, the undercut structure UC is substantially a structure distributed along the contour of the conductor layer 126 .

圖4A與圖4B呈現本發明一些實施例的製造平面顯示裝置的部分步驟的平面示意圖;圖5A與圖5B呈現沿圖4A與圖4B中線A-A’的剖面示意圖。請參照圖4A與圖5A,在完成圖1A至圖1E的步驟已形成側導線120之後,可進一步將電路板140接合於基板100的底面104。電路板140可與多條側導線120電性連接。電路板140可以是薄膜上晶片(chip on film,COF)、印刷電路板等可以接合於底面104上的線路或接墊而無須接合於頂面102上。如此,頂面102的周邊不須為了接合外部電路結構而保留接合用的面積。換言之,頂面102上可留下較大的面積供發光元件、顯示元件等功能元件的設置,而實現窄邊框的設計。當抗蝕刻層124採用導電材時,電路板140可直接接合多條側導線120的抗蝕刻層124。當抗蝕刻層124採用絕緣材時,可在底面104上進一步設置線路或接墊以便與電路板140接合。4A and 4B are schematic plan views of some steps of manufacturing a flat display device according to some embodiments of the present invention; FIGS. 5A and 5B are schematic cross-sectional views along the line A-A' in FIGS. 4A and 4B . Referring to FIGS. 4A and 5A , after the steps in FIGS. 1A to 1E have been completed and the side wires 120 are formed, the circuit board 140 can be further bonded to the bottom surface 104 of the substrate 100 . The circuit board 140 can be electrically connected to the plurality of side wires 120 . The circuit board 140 may be a chip on film (COF), a printed circuit board, or the like that can be bonded to the traces or pads on the bottom surface 104 without being bonded to the top surface 102 . In this way, the periphery of the top surface 102 does not need to reserve a bonding area for bonding external circuit structures. In other words, a larger area can be left on the top surface 102 for the arrangement of functional elements such as light-emitting elements and display elements, thereby realizing the design of a narrow frame. When the anti-etching layer 124 is made of conductive material, the circuit board 140 can directly bond the anti-etching layer 124 of the plurality of side wires 120 . When the anti-etching layer 124 is made of insulating material, lines or pads may be further provided on the bottom surface 104 for bonding with the circuit board 140 .

請參照圖4B與圖5B,形成保護層150。至此,已大致完成本實施例的平面顯示裝置10的製作。保護層150包覆多條側導線120,且連續地覆蓋基板100的頂面102、側面106與底面104。具體而言,保護層150配置於基板100上,且包覆抗蝕刻層124。在圖5B中,保護層150除了包覆抗蝕刻層124之外,還填充底切結構UC,因此保護層150可接觸導體層126的周緣。換言之,保護層150可以包繞側導線120,使得側導線120被密封於保護層150之中。在一些實施例中,保護層150例如隨著側導線120的分布與輪廓而起伏。也就是說,保護層150在對應於側導線120處較遠離基板100,而在側導線120的間隔處較接近基板100。在一些實施例中,保護層150可以是平坦層,且具有平坦的外側表面。Referring to FIG. 4B and FIG. 5B , a protective layer 150 is formed. So far, the fabrication of the flat display device 10 of this embodiment has been substantially completed. The protective layer 150 covers the plurality of side wires 120 and continuously covers the top surface 102 , the side surfaces 106 and the bottom surface 104 of the substrate 100 . Specifically, the protective layer 150 is disposed on the substrate 100 and covers the etching resist layer 124 . In FIG. 5B , in addition to covering the etching resist layer 124 , the protective layer 150 also fills the undercut structure UC, so that the protective layer 150 can contact the periphery of the conductor layer 126 . In other words, the protective layer 150 may wrap the side wires 120 such that the side wires 120 are sealed in the protective layer 150 . In some embodiments, the protective layer 150 undulates, for example, with the distribution and profile of the side conductors 120 . That is, the protective layer 150 is farther from the substrate 100 at the position corresponding to the side wires 120 , and closer to the substrate 100 at the interval of the side wires 120 . In some embodiments, the protective layer 150 may be a flat layer with a flat outer surface.

在一些實施例中,保護層150可以浸泡、噴塗、轉印、塗佈或轉印的方式形成於基板100上。舉例而言,保護層150的製作方式可以是將基板100浸濡於保護材料的溶液中,使保護材料沾附於基板100上,而後待保護材料固化後即可形成保護層150。保護層150的材料可包括聚酯類樹脂(polyester resins)、酚醛樹脂(phenolic resins)、醇酸樹脂(alkyd resins)、聚碳酸酯樹脂(polycarbonate resins)、聚醯胺樹脂(polyamide resins)、聚胺酯樹脂(polyurethane resins)、矽氧樹脂(silicone resins)、環氧樹脂(epoxy resins)、聚乙烯樹脂(polyethylene resins)、丙烯酸樹脂(acrylic resins)、聚苯乙烯樹脂(polystyrene resins)、聚丙烯樹脂(polypropylene resins)、或其他絕緣性材料。In some embodiments, the protective layer 150 may be formed on the substrate 100 by dipping, spraying, transfer printing, coating or transfer printing. For example, the protective layer 150 can be fabricated by immersing the substrate 100 in a solution of protective material to make the protective material adhere to the substrate 100 , and then the protective layer 150 can be formed after the protective material is cured. Materials of the protective layer 150 may include polyester resins, phenolic resins, alkyd resins, polycarbonate resins, polyamide resins, polyurethane Polyurethane resins, silicone resins, epoxy resins, polyethylene resins, acrylic resins, polystyrene resins, polypropylene resins ( polypropylene resins), or other insulating materials.

平面顯示裝置10包括基板100、驅動電路結構110、側導線120、電路板140以及保護層150。在一些實施例中,平面顯示裝置10可以是由將發光元件等類似元件(未繪示)接合於畫素接墊112上所構成的裝置。在其他實施例中,基板100上可進一步設置有觸控元件、感測元件等其他功能的元件。具體來說,基板100、驅動電路結構110、側導線120、電路板140以及保護層150的結構設計及配置關係可參照前述段落的描述,而不再重述。The flat panel display device 10 includes a substrate 100 , a driving circuit structure 110 , side wires 120 , a circuit board 140 and a protective layer 150 . In some embodiments, the flat panel display device 10 may be a device formed by bonding light-emitting elements and the like (not shown) to the pixel pads 112 . In other embodiments, the substrate 100 may be further provided with other functional elements such as touch elements, sensing elements, and the like. Specifically, the structural design and configuration relationship of the substrate 100 , the driving circuit structure 110 , the side wires 120 , the circuit board 140 and the protective layer 150 can be referred to the descriptions in the preceding paragraphs, and will not be repeated.

在平面顯示裝置10中,側導線120的布局設計可以如圖3A至圖3C所示。舉例而言,側導線120連續地由基板100的頂面102經過側面106的導線設置部106c而延伸至底面104,且側導線120的末端120t大致上沿著平行於X方向的直線軌跡並排成列,因此多條側導線120可分別具有不同的延伸長度EL1。舉例而言,越靠近列中心Rc的側導線120具有越長的延伸長度EL1,越靠近列邊緣Rb的側導線120具有越短的延伸長度EL1。在一實施例中,多條側導線120可分別具有不同線寬W1,且不同線寬W1的多條側導線120大致上沿著上述直線軌跡並排成列。舉例而言,越靠近列中心Rc的側導線120的線寬W1越寬,越靠近列邊緣Rb的側導線120的線寬W1越窄。In the flat display device 10, the layout design of the side wires 120 may be as shown in FIG. 3A to FIG. 3C . For example, the side wires 120 continuously extend from the top surface 102 of the substrate 100 to the bottom surface 104 through the wire setting portions 106 c of the side surfaces 106 , and the ends 120 t of the side wires 120 are approximately parallel to each other along a straight line parallel to the X direction. Therefore, the plurality of side wires 120 may have different extension lengths EL1 respectively. For example, the side conductors 120 closer to the column center Rc have the longer extension length EL1, and the side conductors 120 closer to the column edge Rb have the shorter extension length EL1. In one embodiment, the plurality of side conductors 120 may have different line widths W1 respectively, and the plurality of side conductors 120 with different line widths W1 are generally arranged side by side along the above-mentioned straight track. For example, the line width W1 of the side conductive line 120 closer to the column center Rc is wider, and the line width W1 of the side conductive line 120 closer to the column edge Rb is narrower.

在一些實施例中,如圖3C所示,各側導線120具有側面段120C,且側面段120C包括側面抗蝕刻層124C以及側面導體層126C。側面抗蝕刻層124C配置於基板100的側面106上,且側面導體層126C夾設於側面抗蝕刻層124C及基板100的側面106之間。在一實施例中,側面段120C的側面抗蝕刻層124C的厚度t3可以是非均勻的。舉例而言,越靠近列邊緣Rb的側面段120C具有越厚的側面抗蝕刻層124C,越靠近列中心Rc的側面段120C具有越薄的側面抗蝕刻層124C。另外,側面段120C的側面導體層126C具有實質相同的厚度t1。In some embodiments, as shown in FIG. 3C , each side wire 120 has a side segment 120C, and the side segment 120C includes a side etch resist layer 124C and a side conductor layer 126C. The side etch resist layer 124C is disposed on the side surface 106 of the substrate 100 , and the side conductor layer 126C is sandwiched between the side etch resist layer 124C and the side surface 106 of the substrate 100 . In one embodiment, the thickness t3 of the side etch resist layer 124C of the side segment 120C may be non-uniform. For example, the side segment 120C closer to the column edge Rb has the thicker side etch resist layer 124C, and the side segment 120C closer to the column center Rc has the thinner side etch resist layer 124C. In addition, the side conductor layers 126C of the side segments 120C have substantially the same thickness t1.

圖6A至圖6C呈現本發明一些實施例的製造平面顯示裝置的部分步驟的俯視示意圖;圖7A至圖7C呈現沿圖6A至圖6C中線A-A’的剖面示意圖;圖8呈現本發明一些實施例的製造平面顯示裝置的部分步驟的立體示意圖;圖9A與圖9B呈現本發明一些實施例的製造平面顯示裝置的部分步驟的俯視示意圖;圖10A與圖10B呈現沿圖9A與圖9B中線A-A’的剖面示意圖。在此必須說明的是,本實施例沿用前述實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參照前述實施例,在此不贅述。另外,圖6A的弧線軌跡L2是為了便於更清楚的說明本實施方式的虛擬線段,其並非實際存在於基板100上的線段。6A to 6C are schematic top views of some steps of manufacturing a flat display device according to some embodiments of the present invention; FIGS. 7A to 7C are schematic cross-sectional views along the line AA' in FIGS. 6A to 6C ; and FIG. 8 shows the present invention FIG. 9A and FIG. 9B are schematic top views of some steps of manufacturing a flat display device according to some embodiments of the present invention; FIGS. 10A and 10B are diagrams along the lines of FIGS. 9A and 9B . Schematic cross-section of the midline AA'. It must be noted here that this embodiment uses the element numbers and part of the content of the previous embodiment, wherein the same or similar numbers are used to represent the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, which will not be repeated here. In addition, the arc locus L2 in FIG. 6A is a virtual line segment in the present embodiment for the convenience of clearer description, and is not a line segment that actually exists on the substrate 100 .

請參照圖6A與圖7A,提供基板100,並於基板100上預先形成驅動電路結構210。在本實施例中,驅動電路結構210可包括畫素接墊112、第一導線接墊214以及第二導線接墊214’。具體而言,畫素接墊112與第一導線接墊214都配置於基板100的頂面102上。第二導線接墊214’可對應於第一導線接墊214而配置於基板100的底面104上。在本實施例中,驅動電路結構210還包括多條連接走線216。具體而言,連接走線216配置於基板100的底面104上,且與第二導線接墊214’電性連接。連接走線216可以是用於接合第二導線接墊214’與預定接合於基板100的底面104上的電路板或是其他外部電路結構的導線。在一實施例中,驅動電路結構210還可包括電性連接於畫素接墊112與第一導線接墊214的畫素電路(圖6A未示出)。Referring to FIG. 6A and FIG. 7A , a substrate 100 is provided, and a driving circuit structure 210 is pre-formed on the substrate 100 . In this embodiment, the driving circuit structure 210 may include the pixel pads 112, the first wire pads 214 and the second wire pads 214'. Specifically, the pixel pads 112 and the first wire pads 214 are both disposed on the top surface 102 of the substrate 100 . The second wire pads 214' may be disposed on the bottom surface 104 of the substrate 100 corresponding to the first wire pads 214 . In this embodiment, the driving circuit structure 210 further includes a plurality of connecting wires 216 . Specifically, the connection traces 216 are disposed on the bottom surface 104 of the substrate 100, and are electrically connected to the second wire pads 214'. The connection traces 216 may be wires used to bond the second wire pads 214' to a circuit board or other external circuit structures intended to be bonded to the bottom surface 104 of the substrate 100. In one embodiment, the driving circuit structure 210 may further include a pixel circuit (not shown in FIG. 6A ) electrically connected to the pixel pad 112 and the first wire pad 214 .

在圖6A中,第一導線接墊214的數量為多個,且多個第一導線接墊214可沿著頂面102的輪廓排列設置。第一導線接墊214位於頂面102上,且第一導線接墊214的設置位置相較於畫素接墊112更鄰近側面106,特別是,更鄰近導線設置部106c。具體而言,各第一導線接墊214可具有接合面214a。接合面214a可以是第一導線接墊214與後續欲形成的側導線(圖6A未示出)接觸的面。第一導線接墊214的接合面214a例如沿著鄰近側面106的弧線軌跡L2圍繞多個畫素接墊112,而弧形排列於基板100的頂面102的周邊區。舉例來說,弧線軌跡L2可重疊頂面102的圓形輪廓的一假想弧線,但不以此為限。在一實施例中,頂面102的輪廓例如為圓形,則弧線軌跡L2可為與頂面102的輪廓具有相同圓心的圓形軌跡。In FIG. 6A , the number of the first wire bonding pads 214 is multiple, and the plurality of first wire bonding pads 214 can be arranged along the contour of the top surface 102 . The first wire pads 214 are located on the top surface 102 , and the arrangement position of the first wire pads 214 is closer to the side surface 106 than the pixel pads 112 , especially, closer to the wire arrangement portion 106 c . Specifically, each of the first wire pads 214 may have a bonding surface 214a. The bonding surface 214a may be the surface where the first wire pad 214 contacts with the side wire (not shown in FIG. 6A ) to be formed subsequently. The bonding surfaces 214 a of the first wire pads 214 surround the plurality of pixel pads 112 , for example, along the arc track L2 adjacent to the side surface 106 , and are arranged in an arc shape in the peripheral area of the top surface 102 of the substrate 100 . For example, the arc trajectory L2 may overlap an imaginary arc of the circular outline of the top surface 102 , but not limited thereto. In one embodiment, the contour of the top surface 102 is, for example, a circle, and the arc trajectory L2 can be a circular trajectory having the same center as the contour of the top surface 102 .

在本實施例中,第一導線接墊214可規則排列於弧線軌跡L2上,且弧線軌跡L2可圍繞成圓,但不以此為限。在一些實施例中,第一導線接墊214上還可形成一保護層(圖6A未示出)。舉例來說,保護層(圖6A未示出)可具有分別對應於各第一導線接墊214的接合面214a的多個開口,各第一導線接墊214在多個開口的面積中並未被保護層覆蓋從而定義出接合面214a,使後續形成的側導線可在對應的開口中與第一導線接墊214接觸。圖6A主要呈現第一導線接墊214的配置設計,而圖6A的設計也可應用於第二導線接墊214’中,因此第二導線接墊214’的配置設計不再重述。In this embodiment, the first wire pads 214 can be regularly arranged on the arc track L2, and the arc track L2 can be surrounded by a circle, but not limited thereto. In some embodiments, a protective layer (not shown in FIG. 6A ) may also be formed on the first wire pads 214 . For example, the protective layer (not shown in FIG. 6A ) may have a plurality of openings corresponding to the bonding surfaces 214 a of the first wire pads 214 , respectively, and each of the first wire pads 214 is not in the area of the plurality of openings. The bonding surface 214a is defined by being covered by the protective layer, so that the side wires formed subsequently can be in contact with the first wire pads 214 in the corresponding openings. FIG. 6A mainly shows the configuration design of the first wire bonding pad 214, and the design of FIG. 6A can also be applied to the second wire bonding pad 214', so the configuration design of the second wire bonding pad 214' will not be repeated.

請參照圖6B與圖7B,於基板100上形成導體材料層122。導體材料層122可以接觸且直接覆蓋住第一導線接墊214。另一方面,導體材料層122也可以接觸且直接覆蓋住底面104上的第二導線接墊214’(未示出)。於基板100上形成導體材料層122。導體材料層122可以覆蓋基板100的周邊區圍繞成環。導體材料層122的材質包括銅、鋁、鉬、銀、金、鎳、鈦、銦錫氧化物(Indium Tin Oxide,ITO)、氧化銦鎵鋅(IGZO)等。Referring to FIG. 6B and FIG. 7B , a conductor material layer 122 is formed on the substrate 100 . The conductor material layer 122 may contact and directly cover the first wire pads 214 . On the other hand, the conductor material layer 122 may also contact and directly cover the second wire pads 214' (not shown) on the bottom surface 104. A conductor material layer 122 is formed on the substrate 100 . The conductor material layer 122 may cover the peripheral area of the substrate 100 and surround in a ring. The material of the conductor material layer 122 includes copper, aluminum, molybdenum, silver, gold, nickel, titanium, indium tin oxide (ITO), indium gallium zinc oxide (IGZO), and the like.

請參照圖6C與圖7C,於導體材料層122上形成抗蝕刻層224。抗蝕刻層224可具有條狀的圖案,且抗蝕刻層224可由頂面102經過側面106的導線設置部106c連續的延伸到底面104。多個條狀的抗蝕刻層224可沿頂面102的輪廓排列,且多個條狀的抗蝕刻層224可以對應於第一導線接墊214設置。在本實施例中,整個基板100的側面106都預計要設置導線。如圖6C所示,條狀的抗蝕刻層224例如呈放射狀的排列於頂面102的周邊區。因此,整個側面106都可視為是導線設置部106c。在一些實施例中,抗蝕刻層224可重疊第一導線接墊214。多個條狀抗蝕刻層224以一對一的方式對應於第一導線接墊214設置,因此每個抗蝕刻層224都僅重疊一個第一導線接墊214。在一些實施例中,條狀的抗蝕刻層224具有一末端224t,且抗蝕刻層224的末端224t大致上沿著弧線軌跡L2排列。在本實施例中,抗蝕刻層224的末端224t例如朝相同側彎曲。Referring to FIG. 6C and FIG. 7C , an etching resist layer 224 is formed on the conductor material layer 122 . The anti-etching layer 224 may have a stripe pattern, and the anti-etching layer 224 may extend from the top surface 102 to the bottom surface 104 continuously through the wire arrangement portion 106 c of the side surface 106 . A plurality of strip-shaped anti-etching layers 224 may be arranged along the contour of the top surface 102 , and a plurality of strip-shaped anti-etching layers 224 may be disposed corresponding to the first wire pads 214 . In this embodiment, the entire side surface 106 of the substrate 100 is expected to be provided with wires. As shown in FIG. 6C , the strip-shaped anti-etching layers 224 are radially arranged on the peripheral region of the top surface 102 , for example. Therefore, the entire side surface 106 can be regarded as the lead wire setting portion 106c. In some embodiments, the etch-resistant layer 224 may overlap the first wire pads 214 . The plurality of strip-shaped anti-etching layers 224 are disposed corresponding to the first wire pads 214 in a one-to-one manner, so each of the anti-etching layers 224 only overlaps one first wire pad 214 . In some embodiments, the strip-shaped anti-etching layer 224 has an end 224t, and the end 224t of the anti-etching layer 224 is arranged substantially along the arc track L2. In this embodiment, the ends 224t of the etching resist layer 224 are bent toward the same side, for example.

以下,以圖8舉例說明適用於本實施例之抗蝕刻層224的製作步驟,但本揭露不以此為限。Below, FIG. 8 is used as an example to illustrate the fabrication steps of the etching resist layer 224 suitable for this embodiment, but the present disclosure is not limited thereto.

請參照圖8,將抗蝕刻圖案P2設置於轉印工具130上。具體而言,可將預先設計好的抗蝕刻圖案P2例如以塗佈、印刷或是沾附等方式形成於轉印工具130的載體134上。接著,使基板100的導線設置部106c抵靠轉印工具130,並使基板100相對於轉印工具130旋轉,以將抗蝕刻圖案P2沿著導線設置部106c轉印於導體材料層122上。舉例來說,可將導線設置部106c抵靠至載體134,並使基板100一邊沿著移動方向D2移動且一邊沿著旋轉方向D3旋轉。在另一些實施例中,也可在轉印工具130背著移動方向D2移動的同時,使基板100沿著旋轉方向D3而相對於轉印工具130旋轉。在此,移動方向D2例如平行於轉印工具130的延伸方向,旋轉方向D3例如是以垂直於移動方向D2的方向為旋轉軸。舉例而言,當移動方向D2平行於X方向與Y方向的平面時,旋轉方向D3例如以Z方向為旋轉軸。因此,載體134上的抗蝕刻圖案P2可轉印於導線設置部106c(例如整個側面106)、頂面102與底面104上的導體材料層122上,且轉印至頂面102與底面104上的抗蝕刻圖案P2例如順應旋轉方向D3的力而沿基板100的旋轉方向D3彎曲。Referring to FIG. 8 , the etching resist pattern P2 is disposed on the transfer tool 130 . Specifically, the pre-designed anti-etching pattern P2 can be formed on the carrier 134 of the transfer tool 130 by, for example, coating, printing, or sticking. Next, the wire setting portion 106c of the substrate 100 is abutted against the transfer tool 130, and the substrate 100 is rotated relative to the transfer tool 130 to transfer the etching resist pattern P2 onto the conductor material layer 122 along the wire setting portion 106c. For example, the wire setting portion 106c can be abutted against the carrier 134, and the substrate 100 can be moved along the moving direction D2 and rotated along the rotating direction D3. In other embodiments, the substrate 100 may also be rotated relative to the transfer tool 130 along the rotation direction D3 while the transfer tool 130 is moving against the moving direction D2. Here, the movement direction D2 is, for example, parallel to the extending direction of the transfer tool 130 , and the rotation direction D3 is, for example, a direction perpendicular to the movement direction D2 as the rotation axis. For example, when the moving direction D2 is parallel to the plane of the X direction and the Y direction, the rotation direction D3 takes the Z direction as the rotation axis, for example. Therefore, the anti-etching pattern P2 on the carrier 134 can be transferred on the conductive material layer 122 on the wire arrangement portion 106 c (eg, the entire side surface 106 ), the top surface 102 and the bottom surface 104 , and on the top surface 102 and the bottom surface 104 The anti-etching pattern P2 is, for example, bent along the rotation direction D3 of the substrate 100 in compliance with the force in the rotation direction D3.

在一些實施例中,抗蝕刻圖案P2為並排於載體134上的條狀圖案,因此經轉印後,可在導體材料層122上形成條狀的抗蝕刻圖案P2。在一實施例中,抗蝕刻圖案P2的材質可為絕緣材,例如聚酯類樹脂、酚醛樹脂、醇酸樹脂、聚碳酸酯樹脂、聚醯胺樹脂、聚胺酯樹脂、矽氧樹脂、環氧樹脂、聚乙烯樹脂、丙烯酸樹脂、聚苯乙烯樹脂、聚丙烯樹脂等。In some embodiments, the anti-etching patterns P2 are strip-shaped patterns arranged side by side on the carrier 134 , so after transferring, the strip-shaped anti-etching patterns P2 can be formed on the conductor material layer 122 . In one embodiment, the material of the etching resist pattern P2 can be an insulating material, such as polyester resin, phenolic resin, alkyd resin, polycarbonate resin, polyamide resin, polyurethane resin, silicone resin, epoxy resin , polyethylene resin, acrylic resin, polystyrene resin, polypropylene resin, etc.

之後,移除轉印工具130後,可對附著於導體材料層122上的抗蝕刻圖案P2進行固化步驟而形成抗蝕刻層224。對應於抗蝕刻圖案P2,抗蝕刻層224的末端224t例如沿基板100的旋轉方向D3彎曲,如圖6C所示。After that, after the transfer tool 130 is removed, the etching resist pattern P2 attached to the conductor material layer 122 can be cured to form the etching resist layer 224 . Corresponding to the anti-etching pattern P2, the end 224t of the anti-etching layer 224 is bent, for example, along the rotation direction D3 of the substrate 100, as shown in FIG. 6C.

請參照圖9A與圖10A,在圖6C的抗蝕刻層224製作完成之後,可進行圖案化步驟,移除未被抗蝕刻層224遮蔽的導體材料層122,以形成導體層226。移除導體材料層122的方法可包括進行如圖1E所述的圖案化步驟,其中可選用具有不會與抗蝕刻層224反應的蝕刻劑來圖案化導體材料層122,因此抗蝕刻層224在圖案化步驟中大致上不會受損。在一實施例中,導體材料層122可受到過蝕刻以確保相鄰的導體層226彼此斷開。舉例而言,可構成沿著導體層226周緣的底切結構UC。底切結構UC實質上是沿著導體層226的輪廓分布的結構。Referring to FIGS. 9A and 10A , after the etching resist layer 224 of FIG. 6C is fabricated, a patterning step may be performed to remove the conductor material layer 122 not covered by the etching resist layer 224 to form the conductor layer 226 . The method of removing the conductor material layer 122 may include performing a patterning step as described in FIG. 1E, wherein the conductor material layer 122 may be patterned with an etchant that does not react with the etch-resistant layer 224, so that the etch-resistant layer 224 is There is substantially no damage during the patterning step. In one embodiment, the conductor material layer 122 may be overetched to ensure that adjacent conductor layers 226 are disconnected from each other. For example, an undercut structure UC along the periphery of the conductor layer 226 may be formed. The undercut structure UC is essentially a structure distributed along the contour of the conductor layer 226 .

導體層226可對應於抗蝕刻層224而具有條狀圖案。條狀的導體層226的數量可相同於條狀的抗蝕刻層224的數量。在本實施例中,彼此疊置的抗蝕刻層224與導體層226可構成一條側導線220。換言之,側導線220可包括抗蝕刻層224與導體層226,且導體層226夾設於抗蝕刻層224及基板100之間。抗蝕刻層224可完全覆蓋導體層226。The conductor layer 226 may have a stripe pattern corresponding to the etching resist layer 224 . The number of the strip-shaped conductor layers 226 may be the same as the number of the strip-shaped anti-etching layers 224 . In this embodiment, the anti-etching layer 224 and the conductor layer 226 which are stacked on each other can form a side wire 220 . In other words, the side wires 220 may include the anti-etching layer 224 and the conductor layer 226 , and the conductor layer 226 is sandwiched between the anti-etching layer 224 and the substrate 100 . The etch-resistant layer 224 may completely cover the conductor layer 226 .

在本實施例中,側導線220連續地由基板100的頂面102經過導線設置部106c(例如整個側面106)而延伸至底面104。因此,側導線220例如是立體導線,其具有立體的U型結構而包圍基板100的邊緣。側導線220可覆蓋第一導線接墊214的接合面214a以及第二導線接墊214’的接合面214’a。如此,側導線220可將頂面102上的第一導線接墊214電連接至底面104上的第二導線接墊214’。具體而言,在基板100的頂面102上,側導線220可自導線設置部106c沿著Y方向延伸至第一導線接墊214的接合面214a,甚至側導線220的末端220t超出第一導線接墊214。在基板100的底面104上,側導線220可自導線設置部106c沿著Y方向延伸至第二導線接墊214’的接合面214’a,甚至側導線220的末端220t超出第二導線接墊214’。換言之,側導線220大致上與接合面214a及接合面214’a重疊。In the present embodiment, the side wires 220 extend continuously from the top surface 102 of the substrate 100 to the bottom surface 104 through the wire arrangement portion 106 c (eg, the entire side surface 106 ). Therefore, the side wires 220 are, for example, three-dimensional wires, which have a three-dimensional U-shaped structure and surround the edge of the substrate 100 . The side wires 220 may cover the bonding surfaces 214a of the first wire pads 214 and the bonding surfaces 214'a of the second wire pads 214'. As such, the side wires 220 can electrically connect the first wire pads 214 on the top surface 102 to the second wire pads 214' on the bottom surface 104. Specifically, on the top surface 102 of the substrate 100 , the side wires 220 may extend from the wire setting portion 106 c along the Y direction to the bonding surface 214 a of the first wire pads 214 , and even the ends 220 t of the side wires 220 extend beyond the first wires Pad 214 . On the bottom surface 104 of the substrate 100 , the side wires 220 may extend from the wire setting portion 106 c along the Y direction to the bonding surfaces 214 ′ a of the second wire pads 214 ′, even the ends 220 t of the side wires 220 extend beyond the second wire pads 214'. In other words, the side wire 220 substantially overlaps the bonding surface 214a and the bonding surface 214'a.

在本實施例中,各側導線220具有彎曲的末端220t。具體而言,各側導線220的末端220t對應於圖8中經轉印後的抗蝕刻圖案P2,而順應基板100的旋轉方向D3彎曲。如此,側導線220的末端220t朝相同側彎曲。以圖9A而言,各側導線220在頂面102的布局可以是由側面106朝基板100的圓心延伸且末端220t相對於向心方向逆時針偏移。In this embodiment, each side wire 220 has a curved end 220t. Specifically, the end 220t of each side wire 220 corresponds to the transferred etching resist pattern P2 in FIG. 8 , and is bent in accordance with the rotation direction D3 of the substrate 100 . In this way, the ends 220t of the side wires 220 are bent toward the same side. Referring to FIG. 9A , the layout of each side wire 220 on the top surface 102 may be extended from the side surface 106 toward the center of the substrate 100 and the ends 220t are offset counterclockwise relative to the centripetal direction.

多條側導線220可沿頂面102的輪廓排列。具體而言,多條側導線220例如呈放射狀排列於頂面102上。換言之,相鄰的側導線220不互相平行。如此,可製作出順應頂面102的輪廓而設置的多條側導線220,從而可適用於具有弧形輪廓的基板100。在一些實施例中,多條側導線220可具有大致上相同的延伸長度EL2。在本實施例中,各側導線220的延伸長度EL2是指各側導線220在頂面102或底面104上沿徑向方向延伸的長度。A plurality of side wires 220 may be arranged along the contour of the top surface 102 . Specifically, the plurality of side wires 220 are radially arranged on the top surface 102, for example. In other words, the adjacent side wires 220 are not parallel to each other. In this way, a plurality of side wires 220 can be fabricated to conform to the contour of the top surface 102 , so that it can be applied to the substrate 100 having an arc-shaped contour. In some embodiments, the plurality of side wires 220 may have substantially the same extension length EL2. In this embodiment, the extension length EL2 of each side wire 220 refers to the length of each side wire 220 extending along the radial direction on the top surface 102 or the bottom surface 104 .

另一方面,多條側導線220可分別具有大致上相同的線寬W2。在本實施例中,各側導線220的線寬W2是指各側導線220沿頂面102輪廓的切線方向的寬度。舉例而言,於圖8的步驟中,在將轉印元件130抵壓至基板100的導線設置部106c時,由於基板100相對於轉印元件130一邊移動一邊旋轉,導線設置部106c的不同部分與轉印元件130的接觸時間大致上相同,對應的,抗蝕刻圖案P2在不同部分所受到的壓力也大致上相同。如此一來,經轉印後的抗蝕刻圖案P2可具有大致上相同的寬度,並且以其作為遮罩而獲得的側導線220對應於抗蝕刻圖案P2而具有大致上相同的線寬W2。On the other hand, the plurality of side wires 220 may respectively have substantially the same line width W2. In this embodiment, the line width W2 of each side wire 220 refers to the width of each side wire 220 along the tangential direction of the contour of the top surface 102 . For example, in the step of FIG. 8 , when the transfer element 130 is pressed against the wire setting portion 106c of the substrate 100, since the substrate 100 rotates while moving relative to the transfer member 130, different parts of the wire setting portion 106c The contact time of the transfer element 130 is substantially the same, and correspondingly, the pressures on different parts of the anti-etching pattern P2 are also substantially the same. In this way, the transferred anti-etching patterns P2 may have substantially the same width, and the side wires 220 obtained by using them as masks have substantially the same line width W2 corresponding to the anti-etching patterns P2.

在基板100的底面104上,多條側導線220可與對應的連接走線216電性連接。在一實施例中,連接走線216可進一步與至少一電路板(例如圖4A的電路板140)電性連接。預定接合於基板100的電路板或是其他外部電路結構可以接合於底面104上的線路或接墊而無須接合於頂面102上。因此,頂面102的周邊不須為了接合外部電路結構而保留接合用的面積。換言之,平面顯示裝置20可具有更小的周邊區寬度,可應用於要求極小邊框寬度,甚至要求無邊框的設計中。On the bottom surface 104 of the substrate 100 , the plurality of side wires 220 can be electrically connected to the corresponding connection wires 216 . In one embodiment, the connection traces 216 may be further electrically connected to at least one circuit board (eg, the circuit board 140 of FIG. 4A ). The circuit board or other external circuit structures intended to be bonded to the substrate 100 can be bonded to the lines or pads on the bottom surface 104 without being bonded to the top surface 102 . Therefore, the periphery of the top surface 102 does not need to reserve a bonding area for bonding external circuit structures. In other words, the flat-panel display device 20 can have a smaller peripheral area width, and can be applied to designs that require a very small frame width or even no frame.

請參照圖9B與圖10B,於基板100上形成保護層250。至此,已大致完成本實施例的平面顯示裝置20的製作。保護層250包覆多條側導線220,並填充底切結構UC,且連續地覆蓋基板100的頂面102、側面106與底面104。換言之,保護層250可以包繞側導線220,使得側導線220被密封於保護層250之中。保護層250例如可採用與圖4B的保護層150相同的設計,於此不再贅述。Referring to FIG. 9B and FIG. 10B , a protective layer 250 is formed on the substrate 100 . So far, the fabrication of the flat display device 20 of this embodiment has been substantially completed. The protective layer 250 covers the plurality of side wires 220 , fills the undercut structure UC, and continuously covers the top surface 102 , the side surfaces 106 and the bottom surface 104 of the substrate 100 . In other words, the protective layer 250 may wrap the side wires 220 such that the side wires 220 are sealed in the protective layer 250 . For example, the protective layer 250 may adopt the same design as that of the protective layer 150 in FIG. 4B , and details are not described herein again.

圖11A為本揭露一些實施例的平面顯示裝置的立體示意圖;圖11B為本揭露一些實施例的平面顯示裝置的俯視示意圖。此處,圖11A與圖11B例如是圖9B的平面顯示裝置20的一種變形例的示意圖。需說明的是,圖11A與圖11B的實施例沿用圖9B的實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參照前述實施例,在此不贅述。FIG. 11A is a schematic perspective view of a flat-panel display device according to some embodiments; FIG. 11B is a schematic top view of a flat-panel display device according to some embodiments of the disclosure. Here, FIG. 11A and FIG. 11B are, for example, schematic diagrams of a modification of the flat-panel display device 20 of FIG. 9B . It should be noted that the embodiments of FIG. 11A and FIG. 11B use the element numbers and part of the content of the embodiment of FIG. 9B , wherein the same or similar reference numbers are used to represent the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, which will not be repeated here.

本實施例之平面顯示裝置20’不同於圖9B的平面顯示裝置20之處在於,平面顯示裝置20’的導線設置部106c包括第一導線設置部106A及第二導線設置部106B。更具體而言,第一導線設置部106A的曲率半徑大於第二導線設置部106B的曲率半徑。在本實施例中,如圖11B所示,平面顯示裝置20’的基板100’例如為具有橢圓形輪廓的基板,則第一導線設置部106A例如是指位於基板100’的短軸兩端的側面,第二導線設置部106B例如是指位於基板100’的長軸兩端的側面。在如圖8所示的步驟中,抗蝕刻圖案P2例如等間距設置於轉印工具130上,則將抗蝕刻圖案P2附著於基板100’的邊緣時,轉印於第一導線設置部106A處的抗蝕刻圖案P2的間距大於轉印於第二導線設置部106B處的抗蝕刻圖案P2的間距。因此,對應於經轉印的抗蝕刻圖案P2,沿第一導線設置部106A排列的側導線220A的間距大於沿第二導線設置部106B排列的側導線220B的間距。換言之,沿第一導線設置部106A排列的多條側導線220A的分佈密度小於沿第二導線設置部106B排列的多條側導線220B的分佈密度。The flat display device 20' of this embodiment is different from the flat display device 20 of FIG. 9B in that the wire arrangement portion 106c of the flat display device 20' includes a first wire arrangement portion 106A and a second wire arrangement portion 106B. More specifically, the radius of curvature of the first wire setting portion 106A is larger than the radius of curvature of the second wire setting portion 106B. In this embodiment, as shown in FIG. 11B , the substrate 100 ′ of the flat display device 20 ′ is, for example, a substrate with an elliptical outline, and the first wire arrangement portion 106A refers to, for example, the side surfaces located at both ends of the short axis of the substrate 100 ′ , the second wire setting portion 106B refers to, for example, the side surfaces located at both ends of the long axis of the substrate 100 ′. In the step shown in FIG. 8 , the anti-etching patterns P2 are arranged on the transfer tool 130 at equal intervals, for example, when the anti-etching patterns P2 are attached to the edge of the substrate 100 ′, they are transferred at the first wire setting portion 106A The pitch of the anti-etching patterns P2 is greater than the pitch of the anti-etching patterns P2 transferred at the second wire arrangement portion 106B. Therefore, the pitch of the side wires 220A arranged along the first wire arrangement portion 106A is larger than the pitch of the side wires 220B arranged along the second wire arrangement portion 106B, corresponding to the transferred etching resist pattern P2. In other words, the distribution density of the plurality of side wires 220A arranged along the first wire arrangement portion 106A is smaller than the distribution density of the plurality of side wires 220B arranged along the second wire arrangement portion 106B.

綜上所述,本發明實施例的平面顯示裝置包括順應基板的輪廓排列於基板邊緣的側導線,且側導線連續地由基板的頂面經過側面的導線設置部而延伸至底面。如此一來,可適用於具有弧形顯示面板的平面顯示裝置。另外,預定接合至平面顯示裝置的電路結構,例如電路板等,可接合至平面顯示裝置的底面,而可縮減平面顯示裝置的周邊區寬度以達到窄邊框的設計,或甚至無邊框的設計。To sum up, the flat display device according to the embodiment of the present invention includes side wires arranged on the edge of the substrate according to the outline of the substrate, and the side wires continuously extend from the top surface of the substrate to the bottom surface through the wire setting portions on the side surfaces. In this way, it can be applied to a flat display device having a curved display panel. In addition, the circuit structure intended to be bonded to the flat panel display device, such as a circuit board, can be bonded to the bottom surface of the flat panel display device, and the width of the peripheral area of the flat panel display device can be reduced to achieve a narrow frame design, or even a frameless design.

10、20、20’:平面顯示裝置 100、100’:基板 102:頂面 104:底面 106:側面 106A:第一導線設置部 106B:第二導線設置部 106c:導線設置部 110、210:驅動電路結構 112:畫素接墊 114:導線接墊 114a、214a、214’a:接合面 120、220、220A、220B:側導線 120A:頂面段 120B:底面段 120C:側面段 120t、124t、126t、220t、224t:末端 122:導體材料層 124、224:抗蝕刻層 124A:頂面抗蝕刻層 124B:底面抗蝕刻層 124C:側面抗蝕刻層 126、226:導體層 126A:頂面導體層 126B:底面導體層 126C:側面導體層 130:轉印工具 132:輥 134:載體 140:電路板 150、250:保護層 214:第一導線接墊 214’:第二導線接墊 216:連接走線 D1、D2:移動方向 D3:旋轉方向 EL1、EL2:延伸長度 L1:直線軌跡 L2:弧線軌跡 P1、P2:抗蝕刻圖案 Rb:列邊緣 Rc:列中心 t1、t2、t3:厚度 UC:底切結構 W1、W2:線寬 X、Y、Z:方向10, 20, 20': Flat Display Devices 100, 100': substrate 102: Top surface 104: Underside 106: Side 106A: First wire setting part 106B: Second wire setting part 106c: Lead wire setting part 110, 210: Drive circuit structure 112: Pixel pads 114: wire pads 114a, 214a, 214'a: joint surface 120, 220, 220A, 220B: side conductors 120A: Top section 120B: Bottom section 120C: Side Section 120t, 124t, 126t, 220t, 224t: end 122: Conductor material layer 124, 224: Anti-etching layer 124A: top etch resist 124B: Bottom etch resist 124C: Side etching resist 126, 226: Conductor layer 126A: Top conductor layer 126B: Bottom conductor layer 126C: side conductor layer 130: Transfer tool 132: Roller 134: Carrier 140: circuit board 150, 250: protective layer 214: first wire pad 214': 2nd wire pad 216: connect traces D1, D2: moving direction D3: Rotation direction EL1, EL2: extension length L1: Straight track L2: arc trajectory P1, P2: Anti-etching pattern Rb: column edge Rc: column center t1, t2, t3: thickness UC: Undercut Structure W1, W2: line width X, Y, Z: direction

圖1A至圖1E呈現本發明一些實施例的製造平面顯示裝置的側導線的部分步驟的俯視示意圖。 圖2A至圖2E呈現沿圖1A至圖1E中線A-A’的剖面示意圖。 圖3A為本發明一些實施例的平面顯示裝置的側導線的立體示意圖。 圖3B為圖3A的沿線I-I’的剖面示意圖。 圖3C為圖3A的沿線II-II’的剖面示意圖。 圖4A與圖4B呈現本發明一些實施例的製造平面顯示裝置的部分步驟的平面示意圖。 圖5A與圖5B呈現沿圖4A與圖4B中線A-A’的剖面示意圖。 圖6A至圖6C呈現本發明一些實施例的製造平面顯示裝置的部分步驟的俯視示意圖。 圖7A至圖7C呈現沿圖6A至圖6C中線A-A’的剖面示意圖。 圖8呈現本發明一些實施例的製造平面顯示裝置的部分步驟的立體示意圖。 圖9A與圖9B呈現本發明一些實施例的製造平面顯示裝置的部分步驟的俯視示意圖。 圖10A與圖10B呈現沿圖9A與圖9B中線A-A’的剖面示意圖。 圖11A為本揭露一些實施例的平面顯示裝置的立體示意圖。 圖11B為本揭露一些實施例的平面顯示裝置的俯視示意圖。1A to FIG. 1E are schematic top views of some steps of manufacturing a side wire of a flat display device according to some embodiments of the present invention. Figures 2A to 2E present schematic cross-sectional views along the line A-A' in Figures 1A to 1E. 3A is a three-dimensional schematic diagram of a side wire of a flat display device according to some embodiments of the present invention. Fig. 3B is a schematic cross-sectional view along the line I-I' of Fig. 3A. Fig. 3C is a schematic cross-sectional view along the line II-II' of Fig. 3A. 4A and 4B are schematic plan views showing some steps of manufacturing a flat display device according to some embodiments of the present invention. Figures 5A and 5B are schematic cross-sectional views taken along the line A-A' in Figures 4A and 4B. 6A to 6C are schematic top views of some steps of manufacturing a flat display device according to some embodiments of the present invention. Figures 7A to 7C present schematic cross-sectional views along the line A-A' in Figures 6A to 6C. FIG. 8 presents a schematic perspective view of some steps of manufacturing a flat panel display device according to some embodiments of the present invention. 9A and 9B are schematic top views of some steps of manufacturing a flat display device according to some embodiments of the present invention. Figures 10A and 10B are schematic cross-sectional views taken along the line A-A' in Figures 9A and 9B. FIG. 11A is a schematic perspective view of a flat-panel display device according to some embodiments. FIG. 11B is a schematic top view of a flat display device according to some embodiments of the disclosure.

10:平面顯示裝置10: Flat display device

100:基板100: Substrate

102:頂面102: Top surface

104:底面104: Underside

106:側面106: Side

106c:導線設置部106c: Lead wire setting part

110:驅動電路結構110: Drive circuit structure

112:畫素接墊112: Pixel pads

114:導線接墊114: wire pads

114a:接合面114a: Joint surface

120:側導線120: side wire

124:抗蝕刻層124: Anti-etching layer

126:導體層126: Conductor layer

140:電路板140: circuit board

150:保護層150: protective layer

UC:底切結構UC: Undercut Structure

X、Y、Z:方向X, Y, Z: direction

Claims (10)

一種平面顯示裝置,包括: 基板,具有相對的頂面及底面、以及連接於所述頂面與所述底面之間的側面,其中所述側面具有至少一導線設置部且所述導線設置部在所述基板的平面上沿弧形軌跡分布;以及 多條側導線,連續地由所述基板的所述頂面經過所述導線設置部而延伸至所述底面。A flat display device, comprising: A substrate, having opposite top and bottom surfaces, and a side surface connected between the top surface and the bottom surface, wherein the side surface has at least one wire arrangement portion and the wire arrangement portion is along the plane of the substrate arc-shaped trajectory distribution; and A plurality of side wires extend continuously from the top surface of the substrate to the bottom surface through the wire setting portion. 如請求項1所述的平面顯示裝置,更包括: 多個導線接墊,配置於所述基板的所述頂面及所述底面的至少其中一者的周邊區,所述多個導線接墊的每一者具有接合面,所述接合面與所述多條側導線的其中一者接觸。The flat display device according to claim 1, further comprising: a plurality of wire bonding pads, disposed in a peripheral region of at least one of the top surface and the bottom surface of the substrate, each of the plurality of wire bonding pads has a bonding surface, the bonding surface and the One of the plurality of side wires is in contact. 如請求項1所述的平面顯示裝置,其中所述多條側導線的末端大致上沿著直線軌跡並排成列, 越靠近所述列的中心的側導線的線寬越寬,越靠近所述列的邊緣的側導線的線寬越窄。The flat display device according to claim 1, wherein the ends of the plurality of side wires are arranged in a row substantially along a straight line, The line width of the side conductors closer to the center of the column is wider, and the line width of the side conductors closer to the edge of the column is narrower. 如請求項3所述的平面顯示裝置,其中所述多條側導線的每一者具有側面段,所述側面段包括: 側面抗蝕刻層,配置於所述基板的所述側面上;以及 側面導體層,夾設於所述側面抗蝕刻層及所述基板的所述側面之間, 越靠近所述列的邊緣的所述側面段具有越厚的所述側面抗蝕刻層,越靠近所述列的中心的所述側面段具有越薄的所述側面抗蝕刻層, 所述側面段的所述側面導體層具有實質相同的厚度。The flat display device of claim 3, wherein each of the plurality of side wires has a side segment, the side segment comprising: a side etching resist layer, disposed on the side surface of the substrate; and a side conductor layer, sandwiched between the side etching resist layer and the side surface of the substrate, the side segment closer to the edge of the column has the thicker side etch resist layer, the side segment closer to the center of the column has the thinner side etch resist layer, The side conductor layers of the side segments have substantially the same thickness. 如請求項1所述的平面顯示裝置,其中所述多條側導線的每一者具有彎曲的末端,所述多條側導線的所述末端朝相同側彎曲且所述多條側導線的所述末端大致上沿著弧線軌跡排列。The flat display device of claim 1, wherein each of the plurality of side wires has a bent end, the ends of the plurality of side wires are bent toward the same side and all of the plurality of side wires have ends that are bent The ends are arranged substantially along an arc trajectory. 如請求項1所述的平面顯示裝置,其中所述多條側導線的每一者包括導體層與抗蝕刻層,所述導體層夾設於所述抗蝕刻層及所述基板之間, 所述導體層相對於所述抗蝕刻層內縮而使所述基板、所述導體層與所述抗蝕刻層構成沿著所述導體層周緣的底切結構。The flat-panel display device of claim 1, wherein each of the plurality of side wires includes a conductor layer and an etch-resistant layer, the conductor layer is sandwiched between the etch-resistant layer and the substrate, The conductor layer is retracted relative to the etch-resistant layer so that the substrate, the conductor layer and the etch-resistant layer form an undercut structure along the periphery of the conductor layer. 如請求項1所述的平面顯示裝置,更包括: 至少一電路板,配置於所述基板的所述底面,且與所述多條側導線電性連接。The flat display device according to claim 1, further comprising: At least one circuit board is disposed on the bottom surface of the substrate and is electrically connected to the plurality of side wires. 如請求項1所述的平面顯示裝置,其中所述導線設置部包括第一導線設置部及第二導線設置部,所述第一導線設置部的曲率半徑大於所述第二導線設置部的曲率半徑, 所述多條側導線在所述第一導線設置部的排列間距大於在所述第二導線設置部的排列間距。The flat display device according to claim 1, wherein the wire setting part comprises a first wire setting part and a second wire setting part, and the curvature radius of the first wire setting part is larger than that of the second wire setting part radius, The arrangement pitch of the plurality of side wires in the first wire arrangement portion is greater than the arrangement pitch of the second wire arrangement portion. 一種平面顯示裝置的製造方法,包括: 提供一基板,具有相對的頂面及底面、以及連接於所述頂面與所述底面之間的側面,其中所述側面具有至少一導線設置部,所述導線設置部在所述基板的平面上呈弧形; 形成導體材料層,所述導體材料層連續地覆蓋所述基板的所述頂面、所述側面的所述導線設置部及所述底面; 將抗蝕刻圖案設置於轉印工具上; 使所述基板的所述側面抵靠所述轉印工具,並使所述基板相對於所述轉印工具旋轉,以將所述抗蝕刻圖案沿著所述導線設置部轉印於所述導體材料層上;以及 移除未被所述抗蝕刻圖案遮蔽的部分的所述導體材料層,以形成多條側導線。A method of manufacturing a flat display device, comprising: A substrate is provided, which has opposite top and bottom surfaces, and a side surface connected between the top surface and the bottom surface, wherein the side surface has at least one wire arrangement portion, and the wire arrangement portion is on the plane of the substrate arc-shaped forming a conductor material layer, the conductor material layer continuously covering the top surface of the substrate, the wire arrangement portion on the side surface, and the bottom surface; Setting the anti-etching pattern on the transfer tool; The side surface of the substrate is abutted against the transfer tool, and the substrate is rotated relative to the transfer tool to transfer the anti-etching pattern to the conductor along the wire arrangement portion on the material layer; and A portion of the conductor material layer not shielded by the etch-resistant pattern is removed to form a plurality of side wires. 如請求項9所述的平面顯示裝置的製造方法,其中所述多條側導線的末端沿所述基板的旋轉方向彎曲。The method of manufacturing a flat display device according to claim 9, wherein ends of the plurality of side wires are bent along a rotation direction of the substrate.
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