^/8417 :)、發明說明： •【發明所属— 汀屬之技術領域】 治具方法 糸提仏種濺鍍機自動倉儲控制系統及移載 經由濺铲#尤私其技術上提供一種使用後之濺鍍治具自動 -清潔之心ΐ、移載裝置及搬送裝置移載至暫存儲櫃，而 至機梦播=治具亦得由暫存儲植經移載裝置及搬送裝置送 • 〜殿機使用者。 【先前技術】 參閱第_、签一 一 壬曰土 乐一圖所示，習用之濺鍍機濺鍍治具， 董1達到九+八‘ —、 A ，體積亦相當龐大，精密度亦高度要求 ’母一治具以合今細 ^ 金鋼製作，費用更是昂貴，不容許任何損 傷，所以徒手搬遥p 、 ^ ^ 巳不可能，因此習用濺鍍機之治具搬運 方式，乃專門$ # 士， ^ 妒 十有人力治具台車（1 )(如第一圖所示） ’藉由人力治具a鱼 σ早Q 1 )進行治具進出氧化銦錫濺鍍機 的作業方式，其作紫y 1乍業权式係以人力治具台車（i )對齊暫 存儲樞（2 )，i I、/ , 呈 再以人力方式由暫存儲櫃（2 )中搬出治 /、（ 3 )(如第二圖所示），抬入人力治具台車（丄），再 推移人力治具台車（1 )至指定地點，當人力治具台車（ 1 )推到疋點後，與濺鍍機連結，需再進行一次治具（3 )進出作業，單_二且r Q、舌、去I丄、/ 1 /〇具C 3)重達九十公斤，且人力治具 台車（1 ) 一次作業最多只能處理四個治具（3 )，不僅 耗費人力與時間，作業上也極不方便，搬運大且重之治具 也有安全疑慮。 由前所述’習用之濺鍍治具之移載，仍存在有下列缺 5 1278417 失： 一、人力搬運治具^ 〈3)到台車（1 )上，再將治具 3) 由台車（1)15； ^ 至濺鍍機上，均具有相當高的風險 容易有安全上的疑慮。 、治具（3 )之、街丄 運數量與次數均多，而人力治具 1、一次只能處理四個治具（3 ) 明顯造成人力 台車（1 ) 與時間之耗費 二、以人工方式搬谨 ..u 飞徽運體積大且重量重之治具（3)， 作業上極不方便。 是以，針對上述習知 &知結樽所存在之問題點，如何開發 一種更具理想實用性之 ★於上 則新結構，實消費者所殷切企盼， 亦係相關業者須努力 、七 知大破之目標及方向。 有鐘於此，發明& + 叙4 本於多年從事相關產品之製造開發 與设叶經驗，針對上汁 狄尸 ☆ ’L之目樑，詳加設計與審慎評估後， 終付一確具實用性之本發明。 【發明内容】 各人解決之技術問題· ，主要 ”、、·驾知之濺鍍機治具搬運方式 王要利用人力治呈二 或濺鍍機，但人力/、口 _ δ人力搬移治具進出暫存儲櫃 具，以此模式較為—次作業最多只能處理四個治 ，而重且大之、/ f力與日m，且作業上也極不方便 里且大之治具以人工搬 解決Η π '、有女全疑慮。 解决問喊之技術特點··提 系統及移載、;Λ呈 ’、種濺鐘機自動倉儲控制 送裝置及濺鍍# 載羞置得以分別對齊於搬 视機載具庫，如此泠目1 具侍由濺鍍機載具庫送出 6 1278417 移載裝置，…一移載裝置送至搬送褒置，而搬 置得將治具送至第二移載裝[第二移载裝置則將治 選=暫存儲櫃之預定位置，而對於乾淨之治*，則經由 ,後由暫存儲櫃移至第二移載裝置，再由第二移載裝 =搬送裝置’搬送裝置運送至第—移載裝置I，第二 :置知將/α具送入濺鍍機載具庫内；該搬送裝置及第二 :栽裝置亦可省略’僅以第一移載裝置直接將機鑛機载： 适出之治具送入暫存儲櫃之預定位置儲放者。 對照先别技術之功效： …本發明提供一種全自動之倉儲控制系統，使得治 進出麇鑛機、進出暫存儲概或其間之運送 為安全，且更為節省人力者。 勺幸又 一、本發明並可配合場地而增減搬送裝i，使得 之範圍得以更彈性者。 有關本發明所採用之技術、手段及其功效，兹舉一較^/8417 :), invention description: • [invention - the technical field of the genus] The fixture method 糸 仏 溅 溅 溅 溅 溅 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 自动 尤 尤 尤 尤 尤 尤 尤 尤 尤 尤 尤 尤 尤The sputtering fixture automatically-cleans the heart, the transfer device and the transfer device to the temporary storage cabinet, and the machine dream broadcast = the fixture must also be sent by the temporary storage plant transfer device and the transport device. Machine user. [Prior Art] See the _, sign one by one, as shown in the figure, the conventional sputtering machine splashing fixture, Dong 1 reaches nine + eight '-, A, the volume is also quite large, the precision is also high It is required to make the 'mother one fixture' to make it into the metal. The cost is more expensive and does not allow any damage. Therefore, it is impossible to move it by hand, ^ ^ 巳 is impossible, so the handling method of the conventional sputtering machine is special. $ #士, ^ 妒10 has a manpower fixture trolley (1) (as shown in the first figure) 'With the manpower fixture a fish σ early Q 1 ) to carry out the operation mode of the indium oxide tin sputtering machine The purple y 1 乍 权 以 以 以 以 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 人力 对齐 对齐 对齐 对齐 对齐 对齐 对齐 对齐 对齐 对齐 对齐(As shown in the second figure), lift the manpower fixture trolley (丄), then move the manpower fixture trolley (1) to the designated location, when the manpower fixture trolley (1) is pushed to the spot, and the sputtering Machine connection, need to carry out a fixture (3) in and out of the operation, single _ two and r Q, tongue, to I 丄, / 1 / cookware C 3) weighs 90 kilograms, and people Fixture trolley (1) for one job can only handle four fixture (3), not only labor intensive and time, the work is also very inconvenient, handling of large and heavy jigs are also security concerns. From the previous transfer of the conventional splashing fixture, there are still the following defects: 5, 12,784,17 Loss: 1. Manpower handling fixture ^ <3) to the trolley (1), and then the fixture 3) by the trolley ( 1) 15; ^ On the sputter machine, there is a considerable risk of safety and easy to have doubts. And the fixtures (3), the number of street transport and the number of times, and the manpower fixture 1, can only deal with four fixtures at a time (3) obviously cause the human trolley (1) and the cost of time two, by artificial means Moving..u Flying emblem is a large and heavy fixture (3), which is extremely inconvenient in operation. Therefore, in view of the problems existing in the above-mentioned knowledge and knowledge, how to develop a more ideal and practical ★ on the new structure, the real consumer is eagerly awaited, and the relevant industry must work hard, the seven know The goal and direction of breaking. There are bells here, invention & + VII 4 This is the experience of manufacturing and development of related products for many years, for the sacred corpse of ☆ 'L's eye, after detailed design and careful evaluation, the final payment is guaranteed The invention of the utility. [Summary of the Invention] The technical problems solved by each person···························································································· Temporary storage cabinets, this mode is more - the maximum number of operations can only deal with four treatments, but heavy and large, / f force and day m, and the operation is also extremely inconvenient and the big fixture is manually solved Η π ', have women's full doubts. Solve the technical characteristics of the caller ··Remove the system and transfer, Λ ',,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The aircraft carrier library is so eye-catching. 1 The servo shop of the waiter sends out the 6 1278417 transfer device, ... a transfer device is sent to the transfer device, and the fixture is sent to the second transfer device. [The second transfer device will select the location of the temporary storage cabinet, and for the clean treatment*, then pass through, then move from the temporary storage cabinet to the second transfer device, and then move from the second transfer device=transfer The device 'transport device is transported to the first transfer device I, and the second: the device is sent to the sputter machine carrier library The conveying device and the second: planting device may also omit 'the first transfer device directly transports the machine tool carrier: the appropriate jig is sent to the predetermined position storage device of the temporary storage cabinet. Efficacy: ... The invention provides a fully automatic storage control system, which makes it safe to transport the in-and-out miners, the in-and-out temporary storage or the transportation between them, and saves manpower. The increase or decrease of the transporting device i makes the range more flexible. The techniques, means and effects of the invention are described.
佳貫施例並配合圖式钱^ % B 口式评細呪明於后，相信本發明上述之目 的、構造及特徵，當可由之得一深入而具體的瞭解。 【實施方式】 參閱第三圖所示’本發明係提供一種濺鍍機自動倉 儲控制系統，其一較佳實施例可包含有： 濺鍍機載具庫（1丄），該濺鍍機載具庫（1 1) 設於氧化銦錫濺鍍機^( i 〇 )之旁側； 第-移載裝置（20)(如第八圖所示），該第一移載 裝置（20)設於濺鍍機載具庫（丄工）《一側，並該第 7 1278417 移載裝置（2 〇 )係於地面舖設導弓 件（2 1 )可為二滑軌，使第一移戴裝 1 ) ^ 導引件 Γ9ί、 31 ^ 2 〇 ) ζ 1 )滑移來對齊濺鍍機·栽具庫（ 一搬送裝置（3〇)，該搬送寰置 1 1}’ 移載裝置（2 0)之異於濺鍍機載具 0 載裝置（20)並料引件（21) 1 (3 0 )，榉〜壯 移來對齊搬$ ；搬适裝置（3 〇 )得由多 第九圖所干、 致搬迗機（3 i 不）所排列組成，搬送機（^ 需求增減，掺、矣妝m / 0 )之數量ΰ 搬运裝置（3 〇 )之二側 (3 2、、r 〇 训刀別形成治具d 33)，第一移載裝置 / 9 Ί X 、乙 u ) 月移來對齊搬送裝置（3 〇2 )； 得 設於 旁側 得藉由委 之治具出入t 第二移載裝置 於搬送裝置（3 〇 第二移載裝置（4 使第一移載裝置（ 齊搬送裝置（3 〇 暫存儲櫃（5 0 ) 一暫存儲櫃（ 第二移載裝置（4 暫時存放六十幾片 具（7 0 )，第二寻 至暫存儲櫃（5 〇 引件（41)滑移 (40)，該第二移栽裝置（4 )之異於第-移載裳置（2〇) 0 )於地面上舖設有導引件（4 4 〇 )得於導引件（4 i )上滑 )之治具出入口（ 3 3 )，並可: 或翻轉裝置（6 〇 )對齊； 5〇)(如第+、第十一圖所示） 〇 )之導引件（4 1 )旁側，得」 之/口具（70)，&含使用過或与 多載裝置（4 0 )導力件（4 1〕 )旁側，使第二移載裝置（4 〇 ) 而可對齊暫存儲櫃（5 〇 )其一 ^ 導引 藉由 第一 ，移 裝置 > (如 場地 入口 引件(3 )設 側，L )， 來對 移至 設於 提供 淨治 舖設 藉導 存位 8 1278417 '置； * 一翻轉裝置（6 Ο )，設於第二移載裝置（40)之 導引件（4 1 ) 一側，翻轉裝置（6 0 )並於暫存儲櫃（ ’ 5 0 )之一側，治具（7 0 )可經第二移載裝置（4 0 ) 而送入翻轉裝置（6 0 )翻轉九十度（如第十二圖所示） ，一台車（80)，該台車（80)設於翻轉裝置（60 )之翻轉送出位置，如此在翻轉裝置（6 0 )翻轉而使高 ^ 度降低之治具（70)可送入台車（80)(如第六圖所 示），以便利台車（8 0 )將使用過之治具（7 0 )送出 请洗者。 本發明之一種濺鍍機移載治具方法，其移出之移載步 驟為： a ·進出作業：由濺鍍機（1 〇 )之濺鍍機載具庫（ 1 1 )，將使用過之治具（70)送入第一移載裝置（2 0 ); • b ·搬運作業：第一移載裝置（20)於導引件（2 .1)上滑移而對齊搬送裝置（30)之治具出入口 （32 )，第一移載裝置（2 0 )啟動而搬運治具（7 0 )進入 搬送裝置（3 0 )内； c ·移載作業：利用搬送裝置（3 0 )將已進入搬送 裝置（30)之治具（70)，移至第二移載裝置（40 )内進行移載之轉移載送（如第三圖所示）； d ·對正作業：該第二移載裝置（4 0 )沿著導引件 (4 1 )移動，並對正暫存儲櫃（5 0 )之其一預定儲放 9 1278417 • 格位（5 1 )(如第十圖所示）； ； e ·進出作業：第二移載裝置（4 0 )對正其中一儲 放格位（5 1 )後，可將治具（7 0 )由第二移載裝置（ ^ 4 0 )推出，並送入預定儲放格位（5 1 )暫存（如第三 圖所示）。 本發明之一種濺鍍機移載治具方法，其移入之移載 步驟為： 0 a ·對正作業··該第二移載裝置（4 0 )沿著導引件 (4 1 )移動，並對正暫存儲櫃（5 0 )之其一預定儲放 格位（5 1 ); b ·進出作業··第二移載裝置（40)對正其中一儲 放格位（51)後，可將治具（70)由暫存儲櫃（50 _ )推出，並送入第二移載裝置（40); c ·搬運作業：第二移載裝置（4 0 )於導引件（4 1)上滑移而對齊搬送裝置（30)之治具出入口（3 3 # )，第二移載裝置（40)啟動而搬運治具（70)進入 . 搬送裝置（3 0 )内； d ·移載作業：利用搬送裝置（3 0)將已進入搬送 裝置（30)之治具（70)，移至第一移載裝置（20 )内進行移載之轉移載送； e ·進出作業：由第一移載裝置（2 0 )將乾淨之治 具（7 0 )送入濺鍍機< (10)之濺鍍機載具庫（11) 參閱第四、五圖所示，本發明之一種濺鍍機自動倉儲 10 0 1 ) 1278417 乂控制系統之另一較佳實施例可包含有： ； 一濺鍍機載具庫（1 1 )，該濺鍍機載具庫（1 設於氧化銦錫濺鍍機（1 0 )之旁側； ‘ 第一移載裝置（2 0 )，該第一移載裝置（2 0 於濺鍍機載具庫（1 1 )之一側，並該第一移載裝置 0 )係於地面舖設導引件（2 1 )該導引件（2 1 ) 二滑執，使第一移載裝置（2 0 )得藉由導引件（2 $ 滑移來對齊濺鍍機載具庫（1 1 ); 一暫存儲櫃（5 0)設於第一移載裝置（2 0) 引件（2 1 ) —側，得以提供暫時存放六十幾片之治 7 0 )，包含使用過或乾淨治具（7 0 )，第一移載裝 2 0 )導引件（2 1 )舖設至暫存儲櫃（5 0 )，使 _ 移載裝置（2 0 )藉導引件（2 1 )滑移而可對齊暫 櫃（5 0 )其一暫存位置； 一翻轉裝置（60)，設於暫存儲櫃（50)之 •，翻轉裝置（6 0 )係對齊於第一移載裝置（2： 0 ) ^ 置，使治具（70)可經第一移載裝置（20)而送 轉裝置（60)翻轉九十度，一台車（80)，該台 8 0 )設於翻轉裝置（6 0 )之翻轉送出位置，如此 轉裝置（6 0)翻轉而使高度降低之治具（70)可 台車（8 0 )(如第六圖所示），以便利台車（8 0 ) 用過之治具（7 0 )送出清洗者。 本發明之一種濺鍍機移載治具方法，其移出之移 驟為： )設 (2 可為 1 ) 之導 具（ 置（ 第一 存儲 一側 之位 入翻 車（ 在翻 送入 將使 載步 11 1278417 a ·對正作業：第一移載裝置（20)於導引件（2 1 )上滑移而移動至對齊濺鍍機（1 〇 )之濺鍍機載具庫 (11)(如第四、第五圖所示）； b ·進出作業：由濺鍍機（1 〇)之濺鍍機載具庫（ 1 1 )，將使用過之治具（70)送入第一移載裝置（2 0 )(如第四、第五圖所示）； c ·對正作業：第一移載裝置（2 0 )於導引件（2 1 )上滑移，至對齊暫存儲櫃（5 0 )之其一預定儲放格 位（5 1 ); d ·送入作業：治具（7 0 )由第一移載裝置（2 0 )推出，並送入預定儲放格位（51)暫存（如第四、第 五圖所示）。 本發明之一種濺鍍機移載治具方法，其移入之移載步 a ·對正作業：第一移載裝置（2 0 )於導引件（2 • 1 )上滑移，對正暫存儲櫃（5 0 )之其一預定儲放格位 • (51)； b ·進出作業：由暫存儲櫃（5 0 )將乾淨之治具（ 70)送入第一移載裝置（20)(如第四、第五圖所示 c ·對正作業：第一移載裝置（20)於導引件（2 1 )上滑移，至對正濺鍍機（1 0 )之濺鍍機載具庫（1 1 ); d ·送入作業：治具（70)由第一移載裝置（20 12 1278417 )推出，並送、 所示）。 濺鍍機載具庫（11)(如第四、第五圖 弟四圖與苐五 設於濺鍍機（丄圖之差別在於’該暫存儲櫃（5 〇 )得 明更能配合現0)之左側或右側之不同，如此使得本發 參閱第 衰境作機動調整者。 需要送出清洗，！圖所* ’該暫存之用過治具（7 〇)均 0 )藉*導引件其送出清洗之過程乃將帛二移載裝置（4 一預清洗仏s ( 4 1 )移動至對齊暫存儲櫃（5 0 )其 使I:::::…所在位置之儲輪（“)，將 轉裝置（6 7〇)抽出後送至翻轉裝置（60)，翻 呈（7 π、）乃將治具（7 0 )翻轉九十度，以降，低治 載至二it再將治具(7。)送上…“) =翻轉…6〇)可設於暫存儲櫃（5〇)之 =置（如第六圖所示），或翻轉裝置（6〇)得設於 暫存儲概（…之左侧位置（如第七圖所示）者。、 本發明功效增進之處如下： ?、本發明提供治具之全自動倉儲控制系統，使治具 运入錢鑛機載具庫或送至暫存儲櫃暫存過程，完全益需 人力搬運，得以節省時間、人工及較為安全者。…、 2、本發明之搬送裝置及移載襄置並可配合場地增減 ^亥搬达裝置斜配合加長或減短長度，使本發明之設 置更具彈性，可配合場地進行配置者。 前文係針對本發明之較佳實施例為本發明之技術特徵 13 1278417 進行具體之說明；惟，熟悉此項技術之人士當可在不脫離 ； 本發明之精神與原則下對本發明進行變更與修改，而該等 變更與修改，皆應涵蓋於如下申請專利範圍所界定之範疇 中 〇 【圖式簡單說明】 第一圖：係習用人力治具台車之立體示意圖。 第二圖：係習用治具及暫存儲櫃立體示意圖。 ^ 第三圖：係本發明之其一較佳實施例圖。 第四圖：係本發明之另一較佳實施例圖。 第五圖··係本發明之又一較佳實施例圖。 第六圖：係本發明之翻轉裝置其一例示意圖。 第七圖··係本發明之翻轉裝置另一例示意圖。 第八圖：係本發明之第一移載裝置平面示意圖。 第九圖：係本發明之搬送機平面示意圖。 第十圖：係本發明之其一暫存儲櫃前視平面示意圖。 # 第十一圖：係本發明之暫存儲櫃側視平面示意圖。 . 第十二圖：係本發明之翻轉裝置平面示意圖。 第十三圖：係本發明之第二移載裝置平面示意圖。 【主要元件符號說明】 (1 )人力治具台車 （2 )暫存儲櫃 (3 )治具 (11)濺鍍機載具庫 (21)導引件 (31)搬送機 (1 0 )氧化銦錫，賤鍍機 (20)第一移載裝置 (3 0 )搬送裝置 14 1278417 ( 3 2 )治具出入口 ‘.（4 0 )第二移載裝置 (5 0 )暫存儲櫃 ^ ( 6 0 )翻轉裝置 (8 0 )台車 (3 3 )治具出入口 (41)導引件 (5 1 )儲放格位 (7 0 )治具It is believed that the above-mentioned objectives, structures and features of the present invention can be obtained from an in-depth and specific understanding of the present invention. [Embodiment] Referring to the third figure, the present invention provides a sprinkler automatic storage control system, and a preferred embodiment thereof may include: a sputter machine carrier library (1丄), the sputter machine The library (1 1) is disposed beside the indium tin oxide sputtering machine ^ (i 〇); the first-transfer device (20) (as shown in the eighth figure), the first transfer device (20) is provided On the side of the sprinkler carrier (completed), and the 7 1278417 transfer device (2 〇) is placed on the ground laying guide (2 1 ) can be two slides, making the first shift dress 1) ^ Guide Γ9ί, 31 ^ 2 〇) ζ 1) Slip to align the sputter machine and planting library (a transfer device (3〇), the transfer device 1 1}') transfer device (2 0 ) is different from the sprinkler carrier 0 carrier device (20) and the feeding device (21) 1 (3 0 ), 榉 ~ 壮 来 aligning to move $; moving device (3 〇) by more than ninth The number of the dry and moving machine (3 i not) is arranged, the number of conveyors (^ demand increase and decrease, blending, makeup m / 0) ΰ the two sides of the handling device (3 〇) (3 2, r 〇 knives do not form fixtures d 33), the first transfer device / 9 Ί X, b u) migrating to align the transport device (3 〇 2); it must be placed on the side to pass the second transfer device to the transport device (3 〇 second transfer device (4 The first transfer device (the 搬 transfer device (3 〇 temporary storage cabinet (5 0 ) a temporary storage cabinet (the second transfer device (4 temporarily stores more than sixty pieces (7 0), the second to the temporary storage cabinet (5 〇 lead (41) slips (40), the second transplanting device (4) is different from the first-shifting skirt (2〇) 0) is laid on the ground with guides (4 4 〇 ) The access door ( 3 3 ) of the guide (4 i ) slides up and can be: or the turning device (6 〇) aligned; 5〇) (as shown in the +, 11th) 〇 ) the side of the guide (4 1 ), the side of the device (70), & with or with the multi-load device (40), the side of the force (4 1), so that the second The transfer device (4 〇) can be aligned to the temporary storage cabinet (5 〇), and the guidance is moved to the first (moving device) (such as the site entrance guide (3) set side, L) Located in the provision of the net governance paved deposits 8 1278417 'set; * The turning device (6 Ο ) is disposed on one side of the guiding member (4 1 ) of the second transfer device (40), and the turning device (60) is disposed on one side of the temporary storage cabinet ('50), the fixture (7 0 ) can be sent to the turning device (60) through the second transfer device (40) to invert 90 degrees (as shown in Fig. 12), a car (80), the car (80) is set In the flipping position of the turning device (60), the jig (70) which is turned over in the turning device (60) and lowered in height can be sent to the trolley (80) (as shown in the sixth figure) for convenience. The trolley (800) will send the used fixture (7 0) to the washer. In the method of transferring the jig of the sputtering machine of the present invention, the moving and removing steps are as follows: a. In and out operation: a sprinkler carrier (1 1 ) by a sputtering machine (1 〇), which will be used. The jig (70) is fed into the first transfer device (20); • b. Handling operation: the first transfer device (20) slides on the guide member (2.1) and aligns the transfer device (30) The jig entry and exit (32), the first transfer device (20) is activated and the transport fixture (70) enters the transport device (30); c. Transfer operation: using the transport device (30) Entering the fixture (70) of the conveying device (30), moving to the second transfer device (40) for transfer transfer (as shown in the third figure); d · Aligning operation: the second shift The carrier device (40) moves along the guiding member (4 1 ), and a predetermined storage of the temporary storage cabinet (50) is 9 1278417 • grid position (5 1 ) (as shown in the tenth figure) ; e · In and out operation: After the second transfer device (4 0 ) is aligned with one of the storage positions (5 1 ), the fixture (70) can be pushed out by the second transfer device (^ 4 0 ) And send it to the predetermined storage level (5 1 ) for temporary storage ( The third figure). In the method of transferring the jig of the sputtering machine of the present invention, the moving step of moving in is: 0 a · alignment operation · the second transfer device (4 0 ) moves along the guiding member (4 1 ) And one of the predetermined storage bins (5 1 ) of the temporary storage cabinet (5 0 ); b · the ingress and egress operation · the second transfer device (40) is aligned with one of the storage bins (51), The jig (70) can be pushed out from the temporary storage cabinet (50 _ ) and sent to the second transfer device (40); c · handling operation: the second transfer device (40) is guided by the guide (4 1 Sliding up and aligning the jig entry and exit (3 3 # ) of the transport device (30), the second transfer device (40) is activated and the transport jig (70) is entered into the transport device (30); d · shift Loading operation: transferring the jig (70) that has entered the conveying device (30) to the transfer device in the first transfer device (20) by the transfer device (30); e. In and out operation: The first transfer device (20) feeds the clean jig (70) into the sputter machine<(10) the sputter machine carrier library (11). Referring to the fourth and fifth figures, the present invention A sprinkler automatic storage 10 0 1) 1278417 乂 control Another preferred embodiment of the system may include: a sputtering machine carrier library (1 1 ), the sputtering machine carrier library (1 is disposed beside the indium tin oxide sputtering machine (10); a first transfer device (20), the first transfer device (20 on one side of the sprinkler carrier library (1 1 ), and the first transfer device 0) is attached to the ground laying guide The member (2 1 ) is guided by the guiding member (2 1 ) so that the first transfer device (20) can be aligned with the carrier (1 1 ) by the guide member (2 $ slippage) A temporary storage cabinet (50) is located on the side of the first transfer device (20), and provides a temporary storage of more than sixty pieces of medical treatment. 70), including used or clean fixtures (7 0 ), the first transfer device 20) the guide member (2 1 ) is laid to the temporary storage cabinet (50), so that the _ transfer device (20) is slid by the guide member (2 1 ) The temporary cabinet (50) can be aligned with a temporary storage position; a turning device (60) is disposed in the temporary storage cabinet (50), and the turning device (60) is aligned with the first transfer device (2: 0) ^ ^, so that the fixture (70) can be turned over by the first transfer device (20) and the device (60) is turned over ninety degrees , a car (80), the table 80 is set in the flipping position of the turning device (60), so that the turning device (60) is turned over so that the height reducing jig (70) can be used for the trolley (800) ( As shown in the sixth figure, the cleaner is sent to the fixture (70) used by the trolley (800). The method for transferring the jig of the sputtering machine of the present invention, the moving movement step is:) setting (2 can be 1) the guide (set (the first storage side of the position into the rollover (in the turn-in will make Step 11 1278417 a · Alignment operation: the first transfer device (20) slides on the guide member (2 1 ) and moves to the sputter machine (1 〇) of the sputter machine carrier library (11) (As shown in the fourth and fifth figures); b · In and out operation: the sprinkler carrier (1 1 ) of the sputter machine (1 〇), the used jig (70) is sent to the first Transfer device (20) (as shown in the fourth and fifth figures); c · Alignment operation: the first transfer device (20) slides on the guide (2 1 ) to the alignment temporary storage a predetermined storage position (5 1 ) of the cabinet (50); d · feeding operation: the fixture (70) is pushed out by the first transfer device (20) and sent to the predetermined storage position (51) Temporary storage (as shown in the fourth and fifth figures). A method for transferring the jig of the sputtering machine of the present invention, the moving step of moving in a · alignment operation: first transfer device (2 0 ) Sliding on the guide (2 • 1), facing the temporary storage cabinet (5 0 (1) one of the predetermined storage positions • (51); b • access operation: the clean fixture (70) is sent to the first transfer device (20) by the temporary storage cabinet (50) (eg fourth, The fifth figure shows the c-alignment operation: the first transfer device (20) slides on the guide member (2 1 ) to the sputtering machine (1 0 ) of the sputtering machine carrier library (1) 1); d · Feeding operation: The jig (70) is pushed out by the first transfer device (20 12 1278417) and sent, shown). The sprinkler carrier (11) (such as the fourth and fifth) The four pictures of the Tudi and the 苐五 are set on the sputter machine (the difference between the two is that the temporary storage cabinet (5 〇) can be better equipped with the left side or the right side of the current 0), so that the present is referred to the first For the maneuver adjuster. Need to send out the cleaning,! Figure * 'The temporary use of the fixture (7 〇) are 0) l * The guide is sent to the cleaning process is the second transfer device (4 a pre- The cleaning 仏s ( 4 1 ) is moved to the aligning temporary storage cabinet (5 0 ), which makes the storage wheel (") at the position of I:::::..., and the rotating device (6 7 〇) is taken out and sent to the turning device ( 60), reversal (7 π,) is to turn the fixture (7 0 ) flip nine Ten degrees, to drop, low to load to two and then to the fixture (7.) to send ... ") = flip ... 6 〇) can be set in the temporary storage cabinet (5 〇) = set (as shown in Figure 6 ), or the flipping device (6〇) is provided in the temporary storage position (as shown in the seventh figure). The improvement of the present invention is as follows: ?, the present invention provides automatic automatic fixture The warehousing control system allows the jig to be transported into the money mining vehicle carrier or sent to the temporary storage cabinet for temporary storage. It is fully manned for manpower handling, saving time, labor and safety. ..., 2. The conveying device and the transfer device of the present invention can be combined with the increase or decrease of the site. The inclined device of the device can be lengthened or shortened to make the setting of the present invention more flexible and can be configured with the site. The foregoing description of the preferred embodiment of the present invention is intended to be a part of the description of the present invention, and the invention will be modified and modified without departing from the spirit and principles of the present invention. And such changes and modifications shall be covered in the scope defined by the following patent application scope. [Simple description of the drawings] The first figure is a three-dimensional diagram of a conventional manpower fixture trolley. The second picture is a three-dimensional diagram of the conventional fixture and temporary storage cabinet. ^ Third FIGURE: A diagram of a preferred embodiment of the present invention. Fourth Figure: is a diagram of another preferred embodiment of the present invention. Fig. 5 is a view of still another preferred embodiment of the present invention. Fig. 6 is a schematic view showing an example of the inverting device of the present invention. Fig. 7 is a schematic view showing another example of the inverting device of the present invention. Figure 8 is a plan view showing the first transfer device of the present invention. Figure 9 is a plan view of the conveyor of the present invention. Figure 10 is a front plan view of a temporary storage cabinet of the present invention. #十一十一图: A schematic plan view of a side view of the temporary storage cabinet of the present invention. Fig. 12 is a plan view showing the turning device of the present invention. Figure 13 is a plan view showing the second transfer device of the present invention. [Main component symbol description] (1) Manpower fixture trolley (2) Temporary storage cabinet (3) Fixture (11) Sputtering machine carrier library (21) Guide (31) Transporter (1 0) Indium oxide Tin, bismuth plating machine (20) first transfer device (30) transfer device 14 1278417 (3 2) jig entrance and exit '. (4 0) second transfer device (50) temporary storage cabinet ^ (6 0 ) Flip device (80) Trolley (3 3) Fixture entrance (41) Guide (5 1) Storage position (70) Fixture
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