TW201619029A - Holding apparatus, vacuum processing apparatus - Google Patents

Abstract

The invention provides a holding device and a vacuum treatment device. A held object is subjected to vacuum treatment, while exhaust gas on an adhesive pad is not discharged to vacuum environment. The adhesive pad (17) is arranged in a vacuum device (15) of the holding device (11). When the held object (5) is kept in an adhesion state, a contact part (18) on the edge of the vacuum device (15) is pressed to enable inner space (25) of the vacuum device (15) to be separated from outer space (26). The inner space (25) of the vacuum device (15) is subjected to vacuum exhaust in advance via an exhaust vent (14) in the vacuum device (15). When vacuum treatment is carried out, the exhaust vent (14) is in a state with no gas passing through, so that the exhaust gas from the adhesive pad (17) is not discharged to the environment where vacuum treatment of the held object (5) is performed.

Description

Holding device, vacuum processing device

The present invention relates to a holding device capable of holding a holding object by an adhesive sheet and moving in a vacuum atmosphere, and a vacuum processing device for vacuum-treating the holding object held by the holding device.

In the manufacturing process of a flat panel display such as a liquid crystal display (LCD) or a plasma display (PDP), a substrate assembly process and a substrate transfer process are included, and a technique of using an adhesive chuck device for holding a substrate is known.

For example, the device described in Japanese Patent No. 3882004 is a substrate on which a substrate transferred by a substrate transport robot is pressed against a holding plate at a predetermined pressure, and the substrate is held by the adhesive force of the adhesive member. It is also described that the concave portion surrounded by the adhering member and the substrate is vacuum-sucked, so that the holding can be more strongly attracted.

According to the device, the movable film is deformed by the pressure difference between the concave portion and the closed space partitioned by the deformed film to perform peeling or adhesion holding of the substrate and the adhesive member, and further, by providing a ventilation path and inhaling The source can also eject the gas when suction suction or peeling is performed by vacuum suction.

However, according to the adsorption retention described in the publication, if When the adhesive pad and the substrate are bonded to each other without reaching a sufficient degree of vacuum, the problem of entrapment of air occurs when the adhesive member and the substrate are bonded, because the adhesive force depends on the contact area of the substrate and the adhesive member. Entrapment of air reduces the contact area and reduces the adhesion, which may cause the substrate to fall.

In addition, in the part where the adhesive pad and the substrate are in close contact, because there is no There is a pressure difference without generating a tight pressure. In order to ensure a strong pressing pressure, the space between the adhesive pads must be increased, the substrate may be deformed due to pressure, and the device may have to be enlarged.

In addition, the recesses and closed spaces that are separated by the deformed film A pressure difference is generated therebetween, whereby the adhesive pad disposed on the deformed film is pressed toward the substrate. According to the pressure distribution of the joint between the deformed film and the adhesive pad, the adhesive surface of the adhesive pad may be deformed to form a strong dense bond with the substrate. Hehe.

In addition, the bonding side of the substrate and the adhesive member are opposite sides The surface of the substrate (film formation surface) contacts the member of the substrate transport robot to generate particles. In particular, particles on the film formation surface of the glass substrate of the organic EL display adversely affect the device characteristics.

The device disclosed in Japanese Laid-Open Patent Publication No. 2011-35301, The adhesive pad is disposed on the support plate so that the adsorption groove surrounded by the adhesive pad arrangement side of the support plate and the plate-shaped workpiece becomes a negative pressure, and the pressure pad is pressed against the support plate to make the adhesive pad and the plate-like workpiece close to each other, and the configuration is further configured. The adsorption groove with the adhesive pad returns to the atmospheric pressure, so that the pressure regulating chamber on the side of the support plate on which the adhesive pad is not disposed becomes Negative pressure causes pressure to act on the support plate to peel the adhesive pad from the plate-like workpiece.

The device described in Japanese Patent No. 4746579, The adhesive sheet and the substrate are adsorbed by a negative pressure, and by using the elastic porous sheet, not only the negative pressure can be used to adsorb the substrate, but also the stress of the substrate can be reduced. However, with respect to the adsorption surface of the elastic porous sheet, since the area of the porous material is small, the negative pressure acting on the substrate is lowered, and there is a problem that the heavy substrate cannot be picked up. Further, the method of using an elastic porous sheet cannot be used in a vacuum.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-35301

[Patent Document 2] Japanese Patent No. 3882004

[Patent Document 3] Japanese Patent No. 3917651

[Patent Document 4] Japanese Patent No. 4746579

The present invention has been developed in order to solve the above problems of the prior art, and provides a holding device that does not contact the surface of the object to be vacuum-treated, and can surely hold the object to be held and move in a vacuum atmosphere. .

Further, a vacuum processing apparatus is provided which performs vacuum processing by holding a holding object by the holding means.

In general, even when the adhesive member and the substrate can be bonded together in a vacuum, the substrate surface (film formation surface) on the opposite side of the portion where the substrate is bonded to the adhesive member is in contact with the member of the substrate transfer robot. And may produce particles.

In the case where the substrate is held in a non-contact manner on the film formation surface, a method of adhering the adhesive member and the substrate by vacuum suction or by using the weight of the substrate itself is conceivable, and the former may not be used in a vacuum.

When the adhesive pad is pressed by the weight of the substrate itself, as long as the area of the portion where the substrate and the adhesive pad are in contact is reduced, the pressing force per unit area can be increased, and the adhesive holding force is enhanced, but the substrate is suspended and held. In this case, the peeling force between the substrate and the adhesive portion is also increased, and there is a flaw in the substrate falling.

Conversely, if the area of the adhesive portion is increased with respect to the substrate, the pressing force per unit area is reduced, and the contact area between the substrate and the adhesive pad is reduced to lower the adhesive holding force. Also in this case, when the substrate is suspended and held, there is a possibility that the substrate is dropped.

On the other hand, when the adhesion of the adhesive pad is enhanced, local stress is applied to the substrate when the substrate is peeled off, and damage may occur or the substrate may be deformed.

The technique used in the present invention has been developed to solve the above problems. The holding device of the present invention is for allowing an adhesive pad provided on a holding unit to contact an object to be held, and the holding object is used by the adhesive pad. Carrying and holding; the aforementioned holding unit a vacuum container, a contact portion, a vent hole, and a moving device, wherein the contact portion is disposed at an edge of the vacuum container, and is in contact with the holding object to isolate an inner space of the vacuum container from an outer space of the vacuum container The vent hole is provided in the vacuum container, and serves to evacuate a gas in the internal space by suction and exhaust means, and the internal space is formed by the object to be held and the contact portion. The external space is isolated; the moving device is configured to move the adhesive pad; the adhesive pad is disposed in the inner space, and the moving device moves the direction in which the adhesive pad moves, that is, the moving direction: a surface relative to the contact portion The contact plane in which the portion in contact with the object to be held is located is a moving component in the vertical direction.

The holding device of the present invention includes: a plurality of the vacuum containers; and the adhesive pad disposed in each of the vacuum containers; and the plurality of the adhesive pads and the contact portion disposed at an edge of the plurality of vacuum containers are the same One of the aforementioned holding objects is in contact.

The holding device of the present invention has a plurality of the adhesive pads disposed in the inner space of the same vacuum container, and the plurality of the adhesive pads and the contact portion disposed at the edge of the vacuum container are maintained in the same manner as the foregoing Object contact.

In the present invention, the contact portion is a ring-shaped member having flexibility.

In the invention, the contact portion is disposed on a flat surface of the holding device.

In the present invention, a groove is provided on the surface of the aforementioned holding device, The contact portion is disposed in the aforementioned groove.

In the present invention, the contact portion is formed of a pressure-sensitive adhesive sheet which is disposed on the vacuum container, and a sheet hole which is a through hole is formed in the opening of the vacuum container.

In the present invention, there is provided a rotating mechanism that moves the adhesive pad while rotating in a direction away from the contact portion with respect to the vacuum container.

The holding device of the present invention includes a loading and unloading device that connects the holding device to the adsorption exhaust device, and the loading and unloading device separates the holding device from the adsorption exhaust device to cause the holding device and the adsorption device It can be moved individually with the exhaust device.

In the present invention, the vacuum container is set such that when it is separated from the adsorption exhaust device, gas is prevented from flowing into the vacuum container through the exhaust hole.

In the present invention, the elastic pad that is adhered to the object to be held is biased in a direction away from the object to be held by a resilient cushioning member.

The vacuum processing apparatus according to the present invention includes any one of the above holding devices, a vacuum chamber, and a processing unit; the holding device is disposed in the vacuum chamber; the processing unit is disposed in the vacuum chamber and is provided by the adhesive pad The aforementioned treated surface of the aforementioned object to be held which is adhered and treated with the treatment surface facing downward is treated in a vacuum atmosphere.

In the present invention, the processing unit is a film forming apparatus that releases fine particles for forming a thin film and forms a thin film on the surface of the holding target.

According to the present invention, when the adhesive pad is pressed against the object to be held, since the object to be held is vacuum-adsorbed, the adhesive pad can be surely adhered to the object to be held, and the adhesive holding force of the adhesive pad to the object to be held can be improved.

Further, since the adhesive pad and the holding object are adhered in a vacuum, there is no gas existing between the surface of the adhesive pad adhered to each other and the object to be held.

Further, since the one-side surface of the object to be held can be adhered and held in a non-contact manner, it is possible to prevent the occurrence of defective products.

In addition, the adhesive substance of the adhesive pad belongs to an organic substance, and the released gas is released from the adhesive pad, and is configured to press the holding object to the contact portion by the restoring force and prevent the gas from flowing from the vent hole of the vacuum container. In the vacuum processing, since the internal space of the vacuum container is isolated from the external space, the released gas can be prevented from being released into the processing chamber in which the object to be treated is disposed in the vacuum processing.

In addition, since a plurality of holding means are used to hold one object to be held, the force applied to the object to be held can be dispersed, and cracking and deformation of the object to be held can be suppressed.

5‧‧‧ Keep objects

10‧‧‧Vacuum treatment unit

11, 11a, 11b, 11c‧‧‧ Keeping device

13, 13a‧‧‧Holding unit

14‧‧‧ venting holes

15, 65‧‧‧vacuum containers

17‧‧‧Adhesive pad

18, 18a, 18b, 18c‧ ‧ contact

19‧‧‧ openings

21‧‧‧vacuum tank

25‧‧‧Internal space

26‧‧‧External space

38‧‧‧Sheet hole

39‧‧‧ Closed sheet (contact)

40‧‧‧Handling device

59‧‧‧Rotating mechanism

Fig. 1 shows a vacuum processing apparatus of the present invention.

Fig. 2 (a) shows a holding device of a first example of the present invention in a state in which a holding object is not held, and Fig. 2 (b) shows a holding device of a first example in which a plurality of holding units hold a state in which an object is held. .

Fig. 3(a) shows a holding device of a first example in which a plurality of adhesive pads are pressed against the same holding object, and Fig. 3(b) shows a state in which the holding object is adhered and held by a plurality of adhesive pads.

Fig. 4(a) shows a holding unit that does not hold the object to be held, and Fig. 4(b) shows a holding unit that holds the object to be held.

Fig. 5(a) shows an adhesive pad that is pressed against the same holding object, and Fig. 5(b) shows a state in which the holding object is adhered and held by the adhesive pad.

Fig. 6(a) shows a state in which the object to be held is suspended, and Fig. 6(b) shows a state in which the adhesive pad is separated from the object to be held by the rotation and lowering of the moving plate.

Fig. 7(a) shows the moving plate before the rotation, and Fig. 7(b) shows the moving plate after the rotation.

Fig. 8 is a view (1) for explaining the holding device of the second example.

Fig. 9 is a view (2) for explaining the holding device of the second example.

Fig. 10 is a view (3) for explaining the holding device of the second example.

Figure 11 is a view for explaining the holding device of the third example.

Figure 12 is a view for explaining the holding device of the fourth example.

13(a) to (c) are plan views of the holding devices of the second to fourth examples.

Figure 14 is a view for explaining the holding device of the fifth example.

Reference numeral 10 of Fig. 1 denotes a vacuum processing apparatus of the present invention.

The vacuum processing device 10 has a vacuum chamber 21 between the vacuum chamber 21 and the vacuum chamber 28 _{1 of the} pre-process, between the vacuum chamber 21 and the vacuum chamber 28 _{2 of the} post-process, respectively, by the main gate valves 29 ₁ , 29 ₂ Come connect.

Here, the vacuum chamber 21 is partitioned into the arrangement chamber 22a, and processed. The chamber 22b, the separation chamber 22c, the arrangement chamber 22a and the processing chamber 22b, and the processing chamber 22b and the separation chamber 22c are connected by sub-gate valves 27a and 27b, respectively.

First, the main gate valves 29 ₁ and 29 ₂ and the sub gate valves 27a and 27b are closed, and the vacuum chambers 21, 28 ₁ and 28 ₂ are separated between the chambers 22a to 22c.

Air and nitrogen are introduced into the vacuum chamber 28 ₁ and the arranging chamber 22a of the front process to be atmospheric pressure in advance. When the processing of the vacuum processing apparatus 10 is started, the main gate valve 29 ₁ between the vacuum chamber 21 of the vacuum processing apparatus 10 and the vacuum tank 28 _{1 of the} front process is _first opened, and the arm 31 ₁ of the transport robot is placed thereon. The substrate-shaped holding object 5 is carried into the arrangement chamber 22a from the vacuum chamber 28 ₁ of the front process.

In the inside of the arranging chamber 22a, the holding device 11a of the first example of the present invention is disposed at a position lower than the arm 31 ₁ . Reference numerals 11b and 11c of Fig. 1 respectively denote holding means for moving from the arrangement chamber 22a to the processing chamber 22b and the separation chamber 22c. The holding devices 11a to 11c shown in Fig. 1 have the same structure, and are shown in Figs. 2(a), (b), 3(a), and (b), and represent the holding devices 11a to 11c of the same configuration. Device 11.

The holding device 11 of the first example will be described below, first referring to the figure. 2 (a), the holding device 11 has a connecting plate 41 and one of the connecting plates 41 fixed to the plurality of holding units 13.

Fig. 4(a) shows an enlarged view of one holding unit 13. The holding unit 13 has a vacuum container 15 and a contact portion 18. In the present example, the contact portion 18 is formed by forming a material having flexibility into a ring shape, and is disposed around the opening 19 of the vacuum container 15 at the edge of the opening 19 forming the vacuum container 15.

The vacuum containers 15 of the respective holding units 13 are fixed to the connecting plate 41 in the same direction.

In the internal space of the vacuum container 15, the adhesive pad 17 is arrange|positioned at the bottom surface side rather than the opening 19 of the vacuum container 15.

A through hole 54 is formed in the bottom surface of each vacuum container 15. The support rod 52 is inserted through the through hole 54. One end of the support rod 52 is located in the inner space 25 between the bottom surface and the edge of the vacuum container 15, and the support plate 53 is fixed at one end, and the adhesive pad 17 is fixed to the support plate 53.

The other end of the support rod 52 is located at the outer space 26 of the vacuum vessel 15, at which the moving plate 51 is fixed.

A shaft seal member 57 and a bearing 58 are disposed inside the through hole 54.

The support rod 52 is in close contact with the shaft seal member 57, and the inner space 25 of the vacuum container 15 and the outer space 26 are hermetically separated by the shaft seal member 57. Further, the support rod 52 is inside the through hole 54 by the bearing 58. Keep it.

The support rod 52 is configured to be in contact with the shaft seal 57 and the bearing When the inner space 25 and the outer space 26 are separated by contact, the inner space 25 and the outer space 26 are separated from each other, and the support rod 52 can be reciprocated along the longitudinal direction of the through hole 54 so that the adhesive pad 17 can be placed. The inside of the internal space 25 of the vacuum vessel 15 is moved to the side of the opening 19 and the side of the bottom surface.

In the external space 26, at a position spaced apart from the web 41 The pressing plate 44 provided to be movable with respect to the coupling plate 41 is disposed at a position facing the moving plate 51.

A pressing member 45 is disposed between the moving plate 51 and the pressing plate 44.

The pressing member 45 has an abutting plate 48 and a cushioning member 49, and the abutting plate 48 is attached to the pressing plate 44 through the cushioning member 49.

In the vacuum processing apparatus 10, there is provided an adhesive pad 17 Mobile mobile device. Reference numeral (a) and (a) of Fig. 4 (a) denote a motor included in the moving device. When the motor 47 is operated, the pressing plate 44 and the vacuum container 15 are relatively moved by the moving device to change the distance.

When the holding process of holding the object 5 is started, The moving plate 51 and the abutting plate 48 are separated from each other, and the pressing plate 44 is moved in the direction in which the vacuum container 15 is moved by the moving means. When the distance between the pressing plate 44 and each of the vacuum containers 15 is reduced, the pressing member 45 is pressed. Moving to the side of the vacuum container 15, the moving plate 51 and the abutting plate 48 are first brought into contact.

Between the moving plate 51 and the bottom surface of the vacuum container 15 There is a compressible deformable restoration member 55. The restoring member 55 is located between the bottom surface of the vacuum vessel 15 and the moving plate 51, the cushioning member 49 and the restoring member The 55 has an elastic force, and the cushioning member 49 and the restoring member 55 are made of an elastic material, and are deformed in the compression direction when pressed, and return to the original shape when the pressing is released.

When the moving plate 51 and the abutting plate 48 are in contact, if the pressing plate is pressed 44 is further moved in the direction in which the vacuum container 15 is moved, and the moving plate 51 is pressed by the abutting plate 48. At this time, the cushioning member 49 and the restoring member 55 are pressed to be deformed in the compression direction, and the pressing plate 44 and the respective vacuum containers 15 are pressed. The distance between the two is shortened, and as a result, the adhesive pad 17 is moved in the direction in which the opening 19 is located.

In this manner, the moving plate 51 is brought close to the vacuum container 15, whereby The adhesive pad 17 is moved toward the opening 19 side of the vacuum container 15, and conversely, if the moving plate 51 is away from the vacuum container 15, the adhesive pad 17 moves to the side opposite to the opening 19 of the vacuum container 15, that is, the bottom side.

Contrary to the above example, the pressing plate 44 can be fixed, and the connecting plate 41 can be moved relative to the pressing plate 44.

A plurality of holding units 13 are disposed on the web 41 In the holding device 11, the surface of the contact portion 18 of each holding unit 13 is located on the same plane. If the surface is regarded as a contact plane with the holding object 5, the surface of the plurality of adhesive pads 17 becomes the same as the contact plane. In addition, the plane in which the plurality of moving plates 51 are located also becomes the same plane parallel to the contact plane, and the plane in which the plurality of abutting plates 48 are located also becomes the same plane parallel to the contact plane.

Therefore, if each of the holding units 13 is pressed by the pressing plate 44 The moving plates 51 are respectively pressed, and the cushioning members provided in the respective holding units 13 The restoring member 55 and the restoring member 55 are compressed and deformed so that the respective adhesive pads 17 move in the direction of the opening 19 so that the surfaces are on the same plane.

The holding unit 13 has the above-described configuration, and then, The program for holding the object 5 is held by the holding device 11 having one to a plurality of holding units 13.

First, the holding object 5 is placed by the holding device 11a. In this case, the contact plane is horizontal, the arm shown in Figure 1 of an object to be held 31 5 _1, by means of pins or the like to move the arm ₃₁₁ from the contact portion to a holding means 13 to a plurality of stations At 18, the object 5 is placed in contact with the contact portion 18 and placed on the vacuum container 15.

When holding the object 5 is moved to the holding unit after 13, the inside of the arm ₃₁₁ returns to the previous process of the vacuum tank _281, the main valve between the former process of the vacuum chamber ₂₈₁ and disposed chamber 22a 29 ₁ closed.

Figure 2(b) shows the protection of a plurality of holding units 13 One holding member 5 is placed on the holding device 11, and one holding unit 13 of the holding device 11 is shown in Fig. 4(b).

The portion where the object 5 is in contact with the contact portion 18 is formed in a ring shape, and the internal space 25 is closed by bringing the holding object 5 into contact with the contact portion 18.

Vent holes are provided in the wall surface or the bottom surface of each vacuum container 15 14. The exhaust holes 14 of the vacuum containers 15 are respectively connected to the adsorption exhaust device 42 disposed outside the vacuum chamber 21 via the exhaust pipe 43.

The holding object 5 is placed on each holding unit 13 Before, the inside of the arrangement chamber 22a becomes atmospheric pressure, and the object 5 to be held is placed. After the holding object 5 and the contact portion 18 of each holding unit 13 are brought into contact with each of the holding units 13, the vacuum exhausting of the internal space 25 of each vacuum container 15 is started by the adsorption exhaust device 42.

At this time, the outer space 26 of the vacuum container 15, that is, the arrangement room The internal atmosphere of 22a is at atmospheric pressure, and the contact portion 18 and the edge of the vacuum container 15 are airtight. Further, since the contact portion 18 has flexibility, the object 5 and the contact portion 18 are kept airtight by contact. When the internal space 25 of the vacuum container 15 is evacuated, the gas in the external space 26 does not flow from the external space 26 to the internal space 25. If the internal space 25 of the vacuum container 15 becomes a vacuum atmosphere, the object 5 will be held. The pressure is applied to the contact portion 18 by the pressure of the external space 26, and the vacuum container 15 vacuum-adsorbs the object 5 to be pressed against the contact portion 18.

The contact portion 18 is made of a material that is deformed by the pressing force. When the holding object 5 is pressed against the contact portion 18, the holding object 5 and the contact portion 18 are in close contact with each other to be airtight.

At the beginning of the inner space 25 of the vacuum vessel 15 When the air is exhausted, the adhesive pad 17 is separated from the object to be held 5 to form a gap, and after the object to be held 5 is pressed against the contact portion 18 by vacuum suction, the suction device 42 is continued by suction. When the inner space 25 of the vacuum container 15 is evacuated, when the pressing plate 44 and the vacuum container 15 are relatively close to each other, the abutting plate 48 comes into contact with the moving plate 51, and if it becomes closer, the cushioning member 49 and the restoring The member 55 generates a compressive deformation and moves the adhesive pad 17 in the direction in which the object 5 is held. The surface of the adhesive pad 17 is brought into contact with the back surface of the object 5 to be held.

After the contact, if the pressure plate 44 is to be further vacuumed When the container 15 is moved, the cushion member 49 and the restoring member 55 are compressed and deformed by the adhesive pad 17, and the holding object 5 is pressed in a direction away from the contact portion 18.

At this time, the pressing force applied to the object 5 is held by The distance of the compression deformation of the cushioning member 49 is adjusted to be weaker than the vacuum suction force of the holding target 5 pressed against the contact portion 18 by vacuum suction, so that the holding object 5 can be kept in close contact with the adhesive pad 17, so that the holding object 5 can be kept in close contact with the adhesive pad 17, Until the contact area between the adhesive pad 17 and the holding object 5 reaches saturation, the pressure is pressed by the pressing force from the pressing plate 44, whereby the adhesive pad 17 and the holding object 5 are strongly adhered.

Figure 3 (a) shows the adhesion of a plurality of holding units 13 The pad 17 is pressed against the one object to be held 5, and the holding device 11 is adhered and held to hold the object 5. Fig. 5(a) shows the holding object 5 and one holding unit 13 at this time, and the cushioning member 49 and the restoring member 55 are subjected to compression deformation.

The surface of the adhesive pad 17 is adhered to the back of the holding object 5 In the surface state, the distance between the moving plate 51 and the holding object 5 is determined according to the thickness of the adhesive pad 17, the length of the support bar 52, and the like for supporting the length of the member for supporting the adhesive pad 17, by pressing the plate 44 and the holding object 5 cause the restoration member 55 to undergo compression deformation.

From this state, the pressing plate 44 is moved away from the vacuum container 15 The direction of movement, when the abutment plate 48 and the moving plate 51 are separated, the restoration member The restoring force of 55 is applied to the moving plate 51, and becomes a force that causes the moving plate 51 to move away from the vacuum container 15.

The cushioning member 49 and the restoring member 55 after compression deformation, There is a restoring force to return to the original length, and the adhesive force between the adhesive pad 17 and the holding object 5 which the adhesive pad 17 presses against the holding object 5 is stronger than the restoring force of the restoration member 55, and the adhesive pad 17 does not The object to be held 5 is peeled off, and the restoration member 55 cannot be stretched and the compression deformation is maintained. On the other hand, the cushioning member 49 is extended by its restoring force to return to the original length.

3(b) and 5(b) show that the restoration member 55 is The compression deformation, the cushioning member 49 returns to the original length state.

At this time, the adhesive pad 17 is adhered to the holding object 5, and the adhesive pad 17 is pulled toward the bottom surface side of the vacuum container 15 by the restoring force of the restoring member 55. Therefore, the object 5 is held by the adhesive pad 17 to the bottom surface of the vacuum container 15. The side traction, the portion of the back surface of the object 5 that is in contact with the contact portion 18 is pressed against the contact portion 18 to be in close contact with each other, and the one object to be held 5 is held by the vacuum suction force of each holding unit 13 and the restoring member 55. The state of restoring force is pressed against the contact portion 18.

Regardless of whether the abutment plate 48 is separated from the moving plate 51, each After the surface of the adhesive pad 17 of the holding unit 13 is pressed against the holding object 5, the vacuum exhausting device 24a connected to the arranging chamber 22a starts vacuum evacuation in the arranging chamber 22a, thereby setting the internal atmosphere of the arranging chamber 22a. That is, the pressure of the outer space 26 of the vacuum chamber 21 is gradually lowered.

If the pressure of the external space 26 is reduced to the pressure of the internal space 25 Next, the vacuum suction force of the vacuum container 15 with respect to the holding object 5 disappears.

The adhesion between the adhesive pad 17 and the holding object 5 is complex Since the peeling force by the restoring force of the original member 55 is larger, the holding object 5 can be adhered to the adhesive pad 17 while maintaining the state of being in close contact with the contact portion 18.

The one holding object 5 is adhered and held by a plurality of adhesive pads 17, and the total value of the adhesive force for holding the plurality of adhesive pads 17 holding the object 5 is the total of the restoring force of each of the restoration members 55. The value plus the value of the gravity generated by the weight of the object 5 held by the adhesive is larger.

Therefore, even if the object 5 is suspended by the plurality of adhesive pads 17, the object 5 is not peeled off from the adhesive pad 17 and falls.

The holding unit 13 of one to a plurality of units can be moved together by the connecting plate 41, and the moving device has a turning mechanism (not shown) for turning the holding device 11 upside down.

In each of the holding units 13 of the holding device 11, when the holding object 5 is placed above and the holding object 5 is adhered and held, when the holding device 11 is turned over, the holding object 5 is placed in each holding unit 13 The lower side is in a state of being suspended by the holding device 11. Figure 6(a) shows this state.

As described above, the vacuum container 15 and the adsorption exhaust unit 42 of each holding unit 13 are connected through the exhaust pipe 43. A loading and unloading device 40 is provided in the middle of the exhaust pipe 43, and each of the holding units 13 is connected to the mounting chamber 22a in a vacuum atmosphere by the attaching and detaching device 40. The exhaust pipe 43 of the adsorption exhaust device 42 is separated, and is movable individually with the adsorption exhaust device 42.

Keeping the object 5 adhered by the adhesive pad 17 After the holding device 11 is separated from the adsorption exhaust device 42 by the loading and unloading device 40, the vacuuming operation of the vacuum container 15 by the adsorption exhaust device 42 is stopped, and the loading and unloading device 40 is used. The holding device 11 is separated from the exhaust pipe 43 on the side of the adsorption exhaust unit 42. At this time, at least a part of the loading and unloading device 40 is still attached to the exhaust pipe 43 connected to the vacuum container 15. The vacuum evacuation of the disposition chamber 22a continues.

Here, the holding device 11 is made from the adsorption exhaust device 42 Before or after the separation, the exhaust pipe 43 connected to the vacuum vessel 15 is closed by at least a part of the loading and unloading device 40 that is still attached to the exhaust pipe 43, so that the internal space 25 of the vacuum vessel 15 and the external space are closed. 26 isolation. The gas released from the adhesive pad 17 and filled in the internal space 25 of the vacuum container 15 cannot flow out through the vent hole 14 to the outside of the vacuum container 15.

Further, when the vacuum container 15 is separated from the adsorption exhaust unit 42 by a member different from the attaching and detaching device 40, the gas in the vacuum container 15 is prevented from flowing out through the exhaust hole 14.

The object to be held is placed in the opening 19 of each vacuum container 15 5, it is brought into close contact with the contact portion 18, so that the internal space 25 of each vacuum container 15 is isolated from the external space 26. In a state where the internal space 25 of the vacuum container 15 is separated from the external space 26, the object 5 can be held by The state in which the holding device 11 is suspended moves in a vacuum atmosphere.

The inside of the processing chamber 22b is evacuated by a vacuum exhaust device 24b Vacuum evacuation is performed to form a vacuum atmosphere, and the sub-gate valve 27a between the arrangement chamber 22a and the processing chamber 22b is opened to be separated from the adsorption exhaust unit 42, and the holding device 11a that holds the object 5 is suspended. The chamber 22a moves to the processing chamber 22b. The open secondary gate valve 27a is closed.

Inside the processing chamber 22b, a processing unit 23 that treats the surface of the suspended holding object 5 in a vacuum atmosphere is provided.

In the vacuum processing apparatus 10, the processing unit 23 is a film formation source, and the fine particles (including vapor) of the material constituting the film are released, and the released fine particles reach the surface of the object 5 to be suspended and facing downward. The film is grown on the surface of the object 5 to be held.

Reference numeral 11b denotes a holding device that moves in the processing chamber 22b to place the suspended holding object 5 on the processing unit 23.

The processing unit 23 releases the fine particles upward, and the surface to be vacuum-treated of the object 5 is oriented toward the processing unit 23 located below.

By the release of the fine particles from the processing unit 23, the fine particles reach the surface of the holding object 5 to form a film, that is, vacuum processing.

Further, in the holding device 11b, the holding object 5 may be held by the processing unit 23 in a state where the holding object 5 is not stopped at the processing unit 23, but the holding object 5 is passed through the processing unit 23, thereby maintaining The surface of the object 5 is subjected to vacuum treatment.

Next, the inside of the separation chamber 22c is evacuated by a vacuum exhaust device 24c to become a vacuum atmosphere, and a predetermined film thickness is formed. When the vacuum processing is completed, the sub-gate valve 27b between the processing chamber 22b and the separation chamber 22c is opened, and the holding device 11b holding the holding object 5 is moved from the processing chamber 22b to the separation chamber 22c. After the movement, the sub gate valve 27b is closed.

An inverting mechanism (not shown) of the moving device is disposed inside the separation chamber 22c.

The holding device 11b in the processing chamber 22b is moved to the separation chamber After the movement in the 22c, the object 5 is held in a state where the object 5 is held by the adhesion, and the object 5 is placed on the holding device 11c. In this state, the object to be held 5 is adhered and held by the holding device 11c.

Next, the holding object 5 is held from the holding device 11c. Separate program.

Referring to Figures 7(a) and 7(b), the moving device for moving the adhesive pad 17 has a rotating mechanism 59.

As shown in Fig. 7(a), the rotating mechanism 59 has two The rods 59a, 59b and one end of the two rod members 59a, 59b are mounted to be rotatable on the surface of the moving plate 51 by screws 52a, 52b at a rotationally symmetrical position centering on the center position 56 of the moving plate 51.

The rod members 59a, 59b are arranged in parallel with the other end side The rotating device 59c included in the rotating mechanism 59 is attached, and when the rotating device 59c is operated, the levers 59a and 59b are biased to move in opposite directions.

This force is such that the moving plate 51 is fitted with the lever members 59a, 59b. The force at which the position moves in the opposite direction, that is, the rotational force that causes the moving plate 51 to rotate in the same rotational direction about the center position 56.

The support rod 52 is the surface of the moving plate 51 and the adhesive pad 17 Vertically, the central axis of the support rod 52 passes through the center position 56, and the rotational force that causes the moving plate 51 to rotate becomes a rotational force that causes the adhesive pad 17 to rotate.

Also applied to the object 5 is from the adhesive pad 17 The rotational force is set, but the contact portion 18 is set so as not to be movable on the edge of the vacuum container 15, and the holding object 5 is adhered and held by the adhesive pad 17, and the restoring force of the restoring member 55 is utilized by the contact portion 18. By pressing, the holding object 5 is maintained in a state of being stationary with respect to the contact portion 18 by the static frictional force between the contact portion 18 and the holding object 5.

When a rotational force is applied to the adhesive pad 17, the adhesive pad 17 is applied. In the above, the peeling force of the restoring force of the restoring member 55 is moved to the bottom surface direction, and when the peeling force is applied, the adhesion between the adhesive pad 17 and the holding object 5 is applied. The force is weakened by the rotational force, and the adhesive pad 17 is moved in the direction away from the opening 19 of the vacuum container 15 and the contact portion 18 while rotating relative to the vacuum container 15 and the contact portion 18, so that the adhesive pad 17 is opposed to the holding object. The object 5 is peeled off while rotating (Fig. 6(b)).

The amount of rotation of the moving plate 51 and the adhesive pad 17 is the same, and the reference numeral 50 in Figs. 7(a) and (b) is an index for indicating the amount and direction of rotation of the moving plate 51.

The support rod 52 is perpendicular to the contact plane that makes the contact portion 18 and the holding object 5 contact, and thus is applied by a moving device The force applied to the adhesive pad 17 can be divided into a component that is perpendicular to the surface (that is, the contact plane) of the holding object 5, and a component that rotates in a plane parallel to the contact plane.

When the adhesive pad 17 is separated from the holding object 5, the holding object 5 can be separated from the holding device 11c.

The inside of the separation chamber 22c of FIG. 1 is evacuated, and when the holding object 5 is separated from the contact portion 18, the internal space 25 of the vacuum container 15 and the internal atmosphere of the separation chamber 22c are connected to be filled in the vacuum container 15. The released gas from the adhesive pad 17 is released into the separation chamber 22c, and is removed from the separation chamber 22c via vacuum evacuation.

The main valve between _282,292 open and process after the vacuum chamber, so that the arm ₃₁₂ from ₂₈₂ is inserted into the separation chamber after the process of the vacuum chamber 22c, so that apart from the contact portion 18 holding the object 5 is moved to an arm 31 ₂ , the object 5 is placed on the arm 31 ₂ and moved from the separation chamber 22c to the vacuum chamber 28 _{2 of the} subsequent process.

The holding device 11c that has separated the object to be held 5 is returned to the arrangement chamber 22a by a moving chamber (not shown). In the holding device 11a in the arranging chamber 22a, the exhaust pipe 43 connected to the vacuum container 15 is connected to the exhaust pipe 43 of the adsorption venting device 42 at the portion of the detaching device 40, and is evacuated. In the same manner as described above, after the object 5 is placed, the suspended object 5 is vacuum-treated.

Further, by moving the adhesive pad 17 while rotating relative to the holding target 5, the holding object 5 and the adhesive pad 17 are peeled off, and the deflection of the holding object 5 during peeling is less likely to occur, and compared with When it is rotated and peeled off vertically, the effect of suppressing the adhesive force of the adhesive pad 17 can be suppressed.

Next, other holding devices of the present invention will be described.

Fig. 8 is a view showing a holding device 11 _{2 of} a second example of the present invention.

Unlike the holding device 11 of the first example, the holding device 11 ₂ of the second example is configured such that a connecting plate 41a is provided on the upper portion of the plurality of vacuum containers 15, and the plurality of vacuum containers 15 are moved together by the connecting plate 41a. A plurality of through holes 35 are formed in the connecting plate 41a, and the plurality of vacuum containers 15 and the connecting plate 41a are disposed such that the through holes 35 communicate with the opening 19 of the vacuum container 15.

In the second example, the through hole 35 and the opening 19 are set to have the same diameter, and are arranged such that the entire circumference of the through hole 35 overlaps the entire circumference of the opening 19. However, at least a part of the through hole 35 and the opening 19 are provided. The positions of a part of the portions overlap each other except for the height, so that the adhesive pad 17 is located inside or below the overlapping portion.

The upper end portion of the vacuum container 15 includes a case where it is located below the surface of the connecting plate 41a and is located at the same height as the surface of the connecting plate 41a. The surface of the holding device 11 ₂ is flat and is the surface of the connecting plate 41a. Or the surface of the connecting plate 41a and the upper surface of the vacuum container 15.

The surface ₁₁₂ of the holding means, at least around the opening 19 and the through-hole 35 in addition to the overlapped portion of the height direction, there is formed an annular groove 36; openings 19 and the through hole 36 inside the trench, to surround A circular contact portion 18a having flexibility is disposed in a manner of overlapping portions of 35.

A pin insertion is disposed on the outer side of the groove 36 of the web 41a. The through hole 33 lifts the thin rod-shaped pin 32 from a position below the pin insertion hole 33, and when the upper end of the pin 32 protrudes above the upper end of the contact portion 18a, the holding target can be placed at the upper end of the pin 32. The state of the object 5.

Fig. 8 shows the holding device 11 _{2 in} this state.

The upper end of the contact portion 18a is disposed at a position higher than the surface of the holding device 11 ₂ , and after the adhesive pad 17 is lowered, when the pin 32 is lowered, as shown in FIG. 9, the holding object 5 is placed on the contact portion 18a. on.

The holding object 5 on the contact portion 18a is in contact with the contact portion 18a, and a part of the back surface thereof is exposed in the internal space 25 of the vacuum container 15 without being in contact with the adhesive pad 17. The portion exposed to the internal space 25 is brought into contact with the surface of the adhesive pad 17.

At this time, the external space 26 is an atmosphere of atmospheric pressure. As explained in the first example, when vacuum evacuation of the internal space 25 of each vacuum container 15 is started by the adsorption exhaust unit 42, the internal space 25 of the vacuum container 15 is When the holding object 5 is sucked toward the vacuum container 15 by the pressure difference between the external space 26 and the internal space 25, the contact portion 18a is pressed and deformed in a direction in which the thickness is reduced.

The flexibility and thickness of the contact portion 18a are set such that when the holding object 5 is pressed by vacuum evacuation of the adsorption exhaust device 42, the thickness of the contact portion 18a can be changed to be less than the groove depth, as shown in the figure. As shown in FIG. 10, the pressed object 5 to be pressed is also in contact with the surface of the holding device 11 ₂ .

At this time, the area of the portion of the object 5 that is in contact with the surface of the holding device 11 ₂ is larger than the area of the portion in contact with the contact portion 18a, and is only in contact with the contact portion 18a as compared with the object 5 to be held. The deformation of the object 5 can be suppressed.

When the surface of the adhesive pad 17 is raised to a height equal to or higher than the surface height of the holding device 11 ₂ , when the surface of the adhesive pad 17 is pressed against the back surface of the holding target 5 that is adsorbed and held, the object 5 is held by the adhesive. The pad 17 is adhered and held.

Symbol ₁₁₃ in FIG. 11 represents a third embodiment of the holding device of the present invention, the trench is not formed on the surface of the holding means _113, the contact portion 18b is disposed on a flexible surface of the holding means _113.

The holding object 5 is placed in contact with the contact portion 18b and placed on the contact portion 18b. When the internal space 25 is evacuated, the holding object 5 is vacuum-absorbed and held on the contact portion 18b.

In the holding device 11 _{3 of} the third example, the structure of the connecting plate 41b is simple and the cost can be reduced. FIG 13 (a), (b) show a plan view is not arranged to maintain a second embodiment of the retaining device 5 of the object _112, a plan view of a third embodiment of the holding means ₁₁₃ of.

Next, reference numeral 12 represents a holding means ₁₁₄ of the fourth embodiment of the present invention, FIG. 13 (c) a plan view thereof.

The holding device 11 ₄ is an annular contact portion 18 b of the holding device 11 ₃ of the third example, and is disposed on the surface of the holding unit 13 using the contact sheet 39 as a contact portion.

On the closet sheet 39, at the opening 19 and the through hole 35 A sheet hole 38 is formed at a position above the overlapping portion, and the sheet hole 38 and the opening 19 and the through hole 35 are partially overlapped, respectively, so that the adhesive pad 17 can be positioned lower than the surface of the close-contact sheet 39, and the close-contact sheet Move between positions above the surface of 39.

The surface of the adhesive pad 17 is more than the surface of the adhesive sheet 39 When the adhesive pad 17 is lowered in a low manner, when the holding object 5 is placed on the surface of the adhesive sheet 39, the holding object 5 comes into contact with the adhesive sheet 39, and a part of the back surface of the holding object 5 passes through the opening 19 and The through hole 35 and the sheet hole 38 are exposed to the internal space 25.

The portion of the object 5 that is exposed to the internal space 25 is surrounded by the annular portion of the adhesive sheet 39 around the sheet hole 38 for forming the sheet hole 38, and the internal space 25 is closed.

The same as the above examples, by implementing the internal space 25 Vacuum evacuation causes the holding object 5 to be vacuum-adsorbed by the adhesive sheet 39. When the adhesive pad 17 is raised, the surface of the adhesive pad 17 is brought into contact with the back surface of the holding object 5, and the object 5 is held by the adhesive pad 17. Stick to keep.

Further, it is connected to the pin insertion hole 33 on the close-contact sheet 39. The sheet side pin insertion hole 34 is formed at a position, and when the pin 32 is moved upward from a state in which the upper end portion is located below the coupling plate 41c, the pin insertion hole 33 and the sheet side pin insertion hole 34 can be passed through The upper end portion protrudes to a position above the sheet side pin insertion hole 34.

In the holding devices 11 ₁ to 11 ₄ of the above first to fourth examples, one of the vacuum containers 15 is provided with one adhesive pad 17 to be formed as one holding unit 13, but the holding device of the fifth example shown in FIG. 11 ₅ , a plurality of adhesive pads 17 are disposed in a vacuum container 65 to constitute a holding unit 13a.

Arranged in an annular manner a fifth embodiment of the retaining means _115, it is on the edge 65 of the vacuum vessel, the vacuum vessel 65 to surround the opening of the contact portion 18c.

Between the adhesive pad 17 and the adhesive pad 17 on the inner side of the edge of the vacuum container 65, a plurality of auxiliary bars 61 vertically disposed on the bottom surface of the vacuum container 65 are disposed.

The sides of the auxiliary rod 61 are separated from each other, so each of the adhesive pads 17 The atmosphere in which they are located communicates with each other, and an internal space 25 is formed inside the vacuum vessel 65. The adhesive pad 17 is disposed in the internal space 25.

If one piece larger than the inner circumference of the vacuum container 65 is kept When the object 5 is placed on the contact portion 18c by sandwiching the contact portion 18c with the edge of the vacuum container 65 and the holding object 5, the object 5 is held on the vacuum container 65.

A vent hole 14 is provided in the wall surface or the bottom surface of the vacuum container 65. The internal space 25 is connected to the adsorption venting device 42 disposed outside the vacuum chamber 21 through the vent hole 14 and the exhaust pipe 43.

Holding the object 5 on the edge of the vacuum container 65 When the inside of the vacuum chamber 65 is evacuated, the object to be held 5 is vacuum-sucked by the vacuum container 65, and the contact portion 18c is pressed by the holding object 5 to be deformed, and the object to be held is held. 5 Move slightly below.

At this time, the position is more inside than the edge of the vacuum container 65. The back surface of the object 5 is brought into contact with the front end of the auxiliary rod 61, and is supported by the auxiliary rod 61 to prevent deflection.

In a state in which the adhesive pad 17 is in close contact with the back surface of the object to be held 5, the holding object 5 can be adhered and held by the support rod 52 and the adhesive pad 17 even when the vacuum suction is stopped.

When peeling off, let the stick that is in contact with the same holding object 5 The pad 17 is linearly lowered while rotating.

An annular auxiliary plate 41d is provided on the outer circumference of the vacuum container 65, and the edge portion of the object 5 is held on the auxiliary plate 41d. The auxiliary insertion plate 41d is provided with a pin insertion hole 33, and a pin 32 is disposed directly under the pin insertion hole 33. By the vertical movement of the pin 32, the tip end of the pin 32 can be moved up and down in the pin insertion hole 33.

When the adhesive pad 17 is separated from the holding object 5, if the pin is made When 32 is raised, the holding object 5 can be placed on the pin 32. Further, when the pin 32 on which the holding object 5 is placed is lowered, the holding object 5 can be placed on the edge of the vacuum container 65.

The adhesive pad and the material, structure and operation of the holding means 17 and the fourth embodiment is the same as _114, the moving means moves the adhesive pad 17 direction (i.e. the direction of movement) system comprising: the holding device relative to the surface ₁₁₅ of The contact plane where the portion in contact with the object 5 is held is a moving component in the vertical direction.

In addition, the fifth embodiment is also capable of holding means ₁₁₅ of the annular contact portion 18c of the adhesion sheet 39 change.

5‧‧‧ Keep objects

11‧‧‧ Keeping device

13‧‧‧Holding unit

14‧‧‧ venting holes

15‧‧‧Vacuum container

17‧‧‧Adhesive pad

18‧‧‧Contacts

19‧‧‧ openings

25‧‧‧Internal space

26‧‧‧External space

41‧‧‧Link board

43‧‧‧Exhaust distribution

44‧‧‧ Press plate

45‧‧‧ Pressing members

47‧‧‧Motor

48‧‧‧ Abutment plate

49‧‧‧ cushioning members

51‧‧‧Mobile board

52‧‧‧Support rod

53‧‧‧Support plate

54‧‧‧through holes

55‧‧‧Restoring components

57‧‧‧Axis sealing material

58‧‧‧ bearing

59‧‧‧Rotating mechanism

59a, 59b‧‧‧ rods

Claims (13)

A holding device for causing an adhesive pad provided on a holding unit to contact an object to be held, and holding the holding object by the adhesive pad; the holding unit has a vacuum container, a contact portion, and a vent hole And a moving device, the contact portion is disposed at an edge of the vacuum container, and is in contact with the holding object to isolate an inner space of the vacuum container from an outer space of the vacuum container; the vent hole is disposed in the foregoing The vacuum container is a passage for evacuating the gas in the internal space by the adsorption exhaust device, and the internal space is isolated from the external space by the holding object and the contact portion; the moving device is used The adhesive pad is moved, and the adhesive pad is disposed in the internal space, and the moving device moves the direction in which the adhesive pad moves, that is, the moving direction, with respect to a portion of the surface of the contact portion that is in contact with the holding object. The contact plane in which it is located is a moving component in the vertical direction. The holding device according to claim 1, further comprising: a plurality of the vacuum containers; and the adhesive pad disposed in each of the vacuum containers; a plurality of the adhesive pads and a plurality of the vacuum containers disposed in the plurality of vacuum containers The aforementioned contact portion of the edge is in contact with the same holding object. The holding device according to claim 1, wherein the plurality of the adhesive pads are disposed in the inner space of the same vacuum container, and the plurality of the adhesive pads are disposed in the vacuum The aforementioned contact portion of the edge of the container is in contact with the same holding object. The holding device according to any one of claims 1 to 3, wherein the contact portion is a flexible member. The holding device according to any one of claims 1 to 3, wherein the contact portion is disposed on a flat surface of the holding device. The holding device according to any one of claims 1 to 3, wherein a groove is provided on a surface of the holding device, and the contact portion is provided in the groove. The holding device according to any one of claims 1 to 3, wherein the contact portion is formed of a contact sheet which is disposed on the vacuum container and which is to be a through hole. A sheet hole is formed in the opening of the aforementioned vacuum container. The holding device according to any one of claims 1 to 3, further comprising: a rotating mechanism that rotates the adhesive pad with respect to a direction in which the vacuum container faces away from the contact portion mobile. The holding device according to any one of claims 1 to 3, wherein And a loading and unloading device that connects the holding device to the adsorption exhaust device; the loading and unloading device separates the holding device from the adsorption exhaust device, and the holding device and the adsorption exhaust device are individually mobile. The holding device according to claim 9, wherein the vacuum container is set such that when it is separated from the adsorption exhaust device, gas is prevented from flowing into the vacuum container through the exhaust hole. The holding device according to any one of claims 1 to 3, wherein the adhesive pad adhering to the object to be held faces away from the object to be held by a resilient cushioning member Force. A vacuum processing apparatus, comprising: a holding device, a vacuum chamber, and a processing unit according to any one of claims 1 to 3; wherein the holding device is disposed in the vacuum chamber; the processing portion is disposed in In the vacuum chamber, the treatment surface to be adhered and held by the adhesive pad and having the treatment surface facing downward is treated in a vacuum atmosphere. The vacuum processing apparatus according to claim 12, wherein the processing unit is a film forming apparatus that releases fine particles for forming a thin film and forms a thin film on the surface of the object to be held.