WO2022070390A1

WO2022070390A1 - Separator and separation method

Info

Publication number: WO2022070390A1
Application number: PCT/JP2020/037457
Authority: WO
Inventors: 道也横田; 亮一稲葉
Original assignee: 信越エンジニアリング株式会社
Priority date: 2020-10-01
Filing date: 2020-10-01
Publication date: 2022-04-07
Also published as: KR20230047950A; JP6950120B1; WO2022070465A1; JPWO2022070390A1; CN115243863A; TW202228988A

Abstract

The present invention separates a concavo-convex joining part between a first plate-shaped member and a second plate-shaped member without shape deformation. Provided is a separator that separates a concavo-convex joining part between a first plate-shaped member and a second plate-shaped member joined to each other in a concavo-convex shape. A separation absorbing part that is provided between a rear side of the concavo-convex joining part and a first indoor surface of a chamber in one of the first plate-shaped member and the second plate-shaped member accommodated in a pressurizing chamber formed inside the chamber has a displacement portion that contacts the first indoor surface of the chamber so as to be deformable and movable to a rear side and in a thickness direction of one of the first plate-shaped member and the second plate-shaped member. A retention part that is provided between a rear side of the concavo-convex joining part and a second indoor surface of the chamber in the other of the first plate-shaped member and the second plate-shaped member accommodated in the pressurizing chamber has a fixed portion that contacts the second indoor surface of the chamber so as not to be movable to a rear side and in a thickness direction of the other of the first plate-shaped member and the second plate-shaped member. A pressure difference is generated between a control part and an airtight first depressurizing space part that is provided between the first indoor surface and the separation absorbing part of the chamber due to an increase in an internal pressure of the pressurizing chamber accompanied by an operation of a positive pressure regulating part that supplies a positive pressure fluid to the pressurizing chamber, and one of the first plate-shaped member and the second plate-shaped member moves to the first depressurizing space part together with the displacement portion of the separation absorbing part.

Description

Separation device and separation method

The present invention is a separation device used for peeling a molding die and a molded substrate that are molded by imprint technology including nanoimprint, and for peeling a small element such as a plurality of micro LEDs arranged in parallel and an adhesive chuck. , The present invention relates to a separation method using a separation device.

Conventionally, as this type of separation device, one of a peeling prevention means for pressurizing the mold having at least one of them in the form of a film and the object to be molded so as not to be peeled to a predetermined peeling position, and one of the mold or the object to be molded. There is a mold release device provided with a holding portion for holding the mold, a tension applying means for applying tension to the mold or the object to be molded, and a means for preventing peeling and a moving means for relatively moving the mold and the object to be molded. (See, for example, Patent Document 1).
By nanoimprint technology, the molding pattern of the mold is pressed against the object to be molded such as resin, the molding pattern is transferred to the object to be molded by using heat or light, and then the mold is released from the object to be molded.
In the illustrated example of Patent Document 1, a mold formed in a flexible film shape is peeled off from the peeling position with respect to the object to be molded held in the holding portion, and the mold after peeling and the object to be molded are peeled off. An angle adjusting means for adjusting the angle between the object and the object is provided. That is, the angle adjusting means is used to diagonally pull out the molding pattern of the mold from the object to be molded at a constant mold release angle.

International Publication No. 2015/072572

However, in Patent Document 1, since the molding pattern of the mold is pulled out diagonally at a predetermined angle with respect to the uneven pattern transferred to the object to be molded, the uneven pattern of the object to be molded is deformed in the peeling process. Will cause damage.
More specifically, the case of the imprint including the nanoimprint shown in FIGS. 7 (a) to 7 (c) will be described.
In the state before peeling shown in FIG. 7A, the concave-convex pattern 210 transferred to the workpiece 200 by the concave-convex joining with the molding pattern 110 of the mold 100 is perpendicular to the bottom surface 220 of the workpiece 200. Standing in the shape.
However, in the state at the time of peeling shown in FIG. 7B, the convex portion 211 of the uneven pattern 210 of the object to be molded 200 collapses as the molding pattern 110 of the mold 100 is pulled out in an oblique direction. ..
Therefore, even in the state after peeling shown in FIG. 7 (c), the convex portion 211 of the uneven pattern 210 once collapsed remains collapsed and does not return to the state before peeling.
When the direction (peeling direction) of pulling out the molding pattern 110 of the mold 100 from the uneven pattern 210 of the object to be molded 200 is slanted in this way, the shape is deformed (tilted) as the unevenness difference of the uneven pattern 210 becomes longer. There was a problem that it became easy to perform and it was not possible to achieve high-precision imprint molding.
In particular, in the case of nanoimprint, since the uneven pattern is extremely fine, there is a problem that even a slight shape deformation (tilt) at the time of peeling causes damage to the uneven pattern and makes it impossible to produce a highly accurate uneven pattern.

In order to solve such a problem, the separating device according to the present invention is a separating device for peeling off the uneven joint portion of the first plate-shaped member and the second plate-shaped member which are joined to each other in an uneven shape, and is inside the chamber. A pressurizing chamber in which the first plate-shaped member and the second plate-shaped member that are formed and joined in an uneven manner can be freely taken in and out, and the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber. A separated absorption portion provided between the back side of the uneven joint portion and the first chamber surface of the chamber in any one of the plate-shaped members, and the first plate-shaped member or the first plate-shaped member housed in the pressurizing chamber. On the other side of the second plate-shaped member, the holding portion provided between the back side of the uneven joint portion and the second chamber surface of the chamber, and the separation absorption portion between the first chamber surface and the separation absorption portion of the chamber. Control to control the operation of the first decompression space that is separated from the pressurizing chamber and is airtightly provided, the positive pressure adjusting unit that supplies positive pressure fluid to the pressurizing chamber to increase the internal pressure, and the positive pressure adjusting unit. The separated absorbing portion is provided with a portion, and the separated absorbing portion is deformed with respect to the first chamber surface of the chamber in the thickness direction of the back side of either the first plate-shaped member or the second plate-shaped member. Alternatively, the holding portion has a displacement portion that movably abuts on the second chamber surface of the chamber, and the back side of the first plate-shaped member or the other back side of the second plate-shaped member and the thickness thereof. The control unit has a fixed portion that is immovably abutted in the direction, and the pressure difference between the control unit and the first decompression space portion is generated due to an increase in the internal pressure of the pressurizing chamber due to the operation of the positive pressure adjusting unit. It is characterized in that either the first plate-shaped member or the second plate-shaped member is controlled to move toward the first decompression space portion together with the displacement portion of the separation absorbing portion.
Further, in order to solve such a problem, the separation method according to the present invention is a separation method for peeling off the uneven joint portion of the first plate-shaped member and the second plate-shaped member which are joined to each other in an uneven shape, and is a separation method of the chamber. The carrying-in step of inserting the first plate-shaped member and the second plate-shaped member which have been unevenly joined into the pressure chamber formed inside, and the first plate-shaped member and the second plate-shaped member in the pressure chamber. A holding step for positioning, a pressurization step of supplying a positive pressure fluid to the pressurizing chamber in which the first plate-shaped member and the second plate-shaped member are held to increase the internal pressure, and the pressurization in which the internal pressure is increased. The peeling step of peeling off the uneven joint portion between the first plate-shaped member and the second plate-shaped member in the chamber, and the addition of the first plate-shaped member and the second plate-shaped member from which the uneven joint portion has been peeled off. In the holding step, including the carry-out step of taking out from the pressure chamber, the back side of the uneven joint portion in either the first plate-shaped member or the second plate-shaped member, and the first chamber surface of the chamber. The back side of either the first plate-shaped member or the second plate-shaped member is brought into contact with the displacement portion of the separation absorbing portion provided between the two in the thickness direction, and the first plate-shaped member is brought into contact with the displacement portion. The first plate-shaped member with respect to the fixing portion of the holding portion provided between the back side of the uneven joint portion and the second chamber surface of the chamber on the other side of the plate-shaped member or the second plate-shaped member. Alternatively, the back side of the other side of the second plate-shaped member is brought into contact with the thickness direction, and in the peeling step, the pressurizing chamber whose internal pressure is increased by the supply of the positive pressure fluid and the first chamber surface of the chamber. And the first plate together with the displacement portion of the separation absorption portion by creating a pressure difference between the separation absorption portion and the first decompression space portion separated from the pressurizing chamber and provided in an airtight manner. One of the shaped member and the second plate-shaped member moves toward the first depressurized space portion.

It is explanatory drawing which shows the whole structure of the separation apparatus and the separation method which concerns on embodiment (the first embodiment) of this invention, (a) is a vertical sectional front view of a carry-in process, (b) is a cross section of FIG. 1 (a). The plan view and (c) are a partially enlarged vertical sectional front view. It is explanatory drawing which shows the peeling process of the separation method, (a) is a vertical sectional front view of a holding process, (b) is a vertical sectional front view of a pressurizing process, (c) is a vertical sectional front view of a peeling process. It is explanatory drawing which shows the taking-out process of the separation method, (a) is a vertical section front view of a decompression process, (b) is a vertical section front view of a primary carry-out process, and (c) is a vertical section front view of a secondary carry-out process. .. It is explanatory drawing which shows the separation apparatus and the separation method which concerns on 2nd Embodiment of this invention, (a) is a vertical sectional front view of a carry-in process, (b) is a vertical sectional front view of a pressurizing process, (c) is a peeling step. It is a vertical sectional front view of. It is explanatory drawing which shows the separation apparatus and the separation method which concerns on 3rd Embodiment of this invention, (a) is a vertical sectional front view of a carry-in process, (b) is a vertical sectional front view of a pressurizing process, (c) is a peeling step. It is a vertical sectional front view of. It is explanatory drawing which shows the separation apparatus and the separation method which concerns on 4th Embodiment of this invention, (a) is a vertical sectional front view of a carry-in process, (b) is a vertical sectional front view of a pressurizing process, (c) is a peeling step. It is a vertical sectional front view of. It is explanatory drawing which shows an example of the conventional separation method. It is a figure.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 to 6, the separation device A and the separation method according to the embodiment of the present invention include peeling of a molding die and a molding substrate molded by an imprint technique including nanoimprint, and a plurality of separated devices arranged in parallel. It is a peeling device or peeling method for peeling and separating the first plate-shaped member B and the second plate-shaped member C which are joined to each other in an uneven shape, such as peeling between a micro element such as a micro LED and an adhesive chuck. ..
The first plate-shaped member B is formed in a thin plate shape with a hard material such as glass or synthetic resin, and has a first uneven portion B1 as a front-side uneven joint portion facing the second plate-shaped member C.
The second plate-shaped member C is formed in a thin plate shape with a hard material such as glass or synthetic resin, and the first uneven portion B1 is unevenly joined as the uneven joint portion on the front side facing the first plate-shaped member B. It has a part C1.
The first plate-shaped member B and the second plate-shaped member C are usually arranged so as to be joined in the vertical direction, and the thickness direction of the first plate-shaped member B and the second plate-shaped member C is hereinafter referred to as "Z direction". ". The direction along the first plate-shaped member B and the second plate-shaped member C that intersect the Z direction is hereinafter referred to as "XY direction".

When the first plate-shaped member B and the second plate-shaped member C which are unevenly joined to each other are used for imprint including nanoimprint, either the first plate-shaped member B or the second plate-shaped member C is used. It corresponds to a molding die, and the other of the first plate-shaped member B or the second plate-shaped member C corresponds to a molded substrate.
In the state where the concavo-convex pattern of the molding die is transferred to the molding substrate by imprint molding, the concavo-convex joints (first concavo-convex portion B1, second concavo-convex portion C1) are concavo-convex-bonded to each other and integrated so as to be transportable. It has become.
Further, a transport device in which the first plate-shaped member B and the second plate-shaped member C, which are joined to each other in an uneven manner, transport a plurality of micro elements such as micro LEDs arranged in parallel while maintaining their postures, and then deliver the micro elements to the transport destination. When used in, either the first plate-shaped member B or the second plate-shaped member C corresponds to a micro element arranged in parallel, and the first plate-shaped member B or the second plate-shaped member C The other corresponds to the adhesive chuck. In a state where the adhesive chuck is adhered to the surface of the microelements arranged in parallel for receiving the microelements, the concavo-convex joints (first concavo-convex portion B1, second concavo-convex portion C1) are concavo-convex-bonded to each other and integrated so as to be transportable. It is in a laminated state.

In the cases shown in FIGS. 1 to 6 as specific examples of the first plate-shaped member B and the second plate-shaped member C, the first plate-shaped member B is an imprint molding mold including nanoimprint, and the second plate. The shaped member C is a molded substrate.
Further, a first holding plate B3 made of a hard material is detachably attached to the first back surface B2 which is the back side (opposite side) of the first uneven portion B1 which is the front surface uneven joint portion in the first plate-shaped member B. Has been done. The first plate-shaped member B is arranged so as to project on the surface of the first holding plate B3.
Similarly, a second holding plate C3 made of a hard material is attached to and detached from the second back surface C2, which is the back side (opposite side) of the second uneven portion C1 which is the concave-convex joint portion on the front side of the second plate-shaped member C. It is installed as possible. The second plate-shaped member C is arranged so as to project on the surface of the second holding plate C3.
The first holding plate B3 and the second holding plate C3 are formed into a rectangular panel shape (a rectangular or a quadrilateral having a right angle including a square) or a circular wafer shape, and the first plate-shaped member B and the first plate-shaped member B and the first holding plate are joined in an uneven manner. By sandwiching the two-plate-shaped member C, the laminated body D is integrated so as to be transportable.
As the laminated body D, by arranging a plurality of first plate-shaped members B and second plate-shaped members C side by side, a plurality of uneven joint portions (first uneven portion B1, second uneven portion C1) can be peeled off at the same time. Is preferable.
In the laminated body D, it is preferable that a gap E is provided between the first holding plate B3 and the second holding plate C3 in addition to the first plate-shaped member B and the second plate-shaped member C. Specific examples of the gap E include an outer gap E1, a plurality of first plate-shaped members B such as a square frame or an annular shape formed on the outside of the plurality of first plate-shaped members B and the second plate-shaped member C, and a plurality of first plate-shaped members B. Examples thereof include a through gap E2 passing between the second plate-shaped members C, an inner gap E3 communicating with a through hole D1 opened in the first holding plate B3 and the second holding plate C3, and the like.
In the illustrated example, the second plate-shaped member C, which is a molded substrate, has a resin layer C5, which is a second uneven portion C1 and whose pattern is transferred by light or heat, laminated on the surface of a substrate C4 made of a hard material.
Further, although not shown as another example, it is possible to change the method so that the first plate-shaped member B and the second plate-shaped member C are directly peeled off without attaching the first holding plate B3 or the second holding plate C3. Is.

More specifically, the separation device A according to the embodiment of the present invention is housed in the pressurizing chamber 1 in which the first plate-shaped member B and the second plate-shaped member C joined to each other in an uneven manner and the pressurizing chamber 1. The separated absorption portion 2 provided on the back side of either the first plate-shaped member B or the second plate-shaped member C, and the first plate-shaped member B or the second plate-shaped member C housed in the pressurizing chamber 1. A holding portion 3 provided on the other back side of the above, a first decompression space portion 4 provided separately from the pressurizing chamber 1, a positive pressure adjusting portion 5 provided so as to increase the internal pressure of the pressurizing chamber 1, and the like. Is provided as a main component.
Further, the internal pressure of the first negative pressure adjusting unit 6 for lowering the internal pressure of the first decompression space portion 4, the second decompression space portion 7 provided separately from the pressurizing chamber 1, and the internal pressure of the second decompression space portion 7 are lowered. It is preferable to include a second negative pressure adjusting unit 8 to be operated, and a control unit 9 for operating and controlling the positive pressure adjusting unit 5, the first negative pressure adjusting unit 6, the second negative pressure adjusting unit 8, and the like.

The pressurizing chamber 1 is formed so as to be hermetically sealed inside the chamber 10, and the first plate-shaped member B and the second plate-shaped member C extend over the pressurizing chamber 1 in the chamber 10 and the external space of the chamber 10. It is housed freely in and out.
The inside of the chamber 10 has a first chamber surface 10a and a second chamber surface 10b arranged so as to face the brought-in first plate-shaped member B and the second plate-shaped member C in the thickness direction (Z direction).
The first indoor surface 10a is directly or indirectly with the back side of the uneven joint portion (first uneven portion B1 or second uneven portion C1) in either the first plate-shaped member B or the second plate-shaped member C. It is formed on a plane in the XY direction facing the Z direction. The second indoor surface 10b is the back side of the concavo-convex joint portion (first concavo-convex portion B1 or second concavo-convex portion C1) on the other side of the first plate-shaped member B or the second plate-shaped member C, directly or indirectly in the Z direction. It is formed on a plane in the XY direction facing toward.
The chamber 10 has an entrance / exit 10c for moving the first plate-shaped member B and the second plate-shaped member C in and out of the sealable pressurizing chamber 1. The entrance / exit 10c of the chamber 10 is configured to be openable / closable, and is opened / closed by a drive mechanism 10d including an actuator or the like.
The first plate-shaped member B and the second plate-shaped member C are carried into the pressurizing chamber 1 in a concavo-convex joint state in which the concavo-convex joint portions (first concavo-convex portion B1 and second concavo-convex portion C1) are joined in a concavo-convex shape, for example. This is performed using a transfer means (not shown) such as a transfer robot. The first plate-shaped member B and the second plate-shaped member C are carried out from the pressurizing chamber 1 by a transport means or the like in a separated state in which the uneven joint portions (first uneven portion B1 and second uneven portion C1) are peeled off. It is done sequentially or simultaneously.

In the case shown in FIGS. 1 to 6 as a specific example of the pressurizing chamber 1, the first holding plate B3 attached to the first back surface B2 which is the back side of the first uneven portion B1 on the front side in the first plate-shaped member B. Is arranged so as to face the upper first chamber surface 10a. In the second plate-shaped member C, the second holding plate C3 attached to the second back surface C2, which is the back side of the second uneven portion C1 on the front side, is arranged so as to face the lower second indoor surface 10b.
A third indoor surface 10e is formed on a plane in the Z direction between the first indoor surface 10a and the second indoor surface 10b.
Further, although not shown as another example, the second holding plate C3 of the second plate-shaped member C is arranged to face the upper first chamber surface 10a, and the second holding plate C3 faces the lower second chamber surface 10b. It is also possible to arrange the first holding plate B3 of the one-plate-shaped member B.
Further, a gap detection sensor (not shown) is arranged on the first chamber surface 10a of the chamber 10 in order to detect the position of the back side of either the first plate-shaped member B or the second plate-shaped member C. Is preferable.

The separation absorbing portion 2 is the back side of the concave-convex joint portion (first uneven portion B1 or the second concave-convex portion C1) and the thickness direction thereof in either the first plate-shaped member B or the second plate-shaped member C carried in. It is arranged so as to be in contact with (Z direction) and separated from the first chamber surface 10a of the chamber 10.
The separation absorbing portion 2 abuts against the first chamber surface 10a of the chamber 10 in the thickness direction (Z direction) with the back side of either the first plate-shaped member B or the second plate-shaped member C carried in. It has a displacement portion 2a.
The displacement portion 2a is configured to be deformable or movable in the thickness direction (Z direction), and is brought into contact with the back side of either the first plate-shaped member B or the second plate-shaped member C. It is positioned and integrated so as not to be displaced in the direction intersecting with the thickness direction (Z direction) (XY direction).
That is, in the separation absorbing portion 2, the displacement portion 2a is arranged so as to be deformable or movable in the Z direction with respect to the first chamber surface 10a of the chamber 10, and the first plate shape is formed as the displacement portion 2a is deformed or moved. It is configured to move either the member B or the second plate-shaped member C in the Z direction.
A first decompression space portion 4 is formed between the distance absorbing portion 2 and the first chamber surface 10a of the chamber 10 so as to be separated from the pressurizing chamber 1. The first decompression space portion 4 is formed in an airtight manner by abutting the back side of either the first plate-shaped member B or the second plate-shaped member C against the displacement portion 2a of the separation absorbing portion 2. To.
Further, the separation absorbing portion 2 preferably has a first vent 2b that allows the back side of either the first plate-shaped member B or the second plate-shaped member C to communicate with the first decompression space portion 4.

In the case shown in FIGS. 1 to 6 as a specific example of the distance absorbing portion 2, the first decompression space portion 4 and the first plate-shaped member pass through the first ventilation port 2b provided in the separation absorbing portion 2. The back side of either B or the second plate-shaped member C is always communicated with. Therefore, by utilizing the pressure difference between the internal pressure of the first decompression space portion 4 and the internal pressure of the pressurizing chamber 1 lowered by the first negative pressure adjusting portion 6 described later, the displacement portion 2a of the separated absorption portion 2 is used. , Either the first plate-shaped member B or the second plate-shaped member C can be vacuum-sucked.
As a result, either the first plate-shaped member B or the second plate-shaped member C is detachably sucked and held with respect to the displacement portion 2a due to the increase in the internal pressure of the pressurizing chamber 1 and temporarily fixed.
Further, although not shown as another example of the separated absorption unit 2, it is possible to change to temporary fixing using an adhesive member, electrostatic adsorption, or the like instead of vacuum adsorption.

The holding portion 3 is arranged so as to be in contact with the back side of the carried-in first plate-shaped member B or the second plate-shaped member C in the thickness direction (Z direction) thereof.
Further, the holding portion 3 is immovable with respect to the second chamber surface 10b of the chamber 10 in the thickness direction (Z direction) with the other back side of the first plate-shaped member B or the second plate-shaped member C carried in. It has a fixed portion 3a to abut.
That is, the holding portion 3 abuts the other of the first plate-shaped member B or the second plate-shaped member C against the fixing portion 3a, so that the other of the first plate-shaped member B or the second plate-shaped member C is brought into contact with the fixing portion 3a. Is configured to hold immovable in the Z direction.
It is preferable to form a second decompression space 7 separated from the pressurizing chamber 1 between the holding portion 3 and the second chamber surface 10b of the chamber 10. The second decompression space portion 7 is formed in an airtight manner by abutting the other of the first plate-shaped member B or the second plate-shaped member C against the fixing portion 3a of the holding portion 3.
Further, the holding portion 3 preferably has a second vent 3b for communicating the other back side of the first plate-shaped member B or the second plate-shaped member C with the second decompression space portion 7.

In the case shown in FIGS. 1 to 6 as a specific example of the holding portion 3, the holding annular body 31 is fixed to the second indoor surface 10b of the chamber 10, and the inner space of the holding annular body 31 is the inner space. It becomes the second vent 3b and forms the second decompression space 7.
The holding annular body 31 is made of an elastically deformable material such as a soft synthetic resin or rubber, or a non-deformable material such as a hard synthetic resin or a metal, and is formed in a square frame shape or an annular shape. At one end of the holding annular body 31 in the thickness direction (Z direction), a holding fixing portion 31a with respect to the second chamber surface 10b of the chamber 10 is provided. The other end of the holding annular body 31 in the thickness direction (Z direction), which is the fixing portion 3a, is the other back side of the carried-in first plate-shaped member B or second plate-shaped member C (second plate in the illustrated example). It is in contact with the second holding plate C3) attached to the second back surface C2 of the shaped member C.
Further, since the second decompression space portion 7 serving as the second vent 3b of the holding portion 3 and the other back side of the first plate-shaped member B or the second plate-shaped member C are always communicated with each other, the second described later. Utilizing the pressure difference between the internal pressure of the second decompression space 7 lowered by the negative pressure adjusting portion 8 and the internal pressure of the pressurizing chamber 1, the first plate-shaped member B or the first plate-shaped member B or the fixed portion 3a of the holding portion 3 is used. The other side of the second plate-shaped member C can be vacuum-sucked.
As a result, when the internal pressure of the pressurizing chamber 1 rises, the other of the first plate-shaped member B or the second plate-shaped member C is detachably sucked and held with respect to the fixed portion 3a and temporarily fixed.
Further, although not shown as another example of the holding portion 3, it is also possible to change to temporary fixing using an adhesive member, electrostatic suction, or the like instead of vacuum suction.

The positive pressure adjusting unit 5 is configured to increase the internal pressure by supplying a positive pressure fluid 5F such as compressed air, gas, or water from a supply source (not shown) toward the pressurizing chamber 1.
When shown in FIG. 1A as a specific example of the positive pressure adjusting unit 5, for example, a positive pressure that penetrates the chamber 10 from an air supply drive source (not shown) such as a compressor and leads to the pressurizing chamber 1. It has a path 5a and a positive pressure control valve 5b provided in the middle of the positive pressure path 5a.
By operating the positive pressure adjusting unit 5 (the drive source for supply air and the control valve 5b for positive pressure), the internal pressure of the pressurizing chamber 1 can be set from the atmospheric atmosphere to a predetermined high pressure atmosphere.
To explain in detail, the total amount of the positive pressure fluid 5F supplied to the positive pressure passage 5a is controlled by the operation control of the air supply drive source and the positive pressure control valve 5b, and the internal pressure of the pressurizing chamber 1 is gradually increased. It is preferable to adjust.

The first negative pressure adjusting unit 6 exhausts the first negative pressure fluid 6F such as air from the first decompression space portion 4, so that the internal pressure of the first negative pressure adjusting unit 6 is lower than the internal pressure of the pressurizing chamber 1. It is configured to do.
In the case shown in FIG. 1A as a specific example of the first negative pressure adjusting unit 6, the first decompression space penetrates the chamber 10 from a first exhaust drive source (not shown) such as a vacuum pump. It has a first negative pressure passage 6a leading to the portion 4 and a first negative pressure control valve 6b provided in the middle of the first negative pressure passage 6a.
By operating the first negative pressure adjusting unit 6 (first exhaust drive source and first negative pressure control valve 6b), the internal pressure of the first decompression space unit 4 can be set from an atmospheric atmosphere to a vacuum or a low pressure atmosphere close to vacuum. Become.
More specifically, the total amount of the first negative pressure fluid 6F exhausted from the first negative pressure passage 6a is controlled by the operation control of the first exhaust drive source and the first negative pressure control valve 6b to reduce the first pressure. It is preferable to adjust the internal pressure of the space portion 4 step by step.

The second negative pressure adjusting unit 8 exhausts the second negative pressure fluid 8F such as air from the second decompression space portion 7, so that the internal pressure of the second negative pressure adjusting unit 8 is lower than the internal pressure of the pressurizing chamber 1. It is configured to do.
In the case shown in FIG. 1A as a specific example of the second negative pressure adjusting unit 8, a second decompression space penetrates the chamber 10 from a second exhaust drive source (not shown) such as a vacuum pump. It has a second negative pressure passage 8a leading to the portion 7 and a second negative pressure control valve 8b provided in the middle of the second negative pressure passage 8a.
By operating the second negative pressure adjusting unit 8 (drive source for second exhaust and control valve for second negative pressure 8b), the internal pressure of the second decompression space 7 can be set from an atmospheric atmosphere to a vacuum or a low pressure atmosphere close to vacuum. Become.
More specifically, the operation control of the second exhaust drive source and the second negative pressure control valve 8b controls the total amount of the second negative pressure fluid 8F exhausted from the second negative pressure passage 8a to control the second decompression. It is preferable to adjust the internal pressure of the space portion 7 step by step.

The control unit 9 is a controller having a control circuit (not shown) electrically connected to each of the positive pressure adjusting unit 5, the first negative pressure adjusting unit 6, the second negative pressure adjusting unit 8, and the like.
Further, it is electrically connected to the drive mechanism 10d that opens and closes the entrance / exit 10c of the chamber 10. In addition to that, the first plate-shaped member B and the second plate-shaped member C are electrically connected to the pressurizing chamber 1 as a conveying means for taking in and out.
The controller serving as the control unit 9 sequentially controls the operation at preset timings according to a program preset in the control circuit (not shown).

Then, the program set in the control circuit of the control unit will be described as a separation method by the separation device A.
The separation method using the separation device A according to the embodiment of the present invention is divided into a peeling process and a taking-out process.
The peeling process includes a carry-in step of inserting the first plate-shaped member B and the second plate-shaped member C into the pressurizing chamber 1, and an airtight state of the first plate-shaped member B and the second plate-shaped member C in the pressurizing chamber 1. The main steps include a holding step of holding the pressurizing chamber 1, a pressurizing step of increasing the internal pressure of the pressurizing chamber 1, and a peeling step of peeling off the first plate-shaped member B and the second plate-shaped member C in the pressurizing chamber 1. I'm out.
In the carry-in process, as shown in FIG. 1A and the like, the first plate in which the uneven joint portions (first uneven portion B1 and second uneven portion C1) are unevenly joined and integrated by the operation of the transport means. The shaped member B and the second plate-shaped member C are housed in the pressurizing chamber 1.
In the holding step, as shown in FIG. 2A and the like, with respect to the displacement portion 2a of the separation absorbing portion 2, the concave-convex joint portion (concavo-convex joint portion) in either the first plate-shaped member B or the second plate-shaped member C. The back side of the first uneven portion B1 and the second uneven portion C1) is brought into contact with each other in the thickness direction (Z direction). Therefore, with respect to the displacement portion 2a of the separation absorbing portion 2, the back side of either the first plate-shaped member B or the second plate-shaped member C intersects the thickness direction (Z direction) in the direction (XY direction). It is positioned so that it cannot be displaced and integrated. As a result, as the displacement portion 2a is deformed or moved in the thickness direction (Z direction), the back side of either the first plate-shaped member B or the second plate-shaped member C becomes the first chamber surface 10a of the chamber 10. On the other hand, it becomes movable.
At the same time, with respect to the fixing portion 3a of the holding portion 3, the back side of the concavo-convex joint portion (first concavo-convex portion B1, second concavo-convex portion C1) on the other side of the first plate-shaped member B or the second plate-shaped member C is formed. Contact in the thickness direction (Z direction). As a result, the chamber 10 cannot move in the thickness direction (Z direction) with respect to the second chamber surface 10b.

In the pressurizing step, as shown in FIG. 2 (b), the positive pressure adjusting unit 5 operates toward the pressurizing chamber 1 in which the first plate-shaped member B and the second plate-shaped member C are held. The pressure fluid 5F is supplied to increase the internal pressure.
In the peeling step, as shown in FIG. 2C and the like, as the internal pressure of the pressurizing chamber 1 rises, the first decompression space portion 4 formed between the first chamber surface 10a of the chamber 10 and the separated absorption portion 2 The pressure is higher than the internal pressure of. Therefore, a pressure difference is generated between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space portion 4, and an attractive force is generated that attracts the separated absorption portion 2 toward the first decompression space portion 4.
With this attractive force, either the first plate-shaped member B or the second plate-shaped member C, which abuts together with the separated absorption portion 2 via the displacement portion 2a, is attracted toward the first decompression space portion 4 by the positive pressure fluid 5F. And move. As a result, either one of the first plate-shaped member B or the second plate-shaped member C is peeled off in the thickness direction (Z direction) with respect to the other that cannot move in the thickness direction (Z direction) at the fixing portion 3a. , The uneven joint portion (first uneven portion B1, second uneven portion C1) is peeled off.
At this time, the gap detection sensor arranged on the first chamber surface 10a of the chamber 10 detects the position of the back side of either the first plate-shaped member B or the second plate-shaped member C, and the detected value thereof. By monitoring, it becomes possible to detect the progress and completion of peeling of the uneven joint portion (first uneven portion B1, second uneven portion C1).

In addition to this, in the pressurizing step, it is preferable to lower the internal pressure of the first decompression space portion 4 by operating the first negative pressure adjusting portion 6.
As shown in FIG. 2B and the like, the internal pressure of the pressurizing chamber 1 is increased by supplying the positive pressure fluid 5F by the operation of the positive pressure adjusting unit 5, and at the same time, the exhaust from the first decompression space portion 4 is used. The pressure difference between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 becomes even larger. In the illustrated example, since the distance absorbing portion 2 has the first vent 2b, the back side of either the first plate-shaped member B or the second plate-shaped member C is evacuated with respect to the displacement portion 2a of the distance absorbing portion 2. It is adsorbed.
Further, in the pressurizing step, it is preferable that the internal pressure of the second decompression space portion 7 formed between the second chamber surface 10b and the holding portion 3 of the chamber 10 is lowered by the operation of the second negative pressure adjusting portion 8. ..
In the illustrated example, since the holding portion 3 has the second vent 3b, the internal pressure of the pressurizing chamber 1 rises at the same time, or before the internal pressure of the pressurizing chamber 1 starts to rise, the second decompression space portion 7 is used. By exhaust gas, the back side of the first plate-shaped member B or the other back side of the second plate-shaped member C is vacuum-sucked to the fixed portion 3a of the holding portion 3.
Further, as shown in the illustrated example, the first holding plate B3 attached to the first back surface B2 of the first plate-shaped member B and the second holding plate C3 attached to the second back surface C2 of the second plate-shaped member C. When the positive pressure fluid 5F has a gap E in between the positive pressure fluid 5F and the positive pressure fluid 5F, the positive pressure fluid 5F invades the gap E between the first holding plate B3 and the second holding plate C3. A repulsive force is generated that relatively pushes the shaped member B and the second plate-shaped member C apart.

The take-out process includes a decompression step of lowering the internal pressure of the pressurizing chamber 1, a primary carry-out step of taking out either one of the second plate-shaped member C of the first plate-shaped member B from the pressurizing chamber 1, and a primary carry-out step of taking out one of them from the pressurizing chamber 1. A secondary carry-out step of taking out the other of the second plate-shaped member C of the first plate-shaped member B is included as a main step.
In the depressurizing step, as shown in FIG. 3A, the positive pressure adjusting unit 5 is stopped, and the positive pressure fluid 5F filled in the pressurizing chamber 1 is discharged to the outside of the pressurizing chamber 1. By opening, the internal pressure of the pressurizing chamber 1 drops.
In the primary carry-out step, as shown in FIG. 3 (b), the operation of the second negative pressure adjusting unit 8 is stopped and the transport means is operated, so that the holding unit 3 to the second plate-shaped member C of the first plate-shaped member B One of the above (second plate-shaped member C in the illustrated example) is removed and carried out of the pressurizing chamber 1.
In the secondary unloading step, as shown in FIG. 3C, the operation of the first negative pressure adjusting unit 6 is stopped and the transporting means is operated, so that the separated absorption unit 2 has a second plate-like shape of the first plate-like member B. The other side of the member C (the first plate-shaped member B in the illustrated example) is removed and carried out of the pressurizing chamber 1.

Next, a representative example (first embodiment to fourth embodiment) in which the pressurizing chamber 1 (chamber 10), the separated absorption portion 2, and the laminated body D have different structures will be described.
The separation device A1 of the first embodiment shown in FIGS. 1 to 3 is a split type pressurizing chamber 1, and is first held on the outside of the first plate-shaped member B and the second plate-shaped member C which are joined in an uneven manner. This is a case where the laminated body D to which the plate B3 and the second holding plate C3 are attached is peeled off by the deformation of the separation absorbing portion 2.
In the split type pressurizing chamber 1, the chamber 10 is divided into a first chamber 11 and a second chamber 12, and an entrance / exit 10c is formed between the separated first chamber 11 and the second chamber 12. A sealing material 13 made of a square frame-shaped or annular packing, an O-ring, or the like is interposed in the doorway 10c.
By bringing the first chamber 11 and the second chamber 12 relatively close to each other by the drive mechanism 10d, the entrance / exit 10c is closed in an airtight manner by the sealing material 13, and the pressurizing chamber 1 is openable and closable and has a sealed structure.
In the illustrated example, only the upper first chamber 11 is reciprocated with respect to the lower second chamber 12, but only the lower second chamber 12 or both the first chamber 11 and the second chamber 12 are reciprocated. It is possible to change to a structure other than the illustrated example, such as reciprocating.

The deformable separation absorbing portion 2 is composed of an elastic ventilator 21 attached so as to be elastically deformable in the Z direction with respect to the first chamber surface 10a of the chamber 10.
In the illustrated example, the elastic ventilator 21 is an elastically deformable material such as a soft synthetic resin or rubber, and is a packing or O-ring formed in a square frame shape or an annular shape having one first vent 2b in the center thereof. It consists of an annular member such as a ring. At one end of the elastic ventilator 21 in the thickness direction (Z direction), a mounting portion 21a with respect to the first chamber surface 10a of the chamber 10 is provided. The elastic ventilator 21 has the other end in the thickness direction (Z direction) as the displacement portion 2a, and the back side of either the first plate-shaped member B or the second plate-shaped member C carried in (first in the illustrated example). The first decompression space 4 is formed inside the elastic ventilator 21 by abutting the first holding plate B3) attached to the first back surface B2 of the plate-shaped member B.
Therefore, the elastic ventilator 21 is elastically compressed and deformed in the Z direction due to the difference between the internal pressure increase of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 due to the inflow of the positive pressure fluid 5F, and the displacement portion 2a thereof. At the same time, either the first plate-shaped member B or the second plate-shaped member C is moved toward the first decompression space portion 4. As a result, either one of the first plate-shaped member B and the second plate-shaped member C (first plate-shaped member B in the illustrated example) is peeled off from the other (second plate-shaped member C in the illustrated example).
Although not shown as another example of the elastic vent body 21, a plate-shaped member having a plurality of first vents 2b, a porous member having a large number of first vents 2b, and the like may be used instead of the annular member. Is also possible.
In these cases, a gap detection sensor arranged on the first chamber surface 10a of the chamber 10 is used to either the first plate-shaped member B or the second plate-shaped member C (in the illustrated example, the first plate-shaped member B). ), It is possible to detect abnormal deformation or excessive deformation of the first plate-shaped member B. It is also possible to provide a deformation suppressing member (not shown) such as a stopper for mechanically preventing excessive deformation of the first plate-shaped member B.
Further, in the example shown in FIGS. 1 (a) to 1 (c), a plurality of first plate-shaped members B and second plate-shaped members B and second plates are formed between the first holding plate B3 and the second holding plate C3 to be the laminated body D. The members C are arranged in parallel at predetermined intervals in the XY directions, and have a square frame-shaped outer gap E1 and a plurality of through gaps E2 that pass linearly in both the XY directions.
As a result, the positive pressure fluid 5F penetrates not only the outer gap E1 but also the plurality of through gaps E2, respectively, so that a repulsive force that completely pushes the first plate-shaped member B and the second plate-shaped member C apart is generated. Occur.

The separation device A2 of the second embodiment shown in FIGS. 4A to 4C is a partially open / close type pressurizing chamber 1, which is different from the above-mentioned first embodiment, and other configurations are different. It is the same as the first embodiment.
In the illustrated example, the doorway 10c is opened in a part of the box-shaped chamber 14, and the door 14a is opened and closed by the drive mechanism 10d with respect to the doorway 10c.
As a result, a part of the pressurizing chamber 1 is configured to be openable and closable and has a sealed structure.

The separation device A3 of the third embodiment shown in FIGS. 5A to 5C is different from the above-described first embodiment in that the laminated body D is peeled off by the movement of the separation absorption unit 2, and other than that. The configuration of is the same as that of the first embodiment.
The movable separation absorbing portion 2 is composed of an elevating vent body 22 supported so as to be reciprocating in the Z direction with respect to the first chamber surface 10a of the chamber 10.
In the illustrated example, the elevating vent body 22 is a non-deformable material such as a hard synthetic resin or metal, and is a plate-shaped member formed in a square plate shape or a disk shape having one first vent 2b in the center thereof. Consists of. The side surface of the elevating and lowering ventilator 22 has a sliding portion 22a that can reciprocate in the Z direction and is airtightly supported along the third chamber surface 10e of the chamber 10. The third chamber surface 10e of the chamber 10 has a stopper 10f on one side and a stopper 10g on the other side that protrude toward the elevating vent. The ascending / descending ventilator 22 that has moved in the Z direction abuts on the stopper 10f on one side and the stopper 10g on the other side, thereby restricting the moving range of the elevating ventilator 22. The elevating ventilation body 22 has the tip end portion in the thickness direction (Z direction) as the displacement portion 2a, and the back side of either the first plate-shaped member B or the second plate-shaped member C carried in (the first plate in the illustrated example). The first decompression space 4 is formed between the elevating ventilator 22 and the first chamber surface 10a of the chamber 10 by abutting on the first holding plate B3 attached to the first back surface B2 of the shaped member B. ..
Therefore, due to the difference between the internal pressure increase of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 due to the inflow of the positive pressure fluid 5F, the elevating ventilator 22 moves in the Z direction, and the first plate is moved together with the displacement portion 2a. Either one of the shaped member B or the second plate-shaped member C is moved toward the first decompression space portion 4. As a result, either one of the first plate-shaped member B and the second plate-shaped member C (first plate-shaped member B in the illustrated example) is peeled off from the other (second plate-shaped member C in the illustrated example).
Although not shown as another example of the elevating vent, a plate-shaped member having a plurality of first vents 2b and a large number of first vents instead of the plate-shaped member having one first vent 2b. It is also possible to use a porous plate-shaped member having a mouth 2b or the like.
Further, instead of the support structure in which the sliding portion 22a of the elevating vent body 22 is movably supported along the third indoor surface 10e, the elevating / lowering / elevating body 22 moves up and down to the center of an elastically deformable thin plate-shaped flexible member such as stainless steel. By supporting the vent body 22 in a floating island shape, it is possible to change to a support structure in which the elevating ventilator 22 is supported so as to be able to reciprocate in the Z direction by elastic deformation of the flexible member. In the case of this floating island shape, the outer periphery of the flexible member is attached to the third chamber surface 10e of the chamber 10, so that the first decompression space 4 is separated from the pressurizing chamber 1 on the back side of the flexible member. It is provided in an airtight manner.

The separation device A4 of the fourth embodiment shown in FIGS. 6A to 6C is a laminated body D in which an inner gap E3 communicating with the through hole D1 of the first holding plate B3 and the second holding plate C3 is formed. The configuration in which the above is removed is different from the first embodiment described above, and the other configurations are the same as those in the first embodiment.
The through hole D1 is opened in either or both of the first holding plate B3 and the second holding plate C3 so as to be isolated from the first decompression space portion 4 and the second decompression space portion 7, and the pressurizing chamber 1 is provided. The positive pressure fluid 5F of the above penetrates the inner gap E3 through the through hole D1.
In the illustrated example, between the first holding plate B3 and the second holding plate C3 to be the laminated body D, a plurality of first plate-shaped members B and second plate-shaped members in the circumferential direction around the inner gap E3 and the like. Cs are arranged in parallel at predetermined intervals, and have an outer gap E1 and a plurality of through gaps (not shown) that pass linearly in the radial direction centered on the inner gap E3.
A through hole D1 is opened in the center of either the first holding plate B3 or the second holding plate C3 (the first holding plate B3 in the illustrated example) facing the first decompression space portion 4.
A positive pressure introduction path 5c through which the positive pressure fluid 5F passes is formed on the first chamber surface 10a of the chamber 10 facing the through hole D1 so as to communicate with the through hole D1 from the outlet of the positive pressure introduction path 5c. The positive pressure fluid 5F is introduced into the through hole D1.
Further, as in the first embodiment described above, the laminated body D is peeled off by the deformation of the separation absorbing portion 2, but since the outlet of the positive pressure introduction path 5c opens in the first chamber surface 10a of the chamber 10, it is positive. It is necessary to airtightly separate the passage from the outlet of the pressure introduction path 5c to the through hole D1 and the first decompression space portion 4.
Therefore, the separated absorption unit 2 in the illustrated example surrounds the passage from the outlet of the positive pressure introduction path 5c to the through hole D1 separately from the outer annular member 23 corresponding to the elastic ventilator 21 of the first embodiment. Is provided with an inner annular member 24. The first decompression space portion 4 is formed between the outer annular member 23 and the inner annular member 24.
Although not shown as another example of the elastic vent body 21, instead of the outer annular member 23 and the inner annular member 24, a plate-shaped member having a plurality of first vents 2b and a large number of first vents 2b are used. It is also possible to use a porous member or the like.
As a result, the positive pressure fluid 5F penetrates not only the outer gap E1 but also the inner gap E3 through the positive pressure introduction path 5c, the inner passage of the inner annular member 24, and the through hole D1, and a plurality of positive pressure fluids 5F enter the inner gap E3. Since the fluid flows through the through gaps E2, a repulsive force is generated that completely pushes the first plate-shaped member B and the second plate-shaped member C apart.

According to the separation device A and the separation method according to the embodiment of the present invention, the first plate-shaped member B and the second plate-shaped member C which are concave-convexly joined are housed in the pressurizing chamber 1. The back side of either the shaped member B or the second plate-shaped member C (the first back surface B2 side in the illustrated example) abuts on the displacement portion 2a of the separation absorbing portion 2 and comes into contact with the first chamber surface 10a of the chamber 10. On the other hand, it can be deformed or moved in the thickness direction (Z direction). The other back side of the first plate-shaped member B or the second plate-shaped member C (the second back surface C2 side in the illustrated example) abuts on the fixing portion 3a of the holding portion 3 and touches the second chamber surface 10b of the chamber 10. On the other hand, it becomes immovable in the thickness direction (Z direction).
By supplying the positive pressure fluid 5F to the pressurizing chamber 1 in this accommodation state, the internal pressure of the pressurizing chamber 1 rises and becomes higher than the internal pressure of the first decompression space portion 4. Therefore, either one of the first plate-shaped member B and the second plate-shaped member C (the first plate-shaped member B in the illustrated example) is directed toward the first decompression space portion 4 together with the displacement portion 2a of the separation absorbing portion 2. Moving. As a result, either one of the first plate-shaped member B and the second plate-shaped member C (first plate-shaped member B in the illustrated example) is peeled off from the other (second plate-shaped member C in the illustrated example).
Therefore, the concavo-convex joint portion (first concavo-convex portion B1, second concavo-convex portion C1) of the first plate-shaped member B and the second plate-shaped member C can be peeled off without deforming (falling).
As a result, even if the protrusion amount of the uneven joint portion (first uneven portion B1, second uneven portion C1) becomes longer than that of the conventional one in which the uneven pattern of the mold is diagonally pulled out from the uneven pattern transferred to the object to be molded. , Shape deformation due to peeling can be prevented.
Therefore, when it is used for imprint molding including nanoimprint, it is possible to produce a highly accurate uneven pattern in which the uneven pattern of the concave-convex joint portion (first uneven portion B1, second uneven portion C1) is damaged.
Further, in the case of a transfer device or the like in which minute elements such as a plurality of micro LEDs arranged in parallel are peeled off from an adhesive chuck to transfer the minute elements, the minute elements are not damaged and high-precision delivery can be performed.

In particular, it is preferable to include a first negative pressure adjusting unit 6 that lowers the internal pressure of the first decompression space unit 4.
In this case, at the same time as the internal pressure of the pressurizing chamber 1 rises, the internal pressure of the first decompression space portion 4 is decreased by the first negative pressure adjusting unit 6, thereby causing the internal pressure of the pressurizing chamber 1 and the first decompression space portion 4. The pressure difference from the internal pressure of is further increased.
Therefore, the attractive force that attracts the separated absorption portion 2 toward the first decompression space portion 4 increases.
Therefore, the concavo-convex joint portions (first concavo-convex portion B1, second concavo-convex portion C1) of the first plate-shaped member B and the second plate-shaped member C that are concavo-convex-bonded to each other can be smoothly peeled off.
As a result, the peeling ability can be improved.
Further, either or both of the positive pressure adjusting unit 5 (the drive source for air supply and the control valve for positive pressure 5b) or the first negative pressure adjusting unit 6 (the drive source for the first exhaust and the control valve 6b for the first negative pressure). When the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 are relatively stepwise adjusted by the operation control of the above, the uneven joint portion (first uneven portion B1, second uneven portion C1) is twisted. Can be peeled off smoothly.
Further, the pressure difference between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space portion 4 causes either the first plate-shaped member B or the second plate-shaped member C with respect to the displacement portion 2a of the separated absorption portion 2. The back side of one of them (the first back surface B2 side in the illustrated example) can be vacuum-sucked. As a result, the first plate-shaped member B or the first plate-shaped member B that has moved toward the first decompression space 4 together with the displacement portion 2a of the separated absorption portion 2 due to the pressure difference between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space 4. Either one of the second plate-shaped members C can be sucked and held.

Further, an airtight second decompression space portion 7 formed between the second chamber surface 10b and the holding portion 3 of the chamber 10, and a second negative pressure adjusting portion 8 for lowering the internal pressure of the second decompression space portion 7. , Are preferably provided.
In this case, the internal pressure of the pressurizing chamber 1 and the first are increased by lowering the internal pressure of the first decompression space 4 at the same time as the internal pressure of the pressurizing chamber 1 rises or before the start of the internal pressure rise of the pressurizing chamber 1. A pressure difference is generated between the pressure difference and the internal pressure of the decompression space portion 4.
Therefore, the other back side of the first plate-shaped member B or the second plate-shaped member C (the second back surface C2 side in the illustrated example) is vacuum-sucked to the fixing portion 3a of the holding portion 3 by a pressure difference. As a result, the other of the first plate-shaped member B or the second plate-shaped member C is immovably adsorbed and held.
Therefore, the other of the first plate-shaped member B or the second plate-shaped member C can be reliably fixed to the fixing portion 3a of the holding portion 3.
As a result, the concavo-convex joint portions (first concavo-convex portion B1, second concavo-convex portion C1) of the first plate-shaped member B and the second plate-shaped member C that are concavo-convex-bonded to each other can be reliably peeled off.

Further, the first holding plate B3 is attached to the first back surface B2 of the first plate-shaped member B, the second holding plate C3 is attached to the second back surface C2 of the second plate-shaped member C, and the first holding plate B3 and the like. It is preferable to have a gap E through which the positive pressure fluid 5F can enter between the second holding plates C3.
In this case, the pressure difference between the pressurizing chamber 1 and the first decompression space 4 generates an attractive force that attracts the separated absorption section 2 toward the first decompression space 4, and at the same time, the positive pressure fluid 5F creates a gap E. A repulsive force is generated that relatively pushes the concavo-convex joint portion (first concavo-convex portion B1, second concavo-convex portion C1) between the first plate-shaped member B and the second plate-shaped member C apart.
Therefore, the attractive force and the repulsive force are combined, and the uneven joint portion (first uneven portion B1, second uneven portion C1) can be peeled off more smoothly.
As a result, the peeling ability can be further improved.

In the above-described embodiment (first to fourth embodiment), the case where the first plate-shaped member B and the second plate-shaped member C are an imprint molding die and a molding substrate including nanoimprint is used. As described above, the present invention is not limited to this, and the microelements may be used as a transfer device for delivery.
In this case, either a plurality of first plate-shaped members B projecting from the first holding plate B3 or a plurality of second plate-shaped members C projecting from the second holding plate C3. One is a micro element arranged in parallel, and the other is an adhesive chuck that is unevenly joined to a plurality of first plate-shaped members B or second plate-shaped members C.
Even in such a case, the same operations and advantages as those of the first to fourth embodiments described above can be obtained.

A Separation device 1 Pressurization chamber 2 Separation absorption part 2a Displacement part 3 Holding part 3a Fixed part 4 First decompression space part 5 Positive pressure adjustment part 5F Positive pressure fluid 6 First negative pressure adjustment part 7 Second decompression space part 8th (2) Negative pressure adjustment unit 9 Control unit 10a First chamber surface 10b Second chamber surface B First plate-shaped member B1 Concavo-convex joint (first concavo-convex portion)
B2 Back side of the first uneven part, first back side B3 First holding plate C Second plate-like member C1 Concavo-convex joint part (second uneven part)
C2 Back side of the second uneven part, second back side C3 Second holding plate E Gap

Claims

It is a separation device that peels off the uneven joints of the first plate-shaped member and the second plate-shaped member that are joined to each other in an uneven shape.
A pressurizing chamber formed inside the chamber and accommodating the first plate-shaped member and the second plate-shaped member that are concavo-convex-bonded so as to be freely taken in and out.
A separated absorption portion provided between the back side of the uneven joint portion and the first chamber surface of the chamber in either the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber. When,
A holding portion provided between the back side of the concave-convex joint portion and the second chamber surface of the chamber on the other side of the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber.
A first decompression space portion that is separated from the pressurizing chamber and airtightly provided between the first chamber surface and the separated absorption portion of the chamber.
A positive pressure adjusting unit that supplies a positive pressure fluid to the pressurizing chamber to increase the internal pressure,
A control unit that controls the operation of the positive pressure adjusting unit is provided.
The separation absorbing portion abuts with respect to the first chamber surface of the chamber with the back side of either the first plate-shaped member or the second plate-shaped member in a deformable or movable direction. Has a displacement site,
The holding portion has a fixing portion that is immovably contacted with the first plate-shaped member or the other back side of the second plate-shaped member with respect to the second chamber surface of the chamber in the thickness direction. ,
In the control unit, a pressure difference is generated between the control unit and the first decompression space due to an increase in the internal pressure of the pressurizing chamber due to the operation of the positive pressure adjusting unit, and the first plate together with the displacement portion of the separation absorption unit. A separation device, characterized in that either one of the shaped member or the second plate-shaped member is controlled to move toward the first decompression space portion.
The separation device according to claim 1, further comprising a first negative pressure adjusting unit that lowers the internal pressure of the first decompression space portion.
The chamber is provided with an airtight second decompression space formed between the second chamber surface and the holding portion, and a second negative pressure adjusting portion for lowering the internal pressure of the second decompression space. The separation device according to claim 1 or 2, wherein the separation device is characterized.
A first holding plate is attached to the first back surface of the first plate-shaped member, a second holding plate is attached to the second back surface of the second plate-shaped member, and between the first holding plate and the second holding plate. The separation device according to claim 1, 2 or 3, wherein the positive pressure fluid has a gap through which the positive pressure fluid can enter.
It is a separation method that peels off the uneven joints of the first plate-shaped member and the second plate-shaped member that are joined to each other in an uneven shape.
The carrying-in step of inserting the first plate-shaped member and the second plate-shaped member joined in a concavo-convex manner into the pressurizing chamber formed inside the chamber.
A holding step of positioning the first plate-shaped member and the second plate-shaped member in the pressurizing chamber, and
A pressurizing step of supplying a positive pressure fluid to the pressurizing chamber in which the first plate-shaped member and the second plate-shaped member are held to increase the internal pressure.
A peeling step of peeling off the uneven joint portion between the first plate-shaped member and the second plate-shaped member in the pressurizing chamber where the internal pressure has increased.
It includes a step of taking out the first plate-shaped member from which the uneven joint portion has been peeled off and the second plate-shaped member from the pressurizing chamber.
In the holding step, displacement of the separated absorption portion provided between the back side of the uneven joint portion and the first chamber surface of the chamber in either the first plate-shaped member or the second plate-shaped member. The back side of either the first plate-shaped member or the second plate-shaped member is brought into contact with the portion in the thickness direction thereof, and the first plate-shaped member or the second plate-shaped member is contacted. On the other hand, with respect to the fixing portion of the holding portion provided between the back side of the uneven joint portion and the second chamber surface of the chamber, the first plate-shaped member or the other of the second plate-shaped member is said. The back side is brought into contact with the thickness direction,
In the peeling step, the pressurizing chamber whose internal pressure is increased by the supply of the positive pressure fluid is separated from the pressurizing chamber between the first chamber surface of the chamber and the separated absorption portion and is provided in an airtight manner. A pressure difference is generated between the first decompression space portion and the first plate-shaped member or the second plate-shaped member together with the displacement portion of the separation absorption portion. A separation method characterized by moving towards.