JP5797863B1 - Joining member manufacturing apparatus and joining member manufacturing method - Google Patents

Joining member manufacturing apparatus and joining member manufacturing method Download PDF

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JP5797863B1
JP5797863B1 JP2015110203A JP2015110203A JP5797863B1 JP 5797863 B1 JP5797863 B1 JP 5797863B1 JP 2015110203 A JP2015110203 A JP 2015110203A JP 2015110203 A JP2015110203 A JP 2015110203A JP 5797863 B1 JP5797863 B1 JP 5797863B1
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pressure
joining
holder
chamber
resin
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JP2016224243A (en
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雅樹 坂本
雅樹 坂本
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Origin Electric Co Ltd
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Priority to CN201610300663.4A priority patent/CN105966039B/en
Priority to TW105114389A priority patent/TWI567153B/en
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    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B32B37/1284Application of adhesive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/18Handling of layers or the laminate
    • B32B38/1825Handling of layers or the laminate characterised by the control or constructional features of devices for tensioning, stretching or registration
    • B32B38/1833Positioning, e.g. registration or centering
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133305Flexible substrates, e.g. plastics, organic film

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

【課題】保持している部材の周囲を減圧しても保持具からずれることを回避することができる接合部材製造装置及び接合部材の製造方法を提供する。【解決手段】接合部材製造装置1は、裏面Dbが接触面11fに接触した状態で第1の部材Dを保持する第1の保持具10と、第2の部材Eを保持する第2の保持具20と、密閉可能なチャンバ30と、減圧装置50と、第1の保持具10及び/又は第2の保持具20を移動させる移動装置40と、制御装置60とを備える。制御装置60は、第1の接合面Df又は第2の接合面Efに塗布された樹脂Gと樹脂Gが塗布されていない方の接合面との間隔Sが所定の間隔となるようにした後に、チャンバ30内を所定の圧力を超える圧力から接合時圧力まで減圧するように移動装置40及び減圧装置50を制御する。所定の間隔は、変形が制限されない状態で接合時圧力に減圧したときに第1の部材Dが膨張する厚さの増加分よりも小さい。【選択図】図1To provide a joining member manufacturing apparatus and a joining member manufacturing method capable of avoiding displacement from a holder even if the surroundings of the holding member are decompressed. A joining member manufacturing apparatus 1 includes a first holding tool 10 that holds a first member D and a second holding that holds a second member E in a state where a back surface Db is in contact with a contact surface 11f. A tool 20, a sealable chamber 30, a decompression device 50, a moving device 40 that moves the first holding tool 10 and / or the second holding tool 20, and a control device 60 are provided. After the control device 60 sets the interval S between the resin G applied to the first bonding surface Df or the second bonding surface Ef and the bonding surface to which the resin G is not applied to a predetermined interval, The moving device 40 and the pressure reducing device 50 are controlled so that the pressure in the chamber 30 is reduced from a pressure exceeding a predetermined pressure to a pressure at the time of bonding. The predetermined interval is smaller than the increase in thickness at which the first member D expands when the pressure is reduced to the joining pressure without deformation being limited. [Selection] Figure 1

Description

本発明は接合部材製造装置及び接合部材の製造方法に関し、特に2つの部材を減圧環境下で貼り合わせる接合部材製造装置及び接合部材の製造方法に関する。   The present invention relates to a joining member manufacturing apparatus and a joining member manufacturing method, and more particularly to a joining member manufacturing apparatus and a joining member manufacturing method for bonding two members together in a reduced pressure environment.

例えば、液晶パネルを製造する工程において、接着剤を介して液晶基板と保護ガラスとを貼り合わせることが行われる。このような、2つの部材を接着剤等の樹脂を介して貼り合わせる際、2つの部材の間に極力気泡が混入しないように、真空環境下において各部材を吸着保持し、両者を相対的に近づけて貼り合わせることが行われている(例えば、特許文献1参照。)。   For example, in the process of manufacturing a liquid crystal panel, a liquid crystal substrate and a protective glass are bonded together with an adhesive. When these two members are bonded together via a resin such as an adhesive, each member is adsorbed and held in a vacuum environment so that bubbles are not mixed between the two members as much as possible. A close approach is performed (see, for example, Patent Document 1).

特開2002−357841号公報JP 2002-357841 A

しかしながら、貼り合わせる部材の中には、例えば液晶基板のように、真空環境下に置くと内部の空間が膨張して部材の面が湾曲してしまうものがある。部材の面が湾曲すると、吸着による保持が不十分となり、保持位置がずれてしまう場合がある。   However, some members to be bonded together, such as a liquid crystal substrate, expand the internal space and bend the surface of the member when placed in a vacuum environment. If the surface of the member is curved, the holding by suction becomes insufficient, and the holding position may shift.

本発明は上述の課題に鑑み、保持している部材の周囲を減圧しても保持具からずれることを回避することができる接合部材製造装置及び接合部材の製造方法を提供することを目的とする。   In view of the above-described problems, an object of the present invention is to provide a joining member manufacturing apparatus and a joining member manufacturing method capable of avoiding displacement from the holder even when the periphery of the holding member is decompressed. .

上記目的を達成するために、本発明の第1の態様に係る接合部材製造装置は、例えば図1及び図2に示すように、変形が制限されない状態で周囲の圧力が大気圧よりも低い所定の圧力以下になると第1の接合面Dfの裏面Dbが突出するように膨張し始める第1の部材Dと、第1の接合面Dfに対向させる第2の接合面Efを有する第2の部材Eとが、樹脂Gを介して接合された接合部材Cを製造する装置であって;第1の接合面Dfの裏面Dbが接触する接触面11fを有し、裏面Dbが接触面11fに接触した状態で第1の部材Dを保持する第1の保持具10と;第1の保持具10に保持された第1の部材Dの第1の接合面Dfに対して、第2の接合面Efが対向した状態で第2の部材Eを保持する第2の保持具20と;第1の保持具10に保持された第1の部材D及び第2の保持具20に保持された第2の部材Eを収容する密閉可能なチャンバ30と;チャンバ30内を減圧する減圧装置50と;第1の保持具10に保持された第1の部材Dの第1の接合面Dfと、第2の保持具20に保持された第2の部材Eの第2の接合面Efと、が相対的に接近するように第1の保持具10及び第2の保持具20の少なくとも一方を移動させる移動装置40と;第1の保持具10に保持された第1の部材Dの第1の接合面Df及び第2の保持具20に保持された第2の部材Eの第2の接合面Efの一方Efに塗布された樹脂Gと樹脂Gが塗布されていない方の接合面Dfとの間隔Sが所定の間隔となるようにした後に、チャンバ30内を所定の圧力を超える圧力から接合時圧力まで減圧するように移動装置40及び減圧装置50を制御する制御装置60とを備え;接合時圧力は、所定の圧力よりも低く、第1の部材Dと第2の部材Eとを樹脂Gを介して接合するのに適した圧力であり;所定の間隔は、変形が制限されない状態で所定の圧力を超える圧力から接合時圧力に減圧したときに第1の部材Dが膨張する厚さの増加分よりも小さい間隔に設定されている。   In order to achieve the above object, the joining member manufacturing apparatus according to the first aspect of the present invention has a predetermined lower ambient pressure than atmospheric pressure in a state where deformation is not limited, for example, as shown in FIGS. A second member having a first member D that starts to expand so that the back surface Db of the first joint surface Df protrudes and a second joint surface Ef that opposes the first joint surface Df. E is an apparatus for manufacturing the joining member C joined through the resin G; the contact face 11f is in contact with the back face Db of the first joint face Df, and the back face Db is in contact with the contact face 11f. A first holding tool 10 that holds the first member D in a state where the first member D is held; a second bonding surface with respect to the first bonding surface Df of the first member D held by the first holding tool 10 A second holder 20 that holds the second member E in a state where Ef faces each other; and a first holder 1 A sealable chamber 30 for accommodating the first member D held by the second member E and the second member E held by the second holder 20; a decompression device 50 for depressurizing the chamber 30; The first joint surface Df of the first member D held by the tool 10 and the second joint surface Ef of the second member E held by the second holder 20 relatively approach each other. The moving device 40 for moving at least one of the first holding tool 10 and the second holding tool 20 as described above; the first joint surface Df of the first member D held by the first holding tool 10 and the first The distance S between the resin G applied to one Ef of the second joint surfaces Ef of the second member E held by the second holder 20 and the joint surface Df to which the resin G is not applied is predetermined. After the interval is reached, the pressure in the chamber 30 is reduced from a pressure exceeding a predetermined pressure to a pressure at the time of bonding. A control device 60 for controlling the moving device 40 and the decompression device 50 so that the joining pressure is lower than a predetermined pressure, and the first member D and the second member E are connected via the resin G. A pressure suitable for joining; the predetermined interval is an increase in thickness by which the first member D expands when the pressure exceeding the predetermined pressure is reduced to the pressure at the time of joining in a state where deformation is not limited. Is also set to a small interval.

このように構成すると、チャンバ内において、第1の接合面及び第2の接合面の一方に塗布された樹脂と樹脂が塗布されていない方の接合面との間隔を所定の間隔にするので、その後にチャンバ内を接合時圧力に減圧した場合に第1の部材の膨張を抑制することができて、第1の部材が第1の保持具からずれることを回避することができる。   When configured in this manner, in the chamber, the interval between the resin applied to one of the first bonding surface and the second bonding surface and the bonding surface to which the resin is not applied is set to a predetermined interval. Thereafter, when the inside of the chamber is reduced to the bonding pressure, the expansion of the first member can be suppressed, and the first member can be prevented from shifting from the first holder.

また、本発明の第2の態様に係る接合部材製造装置は、例えば図1を参照して示すと、上記本発明の第1の態様に係る接合部材製造装置1において、制御装置60は、チャンバ30内を接合時圧力まで減圧した後に、第1の保持具10に保持された第1の部材Dに対して、第2の保持具20に保持された第2の部材Eを相対的に押圧するように移動装置40を制御する。   Moreover, when the joining member manufacturing apparatus according to the second aspect of the present invention is shown, for example, with reference to FIG. 1, in the joining member manufacturing apparatus 1 according to the first aspect of the present invention, the control device 60 includes a chamber. After the pressure inside 30 is reduced to the bonding pressure, the second member E held by the second holder 20 is relatively pressed against the first member D held by the first holder 10. The moving device 40 is controlled to do so.

このように構成すると、接合部材となったときに樹脂内に空洞が残らないようにすることができる。   If comprised in this way, when it becomes a joining member, it can prevent that a cavity remains in resin.

また、本発明の第3の態様に係る接合部材製造装置は、例えば図1に示すように、上記本発明の第2の態様に係る接合部材製造装置1において、第2の保持具20が、第1の接合面Df及び第2の接合面Efの一方Efに塗布された樹脂Gと樹脂Gが塗布されていない方の接合面Dfとの間隔Sを調節する間隔調節機23と、第1の保持具10に保持された第1の部材Dに対して間隔調節機23とは独立して第2の部材Eを押圧する押圧機25と、を含んで構成され;移動装置40が、間隔調節機23を第1の保持具10に近づける間隔調節機移動装置43と、押圧機25を第1の保持具10に近づける押圧機移動装置45とを含んで構成されている。   Moreover, the joining member manufacturing apparatus which concerns on the 3rd aspect of this invention is the joining member manufacturing apparatus 1 which concerns on the said 2nd aspect of the said invention, for example, as shown in FIG. An interval adjuster 23 for adjusting an interval S between the resin G applied to one Ef of the first bonding surface Df and the second bonding surface Ef and the bonding surface Df to which the resin G is not applied; And a pressing device 25 that presses the second member E independently of the spacing adjuster 23 against the first member D held by the holder 10; An interval adjuster moving device 43 for bringing the adjuster 23 closer to the first holding tool 10 and a pressing machine moving device 45 for bringing the pressing machine 25 closer to the first holding tool 10 are configured.

このように構成すると、間隔調節機と押圧機とが独立して作動するので、所定の間隔を精度よく調節でき、第1の部材に対する第2の部材の押圧を十分に行うことができる。   If comprised in this way, since a space | interval adjuster and a press machine operate | move independently, a predetermined space | interval can be adjusted with sufficient precision and the 2nd member can be fully pressed with respect to a 1st member.

上記目的を達成するために、本発明の第4の態様に係る接合部材の製造方法は、例えば図1及び図3を参照して示すと、変形が制限されない状態で周囲の圧力が大気圧よりも低い所定の圧力以下になると第1の接合面Dfの裏面Dbが突出するように膨張し始める第1の部材Dと、第1の接合面Dfに対向させる第2の接合面Efを有する第2の部材Eとが、樹脂Gを介して接合された接合部材C(例えば図2(A)参照)を製造する方法であって;密閉可能なチャンバ30内に、第1の接合面Dfの裏面Dbが第1の保持具10の接触面11fに接触した状態で、第1の保持具10に保持された第1の部材Dの第1の接合面Df及び第2の部材Eの第2の接合面Efの一方に塗布された樹脂Gと樹脂Gが塗布されていない方の接合面Dfとの間隔Sが所定の間隔となるように接近させる接近配置工程(S4)と;接近配置工程(S4)の後に、チャンバ30内を所定の圧力を超える圧力から接合時圧力まで減圧する減圧工程(S5)とを備え;接合時圧力は、所定の圧力よりも低く、第1の部材Dと第2の部材Eとを樹脂Gを介して接合するのに適した圧力であり;所定の間隔は、変形が制限されない状態で所定の圧力を超える圧力から接合時圧力に減圧したときに第1の部材Dが膨張する厚さの増加分よりも小さい間隔に設定されている。   In order to achieve the above object, the manufacturing method of the joining member according to the fourth aspect of the present invention, for example, referring to FIG. 1 and FIG. A first member D that starts to expand so that the back surface Db of the first bonding surface Df protrudes when the pressure is lower than a predetermined pressure, and a second bonding surface Ef that opposes the first bonding surface Df. 2 is a method of manufacturing a joining member C (see, for example, FIG. 2A) joined with a resin G via a resin G; the first joining surface Df is sealed in the sealable chamber 30. In a state where the back surface Db is in contact with the contact surface 11f of the first holder 10, the first joint surface Df of the first member D held by the first holder 10 and the second of the second member E. The resin G applied to one of the bonding surfaces Ef and the bonding surface Df to which the resin G is not applied An approach placement step (S4) for approaching the gap S so as to become a predetermined spacing; and a pressure reduction step (S5) for reducing the pressure in the chamber 30 from a pressure exceeding a predetermined pressure to a pressure at the time of joining after the approach placement step (S4). The pressure at the time of bonding is lower than a predetermined pressure, and is a pressure suitable for bonding the first member D and the second member E through the resin G; The interval is set to be smaller than the increase in thickness at which the first member D expands when the pressure exceeding the predetermined pressure is reduced to the pressure at the time of joining in a state where deformation is not limited.

このように構成すると、チャンバ内において、第1の接合面及び第2の接合面の一方に塗布された樹脂と樹脂が塗布されていない方の接合面との間隔を所定の間隔にするので、その後の減圧工程においてチャンバ内を接合時圧力に減圧した場合に第1の部材の膨張を抑制することができて、第1の部材が第1の保持具からずれることを回避することができる。   When configured in this manner, in the chamber, the interval between the resin applied to one of the first bonding surface and the second bonding surface and the bonding surface to which the resin is not applied is set to a predetermined interval. In the subsequent depressurization step, when the inside of the chamber is depressurized to the bonding pressure, the expansion of the first member can be suppressed, and the first member can be prevented from shifting from the first holder.

本発明によれば、チャンバ内において、第1の接合面及び第2の接合面の一方に塗布された樹脂と樹脂が塗布されていない方の接合面との間隔を所定の間隔にするので、その後にチャンバ内を接合時圧力に減圧した場合に第1の部材の膨張を抑制することができて、第1の部材が第1の保持具からずれることを回避することができる。   According to the present invention, in the chamber, since the interval between the resin applied to one of the first bonding surface and the second bonding surface and the bonding surface to which the resin is not applied is set to a predetermined interval, Thereafter, when the inside of the chamber is reduced to the bonding pressure, the expansion of the first member can be suppressed, and the first member can be prevented from shifting from the first holder.

本発明の実施の形態に係る接合部材製造装置の概略構成を示す垂直断面図である。It is a vertical sectional view showing a schematic structure of a joining member manufacturing device concerning an embodiment of the invention. (A)は接合部材の構成を例示する側面図、(B)は接合部材を構成する第1部材の変形した状態を示す側面図である。(A) is a side view which illustrates the structure of a joining member, (B) is a side view which shows the deformed state of the 1st member which comprises a joining member. 接合部材の製造工程を説明するフローチャートである。It is a flowchart explaining the manufacturing process of a joining member.

以下、図面を参照して本発明の実施の形態について説明する。なお、各図において互いに同一又は相当する部材には同一あるいは類似の符号を付し、重複した説明は省略する。   Embodiments of the present invention will be described below with reference to the drawings. In the drawings, the same or similar members are denoted by the same or similar reference numerals, and redundant description is omitted.

まず図1を参照して、本発明の実施の形態に係る接合部材製造装置1を説明する。図1は、接合部材製造装置1の概略構成を示す垂直断面図である。接合部材製造装置1は、第1の部材(以下「第1部材D」という)を保持する第1の保持具(以下「第1保持具10」という)と、第2の部材(以下「第2部材E」という)を保持する第2の保持具(以下「第2保持具20」という)と、チャンバ30と、移動装置40と、減圧装置50と、制御装置60とを備えている。ここで、接合部材製造装置1の詳細な説明に先立って、接合部材製造装置1で製造される接合部材の構成を例示する。   First, with reference to FIG. 1, the joining member manufacturing apparatus 1 which concerns on embodiment of this invention is demonstrated. FIG. 1 is a vertical cross-sectional view showing a schematic configuration of a joining member manufacturing apparatus 1. The joining member manufacturing apparatus 1 includes a first holder (hereinafter referred to as “first holder 10”) that holds a first member (hereinafter referred to as “first member D”), and a second member (hereinafter referred to as “first member D”). A second holding tool (hereinafter referred to as “second holding tool 20”), a chamber 30, a moving device 40, a decompression device 50, and a control device 60. Here, prior to detailed description of the bonding member manufacturing apparatus 1, the configuration of the bonding member manufactured by the bonding member manufacturing apparatus 1 is illustrated.

図2(A)は、接合部材Cの構成を例示する側面図である。図2(B)は、第1部材Dの変形した状態を示す側面図である。接合部材Cは、第1部材Dと第2部材Eとが樹脂としての接着剤Gの層(接着剤層GL)を挟んで構成された部品である。本実施の形態では、第1部材Dが板状に形成されたバックライト付きの液晶モジュールであり、第2部材Eが液晶を保護するカバーガラスであるとして説明する。第1部材Dは、液晶を含む板状の部品の表面が、接着剤Gを介して第2部材Eと接合する第1接合面Dfとなっている。第1部材Dは、第1接合面Dfの反対側の面が、第1裏面Dbとなっている。第1部材Dの第1裏面Db側は、液晶に対して電気信号を供給する駆動回路やバックライト(光源)を含む部品となっている。本実施の形態では、第1接合面Df及び第1裏面Dbが、共に平坦に形成されている。第1部材Dは、第1接合面Df側の液晶と、第1裏面Db側の部品との間に、空間(不図示)が形成されている。第1部材Dは、典型的には大気圧下で製造されるため、内部に形成された空間に空気が封じ込められる。第1部材Dは、周囲を減圧していくと、内部に封じ込められた空気が内外の圧力差によって膨張する。第1部材Dは、減圧によって内部の空気が膨張すると、変形が妨げられない環境下においては、図2(B)に示すように、液晶よりも強度が小さい裏面Dbが突出するように変形することとなる。第1部材Dの変形が制限されない状態で、第1部材Dの周囲を大気圧未満に減圧していった場合に、裏面Dbが突出するように膨張し始める圧力を、所定の圧力ということとする。   FIG. 2A is a side view illustrating the configuration of the joining member C. FIG. FIG. 2B is a side view showing the deformed state of the first member D. FIG. The joining member C is a component in which the first member D and the second member E are sandwiched between layers of adhesive G as a resin (adhesive layer GL). In the present embodiment, a description will be given assuming that the first member D is a liquid crystal module with a backlight formed in a plate shape, and the second member E is a cover glass that protects the liquid crystal. As for the 1st member D, the surface of the plate-shaped component containing a liquid crystal becomes the 1st joined surface Df joined to the 2nd member E via the adhesive agent G. In the first member D, the surface opposite to the first bonding surface Df is a first back surface Db. The first back surface Db side of the first member D is a component including a drive circuit that supplies an electric signal to the liquid crystal and a backlight (light source). In the present embodiment, both the first bonding surface Df and the first back surface Db are formed flat. In the first member D, a space (not shown) is formed between the liquid crystal on the first bonding surface Df side and the component on the first back surface Db side. Since the first member D is typically manufactured under atmospheric pressure, air is contained in a space formed inside. As the first member D is depressurized, the air enclosed inside expands due to the pressure difference between the inside and outside. When the internal air expands due to decompression, the first member D deforms so that the back surface Db having a lower strength than the liquid crystal protrudes, as shown in FIG. 2B, in an environment where deformation is not hindered. It will be. In a state in which the deformation of the first member D is not limited, when the periphery of the first member D is reduced to less than atmospheric pressure, the pressure at which the back surface Db starts to expand so as to protrude is referred to as a predetermined pressure. To do.

第2部材Eは、典型的には板状に形成されており、一方の面が、接着剤Gを介して第1接合面Dfに接合する第2接合面Efとなっている。第2接合面Efは、本実施の形態では平坦に形成されている。接着剤Gは、本実施の形態では、第1部材D又は第2部材Eに塗布されるときは流動性を有する所定の粘度の液体状となっており、紫外線を照射して硬化させたときに粘着特性を発現する光学樹脂であり、樹脂の一形態である。接着剤層GLは、第1部材Dと第2部材Eとを貼り合わせる前は流動性を有していた接着剤Gが、粘度が増加することにより流動性を失って形成されたものである。接着剤層GLは、第1部材Dと第2部材Eとを貼り付けると共に、硬化した際には第1部材Dと第2部材Eとの間隔を適切な間隔に保持する中間層の役割をするものである。   The second member E is typically formed in a plate shape, and one surface serves as a second joint surface Ef joined to the first joint surface Df via the adhesive G. The second joint surface Ef is formed flat in the present embodiment. In this embodiment, when the adhesive G is applied to the first member D or the second member E, the adhesive G is in the form of a liquid having a predetermined viscosity having fluidity, and is cured by being irradiated with ultraviolet rays. It is an optical resin that exhibits adhesive properties, and is a form of resin. The adhesive layer GL is formed such that the adhesive G that has fluidity before bonding the first member D and the second member E loses fluidity due to an increase in viscosity. . The adhesive layer GL attaches the first member D and the second member E, and also serves as an intermediate layer that keeps the interval between the first member D and the second member E at an appropriate interval when cured. To do.

再び図1に戻って接合部材製造装置1の説明を続ける。第1保持具10は、典型的には第1部材Dを保持する装置であり、第1ステージ11を有している。第1ステージ11は、第1部材Dが接触する接触面11fを有している。接触面11fは、接合部材C(図2(A)参照)を製造する際に、第1部材Dの裏面Dbが接触することが予定されている。接触面11fは、裏面Db(あるいは第1接合面Df)を包含する形状で、裏面Dbよりも大きい面積に形成されている。接触面11fは、裏面Db全体が接触するように、平坦に形成されている。第1ステージ11は、本実施の形態では、接触面11fを鉛直上方に向けて配置されている。接触面11fには、載置された第1部材Dを吸引保持するための吸引孔12が形成されている。吸引孔12は、第1ステージ11を貫通し、接触面11fの裏側に達している。吸引孔12は、第1保持具10が第1部材Dを安定して保持することができるように、接触面11fに複数個が現れるように形成されている。   Returning to FIG. 1 again, the description of the joining member manufacturing apparatus 1 will be continued. The first holder 10 is a device that typically holds the first member D, and includes a first stage 11. The first stage 11 has a contact surface 11f with which the first member D contacts. The contact surface 11f is scheduled to come into contact with the back surface Db of the first member D when the joining member C (see FIG. 2A) is manufactured. The contact surface 11f has a shape including the back surface Db (or the first bonding surface Df) and is formed in an area larger than the back surface Db. The contact surface 11f is formed flat so that the entire back surface Db contacts. In the present embodiment, the first stage 11 is arranged with the contact surface 11f facing vertically upward. A suction hole 12 for sucking and holding the placed first member D is formed in the contact surface 11f. The suction hole 12 passes through the first stage 11 and reaches the back side of the contact surface 11f. The suction holes 12 are formed so that a plurality of suction holes 12 appear on the contact surface 11f so that the first holder 10 can stably hold the first member D.

第2保持具20は、本実施の形態では、第1保持具10の上方に設けられており、間隔調節機23と、押圧機25とを有している。間隔調節機23は、典型的には第2部材Eを吸着保持する吸引パイプ24を含んでいる。吸引パイプ24は、鉛直方向に延びるように配設されている。吸引パイプ24は、第2部材Eを安定して保持することができるように、複数本が設けられている。押圧機25は、第2部材Eを、第1保持具10に保持されている第1部材Dに向けて押圧する装置である。押圧機25は、第2部材Eを押圧する第2ステージ26と、第2ステージ26を支持する支持アーム27とを含んでいる。第2ステージ26は、第2部材Eに接触する押圧面26fを有している。押圧面26fは、第2接合面Efを包含する形状で、第2接合面Efよりも大きい面積に形成されている。押圧面26fは、第2部材Eの第2接合面Efの反対側の面の全体が接触するように形成されており、本実施の形態では平坦に形成されている。第2ステージ26は、第2部材Eを押圧するのに十分な剛性を担保できる厚さに形成されている。第2ステージ26には、吸引パイプ24が貫通する貫通孔26hが形成されている。貫通孔26hは、設置された吸引パイプ24の数と同じ数が形成されている。貫通孔26hは、第2ステージ26を、押圧面26fからその裏側の面まで貫通している。貫通孔26hを貫通している吸引パイプ24は、第2ステージ26に対して摺動することができるように構成されている。支持アーム27は、本実施の形態では鉛直方向に延びている。   In the present embodiment, the second holding tool 20 is provided above the first holding tool 10, and includes an interval adjuster 23 and a pressing machine 25. The interval adjuster 23 typically includes a suction pipe 24 that holds the second member E by suction. The suction pipe 24 is disposed so as to extend in the vertical direction. A plurality of suction pipes 24 are provided so that the second member E can be stably held. The pressing machine 25 is a device that presses the second member E toward the first member D held by the first holder 10. The pressing machine 25 includes a second stage 26 that presses the second member E and a support arm 27 that supports the second stage 26. The second stage 26 has a pressing surface 26 f that contacts the second member E. The pressing surface 26f includes a shape that includes the second bonding surface Ef, and is formed in a larger area than the second bonding surface Ef. The pressing surface 26f is formed so that the entire surface on the opposite side of the second joint surface Ef of the second member E is in contact, and is formed flat in the present embodiment. The second stage 26 is formed to a thickness that can ensure sufficient rigidity to press the second member E. The second stage 26 is formed with a through hole 26h through which the suction pipe 24 passes. The number of through holes 26h is the same as the number of suction pipes 24 installed. The through hole 26h penetrates the second stage 26 from the pressing surface 26f to the back surface thereof. The suction pipe 24 passing through the through hole 26h is configured to be slidable with respect to the second stage 26. The support arm 27 extends in the vertical direction in the present embodiment.

チャンバ30は、第1部材Dと第2部材Eとを接合する際に好適な環境となる、減圧した空間を提供するものである。チャンバ30の内部には、第1ステージ11と、第2ステージ26とが収容されている。チャンバ30は、第1ステージ11と第2ステージ26とを鉛直方向に離間させたその間に、ロボットハンド(不図示)に把持された第1部材Dと、ロボットハンド(不図示)に把持された第2部材Eとを収めることができる大きさに形成されている。チャンバ30は、典型的には、直方体状に形成されている。チャンバ30には、第1部材D及び第2部材Eを出し入れ可能な開口を形成可能なシャッタ31が設けられている。シャッタ31は、チャンバ30の側面に設けられている。シャッタ31は、開閉装置31aによって開閉される。チャンバ30は、シャッタ31が閉じられているときに、内部の空間30rが密閉されるように構成されている。チャンバ30には、空間30rに存在する空気を排出する排気孔35が形成されている。排気孔35は、典型的にはシャッタ31の反対側の側面に形成されている。   The chamber 30 provides a decompressed space that is a suitable environment when the first member D and the second member E are joined. A first stage 11 and a second stage 26 are accommodated in the chamber 30. The chamber 30 was gripped by the first member D gripped by the robot hand (not shown) and the robot hand (not shown) while the first stage 11 and the second stage 26 were separated in the vertical direction. It is formed in a size that can accommodate the second member E. The chamber 30 is typically formed in a rectangular parallelepiped shape. The chamber 30 is provided with a shutter 31 capable of forming an opening through which the first member D and the second member E can be taken in and out. The shutter 31 is provided on the side surface of the chamber 30. The shutter 31 is opened and closed by an opening / closing device 31a. The chamber 30 is configured so that the internal space 30r is sealed when the shutter 31 is closed. The chamber 30 is formed with an exhaust hole 35 for discharging air existing in the space 30r. The exhaust hole 35 is typically formed on the side surface opposite to the shutter 31.

チャンバ30の底部には、第1ステージ11が設置されている。チャンバ30の底部及び/又は第1ステージ11には、第1ステージ11をチャンバ30の底部に対して固定することができるロック機構(不図示)が設けられている。チャンバ30の底面には、第1ステージ11の吸引孔12と連通する態様で、吸引孔32が形成されている。吸引孔32には、チューブ18等を介して第1吸引機19が接続されており、第1吸引機19の作動により、第1ステージ11の接触面11fに載置された第1部材Dを第1ステージ11に吸着して保持することができるように構成されている。チャンバ30の上部には、吸引パイプ24が貫通するパイプ孔34と、支持アーム27が貫通するアーム孔37とが形成されている。パイプ孔34は、吸引パイプ24の数と同じ数が形成されている。アーム孔37は、支持アーム27と同じ数が形成されている。パイプ孔34を貫通している吸引パイプ24は、チャンバ30に対して摺動することができるように構成されている。吸引パイプ24のチャンバ30の外側にある端部には、チューブ28等を介して第2吸引機29が接続されており、第2吸引機29の作動により、第2部材Eを吸引パイプ24に吸着して保持することができるように構成されている。アーム孔37を貫通している支持アーム27は、チャンバ30に対して摺動することができるように構成されている。チャンバ30の、吸引パイプ24が貫通しているパイプ孔34及び支持アーム27が貫通しているアーム孔37の部分は、それぞれ、空間30rの密閉性を保持できるようなシール構造が適用されている。   A first stage 11 is installed at the bottom of the chamber 30. The bottom of the chamber 30 and / or the first stage 11 is provided with a lock mechanism (not shown) that can fix the first stage 11 to the bottom of the chamber 30. A suction hole 32 is formed on the bottom surface of the chamber 30 so as to communicate with the suction hole 12 of the first stage 11. A first suction device 19 is connected to the suction hole 32 via a tube 18 or the like, and the first member D placed on the contact surface 11 f of the first stage 11 is moved by the operation of the first suction device 19. The first stage 11 is configured to be attracted and held. In the upper part of the chamber 30, a pipe hole 34 through which the suction pipe 24 passes and an arm hole 37 through which the support arm 27 passes are formed. The same number of pipe holes 34 as the number of suction pipes 24 are formed. The same number of arm holes 37 as the support arms 27 are formed. The suction pipe 24 passing through the pipe hole 34 is configured to be slidable with respect to the chamber 30. A second suction device 29 is connected to the end of the suction pipe 24 outside the chamber 30 via a tube 28 or the like, and the second member E is connected to the suction pipe 24 by the operation of the second suction device 29. It is comprised so that it can adsorb | suck and hold | maintain. The support arm 27 penetrating the arm hole 37 is configured to be slidable with respect to the chamber 30. A seal structure is applied to the portion of the chamber hole 30 through which the suction pipe 24 penetrates and the portion of the arm hole 37 through which the support arm 27 penetrates, respectively, so that the airtightness of the space 30r can be maintained. .

移動装置40は、本実施の形態では、第2保持具20を移動させる装置であり、間隔調節機移動装置43と、押圧機移動装置45とを有している。間隔調節機移動装置43は、間隔調節機23を第1ステージ11に対して接近及び離間する方向に往復移動させる装置である。間隔調節機移動装置43は、本実施の形態では、間隔調節機23(吸引パイプ24)を鉛直方向に往復移動させるように構成されている。間隔調節機移動装置43は、典型的には、ロボットで間隔調節機23を移動させるロボット駆動式の移動装置となっている。押圧機移動装置45は、押圧機25を第1ステージ11に対して接近及び離間する方向に往復移動させる装置である。押圧機移動装置45は、本実施の形態では、押圧機25(第2ステージ26及び支持アーム27)を鉛直方向に往復移動させるように構成されている。押圧機移動装置45は、典型的には、空気圧によって押圧機25を鉛直方向に往復移動させる機構を有している。間隔調節機移動装置43による間隔調節機23の往復移動と、押圧機移動装置45による押圧機25の往復移動とは、独立して行われるように構成されている。   In the present embodiment, the moving device 40 is a device that moves the second holder 20, and includes a distance adjuster moving device 43 and a pressing machine moving device 45. The interval adjuster moving device 43 is a device that reciprocates the interval adjuster 23 in a direction approaching and separating from the first stage 11. In this embodiment, the interval adjuster moving device 43 is configured to reciprocate the interval adjuster 23 (suction pipe 24) in the vertical direction. The interval adjuster moving device 43 is typically a robot-driven moving device that moves the interval adjuster 23 by a robot. The pressing machine moving device 45 is a device that reciprocates the pressing machine 25 in a direction approaching and separating from the first stage 11. In this embodiment, the pressing machine moving device 45 is configured to reciprocate the pressing machine 25 (second stage 26 and support arm 27) in the vertical direction. The pressing machine moving device 45 typically has a mechanism for reciprocating the pressing machine 25 in the vertical direction by air pressure. The reciprocating movement of the interval adjuster 23 by the interval adjusting machine moving device 43 and the reciprocating movement of the pressing machine 25 by the pressing machine moving device 45 are configured to be performed independently.

減圧装置50は、密閉されたチャンバ30内の圧力を低下させる装置であり、真空配管51と、真空ポンプ52とを有している。真空配管51は、チャンバ30内の空気をチャンバ30の外に導く流路を形成するものであり、チャンバ30に形成された排気孔35に一端が接続されている。真空ポンプ52は、真空配管51に配設されており、チャンバ30内の空気を、真空配管51を介してチャンバ30の外に排出するように構成されている。真空ポンプ52は、チャンバ30内の圧力を、第1部材Dと第2部材Eとを接着剤Gを介して接合するのに適した圧力(接合時圧力)に低下させることができる能力を有している。接合時圧力は負圧である。   The decompression device 50 is a device that reduces the pressure in the sealed chamber 30, and includes a vacuum pipe 51 and a vacuum pump 52. The vacuum pipe 51 forms a flow path for guiding the air in the chamber 30 to the outside of the chamber 30, and one end is connected to the exhaust hole 35 formed in the chamber 30. The vacuum pump 52 is disposed in the vacuum pipe 51 and is configured to discharge the air in the chamber 30 to the outside of the chamber 30 through the vacuum pipe 51. The vacuum pump 52 has the capability of reducing the pressure in the chamber 30 to a pressure suitable for bonding the first member D and the second member E via the adhesive G (pressure at the time of bonding). doing. The joining pressure is a negative pressure.

制御装置60は、接合部材製造装置1の動作を制御する装置である。制御装置60は、第1部材Dを把持するロボットハンド(不図示)及び第2部材Eを把持するロボットハンド(不図示)とそれぞれ信号ケーブルで接続されており、第1部材D及び第2部材Eをチャンバ30内外へ搬送することができるように構成されている。また、制御装置60は、第1ステージ11の吸引孔12に連通する第1吸引機19及び吸引パイプ24に連通する第2吸引機29とそれぞれ信号ケーブルで接続されており、下部材D及び上部材Eの真空吸着の有無をそれぞれ制御することができるように構成されている。また、制御装置60は、チャンバ30のシャッタ31を開閉する開閉装置31aと信号ケーブルで接続されており、シャッタ31の開閉を制御することができるように構成されている。また、制御装置60は、間隔調節機移動装置43及び押圧機移動装置45と、それぞれ信号ケーブルで接続されており、間隔調節機23及び押圧機25をそれぞれ移動させることができるように構成されている。また、制御装置60は、真空ポンプ52と信号ケーブルで接続されており、真空ポンプ52の発停を制御することができるように構成されている。   The control device 60 is a device that controls the operation of the joining member manufacturing apparatus 1. The control device 60 is connected to a robot hand (not shown) that holds the first member D and a robot hand (not shown) that holds the second member E by a signal cable, and the first member D and the second member. E is configured so as to be able to transport E into and out of the chamber 30. The control device 60 is connected to the first suction device 19 communicating with the suction hole 12 of the first stage 11 and the second suction device 29 communicating with the suction pipe 24 via signal cables, respectively, and the lower member D and the upper member It is comprised so that the presence or absence of the vacuum suction of the member E can be controlled, respectively. The control device 60 is connected to an opening / closing device 31a for opening / closing the shutter 31 of the chamber 30 through a signal cable, and is configured to control the opening / closing of the shutter 31. Further, the control device 60 is connected to the interval adjuster moving device 43 and the press machine moving device 45 through signal cables, respectively, and is configured to be able to move the interval adjuster 23 and the press machine 25, respectively. Yes. The control device 60 is connected to the vacuum pump 52 with a signal cable, and is configured to control the start and stop of the vacuum pump 52.

引き続き図3を参照して、本発明の実施の形態に係る接合部材の製造方法を説明する。図3は、接合部材C(図2(A)参照)の製造工程を説明するフローチャートである。以下に説明する接合部材Cの製造方法は、これまで説明した接合部材製造装置1で行われることとする。つまり、以下の説明は、接合部材製造装置1の作用の説明を兼ねている。なお、接合部材Cの製造は、接合部材製造装置1を作動させること以外の手法で行うことも可能である。以下の接合部材の製造方法の説明において、接合部材製造装置1及び接合部材Cの詳細な構成に言及しているときは、適宜図1及び図2を参照することとする。   With continued reference to FIG. 3, the method for manufacturing the joining member according to the embodiment of the present invention will be described. FIG. 3 is a flowchart for explaining a manufacturing process of the joining member C (see FIG. 2A). The manufacturing method of the joining member C demonstrated below shall be performed with the joining member manufacturing apparatus 1 demonstrated so far. That is, the following description also serves as an explanation of the operation of the joining member manufacturing apparatus 1. In addition, manufacture of the joining member C can also be performed by methods other than operating the joining member manufacturing apparatus 1. In the following description of the manufacturing method of the joining member, when referring to the detailed configuration of the joining member manufacturing apparatus 1 and the joining member C, reference will be made to FIGS. 1 and 2 as appropriate.

接合部材Cの製造を開始するに際し、制御装置60は、チャンバ30のシャッタ31を開け、ロボットハンド(不図示)に把持された第1部材D及びロボットハンド(不図示)に把持された第2部材Eをチャンバ30内に搬入する(S1)。本実施の形態では、第1接合面Dfを上に向けて第1部材Dをチャンバ30内に搬入し、第2部材Eを、第1部材Dよりも上方で、第2接合面Efを下に向けてチャンバ内に搬入する。なお、本実施の形態では、第2部材Eをチャンバ30内に搬入する前に、第2接合面Efに所定量の接着剤Gを塗布している。所定量の接着剤Gは、第1部材Dと第2部材Eとが接着剤Gを介して接合されたときに接着剤層GLが適切な厚さになる接着剤Gの量である。本実施の形態では、第2接合面Efに塗布された接着剤Gの厚さが、概ね50μm〜300μmとなっている。本実施の形態では、接着剤Gが塗布された第2接合面Efが下向きとなるため、接着剤Gとして、垂れ落ちない粘度を有するものが用いられている。   When starting the manufacture of the joining member C, the control device 60 opens the shutter 31 of the chamber 30, and the first member D held by the robot hand (not shown) and the second member held by the robot hand (not shown). The member E is carried into the chamber 30 (S1). In the present embodiment, the first member D is carried into the chamber 30 with the first joint surface Df facing upward, the second member E is placed above the first member D, and the second joint surface Ef is lowered. Into the chamber. In the present embodiment, a predetermined amount of adhesive G is applied to the second joint surface Ef before the second member E is carried into the chamber 30. The predetermined amount of the adhesive G is an amount of the adhesive G that allows the adhesive layer GL to have an appropriate thickness when the first member D and the second member E are joined via the adhesive G. In the present embodiment, the thickness of the adhesive G applied to the second bonding surface Ef is approximately 50 μm to 300 μm. In the present embodiment, since the second joint surface Ef to which the adhesive G is applied is directed downward, the adhesive G having a viscosity that does not sag is used.

第1部材D及び第2部材Eをチャンバ30内に搬入したら、制御装置60は、ロボットハンド(不図示)に把持された第1部材Dの第1裏面Dbを第1ステージ11の接触面11fに接触させてから、第1吸引機19を作動させる。これにより、第1部材Dが第1保持具10に吸着保持される。第1部材Dが第1保持具10に吸着保持されたら、制御装置60は、ロボットハンド(不図示)をチャンバ30の外に退避させる。また、制御装置60は、ロボットハンド(不図示)に把持された第2部材Eの第2接合面Efとは反対側の面を吸引パイプ24の先端に接触させてから、第2吸引機29を作動させる。これにより、第2部材Eが間隔調節機23に吸着保持される。第2部材Eが間隔調節機23に吸着保持されたら、制御装置60は、ロボットハンド(不図示)をチャンバ30の外に退避させる。   When the first member D and the second member E are carried into the chamber 30, the control device 60 uses the first back surface Db of the first member D held by the robot hand (not shown) as the contact surface 11 f of the first stage 11. Then, the first suction device 19 is operated. As a result, the first member D is sucked and held by the first holder 10. When the first member D is sucked and held by the first holder 10, the control device 60 retracts the robot hand (not shown) out of the chamber 30. The control device 60 makes the second suction machine 29 after the surface opposite to the second joint surface Ef of the second member E held by the robot hand (not shown) contacts the tip of the suction pipe 24. Is activated. As a result, the second member E is attracted and held by the interval adjuster 23. When the second member E is attracted and held by the interval adjuster 23, the control device 60 retracts the robot hand (not shown) out of the chamber 30.

ロボットハンド(不図示)がチャンバ30の外に退避したとき、第1保持具10に吸着保持された第1部材Dと間隔調節機23に吸着保持された第2部材Eとは、第1接合面Dfと、第2接合面Efに塗布された接着剤Gとが、対向しつつ比較的大きな距離が開いて配置されている(対向配置工程:S2)。ここで、第1接合面Dfと第2接合面Efに塗布された接着剤Gとが比較的大きな距離が開いているとは、ロボットハンド(不図示)の出入りを円滑に行うことができると共に、仮にこの状態でチャンバ30内が負圧になって第1部材Dの第1裏面Dbが突出するように膨張した場合に第1裏面Dbが吸引孔12から離れる程の第1裏面Dbの湾曲が許容される距離が開いている状態である。   When the robot hand (not shown) is retracted out of the chamber 30, the first member D sucked and held by the first holder 10 and the second member E sucked and held by the distance adjuster 23 are first bonded. The surface Df and the adhesive G applied to the second bonding surface Ef are arranged to face each other with a relatively large distance (opposing arrangement step: S2). Here, the relatively large distance between the first bonding surface Df and the adhesive G applied to the second bonding surface Ef means that the robot hand (not shown) can enter and exit smoothly. In this state, if the inside of the chamber 30 becomes negative pressure and expands so that the first back surface Db of the first member D protrudes, the curvature of the first back surface Db is such that the first back surface Db is separated from the suction hole 12. Is a state where the allowable distance is open.

第1部材D及び第2部材Eを対向配置したら、制御装置60は、シャッタ31を閉じてチャンバ30内を密閉する(S3)。次に、制御装置60は、間隔調節機移動装置43を作動させ、第1保持具10に吸着保持された第1部材Dの第1接合面Dfと、間隔調節機23に吸着保持された第2部材Eの第2接合面Efに塗布された接着剤Gと、の間隔が所定の間隔となるように、第2部材Eを第1部材Dに近づける(接近配置工程:S4)。ここで、所定の間隔は、仮に第1部材Dの変形が制限されない(変形を妨げる物体がない)状態でチャンバ30内を接合時圧力にして第1部材Dの第1裏面Dbが突出するように膨張した場合における第1部材Dの膨張による厚さの増加分よりも小さい間隔である。また、接合時圧力は、負圧(大気圧よりも低い圧力)であって、第1部材Dと第2部材Eとを接着剤Gを介して接合するのに適した圧力であり、典型的には接合部材Cとしたときに接着剤層GL内に許容範囲を超える空洞が混在していることを回避できる圧力である。なお、本実施の形態では、所定の間隔を、概ね0.1mm〜0.5mmとしている。また、接着剤Gを塗布した範囲の外周が下がっている場合は(接着剤Gの粘度により外周が下がる場合がある)、接着剤Gの下がっていない外周より内側の部分と第1接合面Dfとの間隔を所定の間隔とする。また、第1ステージ11がチャンバ30の底部に対して固定されていない場合は、この接近配置工程(S4)が完了するまでにロック機構(不図示)をロックして固定しておく。   When the first member D and the second member E are arranged to face each other, the control device 60 closes the shutter 31 and seals the inside of the chamber 30 (S3). Next, the control device 60 activates the interval adjuster moving device 43, and the first joint surface Df of the first member D adsorbed and held by the first holder 10 and the first adsorbed and held by the interval adjuster 23. The second member E is moved closer to the first member D so that the gap between the second member E and the adhesive G applied to the second bonding surface Ef becomes a predetermined distance (approach arrangement step: S4). Here, the predetermined interval is set so that the first back surface Db of the first member D protrudes with the pressure in the chamber 30 being joined in a state where the deformation of the first member D is not restricted (there is no object that prevents the deformation). The distance is smaller than the increase in thickness due to the expansion of the first member D when the first member D expands. Moreover, the pressure at the time of joining is a negative pressure (pressure lower than atmospheric pressure), and is a pressure suitable for joining the first member D and the second member E via the adhesive G. Is a pressure that can avoid the presence of cavities exceeding the allowable range in the adhesive layer GL when the bonding member C is used. In the present embodiment, the predetermined interval is approximately 0.1 mm to 0.5 mm. Further, when the outer periphery of the area where the adhesive G is applied is lowered (the outer periphery may be lowered due to the viscosity of the adhesive G), the first joint surface Df and the portion inside the outer periphery where the adhesive G is not lowered. Is a predetermined interval. When the first stage 11 is not fixed to the bottom of the chamber 30, the lock mechanism (not shown) is locked and fixed before the approach placement step (S4) is completed.

第1の部材と第2部材Eとを接近配置したら、制御装置60は、真空ポンプ52を作動させて、チャンバ30内の圧力を低下させていく(減圧工程:S5)。制御装置60は、チャンバ30内の圧力が接合時圧力まで低下することを目標として、真空ポンプ52を作動させる。チャンバ30内の圧力を低下させていき、所定の圧力まで低下すると、第1部材Dは、第1裏面Dbが突出するように膨張し始める。所定の圧力は、通常、接合時圧力よりも高いため、引き続きチャンバ30内を減圧していく。チャンバ30内の圧力を、所定の圧力よりも低下させていくと、第1部材Dは、第1裏面Dbの突出量が多くなっていくことになる。しかしながら、本実施の形態では、接近配置工程(S4)において、第1接合面Dfと第2接合面Efに塗布された接着剤Gとの間隔を所定の間隔にしているので、第1裏面Dbが膨らんで第1部材Dの厚さを大きくしようとしても、第1部材Dが第2部材Eに接触して、それ以上の第1部材Dの膨張が妨げられる。これにより、第1部材Dの内部の空間の膨張によって第1裏面Dbが湾曲して第1裏面Dbが吸引孔12から離れてしまうことを回避することができ、第1部材Dが吸着保持されている第1保持具10からずれてしまうことを回避することができる。このようにして、第1保持具10に吸着保持された第1部材D、及び間隔調節機23に吸着保持されている第2部材Eの保持位置がずれることなく、チャンバ30内を接合時圧力に低下させることができる。   When the first member and the second member E are arranged close to each other, the control device 60 operates the vacuum pump 52 to reduce the pressure in the chamber 30 (decompression step: S5). The control device 60 operates the vacuum pump 52 with the goal of reducing the pressure in the chamber 30 to the bonding pressure. When the pressure in the chamber 30 is decreased to a predetermined pressure, the first member D starts to expand so that the first back surface Db protrudes. Since the predetermined pressure is usually higher than the bonding pressure, the inside of the chamber 30 is continuously depressurized. When the pressure in the chamber 30 is lowered below a predetermined pressure, the first member D has a greater amount of protrusion of the first back surface Db. However, in this embodiment, since the distance between the first bonding surface Df and the adhesive G applied to the second bonding surface Ef is set to a predetermined interval in the approach placement step (S4), the first back surface Db Even if the first member D tries to increase the thickness of the first member D, the first member D comes into contact with the second member E, and further expansion of the first member D is prevented. Thereby, it can be avoided that the first back surface Db is curved and the first back surface Db is separated from the suction hole 12 due to the expansion of the space inside the first member D, and the first member D is held by suction. It can be avoided that the first holding tool 10 is displaced. In this way, the pressure at the time of joining in the chamber 30 is maintained without shifting the holding position of the first member D sucked and held by the first holder 10 and the second member E sucked and held by the interval adjuster 23. Can be lowered.

チャンバ30内が接合時圧力まで低下したら、制御装置60は、押圧機移動装置45を作動させ、押圧機25によって、第2部材Eを第1部材Dに向けて押圧する(押圧工程:S6)。押圧機25は、第2部材Eの第2接合面Efの裏側の面全体を、押圧面26fで押圧する。チャンバ30内が接合時圧力に低下した状態で、接着剤Gが塗布された第2部材Eを押圧機25によって第1部材Dに向けて押圧することにより、接着剤Gの内部に混在していた空洞を押し潰す。接着剤Gに含まれていた気体成分は、真空下(接合時圧力の状態)でほとんど抜けている。気体の抜けたあとの空洞に気体が残っていても、真空中であるので絶対量は僅少である。したがって、空洞を押し潰した後に、問題となり得る大きさの空洞が常圧下で再生することはない。なお、本実施の形態では、押圧機移動装置45が、概ね50kPa〜300kPaの力で、第2部材Eを第1部材Dに向けて押圧しているが、1MPa以上で押圧する場合もあり得る。押圧工程(S6)が完了すると、第1部材Dと第2部材Eとが所定の厚さの接着剤層GLを介して接合された接合部材Cとなる(S7)。接合部材Cが完成したら、制御装置60は、チャンバ30内の圧力をチャンバ30の外の圧力と同程度に昇圧し、シャッタ31を開け、ロボットハンド(不図示)によりチャンバ30から接合部材Cを取り出させて、接合部材Cの製造を終了する。   When the inside of the chamber 30 decreases to the bonding pressure, the control device 60 operates the pressing machine moving device 45 and presses the second member E toward the first member D by the pressing machine 25 (pressing step: S6). . The pressing machine 25 presses the entire back surface of the second joining surface Ef of the second member E with the pressing surface 26f. By pressing the second member E coated with the adhesive G toward the first member D by the pressing machine 25 in a state where the pressure inside the chamber 30 is reduced to the bonding pressure, the pressure is mixed in the adhesive G. Crush the cavities. The gas component contained in the adhesive G is almost eliminated under vacuum (pressure state during bonding). Even if gas remains in the cavity after the gas escapes, the absolute amount is very small because it is in a vacuum. Therefore, after crushing the cavity, a cavity of a size that may cause a problem does not regenerate under normal pressure. In the present embodiment, the pressing machine moving device 45 presses the second member E toward the first member D with a force of approximately 50 kPa to 300 kPa, but may be pressed at 1 MPa or more. . When the pressing step (S6) is completed, the first member D and the second member E are joined members C joined via the adhesive layer GL having a predetermined thickness (S7). When the joining member C is completed, the control device 60 increases the pressure in the chamber 30 to the same level as the pressure outside the chamber 30, opens the shutter 31, and removes the joining member C from the chamber 30 by a robot hand (not shown). Then, the manufacture of the joining member C is completed.

以上で説明したように、本実施の形態に係る接合部材製造装置1及び接合部材の製造方法によれば、密閉されたチャンバ30内において、第1接合面Dfと第2接合面Efに塗布された接着剤Gとの間隔が所定の間隔となるように第1部材Dと第2部材とを接近させた後に、チャンバ30内を接合時圧力に減圧するので、第1部材Dの膨張を抑制することができ、第1部材Dが第1保持具10から外れてしまうほど第1裏面Dbが湾曲することを回避することができる。また、チャンバ30内を接合時圧力まで減圧する過程で第1部材Dの膨張を抑制するので、製品(第1部材D、接合部材C)に悪影響を及ぼすことを抑制することができる。   As described above, according to the bonding member manufacturing apparatus 1 and the bonding member manufacturing method according to the present embodiment, the first bonding surface Df and the second bonding surface Ef are applied in the sealed chamber 30. After the first member D and the second member are brought close to each other so that the distance between the adhesive G and the adhesive G becomes a predetermined distance, the inside of the chamber 30 is reduced to the pressure at the time of joining, so that the expansion of the first member D is suppressed It is possible to prevent the first back surface Db from being curved as the first member D is detached from the first holder 10. Further, since the expansion of the first member D is suppressed in the process of reducing the pressure in the chamber 30 to the bonding pressure, it is possible to suppress adverse effects on the products (the first member D and the bonding member C).

以上の説明では、第1部材Dが液晶モジュールであるとしたが、液晶モジュール以外の、減圧したときに裏面が膨張する部材であってもよい。また、第2部材Eがカバーガラスであるとしたが、カバーガラス以外の、第1部材Dに貼り合わせるのに適した部材であってもよい。   In the above description, the first member D is the liquid crystal module. However, the first member D may be a member other than the liquid crystal module, whose back surface expands when the pressure is reduced. In addition, although the second member E is a cover glass, it may be a member suitable for bonding to the first member D other than the cover glass.

以上の説明では、第1部材Dの第1接合面Df及び第1裏面Dbが、共に平坦に形成されているとしたが、どちらか一方又は両方が、凸状あるいは凹状に形成されていてもよい。第1接合面Dfが平坦でない場合は、第2接合面Efを第1接合面Dfに対応するように(接着剤Gを介して適切に接合されるように)形成することとなり、第1裏面Dbが平坦でない場合は、接触面11fを第1裏面Dbに対応するように形成することとなる。   In the above description, the first bonding surface Df and the first back surface Db of the first member D are both formed flat, but either one or both may be formed in a convex shape or a concave shape. Good. When the first bonding surface Df is not flat, the second bonding surface Ef is formed so as to correspond to the first bonding surface Df (so as to be appropriately bonded through the adhesive G). When Db is not flat, the contact surface 11f is formed so as to correspond to the first back surface Db.

以上の説明では、第2保持具20が、第2部材Eの第1部材Dに対する間隔を調節する間隔調節機23と、第2部材Eを第1部材Dに向けて押圧する押圧機25とに分かれているとしたが、間隔調節機23と押圧機25との機能を統合して1つのステージで第2部材Eの吸着保持、第1部材Dに対する間隔の調節、第1部材Dに向けての押圧を行うことができるように構成されていてもよい。   In the above description, the second holding tool 20 adjusts the distance between the second member E and the first member D, and the pressing device 25 presses the second member E toward the first member D. However, the functions of the interval adjuster 23 and the pressing device 25 are integrated to attract and hold the second member E in one stage, to adjust the interval with respect to the first member D, and to the first member D. It may be configured so that all pressing can be performed.

以上の説明では、第1保持具10及び第2保持具20の部材を保持する構成が、共に、部材の面を吸着して保持するものであるとしたが、両方又はどちらか一方が、部材の外周縁を把持するチャック構造であってもよい。しかしながら、部材の面を吸着保持する構成とすると、部材のサイズ(外周長、面積、形状)が変わった場合でも特別な装置を施すことなく部材を保持することができ、また押圧工程(S6)において押圧しやすいため、好ましい。   In the above description, the configurations for holding the members of the first holding tool 10 and the second holding tool 20 are both configured to adsorb and hold the surfaces of the members. It may be a chuck structure that grips the outer peripheral edge. However, when the surface of the member is held by suction, the member can be held without applying a special device even when the size (outer peripheral length, area, shape) of the member changes, and the pressing step (S6). It is preferable because it can be easily pressed.

以上の説明では、移動装置40が、第2保持具20を移動させる装置であることとしたが、第2保持具20に代えて第1保持具を移動させる装置としてもよく、あるいは、第2保持具20及び第1保持具10の双方を移動させる装置としてもよい。   In the above description, the moving device 40 is a device that moves the second holding tool 20. However, the moving device 40 may be a device that moves the first holding tool instead of the second holding tool 20, or the second holding tool 20. It is good also as an apparatus which moves both the holder 20 and the 1st holder 10. FIG.

以上の説明では、第1部材Dと第2部材Eを接合する前に接着剤Gを第2部材Eの第2接合面Efに塗布することとしたが、第2接合面Efに塗布せずに第1部材Dの第1接合面Dfに塗布することとしてもよい。   In the above description, the adhesive G is applied to the second joint surface Ef of the second member E before joining the first member D and the second member E, but not applied to the second joint surface Ef. Alternatively, it may be applied to the first joint surface Df of the first member D.

1 接合部材製造装置
10 第1保持具
11f 接触面
20 第2保持具
23 間隔調節機
25 押圧機
30 チャンバ
40 移動装置
43 間隔調節機移動装置
45 押圧機移動装置
50 減圧装置
60 制御装置
C 接合部材
D 第1部材
Db 第1裏面
Df 第1接合面
E 第2部材
Ef 第2接合面
G 接着剤
S 間隔
DESCRIPTION OF SYMBOLS 1 Joining member manufacturing apparatus 10 1st holding tool 11f Contact surface 20 2nd holding tool 23 Space | interval adjuster 25 Press machine 30 Chamber 40 Moving apparatus 43 Spacing apparatus moving apparatus 45 Pressing machine moving apparatus 50 Decompression apparatus 60 Control apparatus C Joining member D 1st member Db 1st back surface Df 1st joining surface E 2nd member Ef 2nd joining surface G Adhesive S space | interval

Claims (4)

変形が制限されない状態で周囲の圧力が大気圧よりも低い所定の圧力以下になると第1の接合面の裏面が突出するように膨張し始める第1の部材と、前記第1の接合面に対向させる第2の接合面を有する第2の部材とが、樹脂を介して接合された接合部材を製造する装置であって;
前記第1の接合面の裏面が接触する接触面を有し、前記裏面が前記接触面に接触した状態で前記第1の部材を保持する第1の保持具と;
前記第1の保持具に保持された前記第1の部材の前記第1の接合面に対して、前記第2の接合面が対向した状態で前記第2の部材を保持する第2の保持具と;
前記第1の保持具に保持された前記第1の部材及び前記第2の保持具に保持された前記第2の部材を収容する密閉可能なチャンバと;
前記チャンバ内を減圧する減圧装置と;
前記第1の保持具に保持された前記第1の部材の前記第1の接合面と、前記第2の保持具に保持された前記第2の部材の前記第2の接合面と、が相対的に接近するように前記第1の保持具及び前記第2の保持具の少なくとも一方を移動させる移動装置と;
前記第1の保持具に保持された前記第1の部材の前記第1の接合面及び前記第2の保持具に保持された前記第2の部材の前記第2の接合面の一方に塗布された前記樹脂と前記樹脂が塗布されていない方の接合面との間隔が所定の間隔となるようにした後に、前記チャンバ内を前記所定の圧力を超える圧力から接合時圧力まで減圧するように前記移動装置及び前記減圧装置を制御する制御装置とを備え;
前記接合時圧力は、前記所定の圧力よりも低く、前記第1の部材と前記第2の部材とを前記樹脂を介して接合するのに適した圧力であり;
前記所定の間隔は、変形が制限されない状態で前記所定の圧力を超える圧力から前記接合時圧力に減圧したときに前記第1の部材が膨張する厚さの増加分よりも小さい間隔に設定された;
接合部材製造装置。
A first member that starts to expand so that the back surface of the first joint surface protrudes when the surrounding pressure becomes a predetermined pressure lower than atmospheric pressure in a state where the deformation is not limited, and the first member faces the first joint surface. A second member having a second joining surface to be produced is an apparatus for producing a joined member joined via a resin;
A first holder that has a contact surface that contacts the back surface of the first bonding surface, and holds the first member in a state where the back surface is in contact with the contact surface;
A second holding tool for holding the second member in a state where the second bonding surface is opposed to the first bonding surface of the first member held by the first holding tool. When;
A sealable chamber for accommodating the first member held by the first holder and the second member held by the second holder;
A decompression device for decompressing the interior of the chamber;
The first joint surface of the first member held by the first holder and the second joint surface of the second member held by the second holder are relative to each other. A moving device that moves at least one of the first holder and the second holder so as to approach each other;
It is applied to one of the first joint surface of the first member held by the first holder and the second joint surface of the second member held by the second holder. In addition, after the interval between the resin and the bonding surface to which the resin is not applied is set to a predetermined interval, the chamber is depressurized from a pressure exceeding the predetermined pressure to a bonding pressure. A moving device and a control device for controlling the pressure reducing device;
The joining pressure is lower than the predetermined pressure, and is a pressure suitable for joining the first member and the second member via the resin;
The predetermined interval is set to be smaller than an increase in thickness at which the first member expands when the pressure exceeding the predetermined pressure is reduced to the pressure at the time of joining in a state where deformation is not limited. ;
Joining member manufacturing equipment.
前記制御装置は、前記チャンバ内を前記接合時圧力まで減圧した後に、前記第1の保持具に保持された前記第1の部材に対して、前記第2の保持具に保持された前記第2の部材を相対的に押圧するように前記移動装置を制御する;
請求項1に記載の接合部材製造装置。
The controller controls the second member held by the second holder to the first member held by the first holder after reducing the pressure in the chamber to the joining pressure. Controlling the moving device to relatively press the members of
The joining member manufacturing apparatus according to claim 1.
前記第2の保持具が、前記第1の接合面及び前記第2の接合面の一方に塗布された前記樹脂と前記樹脂が塗布されていない方の接合面との間隔を調節する間隔調節機と、前記第1の保持具に保持された前記第1の部材に対して前記間隔調節機とは独立して前記第2の部材を押圧する押圧機と、を含んで構成され;
前記移動装置が、前記間隔調節機を前記第1の保持具に近づける間隔調節機移動装置と、前記押圧機を前記第1の保持具に近づける押圧機移動装置とを含んで構成された;
請求項2に記載の接合部材製造装置。
An interval adjuster for adjusting the interval between the resin applied to one of the first bonding surface and the second bonding surface and the bonding surface to which the resin is not applied. And a pressing machine that presses the second member against the first member held by the first holding tool independently of the spacing adjuster;
The moving device includes an interval adjuster moving device that brings the distance adjuster closer to the first holding tool, and a pressing machine moving device that brings the pressing machine closer to the first holding tool;
The joining member manufacturing apparatus according to claim 2.
変形が制限されない状態で周囲の圧力が大気圧よりも低い所定の圧力以下になると第1の接合面の裏面が突出するように膨張し始める第1の部材と、前記第1の接合面に対向させる第2の接合面を有する第2の部材とが、樹脂を介して接合された接合部材を製造する方法であって;
密閉可能なチャンバ内に、前記第1の接合面の裏面が第1の保持具の接触面に接触した状態で、前記第1の保持具に保持された前記第1の部材の前記第1の接合面及び前記第2の部材の前記第2の接合面の一方に塗布された前記樹脂と前記樹脂が塗布されていない方の接合面との間隔が所定の間隔となるように接近させる接近配置工程と;
前記接近配置工程の後に、前記チャンバ内を前記所定の圧力を超える圧力から接合時圧力まで減圧する減圧工程とを備え;
前記接合時圧力は、前記所定の圧力よりも低く、前記第1の部材と前記第2の部材とを前記樹脂を介して接合するのに適した圧力であり;
前記所定の間隔は、変形が制限されない状態で前記所定の圧力を超える圧力から前記接合時圧力に減圧したときに前記第1の部材が膨張する厚さの増加分よりも小さい間隔に設定された;
接合部材の製造方法。
A first member that starts to expand so that the back surface of the first joint surface protrudes when the surrounding pressure becomes a predetermined pressure lower than atmospheric pressure in a state where the deformation is not limited, and the first member faces the first joint surface. A second member having a second joining surface to be produced is a method for producing a joined member joined via a resin;
In the sealable chamber, the first member of the first member held by the first holder in a state where the back surface of the first joint surface is in contact with the contact surface of the first holder. An approach arrangement in which the distance between the resin applied to one of the bonding surface and the second bonding surface of the second member and the bonding surface to which the resin is not applied is close to a predetermined distance. Process and;
A pressure reducing step for reducing the pressure in the chamber from a pressure exceeding the predetermined pressure to a pressure at the time of joining after the approaching arrangement step;
The joining pressure is lower than the predetermined pressure, and is a pressure suitable for joining the first member and the second member via the resin;
The predetermined interval is set to be smaller than an increase in thickness at which the first member expands when the pressure exceeding the predetermined pressure is reduced to the pressure at the time of joining in a state where deformation is not limited. ;
A method for manufacturing a joining member.
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