JP2013001888A - Member joining method and member joining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adhesion method capable of rapidly applying, in joining of two members through an adhesive disposed between the mutually opposed surfaces of the members, a uniform pressing force substantially over the whole surface of the mutually opposed surfaces regardless of the member dimension.SOLUTION: First and second pressure sections 20, 22 mutually separated by an airtight elastic sheet 18 are prepared. In the first pressure section, a first member 12 with an adhesive 16 disposed on a first surface 12a is placed on the elastic sheet, and the first member 12 and a second member 14 are disposed at a position where the first surface 12a and a second surface 14a are faced with each other. The first and second pressure sections are decompressed to pressures P1, P2 respectively. The pressure of the second pressure section is increased more than the pressure of the first pressure section, the first member is moved while elastically displacing the elastic sheet toward the first pressure section by a resulting differential pressure ΔP, and the first surface of the first member and the second surface of the second member are mutually pressed through the adhesive while supporting a second reverse surface 14b of the second member against the differential pressure.

Description

  The present invention relates to a member joining method and a member joining apparatus for joining two members together in a facing state.

  In a member joining technique for joining two members to each other in a face-to-face state, an adhesive is disposed between the opposing surfaces of the members, and the opposing surfaces of both members are pressed together via the adhesive in a vacuum environment. Later, a technique is known in which both members are joined by curing the adhesive.

  For example, Patent Document 1 discloses “a liquid crystal display element manufacturing apparatus capable of accurately bonding two substrates disposed at opposing positions without damaging them”. In Patent Document 1, “First, an ultraviolet curable adhesive 1 applied to the surface with a thickness of 30 μm and a lower substrate 3 made of a translucent material in which a liquid crystal material 2 is arranged inside the adhesive 1, It is mounted on a table 4 that is movable in the horizontal direction, and the entire lower surface of the lower substrate 3 is fixed by vacuum suction by the suction mechanism 5 in atmospheric pressure (step a). ”,“ Next, lower substrate 3 The upper substrate 6 made of a translucent material is arranged at a predetermined interval so as to face the substrate, and the upper side surface of the upper substrate 6 is fixed in the atmosphere by vacuum adsorption by the adsorption mechanism 7 (step b). Then, it is adsorbed and fixed only by the first adsorption system 7a of the adsorption mechanism 7. Next, vacuum adsorption by the second adsorption system 7b is added to increase the aperture ratio of the adsorption holes, and the entire surface of the upper substrate 6 is made the first. And the second adsorption system 7a, 7b for adsorption fixation (step c). " The chamber C is closed and evacuation is performed, and alignment is performed by moving both or one of the substrates 3 and 6 in a vacuum atmosphere in a direction opposite to the substrate (step d). 3 and 6 are moved close to each other and pressurized together to bond the substrates 3 and 6 together (step e). ”,“ Then, the bonded substrates 3 and 6 are transported to the outside of the vacuum container C, and ultraviolet rays are bonded. The adhesive means 1 is cured by irradiating ultraviolet rays with the irradiating means 8, and the bonding of the lower substrate 3 and the upper substrate 6 is completed (step f). "

JP 2000-310759 A (paragraphs 0012, 0019 to 0022)

  A member joining technique in which an adhesive is disposed between two opposing surfaces of two members, and the opposing surfaces of both members are pressed against each other via the adhesive in a vacuum environment, and then the two members are joined by curing the adhesive. For example, it is possible to apply a uniform pressing force over a substantially entire surface of the mutually facing surfaces in a short time, for example, eliminating bubbles from the adhesive layer sandwiched between both members and making the thickness of the adhesive layer uniform. It is desired in terms of promoting

  One embodiment of the present invention includes a first member having a first surface and a first back surface opposite to the first surface, and a second member having a second surface and a second back surface opposite to the second surface. In a member joining method in which the two are joined together by an adhesive disposed between the first surface and the second surface, a first pressure zone and a second pressure zone separated from each other by an elastic sheet having airtightness are prepared. An adhesive sheet on at least one of the first surface of the first member and the second surface of the second member, and the first back surface of the first member in the first pressure zone with the elastic sheet The first member and the second member in contact with each other at a first position and a second position where the first surface and the second surface face each other, and an adhesive, Only one of the surface and the second surface is in contact And reducing the pressure of the first pressure zone and reducing the pressure of the second pressure zone, and increasing the pressure of the reduced pressure zone of the second pressure zone over the pressure of the reduced pressure zone of the first pressure zone. And the second pressure zone, the elastic sheet in contact with the first back surface of the first member is elastically deformed to move the first member, and the second member is moved against the differential pressure. 2 pressing the first surface of the first member and the second surface of the second member through the adhesive while supporting the back surface, and the adhesive between the first surface and the second surface And a curing step.

  According to another aspect of the present invention, a first member having a first surface and a first back surface opposite to the first surface, and a second member having a second surface and a second back surface opposite to the second surface. Are joined to each other by an adhesive disposed between the first surface and the second surface, the elastic sheet having airtightness, the first pressure area and the second separated from each other by the elastic sheet. A first pressure reducing unit that depressurizes the first pressure zone, a second pressure reducing unit that depressurizes the second pressure zone, and a pressure in the second pressure zone depressurized by the second pressure reducing unit. A differential pressure generating section that generates a differential pressure between the first pressure zone and the second pressure zone by increasing the pressure of the reduced first pressure zone, and is provided in the first pressure zone; The first member and the second member respectively in the first position and the second position where the second surface faces each other. A member disposed portion can be placed a timber, a member joining device comprising a.

  According to the member joining method according to an aspect of the present invention, the first and second pressure zones separated by the elastic sheet are separated from the first and second members arranged to face each other in the first pressure zone. The first member placed on the elastic sheet is moved instantaneously together with the adhesive by the differential pressure by increasing the pressure in the second pressure area more than the first pressure area after depressurizing both of the first member. Since the first surface and the second surface of the second member are pressed against each other via an adhesive, the first member and the second member can be formed in a very short time regardless of the dimensions of the first and second members. The second member can be pressed against each other with an adhesive interposed therebetween. At this time, since the elastic sheet can be elastically deformed in equilibrium with substantially the whole due to the differential pressure applied uniformly in the second pressure zone, the differential pressure applied to the elastic sheet is substantially reduced on the first surface of the first member. From the whole, it is applied as a uniform pressing force to substantially the entire second surface of the second member via the adhesive. Thus, regardless of the dimensions of the first and second members, a uniform pressing force is applied in a short time over substantially the entire first and second surfaces facing each other and the adhesive therebetween. Therefore, it is possible to promote the elimination of bubbles from the adhesive layer sandwiched between the first and second members and the uniform thickness of the adhesive layer.

  According to the member joining apparatus according to another aspect of the present invention, the first and second pressure zones separated by the elastic sheet with respect to the first and second members arranged to face each other in the first pressure zone. By reducing the pressure of both, the second pressure zone is increased more than the first pressure zone, so that the first member placed on the elastic sheet is moved instantaneously together with the adhesive by the differential pressure. The first surface of the member and the second surface of the second member can be pressed together with an adhesive. At this time, since the elastic sheet can be elastically deformed in equilibrium with substantially the whole due to the differential pressure applied uniformly in the second pressure zone, the differential pressure applied to the elastic sheet is substantially reduced on the first surface of the first member. From the whole, it is applied as a uniform pressing force to substantially the entire second surface of the second member via the adhesive. Thus, regardless of the dimensions of the first and second members, a uniform pressing force is applied in a short time over substantially the entire first and second surfaces facing each other and the adhesive therebetween. Therefore, it is possible to promote the elimination of bubbles from the adhesive layer sandwiched between the first and second members and the uniform thickness of the adhesive layer.

It is sectional drawing which shows typically the main step of the member joining method by the 1st Embodiment of this invention. It is a partial cross section perspective view which shows roughly the member joining apparatus by one Embodiment of this invention which can implement the member joining method of FIG. 1 with the member of joining object. It is sectional drawing which shows typically the main step of the member joining method by the 2nd Embodiment of this invention. It is sectional drawing which shows typically the main steps of the member joining method by the 3rd Embodiment of this invention.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Corresponding components are denoted by common reference symbols throughout the drawings.
FIG. 1 shows main steps A to G of the member joining method according to the first embodiment of the present invention. FIG. 2 shows a member joining apparatus 10 according to an embodiment of the present invention that can implement the member joining method of FIG.

  The illustrated member joining method includes a first member 12 having a first surface 12a and a first back surface 12b opposite to the first surface 12a, and a second back surface 14b opposite to the second surface 14a and the second surface 14a. Are bonded to each other by an adhesive 16 disposed between the first surface 12a and the second surface 14a, and mainly include the following steps A to G ( These correspond to FIGS. 1 (a) to 1 (g), respectively.

Step A (FIG. 1 (a)):
The adhesive 16 is disposed on at least one of the first surface 12 a of the first member 12 and the second surface 14 a of the second member 14. In the illustrated configuration, the uncured adhesive 16 is disposed in a layer having a desired thickness on substantially the entire first surface 12a of the first member 12, and the second surface 14a of the second member 14 has an adhesive on the second surface 14a. 16 is not arranged. In the illustrated configuration, each of the first member 12 and the second member 14 is a substantially rectangular flat plate member (FIG. 2) in plan view, and includes a substantially flat first surface 12a and first back surface 12b. The first surface 12a and the second surface 14a have substantially the same shape and size as each other, and the second surface 14a and the second back surface 14b have a substantially flat second surface 14a and a second back surface 14b, respectively. The shapes and dimensions of the first member 12 and the second member 14 are not particularly limited, and at least the first surface 12a and the second surface 14a have surface shapes that can be joined to each other by the adhesive 16. If it is. The adhesive 16 is disposed only on the second surface 14a of the second member 14, or is disposed on both the first surface 12a of the first member 12 and the second surface 14a of the second member 14. You can also

Step B (FIG. 1 (b)):
A first pressure zone 20 and a second pressure zone 22 are prepared which are separated from each other by an airtight elastic sheet 18. In the illustrated configuration, each of the first pressure zone 20 and the second pressure zone 22 is configured as a variable volume chamber surrounded by an elastic sheet 18 (that is, a movable wall) and a fixed wall 24. Further, in the illustrated initial state, both the first and second pressure zones 20 and 22 are open to the atmosphere. The elastic sheet 18 is a thin plate-like member that can exhibit a uniform elastic restoring force over the entire surface, and has a surface 18a and a back surface 18b opposite to each other. The elastic sheet 18 is airtightly fixed and attached to the fixed wall 24 at the outer edge region, and the inner region of the outer edge region can be displaced between the first and second pressure sections 20 and 22 while causing elastic deformation. The flow of gas between the first pressure zone 20 and the second pressure zone 22 is prevented at any position within the displacement range.

Step C (FIG. 1 (c)):
In the first pressure zone 20, the first member 12 and the second member 14 are connected to the first surface 12 a and the first surface 12 with the first back surface 12 b of the first member 12 in contact with the surface 18 a of the elastic sheet 18. It arrange | positions in each of the 1st position and 2nd position where 2 surface 14a mutually faces. In the illustrated configuration, the adhesive 16 disposed on the first surface 12a of the first member 12 in the first position has an appropriate dimension over substantially the entire second surface 14a of the second member 14 in the second position. It is arranged face to face through the gap. Note that the order of step A and steps B and C does not matter.

  In the illustrated configuration, prior to step C, a sheet support wall 26 (a part of the fixed wall 24 in the figure) that can support the elastic sheet 18 from the back surface 18b side is disposed in the second pressure zone 22 (FIG. 1B). ). In Step C, the entire first back surface 12b of the first member 12 is brought into contact with the front surface 18a of the elastic sheet 18 whose back surface 18b is supported by the sheet support wall 26, and the first member 12 is moved to the first position. To place. Therefore, in the illustrated configuration, when the first member 12 is disposed at the first position, the volume of the chamber constituting the second pressure zone 22 is substantially zero. In this configuration, the posture of the fixed wall 24 is set so that the sheet support wall 26 is disposed below the elastic sheet 18 in the direction of gravity.

Step D (FIG. 1 (d)):
Adhesive disposed on at least one of the first surface 12a of the first member 12 in the first position and the second surface 14a of the second member 14 in the second position (the first surface 12a in the illustrated configuration) 16 is in contact with only one of the first surface 12a and the second surface 14a (the first surface 12a in the illustrated configuration) and the first pressure zone 20 is depressurized to a predetermined pressure P1, The pressure zone 22 is depressurized to a predetermined pressure P2. At this stage, the adhesive 16 disposed on the first surface 12a of the first member 12 or the second surface 14a of the second member 14 (first surface 12a in the illustrated configuration) is applied to the surface of the counterpart member (in the illustrated configuration). It is required not to contact the second surface 14a) of the second member 14. Therefore, it is desirable to depressurize the second pressure zone 22 below the pressure of the first pressure zone 20 (that is, P1 ≧ P2), and is the depressurization of the first pressure zone 20 simultaneous with the depressurization of the second pressure zone 22? Or it is desirable to carry out after that.

Steps E and F (FIGS. 1 (e) and (f)):
After depressurization of the first and second pressure zones 20, 22, the pressure P2 of the depressurized second pressure zone 22 is increased to a pressure P3 (P3> P1) by increasing the pressure P1 of the depressurized first pressure zone 20 A differential pressure ΔP (ΔP = P3−P1) is generated between the first pressure zone 20 and the second pressure zone 22. Due to this differential pressure ΔP, the elastic sheet 18 in contact with the first back surface 12b of the first member 12 is elastically deformed and elastically displaced toward the first pressure zone 20 side. Then, along with the elastic displacement of the elastic sheet 18, the first member 12 is moved in the first pressure zone 20 by the differential pressure ΔP, and the second back surface 14b of the second member 14 against the differential pressure ΔP. The first surface 12 a of the first member 12 and the second surface 14 a of the second member 14 are pressed against each other via the adhesive 16 while supporting the first member 12.

  In the illustrated configuration, a member support wall 28 (a part of the fixed wall 24 in the figure) that can support the second back surface 14b of the second member 14 against the differential pressure ΔP in the first pressure zone 20 prior to step E. Is arranged (FIG. 1B). Then, in step E, within the first pressure zone 20 depressurized to the pressure P1, the second member 14 at the second position is brought closer to the first member 12 at the first position, and the first member is moved. 12 and the second member 14 are overlapped with each other via the adhesive 16, and the second back surface 14 b is moved away from the member support wall 28. In this state, the differential pressure ΔP is generated as described above, and the first member 12 and the second member 14 are bonded together with the adhesive 16 to the member support wall while the elastic sheet 18 is elastically deformed by the generated differential pressure ΔP. The first member 12 and the second member 14 that are overlapped by sandwiching the adhesive 16 are pressed against the member support wall 28 while being moved instantaneously toward the member 28 (step F).

Step G (FIG. 1 (g)):
After the first surface 12a of the first member 12 and the second surface 14a of the second member 14 are pressed against each other via the adhesive 16, the adhesive 16 is interposed between the first surface 12a and the second surface 14a. And the first member 12 and the second member 14 are bonded to each other. In the illustrated configuration, the first member 12 and the second member 14 having the adhesive 16 sandwiched between the first surface 12a and the second surface 14a are taken out from the first pressure zone 20 and the type of the adhesive 16 is taken. The adhesive 16 is cured by a method according to the above. The first member 12 and the second member 14 having the adhesive 16 sandwiched between the first surface 12a and the second surface 14a are not taken out from the first pressure region 20 and are removed from the first pressure region 20. The adhesive 16 can also be cured therein.

  In the above-described member joining method (steps A to G), the first and second members 12 and 14 disposed facing each other in the first pressure zone are separated by the elastic sheet 18. By depressurizing both of the pressure zones 20 and 22, the second pressure zone 22 is increased more than the first pressure zone 20, whereby the first member 12 placed on the elastic sheet 18 is bonded to the adhesive by the differential pressure ΔP. 16, the first surface 12 a of the first member 12 and the second surface 14 a of the second member 14 are pressed against each other via the adhesive 16. Regardless of the dimensions of the members 12 and 14, the first member 12 and the second member 14 can be pressed against each other with the adhesive 16 sandwiched therebetween in a very short time. In addition, at this time, the elastic sheet 18 can be elastically deformed in an almost balanced manner by the differential pressure ΔP that is uniformly applied to the back surface 18b in the second pressure zone 22, so that the differential pressure ΔP applied to the elastic sheet 18 is A uniform pressing force is applied from substantially the entire first surface 12 a of the first member 12 to the entire second surface 14 a of the second member 14 via the adhesive 16. Thus, according to the member joining method, the first and second surfaces 12a, 14a facing each other and the adhesive 16 between them are substantially omitted regardless of the dimensions of the first and second members 12, 14. Since uniform pressing force can be applied in a short time over the whole, it is possible to eliminate bubbles from the layer of the adhesive 16 sandwiched between the first and second members 12 and 14 and to remove the adhesive 16. The uniform thickness of the layer can be promoted.

  In the illustrated configuration, when the first member 12 is disposed at the first position in the first pressure zone 20 (step C), the first surface 12a of the elastic sheet 18 having the back surface 18b supported by the sheet support wall 26 is Since the first back surface 12b of the first member 12 is brought into contact with the first member 12, the first member 12 can be stably disposed at the first position against an external force such as gravity even on the elastic sheet 18. The elastic sheet 18 is also supported by the sheet support wall 26 even when the second pressure zone 22 is reduced to a pressure lower than that of the first pressure zone 20 after the first member 12 is disposed at the first position. Therefore, it is possible to prevent the first member 12 from being displaced on the elastic sheet 18. As a result, while maintaining the relative positional relationship when the first and second members 12 and 14 are arranged at the first and second positions, the first surface 12a of the first member 12 is The second surface 14 a of the second member 14 can be pressed against each other via the adhesive 16.

  Although not shown, when the first member 12 is disposed at the first position in the first pressure zone 20, the first member is not attached to the front surface 18a of the elastic sheet 18 without supporting the elastic sheet 18 on the back surface 18b side. The 12 first back surfaces 12b may be brought into contact with each other. In this configuration, in the initial state in which both the first and second pressure zones 20 and 22 are open to the atmosphere, elastic deformation by an external force such as gravity of the elastic sheet 18 on which the first member 12 is placed is allowed, The position of the first member 12 on the elastic sheet 18 becomes unstable. However, in applications where the relative displacement of the first member 12 and the second member 14 can be allowed to some extent, the elastic sheet 18 is placed on the back surface 18b side when the first member 12 is placed at the first position. It does not have to be supported. Further, the elastic sheet 18 is displaced toward the second pressure section 22 by the pressure reduction (step E) of the first and second pressure sections 20 and 22 so that the back surface 18b can be brought into contact with the sheet support wall 26, for example. If it does so, position shift of the 1st member 12 on elastic sheet 18 can be controlled to some extent.

  In the illustrated configuration, when the first surface 12a of the first member 12 and the second surface 14a of the second member 14 are pressed against each other via the adhesive 16 due to the differential pressure ΔP, first, the first pressure zone that has been depressurized. 20, the second back surface 14 b of the second member 14 is separated from the member support wall 28, and the second member 14 is superimposed on the first member 12 in the first position via the adhesive 16. Yes. At this time, since the first pressure zone 20 is depressurized from the atmospheric pressure to the pressure P1, the air contained in the adhesive 16 is removed to some extent, and the first pressure zone 20 reaches the interface between the adhesive 16 and the second member 14. Air intake is prevented. Thereafter, the first member 12 and the second member 14 are instantaneously moved toward the member support wall 28 together with the adhesive 16 by the differential pressure ΔP, and are pressed against the member support wall 28. It is possible to prevent a relative displacement between the first member 12 and the second member 14 while the first member 12 is moved by the differential pressure ΔP in 20. As a result, while maintaining the relative positional relationship when the first and second members 12 and 14 are arranged at the first and second positions, the first surface 12a of the first member 12 is The second surface 14 a of the second member 14 can be pressed against each other via the adhesive 16.

The adhesive 16 used in the above-described member bonding method has an adhesive force that holds the first surface 12a of the first member 12 and the second surface 12a of the second member 14 fixed to each other by being cured. For example, an adhesive such as a thermosetting type, an ultraviolet curable type, a moisture curable type, or a reactive curable type can be used. The viscosity of the adhesive 16 is not particularly limited, and can be, for example, 1 cP or more and less than 10000 cP at room temperature (22 ° C.). For example, it is an ultraviolet curable type, and the properties at room temperature (22 ° C.) are as follows: tensile modulus of elasticity of 1.0 × 10 ⁸ Pa or more and less than 5.0 × 10 ⁸ Pa, elongation at break of 5% or more and less than 50% The adhesive 16 having a viscosity of 100 cP or more and less than 10000 cP can be used. The adhesive 16 can be applied to the first surface 12a and the second member of the first member 12 by various methods such as gravure coating, spin coating, dispenser coating, and other coating methods, screen printing, inkjet printing, and the like. 14 at least one of the second surfaces 14a.

  The elastic sheet 18 used in the above-described member joining method can be formed from a rubber sheet having characteristics such as appropriate hardness, tensile strength, elongation, and tear strength. The properties of the rubber sheet capable of forming the elastic sheet 18 are, for example, a hardness (Shore hardness A) of 30 to less than 95, a tensile strength of 1 to 60 MPa, an elongation of 100 to 990%, and a tear strength of 7 N / mm or more and less than 137 N / mm. Examples of the rubber sheet material that can form the elastic sheet 18 include natural rubber, chloroprene rubber, nitrile rubber, chlorosulfonated polyethylene, butyl rubber, ethylene / propylene rubber, silicone rubber, fluorine rubber, and urethane rubber. Can do.

  The first and second members 12 and 14 as an example to which the above-described member bonding method can be applied include, for example, a pair of substrates constituting a liquid crystal display device, an organic EL element, and a support plate that supports the element Can be a combination. In the manufacturing process of the liquid crystal display device, for example, an adhesive disposed along the outer periphery of the surface of one substrate is used as the first member 12 and the adhesive 16, and the other substrate is used as the second member 14. After the liquid crystal material is disposed in the region surrounded by the adhesive of the substrate, the above-described member joining method can be performed to join the pair of substrates together with the adhesive. Further, in the manufacturing process of the organic EL display device, for example, a glass plate that supports the organic EL element by using the first member 12 and the adhesive 16 as the first member 12 and the adhesive 16 disposed on the entire surface of the sheet-like organic EL element. As the second member 14, the above-described member bonding method can be performed to bond the organic EL element, the glass plate, and the adhesive together. An organic EL element is sent to a required process in the state supported by the glass plate, and a glass plate is removed from an organic EL element after completion | finish of a process.

  For example, as in the manufacturing process of the organic EL display device, the first member 12 and the second member 14 are bonded to each other by the adhesive 16 and then the first member 12 and the second member 14 are peeled from each other. In application, the above-described member joining method may include the first surface 12a on either the first surface 12a or the second surface 14a before the steps E to F pressing the first surface 12a and the second surface 14a together. Alternatively, a release layer interposed between the second surface 14a and the adhesive 16 can be formed. For example, as shown in FIG. 1H, the release layer 30 can be formed on the entire second surface 14a of the second member 14 where the adhesive 16 is not disposed in Step A described above.

  For example, when the second member 14 is a transparent glass plate and the adhesive 16 is a light (ultraviolet ray or the like) curable adhesive, the light-to-heat conversion layer containing a light absorber and a thermally decomposable resin as the release layer 30. Can be adopted. In this configuration, when the release layer 30 formed of the photothermal conversion layer is irradiated with laser light or the like on the first and second members 12 and 14 joined by the above-described member joining method, the radiant energy such as laser light is emitted. It is absorbed by the absorbent and converted to thermal energy, and the thermal energy rapidly raises the temperature of the release layer 30 to thermally decompose the thermally decomposable resin. The gas generated by the thermal decomposition forms a void layer in the release layer 30, so that the release layer 30 is divided into two parts and the first and second members 12 and 14 are separated from each other.

  A specific configuration of the member bonding apparatus 10 capable of performing the above-described member bonding method will be described with reference to FIG. The illustrated member joining apparatus 10 includes a first member 12 having a first surface 12a and a first back surface 12b opposite to the first surface 12a, and a second back surface opposite to the second surface 14a and the second surface 14a. The second member 14 having 14b is joined to each other by an adhesive 16 disposed between the first surface 12a and the second surface 14a.

  The member joining apparatus 10 includes an elastic sheet 18 having airtightness, a first pressure zone 20 and a second pressure zone 22 separated from each other by the elastic sheet 18, and a first pressure reducing unit 32 that depressurizes the first pressure zone 20. The pressure in the second pressure section 22 that decompresses the second pressure section 22 and the pressure in the second pressure section 22 decompressed by the second decompression section 34 are higher than the pressure in the first pressure section 20 decompressed by the first decompression section 32. A differential pressure generating part 36 for generating a differential pressure ΔP (FIG. 1) between the first pressure zone 20 and the second pressure zone 22 by increasing, and provided in the first pressure zone 20, the first surface 12 a The first member 12 and the second member 14 can be disposed at the first position and the second position where the second surface 14a faces each other.

  In the illustrated configuration, the member joining apparatus 10 further includes a housing 40 that defines a first pressure area 20 and a second pressure area 22 on the front surface 18a side and the back surface 18b side of the elastic sheet 18, respectively. The housing 40 includes a flat base portion 42 and a hollow box-like lid portion 44 that is open at one end, and can have, for example, a substantially rectangular parallelepiped outer shape as a whole. The first and second pressure zones 20 and 22 are surrounded by fixing the lid portion 44 to the base portion 42 using a plurality of bolts 46 in a state where the open end of the lid portion 44 is in contact with the base portion 42. A fixed wall 24 is formed. Thus, the first pressure zone 20 and the second pressure zone 22 are formed as a variable volume chamber surrounded by the elastic sheet 18 (ie, the movable wall) and the housing 40 (ie, the fixed wall 24). The base portion 42 and a part of the lid portion 44 that faces the base portion 42 substantially in parallel constitute the sheet support wall 26 and the member support wall 28 described above.

  The elastic sheet 18 has a substantially rectangular outer shape in plan view, and an outer edge region 18c is sandwiched between one end of the lid portion 44 and the base portion 42 and is fixed in an airtight manner. The elastic sheet 18 is placed flat on the base 42 (sheet support wall 26) in an initial state where no elastic deformation occurs, and the base 42 (sheet support wall 26) and the member support wall 28 of the lid 44 are arranged. It arrange | positions substantially parallel with respect to both. The elastic sheet 18 can be displaced between the first and second pressure zones 20 and 22 while the inner region 18d of the outer edge region 18c is elastically deformed, and at any position within the displacement range. The flow of gas between the zone 20 and the second pressure zone 22 is blocked.

  The first decompression unit 32 can be constituted by, for example, a vacuum pump that communicates with the first pressure zone 20 via a vent hole 48 provided in the lid 44. The second decompression unit 34 can be constituted by, for example, a vacuum pump that communicates with the second pressure zone 22 through a vent hole 50 provided in the base 42. The differential pressure generating unit 36 can be constituted by, for example, an open valve installed between the second pressure reducing unit 34 and the vent hole 50 of the base 42. The first pressure reducing unit (vacuum pump) 32, the second pressure reducing unit (vacuum pump) 34, and the differential pressure generating unit (open valve) 36 can operate independently of each other.

  In the illustrated configuration, the member arrangement portion 38 includes a plurality (four in the figure) of piston / cylinder devices 52 installed on the lid portion 44. Each piston / cylinder device 52 includes a piston rod 54 disposed substantially parallel to both the base 42 (seat support wall 26) and the member support wall 28 of the lid 44 within the first pressure zone 20. . Each piston rod 54 can reciprocate linearly between an operating position extended over a predetermined length in the first pressure zone 20 and a non-operating position drawn from the operating position. The piston / cylinder devices 52 are arranged such that each piston rod 54 is arranged at an equal distance from the base 42 (seat support wall 26) in the operating position, and the second piston rod 54 is placed on the piston rod 54 in the operating position on the second position. The member 14 can be detachably mounted in a substantially parallel posture with respect to the base 42.

A member joining method (steps A to G) performed using the member joining apparatus 10 will be described below.
First member 12 having adhesive 16 disposed on first surface 12a and second member 14 having no adhesive 16 disposed on second surface 14a are prepared (step A). In the initial state where both the first and second pressure zones 20 and 22 are open to the atmosphere, the member joining apparatus 10 is placed on the stationary surface with the base portion 42 of the housing 40 facing downward in the direction of gravity (step B). ). In the initial state, the back surface 18 b of the elastic sheet 18 is supported on the base portion 42 (sheet support wall 26) of the housing 40.

  In the member joining apparatus 10 in the initial state, the plurality of piston / cylinder apparatuses 52 of the member arranging portion 38 are operated, and the respective piston rods 54 are arranged at the operation positions. The first member 12 is placed on the elastic sheet 18 by bringing the first back surface 12 b of the first member 12 having the adhesive 16 disposed on the first surface 12 a into contact with the surface 18 a of the elastic sheet 18. Moreover, the 2nd surface 14a of the 2nd member 14 is made to contact the some piston rod 54 in an action position, and the 2nd member 14 is set | placed on these piston rods 54. FIG. At this time, for example, the operator manually arranges the first member 12 and the second member 14 at the first position and the second position where the first surface 12a and the second surface 14a face each other. (Step C). In this state, the adhesive 16 disposed on the first surface 12a of the first member 12 and the second surface 14a of the second member 14 are separated from each other by an appropriate distance. Further, the second back surface 14 b of the second member 14 is separated from the member support wall 28 of the lid portion 44 of the housing 40 by an appropriate distance.

  Next, the first pressure reducing unit (vacuum pump) 32 is operated to reduce the first pressure zone 20 to a predetermined pressure P1, and the second pressure reducing unit (vacuum pump) 34 is operated to set the second pressure zone 22 to The pressure is reduced to a predetermined pressure P2 (step D). In the decompressed first pressure zone 20, the plurality of piston / cylinder devices 52 of the member arranging portion 38 are operated, and the respective piston rods 54 are arranged at the non-operating positions. Thereby, the second member 14 is dropped onto the adhesive 16 on the first member 12 by its own weight, and the first member 12 and the second member 14 are overlapped with each other via the adhesive 16. The second back surface 14b is separated from the member support wall 28 (step E).

  Next, the second pressure zone 22 is opened to the atmosphere by operating the differential pressure generating part (open valve) 36, and the pressure P2 in the second pressure zone 22 is increased more than the pressure P1 in the first pressure zone 20, thereby A differential pressure ΔP is generated between the pressure zone 20 and the second pressure zone 22. While the elastic sheet 18 is elastically displaced toward the first pressure zone 20 by the differential pressure ΔP, the first member 12 and the second member 14 are instantaneously moved toward the member support wall 28 together with the adhesive 16. The first member 12 and the second member 14 overlapped with the adhesive 16 are pressed against the member support wall 28, whereby the first surface 12a of the first member 12 and the second surface of the second member 14 are The two surfaces 14a are pressed against each other through the adhesive 16 (Step F). Thereafter, the first member 12 and the second member 14 having the adhesive 16 sandwiched between the first surface 12a and the second surface 14a are taken out from the first pressure section 20, and the first surface 12a and the second surface 14 are removed. The adhesive 16 is cured between the surface 14a and the first member 12 and the second member 14 are joined to each other (Step G).

  In the above-described member joining apparatus 10, as the member arranging portion 38, a plurality of piston rods 54 are moved between an operating position that supports the second member 14 and a non-operating position that does not support the second member 14. A piston / cylinder device 52 is employed. The configuration of the member arrangement portion 38 is not limited to this, and various appropriate means such as electrostatic adsorption, vacuum adsorption, and clamping can be employed.

  In the above-described member joining method, when the first surface 12a of the first member 12 and the second surface 14a of the second member 14 are pressed against each other via the adhesive 16 (steps E and F), the first pressure is reduced. After the first member 12 and the second member 14 are overlapped with each other via the adhesive 16 in the one pressure zone 20, the first and second members 12, 14 are integrated together by the differential pressure ΔP. The first and second members 12 and 14 that are overlapped with the adhesive 16 sandwiched therebetween are pressed against the member support wall 28. On the other hand, the first member 12 and the second member 14 are not overlapped with each other via the adhesive 16 before the differential pressure ΔP is generated, and only the first member 12 is moved by the differential pressure ΔP. In addition, the first member 12 may be pressed against the second member 14 having the second back surface 14b supported on the back surface of the member support wall 28 via the adhesive 16 in advance.

  FIG. 3 shows main steps of the member joining method according to the second embodiment of the present invention in which only the first member 12 is moved by the differential pressure ΔP. The member joining method according to the second embodiment is different except that the method of pressing the first surface 12a of the first member 12 and the second surface 14a of the second member 14 through the adhesive 16 is different. It has the same configuration as the member joining method described with reference to FIGS. Accordingly, corresponding steps and components are denoted by the same reference numerals, and description thereof is omitted as appropriate.

Step A (FIG. 3 (a)):
The uncured adhesive 16 is disposed in a layer shape having a desired thickness over substantially the entire first surface 12a of the first member 12. The adhesive 16 is not disposed on the second surface 14 a of the second member 14.

Steps B and C (FIG. 3 (b)):
A first pressure zone 20 and a second pressure zone 22 are prepared which are separated from each other by an airtight elastic sheet 18. As an initial state, both the first and second pressure zones 20 and 22 are opened to the atmosphere, and the back surface 18 b of the elastic sheet 18 is brought into contact with the sheet support wall 26. In the first pressure zone 20, the first member 12 is placed on the elastic sheet 18 by bringing the first back surface 12 b of the first member 12 into contact with the front surface 18 a of the elastic sheet 18. In addition, the second back surface 14b of the second member 14 is brought into contact with the member support wall 28 by using, for example, vacuum suction or electrostatic suction, and the second member 14 is back-supported by the member support wall 28. At this time, the adhesive 16 disposed on the first surface 12a of the first member 12 and the second surface 14a of the second member 14 are separated from each other by an appropriate distance, so that the first and second The members 12 and 14 are disposed at the first position and the second position where the first surface 12a and the second surface 14a face each other.

Step D (FIG. 3C):
The first pressure zone 20 is reduced to a predetermined pressure P1, and the second pressure zone 22 is reduced to a predetermined pressure P2.

Steps E and F (FIG. 3 (d)):
After depressurization of the first and second pressure zones 20, 22, the pressure P2 of the depressurized second pressure zone 22 is increased to a pressure P3 (P3> P1) by increasing the pressure P1 of the depressurized first pressure zone 20 A differential pressure ΔP (ΔP = P3−P1) is generated between the first pressure zone 20 and the second pressure zone 22. The generation of the differential pressure ΔP is such that the first member 12 and the second member 14 do not overlap with each other via the adhesive 16, and the second back surface 14b of the second member 14 contacts the member support wall 28. Done in state. While the elastic sheet 18 is elastically displaced toward the first pressure zone 20 by the generated differential pressure ΔP, the first member 12 is instantaneously moved together with the adhesive 16 toward the second member 14, and the adhesive 16 The first member 12 is pressed against the second member 14 via the first member 12, whereby the first surface 12 a of the first member 12 and the second surface 14 a of the second member 14 are mutually bonded via the adhesive 16. Press.

Step G (FIG. 3 (e)):
After the first surface 12a of the first member 12 and the second surface 14a of the second member 14 are pressed against each other via the adhesive 16, the adhesive 16 is interposed between the first surface 12a and the second surface 14a. And the first member 12 and the second member 14 are bonded to each other.

  The member joining method according to the second embodiment described above also provides the same effects as the member joining method according to the first embodiment.

  FIG. 4 shows a member according to the third embodiment of the present invention in the case where the adhesive 16 is arranged on the second surface 14a of the second member 14 instead of the first surface 12a of the first member 12 as a preparatory work. The main steps of the joining method are shown. The member joining method according to the third embodiment is the same as the member joining method described with reference to FIGS. 1 and 2 except that the adhesive 16 is disposed on the second surface 14a of the second member 14. It has a configuration. Accordingly, corresponding steps and components are denoted by the same reference numerals, and description thereof is omitted as appropriate.

Step A (FIG. 4 (a)):
An uncured adhesive 16 is disposed in a layer shape having a desired thickness over substantially the entire second surface 14a of the second member 14. The adhesive 16 is not disposed on the first surface 12 a of the first member 12.

Steps B and C (FIG. 4 (b)):
A first pressure zone 20 and a second pressure zone 22 are prepared which are separated from each other by an airtight elastic sheet 18. As an initial state, both the first and second pressure zones 20 and 22 are opened to the atmosphere, and the back surface 18 b of the elastic sheet 18 is brought into contact with the sheet support wall 26. In this configuration, the posture of the fixed wall 24 is set so that the sheet support wall 26 is disposed above the elastic sheet 18 in the gravitational direction. In the first pressure zone 20, for example, using vacuum suction or electrostatic suction, the first back surface 12 b of the first member 12 is brought into contact with the front surface 18 a of the elastic sheet 18, and the first member 12 is brought into contact with the elastic sheet 18. Support. In addition, the second back surface 14 b of the second member 14 is brought into contact with the member support wall 28, and the second member 14 is placed on the member support wall 28. At this time, the adhesive 16 disposed on the second surface 14a of the second member 14 and the first surface 12a of the first member 12 are separated from each other by an appropriate distance so that the first and second The members 12 and 14 are disposed at the first position and the second position where the first surface 12a and the second surface 14a face each other.

Step D (FIG. 4C):
The first pressure zone 20 is reduced to a predetermined pressure P1, and the second pressure zone 22 is reduced to a predetermined pressure P2.

Steps E and F (FIG. 4 (d)):
After depressurization of the first and second pressure zones 20, 22, the pressure P2 of the depressurized second pressure zone 22 is increased to a pressure P3 (P3> P1) by increasing the pressure P1 of the depressurized first pressure zone 20 A differential pressure ΔP (ΔP = P3−P1) is generated between the first pressure zone 20 and the second pressure zone 22. The generation of the differential pressure ΔP is such that the first member 12 and the second member 14 do not overlap with each other via the adhesive 16, and the second back surface 14b of the second member 14 contacts the member support wall 28. Done in state. While the elastic sheet 18 is elastically displaced toward the first pressure zone 20 by the generated differential pressure ΔP, the first member 12 is instantaneously moved toward the second member 14, and the first is passed through the adhesive 16. The first member 12 is pressed against the second member 14, thereby pressing the first surface 12 a of the first member 12 and the second surface 14 a of the second member 14 through the adhesive 16.

Step G (FIG. 4 (e)):
After the first surface 12a of the first member 12 and the second surface 14a of the second member 14 are pressed against each other via the adhesive 16, the adhesive 16 is interposed between the first surface 12a and the second surface 14a. And the first member 12 and the second member 14 are bonded to each other.

  The member joining method according to the third embodiment described above also provides the same effects as the member joining method according to the first embodiment.

DESCRIPTION OF SYMBOLS 10 Member joining apparatus 12 1st member 14 2nd member 16 Adhesive 18 Elastic sheet 20 1st pressure area 22 2nd pressure area 26 Sheet support wall 28 Member support wall 30 Peeling layer 32 1st pressure reduction part (vacuum pump)
34 Second decompression unit (vacuum pump)
36 Differential pressure generator (open valve)
38 Member arrangement part 40 Case

Claims (7)

A first member having a first surface and a first back surface opposite to the first surface; and a second member having a second surface and a second back surface opposite to the second surface. In a member joining method for joining together by an adhesive disposed between a surface and the second surface,
Providing a first pressure zone and a second pressure zone separated from each other by an airtight elastic sheet;
Disposing the adhesive on at least one of the first surface of the first member and the second surface of the second member;
In the first pressure zone, the first member and the second member are connected to the first surface and the second surface in a state where the first back surface of the first member is in contact with the elastic sheet. Placing each of the first position and the second position facing each other;
Depressurizing the first pressure zone and depressurizing the second pressure zone in a state where the adhesive is in contact with only one of the first surface and the second surface;
The reduced pressure of the second pressure zone is increased over the reduced pressure of the first pressure zone, and the differential pressure between the first pressure zone and the second pressure zone causes the pressure of the first member to be The first sheet is moved by elastically deforming the elastic sheet in contact with the first back surface, and the first back surface is supported against the differential pressure while supporting the second back surface of the second member. Pressing the first surface of the member and the second surface of the second member together through the adhesive;
Curing the adhesive between the first surface and the second surface;
A member joining method including: Further comprising disposing a member support wall in the first pressure zone that can support the second back surface of the second member against the differential pressure;
The step of pressing the first surface and the second surface against each other includes: the first member and the second member being overlapped with each other via the adhesive; and the second back surface from the member support wall The step of generating the differential pressure in a separated state, and moving the first member and the second member toward the member support wall while elastically deforming the elastic sheet by the generated differential pressure And pressing the first member and the second member overlapped with the adhesive sandwiched therebetween, against the member support wall,
The member joining method according to claim 1. Further comprising disposing a member support wall in the first pressure zone that can support the second back surface of the second member against the differential pressure;
The step of pressing the first surface and the second surface against each other is such that the first member and the second member do not overlap each other via the adhesive, and the second back surface is the member support wall. The step of generating the differential pressure in a state where the first member is in contact with the first member and moving the first member toward the second member while elastically deforming the elastic sheet by the generated differential pressure. Pressing one member against the second member through the adhesive,
The member joining method according to claim 1. Disposing a sheet support wall capable of supporting the elastic sheet in the second pressure zone;
The step of disposing the first member at the first position includes a step of bringing the first back surface into contact with the surface of the elastic sheet whose back surface is supported by the sheet support wall.
The member joining method according to any one of claims 1 to 3.   Prior to the step of pressing the first surface and the second surface against each other, either the first surface or the second surface is interposed between the first surface or the second surface and the adhesive. The member joining method according to claim 1, further comprising a step of forming an intervening release layer. A first member having a first surface and a first back surface opposite to the first surface; and a second member having a second surface and a second back surface opposite to the second surface. In a member joining apparatus for joining together by an adhesive disposed between a surface and the second surface,
An airtight elastic sheet;
A first pressure zone and a second pressure zone separated from each other by the elastic sheet;
A first pressure-reducing part for depressurizing the first pressure zone;
A second pressure reducing unit for reducing the pressure of the second pressure zone;
The first pressure zone, the second pressure zone, and the pressure of the second pressure zone reduced by the second pressure reduction unit are increased more than the pressure of the first pressure zone reduced by the first pressure reduction unit. A differential pressure generator that generates a differential pressure between
A member disposition portion provided in the first pressure zone and capable of disposing the first member and the second member at each of a first position and a second position where the first surface and the second surface face each other; ,
A member joining apparatus comprising:   The member joining apparatus according to claim 6, further comprising a housing that defines the first pressure area and the second pressure area on a front surface side and a back surface side of the elastic sheet, respectively.

Images