JP2014024309A - Vacuum and compression film sticking device, and vacuum and compression film sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and method for vacuum and compression sticking a film to a plurality of products to be processed at a time, with reduced amount of downward sagging of the heated and softened film and with reduced wrinkles of the film.SOLUTION: The vacuum and compression film sticking device includes: 1) an upper frame 17 fixed to a clamp plate 16 for the upper frame, 2) a heating lamp 23 arranged on the upper frame, 3) an upper guide plate having a plurality of window holes at a lower end of the upper frame, 4) a lower receiving plate for holding a film F, 5) table plate 8 for lower placement, 6) a first cylinder for pressing a product to be processed against the film, 7) a second cylinder for making airtight contact between the lower end of the upper frame and the upper end of a lower frame, 8) vacuum means for vacuum degassing the inside of an upper chamber and a lower chamber, and 9) high pressure means for applying high pressure to the inside of the upper chamber.

Description

Various films such as a sealing film, a functional film, a transparent decorative film, and a reflective film can be bonded on the upper surface of a plurality of workpieces so that the thickness is uniform without wrinkling. The present invention relates to a sticking apparatus and a vacuum / pressure film sticking method.

  Conventionally, when a functional film is pasted on the upper surface of a workpiece, the film is heated and softened with the outer periphery of the film held horizontally between the upper and lower jigs, and one workpiece is raised. The film was pressed against the film and pressed from above to attach the film to the upper surface of the workpiece. See FIGS. 22 (a) and (b).

  However, since the entire film is heated and softened when the outer periphery of the film is held horizontally between annular upper and lower jigs and the film is heated, it is placed in a state where it is greatly slackened downward due to its own weight. , Press the work piece against the film, vacuum the lower part of the film, and pressurize the upper part of the film with high pressure, so that the film is wrinkled, the film thickness is uneven, and the pattern bonding position is It was not stable.

  As shown in FIGS. 23 (a) and 23 (b), in order to avoid the film from sagging downward due to its own weight, the film is once adsorbed on the lower surface of the heater and heated to hold the outer periphery of the film. Although the upper and lower jigs are lowered onto the workpiece plate and the film is attached to the film under vacuum and high pressure, if the film surface is adsorbed to a heater, the film surface will become sticky and contact stains will occur. Is not preferable.

Japanese Patent No. 3924760 Patent No. 3924761

  The present invention heats and softens only the film surface necessary for the pasting process when heating the film from above, maintains the strength of the surrounding film by reflecting the irradiation heat to the remaining film, and heat softens By reducing the amount of the film that sags downward due to its own weight as much as possible, wrinkles of the film adhered while removing air bubbles between the film and the work piece in a vacuum without causing any traces of adsorption or dirt. In addition, the film can be applied to a plurality of workpieces at the same time with a uniform film thickness, and the film can be vacuum-pressurized and pressure-bonded, and the film can be reliably positioned on the workpiece. It is an object of the present invention to provide a vacuum / pressure film sticking apparatus and a vacuum / pressure film sticking method.

(1) A vacuum / pressure pasting apparatus according to the present invention comprises:
A vacuum and pressure application device for attaching a film to the upper surface of a plurality of workpieces, the vacuum and pressure application device,
1) an upper frame that is airtightly attached to the lower surface of the upper frame fixing plate;
2) a heating lamp disposed inside and above the upper frame,
3) An upper guide plate which is fixed to the lower end of the upper frame and has a plurality of window holes necessary for bonding the films to the upper surfaces of the plurality of workpieces, the upper fixed frame and the upper frame An upper guide plate that defines an upper chamber by the upper guide plate;
4) a lower frame that is airtightly disposed on the upper surface of the lower frame fixing plate;
5) A plurality of window holes corresponding to the window holes of the upper guide plate, which are airtightly mounted on the upper end portion of the lower frame, place a softable film thereon, and sandwich the softable film with the upper guide plate. A lower receiving plate that defines a lower chamber by a lower frame fixing plate, a lower frame, and a lower receiving plate;
6) A placing plate for placing the work piece below the receiving plate corresponding to the window hole of the receiving plate;
7) a first cylinder that presses the workpiece against the film with the film sandwiched between the lower backing plate and the upper guide plate;
8) A second cylinder that moves the upper chamber or the lower chamber so that the upper and lower chambers are positioned above and below the film, and the lower end of the upper frame and the upper end of the lower frame are in airtight contact with each other;
9) vacuum means for vacuum degassing the upper chamber and the lower chamber;
10) High-pressure means for setting the inside of the upper chamber at a high pressure.

Below, the preferable aspect of the vacuum and pressure bonding apparatus which concerns on this invention is described.
(2) The vacuum / heating unit according to (1), wherein the upper frame fixing plate is fixed to an upper portion of a support rod extending upward from the base, and the second cylinder is disposed on the upper frame fixing plate. Pressure pasting device.
(3) The top plate is fixed to the upper part of the support rod that extends upward from the base, the second cylinder is disposed on the top plate, and the second cylinder moves the upper frame body fixing plate up and down with respect to the top plate. The vacuum / pressure pasting apparatus according to (1), which is moved.
(4) The upper frame comprises an inner upper frame that is airtightly attached to the lower surface of the upper frame fixing plate and an outer upper sliding frame that slides airtightly on the outer peripheral surface of the inner upper frame, The upper guide plate is fixed to the lower end of the outer upper sliding frame, and the second cylinder slides the outer upper sliding frame on the outer peripheral surface of the inner upper frame in an airtight manner, thereby The vacuum / pressure pasting apparatus according to (3), wherein the portion and the lower end portion of the upper chamber are brought into airtight contact with or separated from each other.

(5) The heat insulating mask plate is mounted on the inner side of the upper frame and above the upper guide plate, and is provided corresponding to the window hole of the guide plate. The vacuum / pressure pasting apparatus according to any one of (1) to (4).
(6) The work piece placement table is disposed on the work piece placement plate, and the work piece is placed on the work piece placement table. Pressure pasting device.

(7) When the workpiece is placed on the workpiece mounting plate upper surface or the workpiece mounting table upper surface, the workpiece and the workpiece mounting plate upper surface or the workpiece mounting table upper surface The vacuum / pressure pasting apparatus according to (6), which has a shape in which a hollow space is formed between the two chambers, and the high pressure means sets the hollow space to a high pressure when the inside of the upper chamber is pressurized by a high pressure means.
(8) The vacuum / pressure pasting apparatus according to any one of (1) to (7), wherein a heater is provided on the workpiece plate.
(9) Packings are respectively provided on the surfaces of the lower plate that face the upper guide plate around the plurality of window holes, and a plurality of films are respectively provided on the window holes of the lower plate and slightly packed around the window hole h1. The vacuum / pressure pasting apparatus according to any one of (1) to (8), wherein the vacuum / pressure pasting apparatus is disposed beyond and affixes a plurality of films to a plurality of workpieces.

Furthermore, the present invention provides a method for vacuum-pressurizing and pasting a film on a workpiece, the vacuum-pressurizing pasting method,
1) The upper guide is sandwiched between an upper guide plate having a plurality of window holes of a size required for attachment and a lower plate having a plurality of window holes corresponding to the plurality of window holes. An upper chamber including a plate and a lower chamber including the lower receiving plate are hermetically positioned above and below the film;
2) exhausting the upper and lower chambers;
3) heating and softening the film located in the window hole of the lower plate and the window hole of the upper guide plate;
4) vacuuming the upper and lower chambers;
5) a step of pressing a plurality of workpieces against a heat-softening film located in each window hole;
6) A process of adhering a film softened by heating and softening the upper chamber to a plurality of workpieces while evacuating the lower chamber;
7) stopping heating, breaking the vacuum, and separating the upper and lower chambers;
8) A step of obtaining a workpiece coated with a film.

According to the present invention, the film is sandwiched between the upper guide plate and the lower receiving plate, and the upper and lower chambers are formed on the upper and lower sides of the film in this state, and the irradiation heat from the heating lamp is irradiated only through the window hole of the upper guide plate. Then, while softening only the parts necessary for film sticking and maintaining the strength of the surrounding film, the amount of heat softened film by the backing plate is controlled appropriately by its own weight, and in vacuum Bubbles can be removed, sagging can be reduced, and a film can be stuck on the workpiece to a uniform thickness.
Further, according to the present invention, the film can be reliably positioned on the work piece without being attracted or stained.

1 shows a workpiece setting step 1 of a first embodiment of a vacuum / pressure film pasting apparatus according to the present invention. The workpiece slide transfer process 2 of the 1st embodiment of the vacuum and pressurization film sticking apparatus which concerns on this invention is shown. The upper and lower chamber contact | abutting and film heating process 3 of the 1st embodiment of the vacuum / pressurizing film sticking apparatus which concerns on this invention are shown. Process 4 is shown in which the workpiece is pressed against the film in the vacuum of the first embodiment of the vacuum / pressurized film sticking apparatus according to the present invention. The film heating and pressure bonding process 5 of the first embodiment of the vacuum / pressure film bonding apparatus according to the present invention is shown. The vacuum breaking / upper / lower chamber separation step 6 of the first embodiment of the vacuum / pressure film pasting apparatus according to the present invention is shown. The workpiece taking-out process 7 of the 1st embodiment of the vacuum-pressurizing film sticking apparatus which concerns on this invention is shown. The slide transfer process 2 of the 2nd embodiment of the vacuum and pressure film sticking apparatus which concerns on this invention is shown. The upper and lower chamber contact | abutting and film heating process 3 of the 2nd embodiment of the vacuum / pressurizing film sticking apparatus which concerns on this invention are shown. The slide transfer process 2 of the 3rd embodiment of the vacuum-pressurizing film sticking apparatus which concerns on this invention is shown. The upper and lower chamber contact | abutting and film heating process 3 of the 3rd embodiment of the vacuum and pressurization film sticking apparatus which concerns on this invention are shown. Process 4 is shown in which the workpiece is pressed against the film in the vacuum of the third embodiment of the vacuum / pressure film pasting apparatus according to the present invention. The film heating and pressure sticking process 5 of the 3rd embodiment of the vacuum and pressure film sticking apparatus which concerns on this invention is shown. The upper / lower chamber exhaust / workpiece table lowering step 5 'of the third embodiment of the vacuum / pressurized film adhering apparatus according to the present invention is shown. The vacuum breaking / upper / lower chamber separation step 6 of the third embodiment of the vacuum / pressure film pasting apparatus according to the present invention is shown. The slide transfer process 2 of the 4th embodiment of the vacuum-pressurizing film sticking apparatus which concerns on this invention is shown. The upper-lower chamber contact | abutting and film heating process 3 of the 4th embodiment of the vacuum and pressurization film sticking apparatus which concerns on this invention are shown. Process 4 is shown in which the workpiece is pressed against the film in the vacuum of the fourth embodiment of the vacuum / pressurized film sticking apparatus according to the present invention. The film heating and pressure sticking process 5 of the 5th embodiment of the vacuum and pressure film sticking apparatus which concerns on this invention are shown. The slide transfer process 2 of the 6th embodiment of the vacuum-pressurizing film sticking apparatus which concerns on this invention is shown. The product taking-out process 7 of the 6th embodiment of the vacuum-pressurizing film sticking apparatus which concerns on this invention is shown. The slide transfer process 2 of the seventh embodiment in which a plurality of films are pressure-bonded to the surfaces of a plurality of workpieces, respectively. The vacuum and pressure film sticking method in a prior art is shown. The vacuum and pressure film sticking method in a prior art is shown.

Hereinafter, the present invention will be described in detail with reference to the drawings. The illustrated embodiments are exemplifications of the present invention, and the present invention should not be considered to be limited to these. It goes without saying that various modifications are possible within the scope of the claims of the present application.
(1) First Embodiment FIGS. 1 to 7 show a first embodiment of a vacuum / pressurized film sticking apparatus according to the present invention.
FIG. 1 shows a state in which the workpiece W1 is set outside the apparatus (workpiece setting step 1). A slide rail 2 is disposed on the base 1, and a slide table 3 is disposed on the slide rail 2. The slide table 3 is slid to the right along the slide rail 2 through the slide rod by the left slide cylinder 4. On the slide table 3, a lower component described later is disposed. In this embodiment, the workpiece is composed of a substrate and elements such as resistors and semiconductors arranged on the substrate. However, the workpiece W1 is not limited to these, and various types of films can be attached to a film. Needless to say, it can be sealed.

  FIG. 2 shows a state in which, after the workpiece W1 and the sealing film F are placed (FIG. 1), the slide table 4 and the lower constituent members disposed thereon are returned to their original positions by the slide cylinder 4. (Workpiece slide transfer step 2). The lower component members are the lower chamber 5, the first cylinder 6 disposed below the base 1, the rod 7 of the first cylinder 6, the interior of the lower chamber 5, and the tip of the rod 7. A fixed workpiece plate 8, a preheater plate 9 placed on the workpiece plate 8, and a workpiece table 10 placed on the preheater plate 9 are included. The lower chamber 5 includes a lower frame body fixing plate 51, a lower frame body 52 that extends upward from the outer periphery of the lower frame body fixing plate 51, and a lower receiving plate 53 that is placed in the opening of the lower frame body 52. Yes. A plurality of window holes h <b> 1 are provided in the lower receiving plate 53 at positions corresponding to the workpieces, and a sealing film F is placed on the lower receiving plate 53. The lower receiving plate 53 is made of a rigid plate material such as an aluminum plate.

  In the figure, 11 is a guide rod which is fixed to the lower surface of the workpiece mounting plate 8 and extends downward through the lower chamber in an airtight manner. The window hole h1 is not too large from the viewpoint of preventing wrinkles when sticking the heat softening sealing film, and has a size necessary for sticking the sealing film F to the workpiece W1. Actually, the size of the window hole h1 is slightly larger than the outer shape of the work table 10, but when the sealing film F is heated, the size of the window hole h1 is slightly larger. It is preferable that P denotes a packing, and the film is hermetically held between the lower end portion of the outer upper sliding frame body 172 and the upper end portion of the lower frame body 52 via the packing. See Figure 3.

  A plurality of support rods 15 are erected on the upper surface of the base 1, an upper frame fixing plate 16 is fixed to the upper end portion of the support rod 15, and an upper frame extending downward on the lower surface of the upper frame fixing plate 16. A body 17 is provided. In this embodiment, the upper frame body 17 includes an inner upper fixed frame body 171 that is airtightly fixed to the lower surface of the upper frame body fixing plate 16 and an outer side that is airtightly slidable on the outer periphery of the upper fixed frame body 171. The upper guide plate 18 is attached to the lower end portion of the upper frame body 17 (outer upper sliding frame body 172) in an airtight manner. An upper chamber 19 is constituted by the upper frame fixing plate 16, the upper frame 17 (the upper fixing frame 171 and the outer upper sliding frame 172), and the upper guide plate 18. The upper guide plate 18 is made of a rigid plate material such as an aluminum plate. The second cylinder 20 is fixed to the upper surface of the upper frame fixing plate 16, the rod 21 of the second cylinder 20 is fixed to the upper end of the outer upper sliding frame 172, and the rod 21 is fixed by the second cylinder 20. The outer upper sliding frame 172 slides up and down on the outer periphery of the upper fixed frame 171 in an airtight manner.

  A lamp fixing plate 22 is attached to the lower surface of the upper frame fixing plate 16, and a heating lamp 23 such as an infrared lamp is suspended below the lamp fixing plate 22. A high pressure line L1 communicates with the inside of the upper chamber, and a high pressure valve 24 is provided in the middle of the high pressure line L1, while a vacuum exhaust line L2 communicates with the lower chamber 5 and the upper chamber 19, and a switching valve is connected to the vacuum exhaust line L2. 25 and a vacuum valve 26, an exhaust line L3 branches to the vacuum exhaust line L2 on the upper chamber 19 side of the switching valve 25, and an exhaust valve 27 is provided to the exhaust line L3. The upper guide plate 18 is provided with a plurality of substantially identical window holes h2 corresponding to the window holes h1 of the lower receiving plate 53. The window hole h2 has a size that prevents wrinkles when sticking the heat-softening sealing film, and has a size necessary for sticking the sealing film F to the workpiece W1. By the upper surface of the upper guide plate 18 other than the window hole h2, the irradiation heat is reflected and avoided from being softened by heating, so that the strength other than the heat-softened sealing film portion can be maintained and the deflection can be prevented. .

  FIG. 3 shows that the outer upper sliding frame 172 is driven by driving the second cylinder 20 and sliding the outer upper sliding frame 172 downward along the outer periphery of the upper fixed frame 171 via the rod 21. The lower end portion of the lower frame body 52 is brought into contact with the upper end portion of the lower frame body 52, and the sealing film F is hermetically sealed between the lower end portion of the outer upper sliding frame body 172 and the upper end portion of the lower frame body 52 through the packing P. Hold. In this state, the sealing film F is sandwiched between the lower receiving plate 53 and the upper guide plate 18, and the upper chamber 19 and the lower chamber 5 are positioned above and below the sealing film F (upper and lower chamber contact and film). Heating step 3). When the sealing film F is sandwiched between the lower receiving plate 53 and the upper guide plate 18, the upper guide plate 18 gently touches the sealing film or leaves a slight gap between the sealing film and the sealing film. In some cases, it may be preferable to position the sealing film on the sealing film. Doing so allows the heat-softening film to extend more extensively. The upper and lower chambers are evacuated through the evacuation line L2 and evacuated to prevent air bubbles from being taken in between the workpiece and the sealing film F. The heating lamp 23 is turned on during evacuation / vacuum or evacuation after evacuation, and the sealing film F is heated and softened. At this time, only the sealing film at the portion necessary for sealing is heated and softened by the upper guide plate 18 with the heat rays from the heating lamp. In heating, the preheated heater plate 9 is heated to heat the workpiece.

  FIG. 4 shows that while the upper chamber 19 is heated while the upper and lower chambers are evacuated, the first cylinder 6 is driven to raise the workpiece placing plate 8 via the rod 7, and the workpiece W 1 The sealing film F located in the window hole h1 of the lower receiving plate 53 and the window hole h2 of the upper guide plate 18 is pushed up (the workpiece to be pressed is a film pressing step 4 after vacuuming).

  FIG. 5 shows that while heating the film F with the heating lamp 23, the lower chamber 5 is held in vacuum and bubbles between the film and the workpiece are removed, and the upper chamber 19 is pressurized through the high-pressure line L1 to be heated and softened. The process of sticking the sealing film F which was done on the outer surface of the workpiece W1 is shown (film pressure sticking process 5). The sealing film covers the inner surface of the window hole h1 and the residual heat heater plate 9, but the sealing film F is applied to the window hole h1 and the residual heat heater plate 9 by applying a release agent to the window hole h1 and the residual heat heater plate in advance. Sticking can be prevented. Further, the sealing film itself can be made non-adhesive, and the film can be laminated only at a necessary portion by applying an adhesive to the necessary surface of the workpiece.

  FIG. 6 shows that after the heating lamp 23 is turned off to stop heating and break the vacuum, the second cylinder 20 is driven and the outer upper sliding frame body 172 is moved along the outer peripheral surface of the upper fixed frame body 171 through the rod 21. The upper chamber 19 is separated from the lower chamber 5 (the upper guide plate 18 is separated from the lower receiving plate 53) (vacuum breaking / upper and lower chamber separating step 6).

  FIG. 7 shows a state in which the slide cylinder 4 is driven and the slide table 3 and the lower constituent member are moved to the outside take-out position on the slide rail 2 via the rod (covered product take-out step 7). The workpiece covered with the sealing film is taken out at this take-out position, a new work piece and a film are mounted, and the lower constituent member is returned to the original position below the upper chamber 19 by the slide table 3. See FIG.

  8 and 9 show a second embodiment of the vacuum / pressure film pasting apparatus according to the present invention. FIG. 8 shows a workpiece slide transfer step 2 in which the workpiece is slid and moved to the processing position by the slide after the workpiece setting step 1, and FIG. 9 shows that the upper and lower chambers are positioned above and below the sealing film F, An upper and lower chamber contact / film heating step 3 for heating the film by turning on the heater while evacuating the upper and lower chambers is shown. The difference between the first embodiment and the second embodiment is that, in the second embodiment, the heat insulating mask plate 30 is disposed between the heating lamp 23 and the upper guide plate 18, and the heat insulating mask plate 30 is the upper frame. The difference is that it is fixed to the lower end portion of the support body 55 suspended from the fixing plate 16. The heat insulating mask plate 30 has a plurality of window holes h3 of the same size at positions corresponding to the window holes h2 of the upper guide plate 18. The heat insulating mask plate 30 is made of a rigid plate such as an aluminum plate. The heat insulating mask plate 30 is provided to prevent the upper guide plate from being overheated by the heat rays from the heating lamp. If this purpose is met, the size of the window hole h3 of the heat insulating mask plate 30 is as follows. The upper guide plate 18 need not be the same as the window hole h2.

  FIG. 9 shows the upper and lower chamber contact / film heating step 3, and the second cylinder 20 is driven to bring the lower end portion of the outer upper sliding frame body 172 into contact with the upper end portion of the lower frame body 52. The film F is hermetically sandwiched between the lower end of the outer upper sliding frame 172 and the upper end of the lower frame 52, and the upper chamber 19 and the lower chamber 5 are positioned above and below the sealing film F. A process of heating the film by turning on the heater 23 while exhausting the upper and lower chambers through the vacuum exhaust line L2 is shown. Since the heat insulating mask plate 30 prevents the upper guide plate 18 from being overheated by the heating lamp, the heating of the sealing film F around the window hole h2 can be further suppressed, and wrinkles can be reduced and sealed. The workpiece W1 can be reliably coated with the film F. Since the operation of the second embodiment of the vacuum / pressure film bonding apparatus according to the present invention after the upper and lower chamber contact / film heating step 3 in FIG. 9 is the same as that of the first embodiment, Omitted.

  10 to 15 show a third embodiment of the vacuum / pressure film pasting apparatus according to the present invention. In the third embodiment, the first cylinder 33 that pushes up the workpiece mounting plate 8 and presses the workpiece against the film F, the lower end portion of the upper frame body 35, and the lower end portion of the lower frame body 392 are brought into contact with each other. The second cylinder 31 to be separated is provided below the lower chamber 39, the upper frame body 35 is fixed to the upper frame body fixing plate 16, the lower frame body 392 has a flange portion 38, and the flange portion 38 The inner peripheral surface is different from the first and second embodiments in that the inner peripheral surface can slide airtightly on the outer peripheral surface of the upper frame 35. FIG. 10 shows the workpiece slide transfer process 2, where the lower component is pulled out by the slide table 3, and after the new workpiece and the sealing film are mounted, the lower chamber 39 is moved below the upper chamber 40. Indicates the state of the In FIG. 10, the rod 34 of the first cylinder 33 and the rod 32 of the second cylinder 31 are both pulled down, the lower chamber 39 is separated from the upper chamber 40, and the workpiece W2 is also separated from the sealing film F. It is in the state. The workpiece W2 has a heart shape in cross section with the lower top portion being a flat surface, and the receiving portion surface of the workpiece mounting base 41 has a corresponding V-shaped cross section. Examples of the workpiece include decorative glass.

  FIG. 11 shows the upper and lower chamber contact / film heating step 3, in which the second cylinder 31 is driven to move the lower chamber 39 upward via the rod 32, so that the inner peripheral surface of the flange 38 is the outer periphery of the upper frame 35. The sealing film F is sandwiched between the lower receiving plate 42 and the upper guide plate 36 at the lower end of the upper frame 35. At this time, the first cylinder 33 is stopped. With the lower chamber 39 and the upper chamber 40 positioned above and below the sealing film F, the upper and lower chambers 39 and 40 are evacuated, the heating lamp 23 is turned on, and the film positioned in the window holes h1 and h2 is heated. Soften.

FIG. 12 shows the film pressing step 4. After the vacuum chambers 39 and 40 are evacuated, the first cylinder 33 is driven while heating and the workpiece on the workpiece plate 8 is processed via the rod 34. The product W2 is pressed against the sealing film F which is located in the window holes h1 and h2 and is softened by heating.
FIG. 13 shows the pressure sticking step 5, in which the lower chamber 39 is evacuated under heating, high pressure gas is introduced into the upper chamber 40 to apply high pressure, and the film is stuck on the upper surface of the workpiece. The sealing film also covers the inner surface of the window hole h1, the workpiece mount, and the residual heater plate 9, but is sealed by applying a release agent in advance to the window hole h1, the workpiece holder and the residual heater plate. The film F is prevented from sticking. Further, the sealing film itself can be made non-adhesive, and the film can be laminated only at a required portion by applying an adhesive to the required surface of the workpiece.

FIG. 14 shows an upper / lower chamber exhaust / workpiece table lowering step 5 ′, the heating lamp 23 is turned off to stop heating, and the upper and lower chambers 39, 40 are exhausted while the first cylinder 33 performs processing. The workpiece 8 is lowered and the workpiece to which the film is adhered is separated from the workpiece tray.
FIG. 15 shows the vacuum breaking / upper / lower chamber separation step 6, and after the vacuum breaking, the second cylinder 31 is driven to separate the lower chamber 39 from the upper chamber 40. The subsequent product take-out, new workpiece W2 and workpiece setting process of the sealing film F are the same as those in the above-described embodiment, so that illustration and description thereof are omitted.

  Also in the third embodiment, the heat insulating mask plate described in the second embodiment can be disposed between the upper guide plate 36 and the heating lamp 23 to prevent overheating of the upper guide plate.

  16 to 18 show a fourth embodiment of the vacuum / pressure film pasting apparatus according to the present invention. In the fourth embodiment, the lower chamber 39 can be moved up and down via the rod 47 by the first cylinder 46 disposed on the slide table 3, and the upper frame fixing plate 48 slides up and down on the support rod 15. The upper frame body 35 is fixed to the lower surface of the upper frame body fixing plate 48 and the heating lamp 23 is suspended. The top plate 49 is fixed to the upper end portion of the support rod 15, the second cylinder 50 is disposed on the upper surface of the top plate 49, and the lower end portion of the rod 51 of the second cylinder 50 is fixed to the upper frame body fixing plate. Yes. When the second cylinder 50 is driven, the upper frame fixing plate 48, the upper frame 35, the upper guide plate 36, and the heating lamp 23 are moved up and down via the rod 51. In the figure, 59 is a guide rod.

  FIG. 16 shows the workpiece slide transfer process 2, and FIG. 17 shows the upper and lower chamber contact / film heating process 3. As shown in FIG. 17, first, the first cylinder 46 is driven to raise the lower chamber 39 through the rod 47, and the flange portion 38 of the lower frame body 392 is moved to the outer peripheral portion of the upper guide plate 36 and the upper frame body 35. The sealing film F is sandwiched between the lower receiving plate 42 and the upper guide plate 36, and the outer peripheral portions of the lower receiving plate 42 and the upper guide plate 36 sandwiching the sealing film F are disposed on the upper frame. It is held between the body 35 and the lower frame body 392. While the upper and lower chambers 39 and 40 are exhausted, the heating lamp 23 is turned on to heat and soften the film located in the window hole h1 of the lower receiving plate 42 and the window hole h2 of the upper guide plate 36.

  FIG. 18 shows the film pressing (pressing down) step 4 after the completion of vacuuming. While the upper and lower chambers are evacuated and heated, the first cylinder 46 and the second cylinder 50 are synchronized, and the first cylinder 46 is lowered by the same distance as the distance by which the upper chamber 40 is pushed down by the second cylinder 50. The chamber 39 is pushed down, and the lower surface of the heat-softened film F located in the window holes h1 and h2 of the lower plate 42 and the upper guide plate 36 is pressed against the upper surface of the workpiece W2.

  FIG. 19 shows a fifth embodiment of the vacuum / pressure film pasting apparatus according to the present invention for sealing the outer surface of the workpiece W3 having a void inside and convex upward. The fifth embodiment has the same basic configuration as the third embodiment, but in the fifth embodiment, when the sealing film is pressure-bonded to the outer surface of the workpiece W3 having a void inside. However, it is different in that it is configured to prevent the workpiece from being damaged. That is, in the fifth embodiment, the pressure equalizing plate 61 is provided on the preheater heater plate 9 on the workpiece placing plate 8, and the pressure equalizing passage 62 extending horizontally is provided inside the pressure equalizing plate 61. A high pressure line L1 is communicated with one end of the pressure equalizing path 62, and the other end of the pressure equalizing path 62 extends through the workpiece mounting table and opens into a gap 63 between the convex workpiece W3 and the mounting table. . In this embodiment, when the workpiece W3 is pressed against the sealing film F and the sealing film F is pressurized from the upper chamber 40 side, the convex workpiece is passed through the high pressure line L1 and the pressure equalizing path 62. By applying an equal pressure to the upper chamber 40 side in the gap 63 between W3 and the workpiece mounting table 64, damage to the upward convex workpiece W3 having a gap inside is prevented. Since the steps after the heat sticking step are the same as those in the third embodiment, illustration and explanation thereof are omitted.

    20 and 21 show a slide transfer step 2 and a product take-out step 7, respectively, in the sixth embodiment of the vacuum / pressurized film sticking apparatus according to the present invention. Although the basic configuration is the same as that of the second embodiment, in the above-described embodiment, the example in which the adhesive film is replaced with a new film in the series of vacuum and pressure film application steps has been described. Then, the film gripping and feeding device 60 is arranged on the left and right sides of the device, and the film is made into a continuous film. Cut with etc. A series of vacuum and pressure film sticking steps are performed on the film part newly held by the left and right gripping and feeding devices. In FIG. 20 and FIG. 21, the film feeding direction and the slide table moving direction are drawn in the same direction.

  FIG. 22 shows the slide transfer step 2 of the seventh embodiment of the vacuum / pressurized film sticking apparatus according to the present invention. In this embodiment, a plurality of films can be pressure bonded to the surfaces of a plurality of workpieces. The basic configuration of the present embodiment is the same as that of the fourth embodiment, but a packing P1 is disposed around the window hole h1 of the lower receiving plate 70. The films F1, F2,... Are disposed on the window holes h1 of the respective receiving plates 70 slightly beyond the packing P1 around the window holes h1, and the first cylinder 46 is first driven to drive the rod 47. The lower chamber 39 is raised, the flange portion 38 of the lower frame body 392 is slid in an airtight manner on the outer peripheral portions of the upper guide plate 71 and the upper frame body 35, and the sealing films F1, F2,. The outer periphery of the lower receiving plate 42 and the upper guide plate 36 sandwiched between the lower receiving plate 70 and the upper guide plate 71 and the sealing film F between the upper frame 35 and the lower frame 392. Hold on.

While the invention has been described with reference to the illustrated embodiments, it will be appreciated that various modifications may be made within the scope of the claims. Below, the modification etc. of this invention are shown.
(1) Heating lamp In the illustrated embodiment, the heating lamp is disposed on the lower surface of the upper frame fixing plate. However, the heating lamp is disposed on the upper frame fixing plate with a part of the upper frame fixing plate being transparent. You can also. (Tell me if this is possible.) The expression “the heating lamp disposed inward / upward of the upper frame” is intended to include that the heating lamp may be disposed inside the upper chamber or that the heating lamp is disposed on the upper frame fixing plate.

(2) Cylinder In the fourth embodiment of the present invention shown in FIGS. 16 to 18, the first cylinder 46 is removed, and the workpiece mounting plate 8, the residual heat heater plate 9, and the workpiece mounting table 10 are replaced. It is also possible to arrange the spring in the lower chamber 5 and arrange a spring between the lower surface of the lower chamber and the base 1 instead of the first cylinder. In this case, first, the upper chamber is driven by the second cylinder so that the lower end of the upper frame and the upper end of the lower frame are brought into airtight contact with each other through the film, and the film is received by the upper guide plate and the lower support. The upper chamber and the lower chamber are positioned above and below the film. Furthermore, by moving the upper frame further downward against the spring by the upper cylinder, the film can be pressed against the workpiece, and the heat-softened film can be attached to the upper surface of the workpiece. The spring has the function of the first cylinder, and this aspect is also within the scope of the present invention.

(3) Product to be processed As a product to be processed by the vacuum / pressure pasting apparatus according to the present invention, a film for decoration on decorations in which a sealing film of a substrate with an element is bonded, glass or the like is cut in many faces The application of the bonding of the display-related protective film can be considered. Further, the present invention can also be applied to a workpiece that has a curved upper surface and a flat bottom surface.
(4) Film In addition to the sealing film, various films such as a decoration film, a decoration film, and a polarizing film can be applied as the film.

  DESCRIPTION OF SYMBOLS 1 ... Base, 2 ... Slide rail, 3 ... Slide table, 4 ... Slide cylinder, 5 ... Lower chamber (51 ... Bottom frame fixing plate, 52 ... Bottom Frame, 53 ... lower receiving plate), 6 ... first cylinder, 7 ... rod, 8 ... work plate, 9 ... preheating heater plate, 10 ... Workpiece table, 11 ... guide rod, 15 ... support rod, 16 ... upper frame fixing plate, 17 ... upper frame (171 ... upper fixing frame, 172 ... Outer upper sliding frame), 18 ... upper guide plate, 19 ... upper chamber, 20 ... second cylinder, 21 ... rod, 22 ... lamp fixing plate, 23 ... Heating lamp, 24 ... high pressure valve, 25 ... switching valve, 26 ... vacuum valve, 27 ... exhaust valve, 30 ... off Mask plate 31 ... first cylinder 32 ... rod 33 ... second cylinder 34 ... rod 35 ... upper frame 36 ... upper guide plate 37 ... Lower frame, 38 ... Flange, 39 ... Lower chamber, 40 ... Upper chamber, 41 ... Workpiece table, 42 ... Lower receiving plate, 46 ... 1st cylinder, 47 ... rod, 48 ... upper frame fixing plate, 49 ... top plate, 50 ... second cylinder, 51 ... rod, 55 ... support, 59 ... guide rod, 60 ... film gripping device, 61 ... pressure equalizing plate, 62 ... pressure equalizing path, 63 ... gap, 64 ... table for workpiece, 70 ... Lower receiving plate, 71 ... upper guide plate, F ... sealing film, h1, h2, h3 · Window hole, L1 · · · high pressure line, L2 · · · evacuation line, L3 · · · exhaust line, P, P1 ··· Packing

Claims (10)

A vacuum and pressure application device for attaching a film to the upper surface of a plurality of workpieces, the vacuum and pressure application device,
1) an upper frame that is airtightly attached to the lower surface of the upper frame fixing plate;
2) a heating lamp disposed inside and above the upper frame,
3) An upper guide plate which is fixed to the lower end of the upper frame and has a plurality of window holes necessary for bonding the films to the upper surfaces of the plurality of workpieces, the upper fixed frame and the upper frame An upper guide plate that defines an upper chamber by the upper guide plate;
4) a lower frame that is airtightly disposed on the upper surface of the lower frame fixing plate;
5) A plurality of window holes corresponding to the window holes of the upper guide plate, which are airtightly mounted on the upper end portion of the lower frame, place a softable film thereon, and sandwich the softable film with the upper guide plate. A lower receiving plate that defines a lower chamber by a lower frame fixing plate, a lower frame, and a lower receiving plate;
6) A placing plate for placing the work piece below the receiving plate corresponding to the window hole of the receiving plate;
7) a first cylinder that presses the workpiece against the film with the film sandwiched between the lower backing plate and the upper guide plate;
8) A second cylinder that moves the upper chamber or the lower chamber so that the upper and lower chambers are positioned above and below the film, and the lower end of the upper frame and the upper end of the lower frame are in airtight contact with each other;
9) vacuum means for vacuum degassing the upper chamber and the lower chamber;
10) A vacuum / pressure pasting apparatus comprising high-pressure means for setting the inside of the upper chamber at a high pressure.
The vacuum and pressure bonding according to claim 1, wherein the upper frame fixing plate is fixed to an upper portion of a support rod extending upward from the base, and the second cylinder is disposed on the upper frame fixing plate. apparatus.
The top plate is fixed to the upper part of the support rod extending upward from the base, the second cylinder is disposed on the top plate, and the second cylinder moves the upper frame fixing plate up and down with respect to the top plate. The vacuum and pressure bonding apparatus according to claim 1.
The upper guide comprises an inner upper frame that is airtightly attached to the lower surface of the upper frame fixing plate, and an outer upper sliding frame that slides in an airtight manner on the outer peripheral surface of the inner upper frame. The plate is fixed to the lower end of the outer upper sliding frame, and the second cylinder slides the outer upper sliding frame on the outer peripheral surface of the inner upper frame in an airtight manner to The vacuum and pressure bonding apparatus according to claim 3, wherein the lower end of the chamber is brought into airtight contact with or separated from the lower end.
A heat-insulating mask plate is attached to the inside of the upper frame and above the upper guide plate, and is provided corresponding to the window hole of the guide plate and has a window hole of the same size or its front and rear dimensions to prevent overheating of the upper guide plate. 5. A vacuum / pressure pasting apparatus according to any one of claims 1 to 4.
The vacuum / pressure pasting apparatus according to any one of claims 1 to 5, wherein a workpiece placing table is disposed on the workpiece placing plate, and the workpiece is placed on the workpiece placing table. .
The workpiece is placed between the workpiece and the workpiece mounting plate upper surface or the workpiece mounting table upper surface when the workpiece is placed on the workpiece mounting plate upper surface or the workpiece mounting table upper surface. The vacuum / pressure pasting apparatus according to claim 6, wherein the vacuum / pressure pasting apparatus has a shape in which a hollow space is formed, and the high pressure is applied to the inside of the upper chamber by high pressure means.
The vacuum and pressure bonding apparatus according to any one of claims 1 to 7, wherein a heater is provided on the workpiece plate.
Packing is provided on the surface facing the upper guide plate around the plurality of window holes in the lower plate, and the plurality of films are respectively disposed on the window holes in the lower plate slightly beyond the packing around the window hole h1. The vacuum / pressure pasting apparatus according to claim 1, wherein the plurality of films are stuck to a plurality of workpieces, respectively.
1) The upper guide is sandwiched between an upper guide plate having a plurality of window holes of a size required for attachment and a lower plate having a plurality of window holes corresponding to the plurality of window holes. An upper chamber including a plate and a lower chamber including the lower receiving plate are hermetically positioned above and below the film;
2) exhausting the upper and lower chambers;
3) heating and softening the film located in the window hole of the lower plate and the window hole of the upper guide plate;
4) vacuuming the upper and lower chambers;
5) a step of pressing a plurality of workpieces against a heat-softening film located in each window hole;
6) A process of adhering a film softened by heating and softening the upper chamber to a plurality of workpieces while evacuating the lower chamber;
7) stopping heating, breaking the vacuum, and separating the upper and lower chambers;
8) A method of adhering a film on a workpiece by vacuum and pressure, comprising a step of obtaining a workpiece coated with a film.

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