JP2017065221A - Apparatus and method of manufacturing film coated component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress deterioration in yield of a film material caused due to the size of a base material and to reduce the cost of equipment with a simple film chuck mechanism.SOLUTION: Provided is a manufacturing apparatus 10 of a film coated component W, which includes: an upper chamber 1 and a lower chamber 2 capable of being united and separated; a first vacuum circuit 3 and an air circuit 4 connected to each of the chambers; a heater 5 mounted within the upper chamber; a table 61 provided inside the lower chamber; and a table driving device 62 which brings up and down the table. The apparatus sticks, by using an atmospheric pressure difference, a heated and softened film material FF on a base material KK loaded on the table that is brought up to a prescribed position. The apparatus includes: a frame-like film chuck jig 71 formed to be capable of grasping an outer peripheral part FF1 of the film material; a holding fitting 72 formed to be capable of attaching and detaching the film chuck jig; and an annular support plate 73 formed to be capable of abutting against the upper and lower chambers in an air-tight manner while supporting the holding fitting. The table abuts against the film chuck jig in the air-tight manner when being brought up to the prescribed position.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an apparatus and a method for manufacturing a film-covered part that is formed by sticking a heat-softened film material to a substrate by a pressure difference.

  For example, Patent Document 1 discloses a manufacturing apparatus and a manufacturing method for a film-covered part that is formed by sticking a heat-softened film material to a base material by a pressure difference. The manufacturing apparatus and manufacturing method are shown in FIGS. As shown in FIGS. 9 to 14, the manufacturing apparatus includes an upper chamber 101a and a lower chamber 101b that can be joined and separated in the vertical direction, a vacuum circuit and an air circuit 104 connected to each chamber, A vacuum tank 105, a pressurized air tank 106 connected to the circuit, a heater 107 mounted in the upper chamber 101a, a table 108 arranged to be movable up and down in the lower chamber 101b, and an upper chamber for moving the upper chamber 101a up and down A driving device 101c and a table driving device 101d for raising and lowering the table 108 are provided.

  Moreover, the manufacturing method of the said film covering component is comprised from the process described below. That is, as shown in FIG. 9, the base material 102 and the film material 103 are set in the upper chamber 101a and the lower chamber 101b separated from each other in the vertical direction (setting step). Next, as shown in FIG. 10, the upper chamber 101a is lowered, the upper and lower chambers are joined to close each room, and each room is sucked from the atmospheric pressure state to the vacuum state by the vacuum tank 105 together. (Vacuum suction process). Next, as shown in FIG. 11, the film material 103 is heated by turning on the heater 107 while suctioning the interior of the upper and lower chambers to a vacuum state (film heating step). At this time, in order to prevent excessive dripping of the heat-softened film material 103, the gas stored in the gas supply chamber 109 is sent into the lower chamber 101b to adjust the pressure difference in the upper and lower chambers. Next, as shown in FIG. 12, the table 108 in the lower chamber 101b is raised to a position where it abuts on the upper end flange of the lower chamber 101b (table raising step). Next, as shown in FIG. 13, when the upper and lower chambers reach the target high vacuum state, the vacuum in the upper chamber 101 a is released and air is introduced to create a pressure difference between the front and back of the film material 103. Thus, the film material 103 is pressed against and adhered to the base material 102 (film attaching step). At this time, the pressure in the lower chamber 101b remains in a high vacuum state. In addition, in order to improve the adhesiveness of the film material 103 to the base material 102, the pressurized air tank 106 can be open | released and the gas more than atmospheric pressure can also be sent in in the upper chamber 101a. Next, as shown in FIG. 14, when the attachment of the film material 103 to the base material 102 is completed, the heater 107 is turned off, the vacuum in the lower chamber 101b is released to return to the atmospheric pressure state, and the upper chamber 101a is raised, and the product in which the base material 102 is coated with the film material 103 is taken out (product take-out step).

JP 2002-67137 A

However, the film-coated component manufacturing apparatus and method described in Patent Document 1 have the following problems.
That is, in the film-coated component manufacturing apparatus, as shown in FIG. 15, when the film material 103B is adhered to the base material 102B that is considerably smaller than the size of the upper and lower chambers, the yield of the film material 103B is improved. Therefore, the film chuck jigs 107 and 108 that hold the small film material 103B are used.
However, in the film sticking process in which the film material 103B is stuck to the base material 102B by the above manufacturing method, when the upper and lower chambers reach the target high vacuum state, the vacuum in the upper chamber 101a is released and the atmosphere is turned on. Then, a pressure difference is generated between the front and back surfaces of the film material 103B (see FIG. 13). Therefore, the film chuck jigs 107 and 108 need to be strong enough to withstand the pressure difference, and it is necessary to take measures to increase the thickness of the film chuck jigs 107 and 108. Therefore, when using the film chuck jigs 107 and 108 for holding the small film material 103B, there is a problem that the weight of the film chuck jigs 107 and 108 increases, which makes the handling inconvenient and increases the equipment cost. It was.

  The present invention has been made to solve the above-described problems, and can suppress a decrease in the yield of the film material due to the size of the substrate, and can reduce the equipment cost with a simple film chuck mechanism. Objective.

In order to solve the above problems, a film-coated component manufacturing apparatus and method according to the present invention have the following configuration.
(1) An upper chamber and a lower chamber that can be joined and separated in the vertical direction, a first vacuum circuit and an air circuit connected to each chamber, and a heater mounted in the upper chamber or the lower chamber And a table disposed in the lower chamber so as to be movable up and down, and a table driving device for raising and lowering the table, and the base material placed on the table raised to a predetermined position by the table driving device. An apparatus for producing a film-coated component, wherein a film material gripped between the upper chamber and the lower chamber and softened by heating is adhered to a surface by a pressure difference,
A frame-shaped film chuck jig formed so as to be capable of gripping the outer periphery of the film material, a holding member formed so as to be detachable from the film chuck jig, and an upper end portion of the lower chamber that supports the holding member And a film chuck mechanism having an annular support plate formed so as to be in airtight contact with the lower end of the upper chamber, and when the table is raised to a predetermined position, the table is in airtight contact with the film chuck jig. It is characterized by touching.

In the present invention, a frame-shaped film chuck jig formed so as to be capable of gripping the outer peripheral portion of the film material, a holding member formed so as to be detachable from the film chuck jig, and a lower chamber that supports the holding member And a lower end of the upper chamber and an annular support plate formed so as to be able to come into airtight contact with the upper chamber, and the table is airtightly contacted with the film chuck jig when raised to a predetermined position. Therefore, the film chuck jig can be downsized to the same size as the outer peripheral portion of the film material, and the weight can be greatly reduced. In addition, since the holding member is formed so that the film chuck jig can be attached and detached, the film material is gripped in advance and reduced in size and weight in a state where the annular support plate supporting the holding member is fixed to the upper end portion of the lower chamber. It is possible to hold only the film chuck jig and transport it into the upper and lower chambers that are separated from each other up and down, and to be easily attached to the holding member. Therefore, the film chuck jig can greatly improve the convenience in handling and can greatly reduce the equipment cost. Note that by preparing only film chuck jigs having different sizes, it is possible to suppress a decrease in the yield of the film material due to the size of the base material.
Therefore, according to the present invention, it is possible to suppress a decrease in the yield of the film material due to the size of the base material, and it is possible to reduce the equipment cost with a simple film chuck mechanism.

(2) In the film coated component manufacturing apparatus described in (1),
The film chuck jig is elastically connected to the annular support plate through an elastic member attached to the holding member.

In the present invention, the film chuck jig is elastically connected to the annular support plate via the elastic member mounted on the holding member, so that the table and the film chuck jig are in contact with each other at the raised position of the table. The impact force at the time of contact and the overstroke of the table can be relaxed or absorbed via the elastic member. In addition, when the elastic member presses the film chuck jig against the table at the raised position of the table, it is possible to improve the airtightness between the film chuck jig and the table when the film material is adhered to the base material. . In addition, the external force acting on the film chuck jig is absorbed through the elastic member attached to the holding member along with the atmospheric pressure fluctuation in the upper and lower chambers when the film material is attached to the base material, and is absorbed by the annular support plate. Does not work directly. Therefore, the thicknesses of the film chuck jig and the annular support plate can be considerably reduced, respectively, and the structures of the film chuck jig and the annular support plate can be simplified.
As a result, it is possible to suppress a decrease in the yield of the film material due to the size of the base material, and it is possible to reduce the equipment cost with a simpler film chuck mechanism.

(3) In the film-coated component manufacturing apparatus described in (2),
The outer periphery of the film chuck jig is provided with a plurality of locking rods that can be locked to the holding member, and the length of the locking rods is the width of the film material in the vicinity of the locking rods. It is characterized by being inversely proportional to the size.

In the present invention, the outer periphery of the film chuck jig is provided with a plurality of locking rods that can be locked to the holding member, and the length of the locking rods is the film material in the vicinity of the locking rods. Therefore, when the width dimension of the film material is reduced, and the width dimension of the film chuck jig is reduced accordingly, the length of the locking rod is increased. Therefore, it is possible to save the trouble of adjusting the position of the holding member one by one only by changing the length of the locking rod with respect to the film chuck jig having different width dimensions. Therefore, in the case where a film material is attached to substrates having different sizes in one manufacturing apparatus (chamber), the convenience when attaching the film chuck jig to the holding member is improved, and the holding member and the annular support are provided. The structure of the plate can be further simplified.
As a result, it is possible to suppress a decrease in the yield of the film material due to the size of the base material, and it is possible to reduce the equipment cost with a simpler film chuck mechanism.

(4) In the film-coated component manufacturing apparatus described in any one of (1) to (3),
The table includes a second vacuum circuit which is surrounded by the table and the film chuck jig and sucks air in a sealed space where the film material covers the base material.

In the present invention, the table is provided with the second vacuum circuit that is surrounded by the table and the film chuck jig and sucks the air in the sealed space where the film material covers the base material. After raising and bringing the table and the film chuck jig into contact with each other in an airtight manner, the air in the sealed space can be quickly and reliably sucked by operating the second vacuum circuit. Therefore, the film material can be adhered to the base material in a short time as the planar size of the base material and the film material becomes small.
As a result, it is possible to suppress the decrease in the yield of the film material due to the size of the base material while improving the attaching speed of the film material to the base material, and it is possible to reduce the equipment cost with a simple film chuck mechanism.

(5) In the film-coated component manufacturing apparatus described in (4),
The table is formed with a plurality of communication portions that support the base material with a predetermined gap and communicate between the base material and the table, and connecting the second vacuum circuit to the table A partition member extending to above the mouth is provided.

In the present invention, the table is formed with a plurality of communication portions that support the base material with a predetermined gap and communicate between the base material and the table, and a connection port to the table of the second vacuum circuit Since the partition member extended to above is provided, the connection port of the second vacuum circuit is blocked by the film material in the middle of operating the second vacuum circuit and attaching the film material to the substrate. This can be avoided by the partition member. Therefore, it is possible to make it difficult to cause poor sticking such as bubbles and wrinkles between the base material and the film material. Note that the communicating portion corresponds to a vent hole or a vent groove.
As a result, it is possible to suppress the decrease in the yield of the film material due to the size of the base material while improving the quality of sticking the film material to the base material, and it is possible to reduce the equipment cost with a simple film chuck mechanism.

(6) A method for manufacturing a film-coated component manufactured using the apparatus for manufacturing a film-coated component described in any one of (1) to (3),
The lower chamber and the upper chamber are brought into contact with each other and the heater is turned on to heat and soften the film material, and the first vacuum circuit is operated to set the atmospheric pressure in the upper and lower chambers to a predetermined vacuum state. The table is raised to a predetermined position, and after the table and the film chuck jig abut on each other in an airtight manner, the air circuit is opened to change the pressure in the upper and lower chambers to an atmospheric pressure state. To do.

In the present invention, the lower chamber and the upper chamber are brought into contact with each other, the heater is turned on to heat and soften the film material, and the first vacuum circuit is operated to set the atmospheric pressure in the upper and lower chambers to a predetermined vacuum state. After the table is raised to a predetermined position and the table and the film chuck jig are in airtight contact with each other, the air circuit is opened and the pressure in the upper and lower chambers is shifted to the atmospheric pressure state. Based on the difference between the atmospheric pressure in the upper and lower chambers and the atmospheric pressure in the sealed space that is held in a predetermined vacuum state and surrounded by the table and the film chuck jig and covers the substrate, the film material is applied to the substrate. Can be attached. Further, since the atmospheric pressure in the upper and lower chambers is shifted almost simultaneously from a predetermined vacuum state to an atmospheric pressure state, there is no pressure difference between the upper and lower surfaces of the table. Therefore, a load due to a change in atmospheric pressure in the upper and lower chambers does not act on the table driving device, and the table driving device can be simplified. In addition, as in the conventional manufacturing method, the time for adhering the film material to the base material can be shortened because there is no time difference between the air release in the upper chamber and the air release in the lower chamber.
As a result, while improving the production efficiency of film-covered parts, it is possible to suppress the decrease in the yield of the film material due to the size of the base material, and it is possible to reduce the equipment cost with a simpler film chuck mechanism and table driving device. .

(7) A method for manufacturing a film-coated component manufactured using the apparatus for manufacturing a film-coated component described in (4) or (5),
The lower chamber and the upper chamber are brought into contact with each other, the heater is turned on to heat and soften the film material, and the first vacuum circuit is activated to set the atmospheric pressure in the upper and lower chambers to a moderate vacuum state. The table is raised to a predetermined position, and after the table and the film chuck jig are in airtight contact with each other, the second vacuum circuit is operated, and the air circuit is opened to open the upper and lower chambers. The atmospheric pressure is shifted to an atmospheric pressure state.

In the present invention, the lower chamber and the upper chamber are brought into contact with each other, the heater is turned on to heat and soften the film material, and the first vacuum circuit is activated to set the atmospheric pressure in the upper and lower chambers to a moderate vacuum state. The table is raised to a predetermined position, and after the table and the film chuck jig are in airtight contact with each other, the second vacuum circuit is operated and the air circuit is opened to adjust the atmospheric pressure in the upper and lower chambers to atmospheric pressure. Since the state is shifted to the state, when the film material is adhered to the base material, the pressure in the upper and lower chambers can be returned to the atmospheric pressure state almost at the same time before the pressure is changed to a predetermined vacuum state. Therefore, the pressure acting on the upper and lower chambers is reduced, and simplification such as reducing the wall thickness of the upper chamber and the lower chamber can be achieved.
In addition, since the sealed space in which the film material covers the base material surrounded by the table and the film chuck jig is significantly narrower than the entire space in the upper and lower chambers, the entire space in the upper and lower chambers is formed by the first vacuum circuit. The time for the second vacuum circuit to operate to reach the predetermined vacuum state from the medium vacuum state by operating the second vacuum circuit is far shorter than the time for reaching the predetermined vacuum state. Therefore, the time for sticking the film material to the substrate can be greatly shortened.
Furthermore, since the air remaining on the substrate side can be sucked to the end by the operation of the second vacuum circuit, bubbles and wrinkles generated between the substrate and the film material are suppressed, and poor adhesion is less likely to occur. be able to.
As a result, it is possible to suppress the decrease in film material yield due to the size of the base material while improving the film material sticking quality and production efficiency in film-coated parts, and the equipment cost is further reduced by the simpler film chuck mechanism and upper and lower chamber structure. Can be reduced.

  According to the present invention, it is possible to suppress a decrease in the yield of the film material due to the size of the base material, and it is possible to reduce the equipment cost with a simple film chuck mechanism.

It is typical sectional drawing of the 1st Example of the manufacturing apparatus of the film covering component which concerns on embodiment of this invention. It is a perspective view of the film chuck mechanism in the manufacturing apparatus shown in FIG. FIG. 3 is a partially enlarged perspective view of the film chuck mechanism shown in FIG. 2. It is process sectional drawing in the manufacturing apparatus shown in FIG. (A) represents a vacuum suction process, (b) represents a film heating process, (c) represents a table raising process, and (d) represents a film sticking process. It is typical sectional drawing of the 2nd Example of the manufacturing apparatus of the film covering component which concerns on embodiment of this invention. It is a typical fragmentary sectional view at the time of the 2nd vacuum circuit operation | movement of the manufacturing apparatus shown in FIG. (A) represents the start of evacuation, (b) represents during evacuation, and (c) represents the completion of evacuation. It is typical sectional drawing showing the modification in the manufacturing apparatus shown in FIG. It is a top view of the film chuck mechanism in the manufacturing apparatus shown in FIG. It is typical sectional drawing at the time of the base material of the manufacturing apparatus of the film covering component described in patent document 1, and a film material set. It is typical sectional drawing at the time of vacuum suction of the manufacturing apparatus shown in FIG. It is typical sectional drawing at the time of the film material heating of the manufacturing apparatus shown in FIG. FIG. 10 is a schematic cross-sectional view of the manufacturing apparatus shown in FIG. 9 when the table is raised. FIG. 10 is a schematic cross-sectional view of the manufacturing apparatus shown in FIG. 9 when the upper chamber is opened to the atmosphere. It is typical sectional drawing at the time of product taking-out of the manufacturing apparatus shown in FIG. It is typical sectional drawing when using the film chuck jig | tool which hold | grips a small film member in the manufacturing apparatus shown in FIG.

  Next, a manufacturing apparatus and a manufacturing method for a film-covered component according to an embodiment of the present invention will be described in detail with reference to the drawings. First, the overall structure of the first example of the film-coated component manufacturing apparatus according to the present embodiment will be described, and then a manufacturing method for manufacturing the film-coated component using the manufacturing apparatus will be described. Next, 2nd Example of this manufacturing apparatus and its film sticking process are demonstrated.

<Overall structure of the first embodiment in the manufacturing apparatus>
First, the whole structure of the 1st Example in the manufacturing apparatus of the film covering component which concerns on this embodiment is demonstrated using FIGS. 1-3. FIG. 1 shows a schematic cross-sectional view of a first example of a film-coated component manufacturing apparatus according to an embodiment of the present invention. FIG. 2 shows a perspective view of the film chuck mechanism in the manufacturing apparatus shown in FIG. FIG. 3 is a partially enlarged perspective view of the film chuck mechanism shown in FIG.

  As shown in FIGS. 1 to 3, the manufacturing apparatus 10 includes an upper chamber 1 and a lower chamber 2 that can be joined and separated in the vertical direction, and a first vacuum circuit 3 (3A) connected to each chamber. 3B) and the air circuit 4 (4A, 4B), the heater 5 mounted in the upper chamber 1, a table 61 disposed in the lower chamber 2 so as to be movable up and down, and a table driving device for moving the table 61 up and down 62. Further, as the film chuck mechanism 7, a frame-shaped film chuck jig 71 formed so as to be able to hold the outer peripheral portion FF1 of the film material FF, and a plurality of holding metal fittings formed so that the film chuck jig 71 can be attached and detached ( Holding member) 72, and an annular support plate 73 that supports the holding metal fitting 72 and is formed so as to be able to contact the upper end 21 of the lower chamber 2 and the lower end 11 of the upper chamber 1 in an airtight manner.

(Upper chamber)
As shown in FIG. 1, the upper chamber 1 is a box-shaped molding chamber whose bottom is opened, and a first vacuum circuit 3A and an air circuit 4A are connected to the side walls thereof. The first vacuum circuit 3A is connected to a vacuum pump 3C through an on-off valve 3A1. When the upper and lower chambers are joined and closed to operate the first vacuum circuit 3A, the pressure in the upper chamber 1 is sucked from the atmospheric pressure state to a desired vacuum state. The air circuit 4A communicates with the outside air via the opening / closing valve 4A1. When the air circuit 4A is operated, the pressure in the upper chamber 1 is returned to the atmospheric pressure state.

  The upper chamber 1 is equipped with an infrared heater (heater) 5 for heating and softening the film material FF. A plurality of heaters 5 are arranged along the ceiling, and a radiation thermometer (not shown) for measuring the temperature of the film material FF is arranged in the gap between the heaters 5. The heater 5 may be attached to both the upper chamber 1 and the lower chamber 2 or may be attached only to the lower chamber 2. In addition, a horizontal plane that is in airtight contact with the annular support plate 73 is formed at the lower end 11 of the upper chamber 1. The upper chamber 1 is equipped with an upper chamber driving device (not shown) that moves the upper chamber 1 in the vertical direction.

(Lower chamber)
As shown in FIG. 1, the lower chamber 2 is a box-shaped molding chamber whose upper side is open, and a first vacuum circuit 3B and an air circuit 4B are connected to the side walls thereof. The first vacuum circuit 3B is connected to the vacuum pump 3C via the opening / closing valve 3B1. When the upper and lower chambers are joined and closed to operate the first vacuum circuit 3B, the pressure in the lower chamber 2 is sucked from the atmospheric pressure state to a desired vacuum state. The air circuit 4B is communicated with the outside air via the opening / closing valve 4B1. When the air circuit 4B is operated, the pressure in the upper chamber 1 is returned to the atmospheric pressure state. Further, the upper end portion 21 of the lower chamber 2 is formed with a horizontal flange surface that fixes the annular support plate 73 in an airtight manner.

(Film chuck mechanism)
As shown in FIGS. 1 to 3, the film chuck mechanism 7 includes one film chuck jig 71, two holding fittings (holding members) 72, and one annular support plate 73.
The film chuck jig 71 is formed in accordance with the planar size of the film material FF. The film chuck jig 71 includes a frame-shaped upper frame body 71A and a lower frame body 71B that hold the outer peripheral part FF1 of the film material FF cut into a rectangular shape with substantially the same width. The outer edges of the upper frame 71A and the lower frame 71B are formed substantially the same as the outer edges of the film material FF. As shown in FIGS. 2 and 3, a plurality of thumb screw portions (fastening portions) 712 are formed on the left and right outer edges on the long side of the upper frame body 71 </ b> A and the lower frame body 71 </ b> B in the vertical direction. . A substantially U-shaped handle portion 713 is formed on the left and right outer edges on the short side of the upper frame 71A. A plurality (four in this case) of locking rods 711 extending outward in parallel with the short side are formed on the front end and the rear end on the long side of the upper frame 71A. The locking rod 711 is a rod-like body having a flange 711T formed on the tip side. The length of the locking rod 711 is formed in inverse proportion to the short side size of the film material FF. Therefore, when the short side size of the film material FF is reduced and the short side size of the film chuck jig 71 is accordingly reduced, the length of the locking rod 711 is increased on the contrary.

  The two holding metal fittings 72 are arranged away from the left and right outer edges on the long side of the film chuck jig 71 in substantially parallel directions. Each holding metal 72 has a long channel member 721 formed in a U-shaped cross section and a position corresponding to the locking rod 711 of the film chuck jig 71, and is formed vertically on both side walls of the channel member 721. And two engaging claws 722 that are pivotally supported to each other and an elastic member 74 attached to the front end portion and the rear end portion in the longitudinal direction of the channel member 721. When the two engaging claws 722 stand vertically, the engaging rods 711 of the film chuck jig 71 are pressed against the upper ends of both side walls of the channel member 721 to be engaged. The flange portion 711T of the locking rod 711 has a function of preventing the outer engaging claw 722 from coming off in the lateral direction. The elastic member 74 includes a spring member 741 and a presser bolt 742 that compresses the spring member 741 in the vertical direction. The presser bolt 742 passes through the bottom wall of the channel member 721 and is screwed to the annular support plate 73 while compressing the spring member 741 by a predetermined amount. The channel member 721 is pressed against the annular support plate 73 by the compression force of the spring member 741. As a result, the film chuck jig 71 locked to the holding metal fitting 72 is elastically connected to the annular support plate 73 via the elastic member 74.

  The annular support plate 73 is hermetically sealed with the first annular support plate 731 on the inner peripheral side that supports the film chuck jig 71 via the holding fitting 72, the upper end portion 21 of the lower chamber 2, and the lower end portion 11 of the upper chamber 1. It is divided into a second annular support plate 732 on the outer peripheral side that comes into contact with the outer periphery. The division position of the first annular support plate 731 and the second annular support plate 732 substantially matches the inner wall surface of the lower end portion 11 of the upper chamber 1. The outer peripheral edge of the first annular support plate 731 is vertically fitted to a step portion formed on the inner peripheral edge of the second annular support plate 732, and a plurality of fastenings formed on the outer peripheral edge of the first annular support plate 731. The second annular support plate 732 is connected to a fastening bolt inserted through the hole 7311. A seal member 733 is fitted to the connecting portion between the first annular support plate 731 and the second annular support plate 732. In a state where the first annular support plate 731 and the second annular support plate 732 are connected, the upper end surfaces of the first annular support plate 731 and the second annular support plate 732 form the same surface.

  The first annular support plate 731 is formed with a rectangular opening 734 into which the film chuck jig 71 is inserted. A holding fitting 72 is elastically connected to the short side near the four corners of the opening 734 via an elastic member 74. A reinforcing member 735 may be joined to the periphery of the opening 734 of the first annular support plate 731 along the opening 734 (see FIG. 2). The second annular support plate 732 is formed to be in airtight contact with the upper end portion 21 of the lower chamber 2 and the lower end portion 11 of the upper chamber 1 on the outer peripheral side of the division position with the first annular support plate 731. . The second annular support plate 732 is connected to the upper end portion 21 of the lower chamber 2 by fastening bolts that are inserted through a plurality of fastening holes 7321 formed on the outer peripheral edge.

(Table, table driving device)
As shown in FIG. 1, the table 61 is formed with a base stand 64 on which the base KK is placed at the center upper end. A table driving device 62 is connected to the lower center of the table 61. As the table driving device 62, for example, a hydraulic cylinder can be used, and the table 61 and the lower frame body 71B of the film chuck jig 71 are brought into contact with each other at the raised position of the cylinder rod. In addition, a seal member 63 is mounted on the table 61 at a position where it contacts the lower frame body 71 </ b> B of the film chuck jig 71. The seal member 63 is deformed by the elastic force of the elastic member 74 to ensure the airtightness between the table 61 and the film chuck jig 71. The seal member 63 may be mounted on the lower frame 71B of the film chuck jig 71.

<The manufacturing method of the film-coated component in 1st Example>
Next, the manufacturing method which manufactures a film covering component using this manufacturing apparatus in 1st Example is demonstrated using FIG. FIG. 4 is a process cross-sectional view of the manufacturing apparatus shown in FIG. 4A represents a vacuum suction process, FIG. 4B represents a film heating process, FIG. 4C represents a table raising process, and FIG. 4D represents a film sticking process. Represent.

  As shown in FIG. 4, in the manufacturing method which manufactures a film covering component using this manufacturing apparatus 10, a vacuum suction process (FIG. 4 (a)), a film heating process (FIG. 4 (b)), and a table raising process ( 4 (c)) and the film sticking step (FIG. 4 (d)) are performed in order. The film-coated component W is a component in which a film material FF is adhered to the surface of the base material KK. The base material KK is, for example, a base material for resin parts for vehicles, and is made of a resin such as a polypropylene resin, an acrylic resin, a polystyrene resin, or an ABS resin, and is pre-injected into a predetermined shape. The film material FF is, for example, a sheet-like decorative film material on which a wood grain pattern or the like is printed, and is made of a resin such as an acrylic resin, a polyester resin, or a polycarbonate resin. An adhesive is uniformly applied to the lower surface of the film material FF.

  First, as shown in FIG. 4A, in the vacuum suction process, the film material FF previously gripped by the film chuck mechanism 7 is set between the upper chamber 1 and the lower chamber 2, and the upper chamber 1 and the lower chamber 2 are set. The first vacuum circuit 3A of the upper chamber 1 and the first vacuum circuit 3B of the lower chamber 2 are operated until the atmospheric pressure in the upper and lower chambers reaches a predetermined vacuum state. Each of the first vacuum circuits 3A and 3B is operated by opening the respective on-off valves 3A1 and 3B1. The predetermined vacuum state varies depending on the size of the base material KK, the type of the film material FF, and the like, but is, for example, about 50 to 150 Pa. At this time, the open / close valves 4A1 and 4B1 of the air circuit 4A of the upper chamber 1 and the air circuit 4B of the lower chamber 2 are closed. Further, the table 61 on which the base material KK is mounted stands by at a lowered position where the base material KK and the film material FF are separated from each other.

  Next, as shown in FIG. 4B, in the film heating step, the infrared heater (heater) 5 attached to the upper chamber 1 is turned on, which is convenient for attaching the film material FF to the base material KK. Heat softening to a predetermined temperature. The film material FF is heated and softened while the first vacuum circuit 3A of the upper chamber 1 and the first vacuum circuit 3B of the lower chamber 2 are operated.

  Next, as shown in FIG. 4C, in the table ascending step, it is confirmed by a radiation thermometer or the like that the film material FF is heated and softened to a predetermined temperature suitable for adhering the film material FF to the base material KK. At the same time, after confirming that the air pressure in the upper and lower chambers has reached a predetermined vacuum state, the table driving device 62 is operated to raise the table 61 to a predetermined position, and the table 61 and the film chuck jig 71 are hermetically sealed. Abut. At this time, the sealed space Q surrounded by the table 61 and the film chuck jig 71 and covering the base material KK with the film material FF is maintained in a predetermined vacuum state. Further, the heater 5 is turned off, and the first vacuum circuits 3A and 3B close and stop the on-off valves 3A1 and 3B1, respectively.

  Next, as shown in FIG. 4D, in the film sticking step, the air circuit 4A of the upper chamber 1 and the air circuit 4B of the lower chamber 2 are operated, and the atmospheric pressure in the upper and lower chambers is changed from a predetermined vacuum state. Return to atmospheric pressure. At this time, the air pressure in the upper and lower chambers returned to the atmospheric pressure state, and the inside of the sealed space Q that is held in a predetermined vacuum state and surrounded by the table 61 and the film chuck jig 71 and the film material FF covers the base material KK. Based on the atmospheric pressure difference from the atmospheric pressure, the heat-softened film material FF is attached to the surface of the base material KK. In addition, after the film material FF is stuck on the surface of the base material KK, the upper chamber 1 is raised to cut the unnecessary film material FF, and the film-covered component W can be taken out from the lower chamber.

<Overall structure of the second embodiment of the manufacturing apparatus>
Next, the overall structure of a second example of the film-coated component manufacturing apparatus according to the present embodiment will be described with reference to FIG. FIG. 5 is a schematic cross-sectional view of a second example of the apparatus for manufacturing a film-coated component according to the embodiment of the present invention.

  As shown in FIG. 5, the manufacturing apparatus 10B includes an upper chamber 1 and a lower chamber 2 that can be joined and separated in the vertical direction, and a first vacuum circuit 3 (3A, 3B) connected to each chamber. And the air circuit 4 (4A, 4B), the heater 5 mounted in the upper chamber 1, a table 61 disposed in the lower chamber 2 so as to be movable up and down, and a table driving device 62 for moving the table 61 up and down. I have. Further, as the film chuck mechanism 7, a frame-shaped film chuck jig 71 formed so as to be able to hold the outer peripheral portion FF1 of the film material FF, and a plurality of holding metal fittings formed so that the film chuck jig 71 can be attached and detached ( Holding member) 72, and an annular support plate 73 that supports the holding metal fitting 72 and is formed so as to be able to contact the upper end 21 of the lower chamber 2 and the lower end 11 of the upper chamber 1 in an airtight manner. Since each of the above-described configurations is the same as that of the first embodiment described above, the same reference numerals are given, and the description thereof is omitted unless particularly necessary.

  The manufacturing apparatus 10B of the second embodiment is different from the manufacturing apparatus 10 of the first embodiment in the following configuration. That is, in the case of the second embodiment, the table 61 is connected to the base material side from the position where it contacts the film chuck jig 71, and the film material FF sucks the air in the sealed space that covers the base material KK. The vacuum circuit 3D (3) is provided. The second vacuum circuit 3D (3) is connected to the vacuum pump 3C via the opening / closing valve 3D1.

  Further, the table 61 is formed with a plurality of communication portions (a vent hole 83 and a vent groove 84) that support the base material KK with a predetermined gap and communicate between the base material KK and the table 61. The partition member 8 extended to the upper direction of the connection port 3D2 to the table 61 of the 2 vacuum circuit 3D is provided. The partition member 8 includes a base plate 81 on which the base material KK is placed, a partition plate 82 that supports the base plate 81, and a leg portion 85 that forms a predetermined gap between the partition plate 82 and the table 61. And. The partition plate 82 has a plurality of vent holes 83 formed vertically. A plurality of ventilation grooves 84 are formed horizontally on the lower surface of the substrate base 81. The ventilation hole 83 and the ventilation groove 84 are formed so as to cross each other and communicate with each other.

<Film pasting process in 2nd Example>
Next, the film sticking process in 2nd Example is demonstrated using FIG. FIG. 6 shows a schematic partial cross-sectional view of the manufacturing apparatus shown in FIG. 5 when the second vacuum circuit is operated. 6A shows the start of evacuation, FIG. 6B shows the state during evacuation, and FIG. 6C shows the time when the evacuation is completed.

  As with the first embodiment, the manufacturing method for manufacturing the film-covered component using the manufacturing apparatus 10B according to the second embodiment is similar to the vacuum suction process shown in FIG. 4A and shown in FIG. 4B. A film heating step, a table raising step shown in FIG. 4C, and a film sticking step shown in FIG. However, the process of the second embodiment is different from the process of the first embodiment in the following contents.

  That is, the lower chamber 2 and the upper chamber 1 are brought into contact with each other, the heater 5 is turned on to heat and soften the film material FF, and the first vacuum circuit 3 (3A, 3B) is operated to moderate the atmospheric pressure in the upper and lower chambers. After the table 61 is raised to a predetermined position and the table 61 and the film chuck jig 71 are in airtight contact with each other, the second vacuum circuit 3D (3) is operated, and The air circuit 4 (4A, 4B) is opened, and the atmospheric pressure in the upper and lower chambers is shifted to the atmospheric pressure state. Here, the medium vacuum state varies depending on the size of the base material KK, the type of the film material FF, and the like, but is about 10,000 Pa, for example.

  Specifically, as shown in FIG. 6A, at the start of evacuation of the second vacuum circuit 3D, the table 61 and the film chuck jig 71 come into airtight contact with each other so that the film material FF becomes the base material KK. The space Q1 covering the space Q2 and the space Q2 formed in the gap between the partition plate 82 and the table 61 form a sealed space Q that is communicated by a plurality of communication portions (ventilation holes 83, ventilating grooves 84). The air pressure in the sealed space Q is a moderate vacuum state.

  However, since this sealed space Q is remarkably narrow compared with the entire space in the upper and lower chambers, as shown in FIGS. 6B and 6C, the second vacuum circuit 3D is operated to close the sealed space Q. The atmospheric pressure can be reached from a moderate vacuum state to a predetermined vacuum state in a short time. Therefore, the heat-softened film material FF is formed on the surface of the base material KK based on the pressure difference between the atmospheric pressure in the sealed space Q that has reached a predetermined vacuum state and the atmospheric pressure in the upper and lower chambers returned to the atmospheric pressure state. Affixed.

  Here, the table 61 is formed with a plurality of communication portions (a vent hole 83 and a vent groove 84) that support the base material KK with a predetermined gap and communicate between the base material KK and the table 61. A partition member 8 extending to the upper side of the connection port 3D2 of the second vacuum circuit 3D is provided. Therefore, the second vacuum circuit 3D can suck the air in the sealed space Q to the end through the communication portion (the vent 83, the vent groove 84) of the partition member 8, and the connection to the table 61 of the second vacuum circuit 3D. There is no problem that the opening 3D2 is blocked by the film material FF during its operation.

<Effect>
As described above in detail, according to the manufacturing apparatuses 10 and 10B for the film-covered component W according to the present embodiment, the frame-shaped film chuck jig 71 formed so as to be able to grip the outer peripheral portion FF1 of the film material FF. A holding metal fitting (holding member) 72 formed to be detachable from the film chuck jig 71, and supports the holding metal fitting 72 so that the upper end portion 21 of the lower chamber 2 and the lower end portion 11 of the upper chamber 1 are airtight. A film chuck mechanism 7 having an annular support plate 73 formed so as to be able to come into contact is provided, and the table 61 comes into airtight contact with the film chuck jig 71 when raised to a predetermined position. The film material FF can be downsized to the same size as the outer peripheral part FF1, and the weight can be greatly reduced. Further, since the holding fixture 72 is formed so that the film chuck jig 71 can be attached and detached, the film material FF is previously provided in a state where the annular support plate 73 supporting the holding fixture 72 is fixed to the upper end portion 21 of the lower chamber 2. The film chuck jig 71 that is held in a small size and light weight is held and conveyed into the upper and lower chambers that are separated from each other up and down, and can be easily attached to the holding metal fitting 72. Therefore, the film chuck jig 71 can greatly improve the convenience in handling and can greatly reduce the equipment cost. In addition, by preparing only the film chuck jigs 71 having different sizes, it is possible to suppress the yield reduction of the film material FF accompanying the size of the base material KK.
Therefore, according to this embodiment, the yield reduction of the film material FF accompanying the size of the base material KK can be suppressed, and the equipment cost can be reduced by the simple film chuck mechanism 7.

In addition, according to the present embodiment, the film chuck jig 71 is elastically connected to the annular support plate 73 via the elastic member 74 attached to the holding metal fitting (holding member) 72. The impact force when the table 61 and the film chuck jig 71 come into contact with each other at the raised position and the overstroke of the table 61 can be relaxed or absorbed via the elastic member 74. In addition, the elastic member 74 presses the film chuck jig 71 against the table 61 at the raised position of the table 61, so that the film chuck jig 71 and the table 61 are bonded to each other when the film material FF is adhered to the base material KK. Airtightness can be improved. Further, the external force acting on the film chuck jig 71 is absorbed through the elastic member 74 attached to the holding metal fitting 72 in accordance with the atmospheric pressure fluctuation in the upper and lower chambers when the film material FF is stuck to the base material KK. The annular support plate 73 does not act directly. Therefore, it is possible to simplify the structures of the film chuck jig 71 and the annular support plate 73 by reducing the thicknesses of the film chuck jig 71 and the annular support plate 73 to a considerable extent.
As a result, it is possible to suppress a decrease in the yield of the film material FF due to the size of the base material KK, and it is possible to reduce the equipment cost with a simpler film chuck mechanism 7.

Further, according to the present embodiment, the outer periphery of the film chuck jig 71 is provided with a plurality of locking rods 711 that can be locked to the holding metal fitting (holding member) 72, Since the length is inversely proportional to the width dimension of the film material FF in the vicinity of the locking rod 711, when the width dimension of the film material FF decreases and the width dimension of the film chuck jig 71 decreases correspondingly, the opposite is true. The length of the locking rod 711 increases. Therefore, it is possible to save time and effort to adjust the position of the holding fitting 72 only by changing the length of the locking rod 711 with respect to the film chuck jig 71 having different width dimensions. Therefore, in the case where the film material FF is adhered to the base material KK having different sizes in one manufacturing apparatus (chamber), the convenience when attaching the film chuck jig 71 to the holding metal fitting 72 is improved and the holding is performed. The structure of the metal fitting 72 and the annular support plate 73 can be further simplified.
As a result, it is possible to suppress a decrease in the yield of the film material FF due to the size of the base material KK, and it is possible to reduce the equipment cost with a simpler film chuck mechanism 7.

Further, according to the present embodiment, the table 61 is surrounded by the table 61 and the film chuck jig 71, and the second vacuum circuit 3 </ b> D that sucks air in the sealed space Q where the film material FF covers the base material KK. Since the table 61 is raised to a predetermined position, the table 61 and the film chuck jig 71 are brought into airtight contact with each other, and then the second vacuum circuit 3D is operated, whereby the inside of the sealed space Q is Air can be sucked in quickly and reliably. Therefore, the film material FF can be adhered to the base material KK in a short time as the planar sizes of the base material KK and the film material FF become smaller.
As a result, while improving the adhesion speed of the film material FF to the base material KK, it is possible to suppress the decrease in the yield of the film material FF due to the size of the base material KK, and to reduce the equipment cost with a simple film chuck mechanism 7 Can be planned.

Further, according to the present embodiment, the table 61 is formed with a plurality of communication portions 83 and 84 that support the base material KK with a predetermined gap and communicate between the base material KK and the table 61. Since the partition member 8 extended to the upper part of the connection port 3D2 to the table 61 of the second vacuum circuit 3D is provided, the second vacuum circuit 3D is operated to attach the film material FF to the base material KK. On the way, the partition member 8 can prevent the connection port 3D2 of the second vacuum circuit 3D from being blocked by the film material FF. Therefore, it is possible to make it difficult to cause poor sticking such as bubbles and wrinkles between the base material KK and the film material FF. Note that the vent 83 or the vent groove 84 corresponds to the communication portion.
As a result, while improving the adhesion quality of the film material FF to the base material KK, it is possible to suppress the decrease in the yield of the film material FF due to the size of the base material KK, and to reduce the equipment cost with a simple film chuck mechanism 7 Can be planned.

In addition, according to the method for manufacturing a film-coated component according to another embodiment, the lower chamber 2 and the upper chamber 1 are brought into contact with each other, the heater 5 is turned on to heat and soften the film material FF, and the first vacuum circuit 3 (3A, 3B) is actuated to bring the air pressure in the upper and lower chambers to a predetermined vacuum state, the table 61 is raised to a predetermined position, and the table 61 and the film chuck jig 71 are brought into airtight contact with each other. Since the air circuit 4 (4A, 4B) is opened and the atmospheric pressure in the upper and lower chambers is shifted to the atmospheric pressure state, the atmospheric pressure in the upper and lower chambers returned to the atmospheric pressure state, the table 61 being held in a predetermined vacuum state, The film material FF can be adhered to the base material KK based on the pressure difference between the air pressure in the sealed space Q surrounded by the film chuck jig 71 and covering the base material KK with the film material FF. Further, since the atmospheric pressure in the upper and lower chambers is shifted almost simultaneously from a predetermined vacuum state to an atmospheric pressure state, there is no pressure difference between the upper and lower surfaces of the table 61. Therefore, a load due to a change in atmospheric pressure in the upper and lower chambers does not act on the table driving device 62, and the table driving device 62 can be simplified. In addition, as in the conventional manufacturing method, the time for adhering the film material FF to the base material KK can be shortened by the time difference between the release of the atmosphere in the upper chamber 1 and the release of the atmosphere in the lower chamber 2.
As a result, while improving the production efficiency of the film-coated component W, it is possible to suppress a decrease in the yield of the film material FF due to the size of the base material KK, and to reduce the equipment cost with a simpler film chuck mechanism 7 and table driving device 62. Can be achieved.

In addition, according to the method for manufacturing a film-coated component according to another embodiment, the lower chamber 2 and the upper chamber 1 are brought into contact with each other to turn on the heater 5 to heat and soften the film material FF, and the first vacuum circuit. 3 (3A, 3B) is actuated to bring the atmospheric pressure in the upper and lower chambers to a moderate vacuum state, the table 61 is raised to a predetermined position, and the table 61 and the film chuck jig 71 are brought into airtight contact with each other. Later, the second vacuum circuit 3D is activated, and the air circuit 4 (4A, 4B) is opened to change the pressure in the upper and lower chambers to the atmospheric pressure state. Therefore, the film material FF is attached to the base material KK. In this case, the atmospheric pressure in the upper and lower chambers can be returned to the atmospheric pressure state almost simultaneously before the predetermined vacuum state is reached. Therefore, the pressure acting on the upper and lower chambers is reduced, and simplification such as reducing the wall thickness of the upper chamber 1 and the lower chamber 2 can be achieved.
Further, since the sealed space Q surrounded by the table 61 and the film chuck jig 71 and covering the base material KK with the film material FF is significantly narrower than the entire space in the upper and lower chambers, the first vacuum circuit 3 ( 3A, 3B), the second vacuum circuit 3D is activated to reach the predetermined vacuum state from the intermediate vacuum state by the time required for the entire space in the upper and lower chambers to reach the predetermined vacuum state by 3A, 3B). The time is much shorter. Therefore, the time for sticking the film material FF to the base material KK can be greatly shortened.
Furthermore, since the second vacuum circuit 3D is activated and the air remaining on the base material side can be sucked to the end, air bubbles and wrinkles generated between the base material KK and the film material FF are suppressed, and sticking failure is prevented. It can be made difficult to occur.
As a result, while improving the adhesion quality and production efficiency of the film material FF in the film-coated component W, it is possible to suppress the decrease in the yield of the film material FF due to the size of the base material KK, and the simpler film chuck mechanism 7 and the upper and lower Equipment costs can be reduced with the chamber structure.

In addition, it cannot be overemphasized that this embodiment can be changed in the range which does not change the summary of this invention. For example, in the present embodiment, a plurality of locking rods 711 formed on the outer peripheral side of the film chuck jig 71 so as to be locked to the holding fitting 72 are provided, and the length of the locking rod 711 is the length of the engagement rod 711. Although it is formed so as to be inversely proportional to the width dimension of the film material FF in the vicinity of the stop rod 711, it is not necessarily limited thereto.
For example, the locking rod may be eliminated and the film chuck jig may be directly fastened to the holding metal fitting. In this case, it is possible to deal with film chuck jigs of different sizes by changing the attachment position of the holding metal fitting to the annular support member.
For example, as shown in FIGS. 7 and 8, as the film chuck mechanism 9, a film chuck jig 91 and an annular support plate 93 may be coupled via a holding member 92 that can elastically expand and contract. . Also, a plurality of types of holding members 92 having different lengths may be prepared and replaced depending on the size of the film chuck jig 91.

  INDUSTRIAL APPLICABILITY The present invention can be used as a manufacturing apparatus and a manufacturing method for a film-coated component that is formed by sticking a heat-softened film material to a base material by a pressure difference.

DESCRIPTION OF SYMBOLS 1 Upper chamber 2 Lower chamber 1, 2 Upper / lower chamber 3, 3A, 3B 1st vacuum circuit 3, 3D 2nd vacuum circuit 3D2 Connection port 4, 4A, 4B Air circuit 5 Far-infrared heater (heater)
DESCRIPTION OF SYMBOLS 7 Film chuck mechanism 8 Partition member 9 Film chuck mechanism 10, 10B Manufacturing apparatus 11 Lower end part 21 Upper end part 61 Table 62 Table drive apparatus 71, 91 Film chuck jig | tool 72, 92 Holding fixture (holding member)
73, 93 Annular support plate 74 Elastic member 83, 84 Communicating portion 711 Locking rod FF Film material FF1 Outer portion KK Base material Q Sealed space W Film-coated part

Claims (7)

An upper chamber and a lower chamber that can be joined and separated in the vertical direction; a first vacuum circuit and an air circuit connected to each chamber; a heater mounted in the upper chamber or the lower chamber; A table disposed in a lower chamber so as to be movable up and down, and a table driving device that raises and lowers the table, on the surface of the base material placed on the table raised to a predetermined position by the table driving device, An apparatus for manufacturing a film-covered component that adheres a film material that has been gripped between the upper chamber and the lower chamber and heat-softened by a pressure difference,
A frame-shaped film chuck jig formed so as to be capable of gripping the outer periphery of the film material, a holding member formed so as to be detachable from the film chuck jig, and an upper end portion of the lower chamber that supports the holding member And a film chuck mechanism having an annular support plate formed so as to be in airtight contact with the lower end of the upper chamber, and when the table is raised to a predetermined position, the table is in airtight contact with the film chuck jig. An apparatus for manufacturing a film-coated part, which is in contact with each other. In the apparatus for manufacturing a film-coated component according to claim 1,
The apparatus for manufacturing a film-coated component, wherein the film chuck jig is elastically connected to the annular support plate via an elastic member attached to the holding member. In the apparatus for manufacturing a film-coated component according to claim 2,
The outer periphery of the film chuck jig is provided with a plurality of locking rods that can be locked to the holding member, and the length of the locking rods is the width of the film material in the vicinity of the locking rods. An apparatus for producing a film-coated part, characterized by being inversely proportional to the size. In the apparatus for manufacturing a film-coated component according to any one of claims 1 to 3,
The table is provided with a second vacuum circuit which is surrounded by the table and the film chuck jig and sucks air in a sealed space where the film material covers the base material. Parts manufacturing equipment. In the apparatus for manufacturing a film-coated component according to claim 4,
The table is formed with a plurality of communication portions that support the base material with a predetermined gap and communicate between the base material and the table, and connecting the second vacuum circuit to the table An apparatus for manufacturing a film-covered part, comprising a partition member extending to above the mouth. A method for manufacturing a film-covered component manufactured using the apparatus for manufacturing a film-coated component according to any one of claims 1 to 3,
The lower chamber and the upper chamber are brought into contact with each other and the heater is turned on to heat and soften the film material, and the first vacuum circuit is operated to set the atmospheric pressure in the upper and lower chambers to a predetermined vacuum state. The table is raised to a predetermined position, and after the table and the film chuck jig abut on each other in an airtight manner, the air circuit is opened to change the pressure in the upper and lower chambers to an atmospheric pressure state. A method for manufacturing a film-coated part. A method for manufacturing a film-coated component manufactured using the apparatus for manufacturing a film-coated component according to claim 4 or 5,
The lower chamber and the upper chamber are brought into contact with each other, the heater is turned on to heat and soften the film material, and the first vacuum circuit is activated to set the atmospheric pressure in the upper and lower chambers to a moderate vacuum state. The table is raised to a predetermined position, and after the table and the film chuck jig are in airtight contact with each other, the second vacuum circuit is operated, and the air circuit is opened to open the upper and lower chambers. A method for producing a film-coated component, wherein the atmospheric pressure is shifted to an atmospheric pressure state.

Images