JP2010049048A - Method and apparatus for sticking workpiece - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for sticking a workpiece, in which the workpiece is sucked/held by a simpler structure so that the intrusion of air into the workpiece-stuck surface is eliminated and the yield of a workpiece-stuck product is improved. <P>SOLUTION: A fixed sticking base 4 and a movable sticking stand 5 equipped with a diaphragm 6 are arranged to be opposed to each other in a vacuum chamber 2. The first workpiece W1 and the second workpiece W2 are respectively fit to the fixed sticking base 4 and the diaphragm 6. The diaphragm 6 is formed from a rubber plate, on which a group of air holes 18 are formed, and is fixed to cover the whole open surface of a pneumatic concave part 14 arranged on the movable sticking stand 5. The second workpiece W2 sucked/held by the diaphragm 6 is directly opposed to the first work piece W1. The vacuum chamber 2 is evacuated. The sucked state of the second workpiece W2 is released and simultaneously the pressurized air is sent to the pneumatic concave part 14 to expand the diaphragm 6 so that the second workpiece W2 is pressed from the central part thereof to the peripheral part and the second workpiece is stuck to the first workpiece W1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a work laminating method and a work laminating apparatus suitable for laminating glass plates or a glass plate and a film, for example. The workpiece | work bonding apparatus of this invention can be used in the process of manufacturing a liquid crystal workpiece or a plasma display workpiece, for example.

  In the workpiece bonding apparatus of the present invention, one of the workpieces is pressed against the other workpiece with a diaphragm, and bonding is performed from the center portion to the peripheral portion of both workpieces. An apparatus is known from US Pat. There, a rubber air bag is provided on the upper bonding table, and the air bag is pressed and bonded to a pair of workpieces placed on the lower table.

  In the workpiece | work bonding apparatus of this invention, although a pair of workpiece | work is bonded within a vacuum chamber, this kind of bonding apparatus is well-known to patent document 2. FIG. In this case, a pair of upper and lower stages for supporting a workpiece to be bonded are disposed opposite to each other inside the vacuum chamber, and the pair of workpieces are bonded in a state where the pressure in the vacuum chamber is reduced. Each workpiece to be bonded is attracted and held by an electrostatic chuck.

JP 2001-255540 A (paragraph number 0015, FIG. 3) Japanese Patent Laying-Open No. 2004-301909 (paragraph number 0031, FIG. 1)

  The workpiece | work bonding apparatus of patent document 1 bonds a pair of workpiece | work in air | atmosphere. Therefore, it is inevitable that air exists between both works before bonding. In addition, it is only necessary to perform the bonding while forcibly removing the air between the workpieces at the time of bonding, but it is difficult to completely eliminate the air caught between the workpieces. This is a high obstacle to improving the yield of bonded products. In particular, when large workpieces are to be bonded, air is easily trapped locally, so the trapped air is removed separately, which requires extra effort and cost. It was. For example, the work bonded body is housed in an electric kettle, heated to a predetermined temperature, pressurized at several atmospheres, and the trapped air is removed separately. The cost required for manufacturing bonded products Inevitably increased.

  In that respect, according to the substrate laminating apparatus of Patent Document 2, since the pair of workpieces are bonded in a vacuum chamber having a reduced pressure, air entrapment can be eliminated. However, since each workpiece to be bonded is attracted and held by an expensive electrostatic chuck, the overall cost of the bonding apparatus is increased, and there is a problem in reducing the cost of the bonded product.

  The objective of this invention is providing the workpiece | work bonding method and workpiece | work bonding apparatus which can eliminate the biting of the air to a workpiece | work bonding surface, and can improve the yield of bonding products. The object of the present invention is to hold a workpiece with a simpler structure by accurately holding and bonding, thus reducing the cost required for the bonding equipment compared to holding the workpiece with an electrostatic chuck and bonding products. It is in providing the workpiece | work bonding method and workpiece | work bonding apparatus suitable for reducing cost.

  The workpiece bonding method of the present invention is provided in the fixed bonding table 4 disposed inside the fixed chamber body 2A, the movable bonding table 5 disposed inside the movable chamber body 2B, and the movable bonding table 5. The 1st workpiece | work W1 and the 2nd workpiece | work W2 are bonded through the following processes using the diaphragm film | membrane 6 which can be ventilated. A step of attaching the first workpiece W1 and the second workpiece W2 to the diaphragm film 6 of the fixed bonding table 4 and the movable bonding table 5, respectively, and applying a vacuum pressure to the diaphragm film 6 to apply the second workpiece W2 In a state where the movable chamber body 2B is joined to the fixed chamber body 2A while being adsorbed and fixed, the vacuum chamber 2 is closed, and the first workpiece W1 and the second workpiece W2 are opposed to each other with a predetermined gap therebetween. After the process of exhausting the air in 2 and the supply of the vacuum pressure to the diaphragm film 6 are cut off to release the adsorption state of the second work W2, the pressurized air is applied to the diaphragm film 6 so that the second work W2 Is pressed from the central part to the peripheral part and bonded to the first work W1.

  In the process of exhausting the air in the vacuum chamber 2, the vacuum pressure of the same vacuum source 3 is applied to the vacuum chamber 2 and the diaphragm film 6, and an equal vacuum pressure is applied to the inside and outside of the second workpiece W <b> 2.

  In the step of exhausting the air in the vacuum chamber 2, the facing gap between the first workpiece W1 and the second workpiece W2 is set to 0.1 to 1 mm.

  The workpiece bonding apparatus according to the present invention includes a vacuum chamber 2 and a vacuum source 3 that exhausts air inside the vacuum chamber 2. Inside the vacuum chamber 2, a fixed bonding table 4 on which the first workpiece W1 is mounted and a movable bonding table 5 provided with a diaphragm film 6 on which the second workpiece W2 is mounted are provided. The diaphragm film 6 is formed of a rubber plate in which a group of ventilation holes 18 are formed, and is fixed in a state of covering the entire opening surface of the pneumatic recess 14 provided in the movable bonding table 5. The pneumatic recess 14 is connected to the vacuum source 3 and the pressure source 7 via the passages 21, 22, and 23 and the switching valves 28 and 31, and alternatively communicates with the vacuum source 3 and the pressure source 7. Configure as you can. Thus, under the following conditions, pressurized air is applied to the diaphragm film 6 to press the second workpiece W2 from the central portion to the peripheral portion and to bond the first workpiece W1. The 1st work W1 with which the fixed pasting stand 4 was equipped has faced the 2nd work W2 with which the diaphragm film 6 was equipped across a predetermined gap. The air in the vacuum chamber 2 is exhausted by the vacuum source 3. The supply of the vacuum pressure to the diaphragm film 6 is shut off, and the suction state of the second workpiece W2 is released.

  The pneumatic recess 14 is formed by a spiral groove that is recessed in the movable bonding table 5. A passage 22 is connected to the spiral center.

  The vacuum chamber 2 includes a fixed chamber body 2A and a movable chamber body 2B. Inside the fixed chamber body 2 </ b> A, the fixed bonding table 4 and the output unit 12 of the drive structure 11 that moves the fixed bonding table 4 up and down toward the diaphragm film 6 are provided. A movable bonding stand 5 provided with a diaphragm film 6 is provided inside the movable chamber body 2B. The movable chamber body 2B is connected to the fixed chamber body 2A via a swing shaft 9 so as to be swingable and openable.

  In the workpiece bonding method of the present invention, the diaphragm workpiece 6 that presses the second workpiece W2 toward the first workpiece W1 is used to hold the second workpiece W2 on the outer surface of the diaphragm membrane 6 by vacuum pressure. I made it. Further, both the workpieces W1 and W2 are opposed to each other through a predetermined gap, the air in the vacuum chamber 2 is exhausted, the adsorbed state of the second workpiece W2 is released, and the pressurized air acts on the diaphragm film 6 Then, the second workpiece W2 was pressed from the central portion to the peripheral portion so that it could be bonded to the first workpiece W1. In this way, when the second workpiece W2 is pressed from the central portion to the peripheral portion and bonded to the first workpiece W1 in a vacuum environment, there is room for air entrapment to the bonding surfaces of both the workpieces W1 and W2. Therefore, the yield of the bonded product can be improved. In addition, since the second work W2 is sucked and held by the vacuum pressure on the outer surface of the diaphragm film 6 by using the diaphragm film 6 that presses the second work W2, a conventional bonding apparatus that sucks and holds the work with an electrostatic chuck. Compared to, the second workpiece W2 can be sucked and held with a simpler structure, and the cost and running cost required for the bonding equipment can be greatly reduced, and the cost of the bonded product can be reduced accordingly.

  When the vacuum pressure of the same vacuum source 3 is applied to the vacuum chamber 2 and the diaphragm film 6, the vacuum pressure acting on the inner and outer surfaces of the second workpiece W2 can be made uniform and the second workpiece W2 can be properly separated from the diaphragm film 6. . Therefore, it is possible to appropriately perform the bonding of both the workpieces W1 and W2 by the diaphragm film 6 performed continuously after the suction state of the second workpiece W2 is released. If there is a difference between the vacuum pressure acting on the diaphragm film 6 and the vacuum pressure acting on the vacuum chamber 2, the second work W2 is separated from the diaphragm film 6 at an early timing, or conversely, the second work W2 is There is a possibility that the separation timing is delayed by being pressed against the diaphragm film 6. When the separation timing of the second workpiece W2 is early, there is a possibility that the peripheral edges of both the workpieces W1 and W2 adhere irregularly prior to the pressing by the diaphragm film 6. In addition, when the separation timing of the second workpiece W2 is late, there is a possibility that the bonding surface varies due to variations in how the pressing surface spreads by the diaphragm film 6.

  The first work W1 and the second work W2 are set to have a facing gap of 0.1 to 1 mm and the two works W1 and W2 are bonded together by appropriately bonding both the works W1 and W2 with the diaphragm film 6. Because. Incidentally, if the facing gap is less than 0.1 mm, before the second workpiece W2 is pressed by the diaphragm film 6, it is easy to cause an adhesion failure such that the peripheral portions of both the workpieces W1 and W2 are bonded in advance. On the other hand, if the facing gap exceeds 1 mm, the pressing force at the peripheral portions of the workpieces W1 and W2 is insufficient, and there is a possibility that poor adhesion occurs at the peripheral portion of the bonding surface.

  According to the workpiece bonding apparatus according to the present invention, in the vacuum environment in the vacuum chamber 2, the second workpiece W2 is pressed from the center portion to the peripheral portion by the diaphragm film 6 and bonded to the first workpiece W1, There is no room for air to enter the bonding surfaces of both the workpieces W1 and W2, and therefore the yield of the bonded product can be improved. In addition, since the second work W2 is sucked and held by the vacuum pressure on the outer surface of the diaphragm film 6 by using the diaphragm film 6 that presses the second work W2, a conventional bonding apparatus that sucks and holds the work with an electrostatic chuck. Compared to the above, the second workpiece W2 can be sucked and held with a simpler structure, and the cost and running cost required for the bonding apparatus can be greatly reduced, and the cost of the bonded product can be reduced accordingly.

  In addition, since the pneumatic recess 14 covered with the diaphragm film 6 is configured to be able to selectively communicate with the vacuum source 3 and the pressure source 7 via the passages 21, 22, 23 and the switching valves 28, 31, By simply switching the switching valves 28 and 31, the second workpiece W2 can be adsorbed and held on the diaphragm film 6 or the diaphragm film 6 can be expanded to bond both the works W1 and W2. Compared to the combined device, the structure of the bonding device can be simplified and the overall cost can be reduced.

  According to the bonding apparatus in which the pneumatic recess 14 is configured by a spiral groove formed in the movable bonding table 5 and the passage 22 is connected to the center of the spiral, from the center of the spiral facing the passage 22 toward the outer end of the spiral. Vacuum pressure or pressurized air can be applied. Therefore, the release state of the second workpiece W2 can be released, and the pressing operation of the second workpiece W2 by the diaphragm film 6 can be expanded from the central portion to the peripheral portion, and more preferably both the workpieces W1 and W2 are bonded. it can.

  The fixed bonding base 4 and the output part 12 of the drive structure 11 are provided inside the fixed chamber body 2A constituting the vacuum chamber 2, and the movable bonding base 5 and the diaphragm film 6 are provided inside the movable chamber body 2B. According to the laminating apparatus for connecting the chamber body 2B to the fixed chamber body 2A via the swing shaft 9 so as to be swingable and openable, from the mounting of both the first and second workpieces W1 and W2, the diaphragm film 6 A series of processes leading to the bonding of both workpieces W1 and W2 can be performed smoothly and continuously, and both workpieces W1 and W2 can be bonded efficiently. Further, by joining the movable chamber body 2B to the fixed chamber body 2A, the workpieces W1 and W2 can be directly opposed in a state where they are positioned in the front-rear and left-right directions.

(Example) FIGS. 1-8 shows the Example of the workpiece | work bonding apparatus which concerns on this invention. In FIG. 1, a workpiece bonding apparatus includes a vacuum chamber 2 provided on an upper portion of a base 1, a vacuum pump (vacuum source) 3 that exhausts air in the vacuum chamber 2, and a fixed bonding disposed in the vacuum chamber 2. It is comprised by the combination stand 4 and the movable bonding stand 5, the diaphragm film | membrane 6 provided in the movable bonding stand 5, and the pressurization pump 7 (pressure source) which supplies pressurized air to the diaphragm film | membrane 6. The first workpiece W1 is fixed to the fixed bonding table 4, and the second workpiece W2 is sucked and fixed to the diaphragm film 6 of the movable bonding table 5.

  The first work W1 and the second work W2 are an antistatic film or antireflection film bonded to a rectangular glass plate or plastic plate such as a liquid crystal substrate or a plasma display substrate, or a liquid crystal substrate or a plasma display substrate. It consists of film. The workpiece | work bonding apparatus of this invention is applicable when bonding a board | substrate, the case where a film is bonded with respect to a board | substrate, and the case where a film is bonded. A transparent adhesive layer is formed over the entire surface of either one of the workpieces W1 and W2.

  The vacuum chamber 2 is composed of a box-shaped fixed chamber body 2A that opens upward and a box-shaped movable chamber body 2B that opens downward, and the space in the vacuum chamber 2 has a passage and a switching valve to be described later. Via the vacuum pump 3. The movable chamber body 2B is supported by the fixed chamber body 2A so as to be swingable and openable via a swing shaft 9, and is swingably opened and closed by an air cylinder (not shown). A seal body 10 is disposed on the surface of the fixed chamber body 2A where the movable chamber body 2B is joined, and the vacuum chamber 2 is sealed inside and outside by the seal body 10.

  The fixed chamber body 2A is fixed to the base 1, and the inside of the fixed bonding table 4 and the output unit 12 of the drive structure 11 that moves the fixed bonding table 4 up and down toward the diaphragm film 6 Is provided. The drive structure 11 is configured using an air cylinder (not shown) as a drive source, and transmits the raising / lowering operation of the piston of the air cylinder to the fixed bonding table 4 via the output unit 12. The pair of left and right output portions 12 are guided and supported by a slide bush 15 provided in the fixed chamber body 2A. In order to set the facing gap between the first workpiece W1 and the second workpiece W2 more accurately, the drive structure 11 can be composed of a ball screw and a step motor or servo motor.

  The previous movable bonding table 5 is fixed to the inner surface of the movable chamber body 2B. On the surface of the movable bonding table 5 facing the fixed bonding table 4, a pneumatic recess 14 is formed to be recessed, and the diaphragm film 6 is fixed to the movable bonding table 5 so as to cover the entire opening surface of the pneumatic recess 14. It is. The pneumatic recess 14 communicates with the vacuum pump 3 and the pressurizing pump 7 via a passage and a switching valve which will be described later.

  As shown in FIG. 3, the pneumatic concave portion 14 is formed of a rectangular spiral groove that gradually approaches the central portion along each side portion of the second workpiece W <b> 2, and a second passage described later at the groove end of the central portion. 22 is in communication. In FIG. 1 to FIG. 7, the groove width and the groove depth are exaggerated in order to clearly show the pneumatic recess 14, but the actual groove width and groove depth depend on the work size difference. Each is set to 0.5 to 1.5 mm. Thus, the reason why the groove width and the groove depth are set small is to prevent the diaphragm film 6 from being recessed into the groove when the second workpiece W2 is adsorbed by the diaphragm film 6. The diaphragm film 6 is formed of a rubber plate having vent holes 18 opened over the entire surface, and the periphery thereof is fixed to the movable bonding table 5 with a rectangular pressing frame 19. The vent holes 18 are round holes having a diameter of several millimeters, and are formed at regular intervals over the entire surface of the diaphragm film 6. As shown in FIG. 2, the diaphragm film 6 in the free state is received and flattened by the peripheral wall of the opening of the pneumatic recess 14, and most of the vent holes 18 face the pneumatic recess 14 in this state. .

  The vacuum chamber 2 communicates with the vacuum pump 3 through a first passage (passage) 21, and the pneumatic recess 14 communicates with the pressurization pump 7 through a second passage (passage) 22. The vacuum pump 3 communicates with the third passage (passage) 23 branched from the two passages 22 and the first passage 21. In the middle of the first passage 21, a first switching valve (switching valve) 24, a negative pressure sensor 25, and an air release valve 26 are provided. In the middle of the second passage 22, a second switching valve (switching valve) 28, a negative pressure sensor 29, and an air release valve 30 are provided. The third passage 23 communicates with the second passage 22 between the second switching valve 28 and the negative pressure sensor 29 and the first passage 21 between the vacuum pump 3 and the first switching valve 24. A third switching valve (switching valve) 32 is provided in the middle.

  Each of the first to third switching valves 24, 28, and 32 is an electromagnetic valve that can be switched between a state that blocks each of the first to third passages 21, 22, and 23 and a state that allows ventilation. Thus, by switching these switching valves 24, 28 and 32, a vacuum pressure can be applied to the vacuum chamber 2, or alternatively, a vacuum pressure and pressurized air can be applied to the pneumatic recess 14. be able to. Details thereof will be described later.

  The bonding apparatus configured as described above bonds both the first and second workpieces W1 and W2 as follows. Below, the case where the 1st work W1 is a glass substrate and the 2nd work W2 is a film is explained.

  First, in a state where the movable chamber body 2B is opened, the first work W1 is placed on the upper surface of the fixed bonding table 4, and the four positions on the periphery thereof are positioned and held by a positioning body (not shown) (see FIG. 2). ). Next, the second workpiece W2 is placed on the diaphragm film 6 in a state where the fixed chamber body 2A is in a substantially inverted posture, and further positioned by a positioning jig. In this state, the third switching valve 32 can be vented, the vacuum pressure of the vacuum pump 3 is applied to the pneumatic recess 14, and the second workpiece W 2 is adsorbed and fixed to the diaphragm film 6. At this time, the first switching valve 24 and the second switching valve 28 keep the passages 21 and 23 closed. The positioning jig is removed from the diaphragm film 6 after the second workpiece W2 is adsorbed and fixed to the diaphragm film 6.

  After completion of the bonding preparation as described above, as shown in FIG. 5, the movable chamber body 2B is put on the opening surface of the fixed chamber body 2A to close the vacuum chamber 2, and both the first and second workpieces W1. The W2 is faced up and down, and the movable chamber body 2B is fixed to the fixed chamber body 2A with a lock structure (not shown). In this state, the first and second workpieces W1 and W2 face each other vertically with a sufficiently large gap. Therefore, the drive structure 11 is activated to move the fixed bonding table 4 toward the movable bonding table 5, and the facing gap between the first workpiece W1 and the second workpiece W2 is set to a predetermined gap suitable for bonding. To do.

  It is preferable to set the facing gap between the workpieces W1 and W2 within a range of 0.1 to 1 mm. If the facing gap is less than 0.1 mm, before the second workpiece W2 is pressed by the diaphragm film 6, adhesion failure such as the peripheral portions of the workpieces W1 and W2 adhering to each other easily occurs. On the other hand, if the facing gap exceeds 1 mm, the pressing force at the peripheral portions of the workpieces W1 and W2 is insufficient, and there is a possibility that poor adhesion occurs at the peripheral portion of the bonding surface.

  Next, as shown in FIG. 6, the first switching valve 24 of the first passage 21 is switched to a ventable state, the vacuum pressure of the vacuum pump 3 is applied to the vacuum chamber 2, and the air inside the vacuum chamber 2 is Exhaust. As a result, the vacuum pressure of the same vacuum pump 3 acts on the vacuum chamber 2 and the diaphragm film 6, so that when the evacuation of the vacuum chamber 2 is finished, an equal vacuum pressure acts on the inside and outside of the second workpiece W2. Will do.

  After confirming that the vacuum pressure acting on the vacuum chamber 2 and the diaphragm film 6 is equalized by the output signals from the negative pressure sensors 25 and 29, the supply of the vacuum pressure to the vacuum chamber 2 and the diaphragm film 6 is cut off. The suction state of the second workpiece W2 is released. Specifically, as shown in FIG. 7, the third switching valve 32 of the third passage 23 is switched to the cutoff state. At this time, the second workpiece W2 is released from the suction force. At the same time when the third switching valve 32 is switched to the shut-off state, the second switching valve 28 of the second passage 22 is made to be in a ventable state so that the pressurized air acts on the pneumatic recess 14. As a result, the diaphragm film 6 expands downward as shown in FIG. 8 and bonds the second workpiece W2 to the first workpiece W1. Note that the switching valve 24 of the first passage 21 is kept in a state where it can be ventilated for a certain period of time (about 2 seconds) after the second switching valve 28 of the second passage 22 is switched to the ventable state. The air inside the chamber 2 is exhausted, and when the predetermined time has elapsed since the switching of the second switching valve 28, it is switched to the shut-off state as shown in FIG.

  The diaphragm membrane 6 immediately after the pressurized air is supplied to the pneumatic recess 14 expands at its center portion ahead of other portions, and the expanding region expands to the peripheral portion. At this time, the second workpiece W2 and the first workpiece W1 face each other through a very small gap. Therefore, as shown in FIG. 8, the second work W2 that has been suction-held by the diaphragm film 6 is received by the fixed bonding table 4 via the first work W1, and both the works W1 and W2 are in the center. It will be pasted to the peripheral part.

  Therefore, even if very little air remains inside the vacuum chamber 2 in the worst situation, both the workpieces W1 are forcibly pushed out to the work peripheral side while the air existing between the workpieces W1 and W2 is forced out. -W2 can be bonded to prevent air entrapment. In a state where both the workpieces W1 and W2 are completely bonded to the peripheral edge, as shown in FIG. 1, most part of the diaphragm film 6 is in a posture parallel to the fixed bonding table 4 so that both workpieces W1 and W2 are bonded. W2 is held tightly. Thereafter, the pressure inside the vacuum chamber 2 is increased by the air ejected from the vent hole 18 of the diaphragm film 6. When the internal pressure of the vacuum chamber 2 reaches a predetermined pressure (about 5 atm), the second switching valve 28 is switched to the shut-off state, and this state is maintained for a certain time. Thereby, the peripheral part of both the workpieces W1 and W2 can be brought into close contact with high-pressure air just in case, and the bonding of both the workpieces W1 and W2 can be made perfect.

  Finally, the electromagnetically operated atmospheric release valves 26 and 30 are opened to communicate with the atmosphere, and the vacuum chamber 2 and the pneumatic recess 14 are opened to the atmosphere. In this state, the movable chamber body 2B is opened and swinged to take out the bonded workpiece. In the process of expanding the diaphragm film 6, part of the pressurized air supplied to the pneumatic recess 14 is ejected from the vent hole 18 into the vacuum chamber 2. However, as described above, both the workpieces W1 and W2 are bonded from the central portion to the peripheral portion by the diaphragm film 6 and the bonding of both the workpieces W1 and W2 is completed in a very short time. There is no room for air ejected from the mouth 18 to enter between the workpieces W1 and W2.

  In the above-described embodiment, the case where the second workpiece W2 is a film has been described. However, when the second workpiece W2 is a glass substrate or a plastic substrate, both the workpieces W1 and W2 are similarly appropriately and quickly processed. Can be pasted. In the above embodiment, the air in the vacuum chamber 2 is exhausted after the opposing gap between the first work W1 and the second work W2 is set to a predetermined value, but the air in the vacuum chamber 2 is conversely exhausted. After the air is exhausted, the facing gap between the first workpiece W1 and the second workpiece W2 can be set to a predetermined value.

  As is clear from the above description, the workpiece bonding method of the present invention is arranged inside the fixed chamber body 2A and opened / closed with respect to the fixed chamber body 2A and the fixed bonding table 4 that is moved up and down by the drive structure 11. The first workpiece W1 and the second workpiece W2 are pasted using the movable bonding base 5 disposed inside the movable chamber body 2B that can be provided and the breathable diaphragm film 6 provided on the movable bonding base 5. The first workpiece W1 and the second workpiece W2 can be suitably bonded through the following process.

Attaching the first workpiece W1 and the second workpiece W2 to each of the fixed bonding table 4 and the diaphragm film 6 of the movable bonding table 5;
A process of closing the vacuum chamber 2 by joining the movable chamber body 2B to the fixed chamber body 2A in a state where the vacuum pressure is applied to the diaphragm film 6 to adsorb and fix the second workpiece W2, and the fixed bonding table 4 is movable. A step of moving the first workpiece W1 and the second workpiece W2 to face each other through a predetermined gap, and exhausting the air in the vacuum chamber 2;
After the supply of the vacuum pressure to the diaphragm film 6 is shut off and the suction state of the second workpiece W2 is released, pressurized air is applied to the diaphragm film 6 to press the second workpiece W2 from the central portion to the peripheral portion. The two workpieces W1 and W2 are bonded through a process of bonding to the first workpiece W1.

  In the process of exhausting the air in the vacuum chamber 2, the vacuum pressure of the same vacuum source 3 is applied to the vacuum chamber 2 and the diaphragm film 6, and an equal vacuum pressure is applied to the inside and outside of the second workpiece W <b> 2. In the step of exhausting the air in the vacuum chamber 2, the gap between the first workpiece W1 and the second workpiece W2 is set to 0.1 to 1 mm.

  In the above embodiment, the movable chamber body 2B is swingably opened and closed around the horizontal swing shaft 9, but the movable chamber body 2B can be swingably opened and closed around the vertical swing shaft 9, or a fixed chamber body. The movable chamber body 2B that is not connected to 2A can be joined together in a lid-like manner to close the vacuum chamber 2. The pneumatic recess 14 does not need to be formed in a rectangular spiral shape, and is formed by a lattice-like groove that intersects vertically and horizontally, a group of recesses similar to the vent hole 18, and a groove that communicates the recess. can do. In short, any structure may be used as long as it can simultaneously apply vacuum pressure or pressurized air to the diaphragm film 6.

  The vent hole 18 of the diaphragm film 6 can be formed by a square hole or a slit-like hole, or can be formed in a state where a round hole, a square hole and a slit-like hole are mixed. If necessary, the fixed bonding base 4 can be provided on the inner surface of the movable chamber body 2B, and the movable bonding body 5 and the diaphragm film 6 can be provided inside the fixed chamber body 2A. In that case, the structure corresponding to the pneumatic recessed part 14 and the vent hole 18 is provided in the fixed bonding base 4, and the vacuum pressure is applied to the structure corresponding to the pneumatic recessed part 14, so that the first work W1 is fixed and bonded. It may be adsorbed and fixed to the table 4.

  The movable bonding table 5 can be connected to the fixed bonding table 4 or the fixed chamber body 2A so as to be capable of opening and closing. In that case, after the second workpiece W2 is adsorbed and held by the diaphragm film 6, the movable bonding table 5 is closed and swung to face the fixed bonding table 4, and the movable chamber body 2B is fixed to the fixed chamber body 2A. The vacuum chamber 2 may be closed by bonding. Moreover, an alignment stand can be provided in the fixed chamber body 2A, the fixed bonding stand 4 can be supported by the alignment stand, and an alignment device can be provided between them.

It is a vertical front view of a workpiece bonding apparatus. It is a vertical front view of the workpiece | work bonding apparatus of the state which opened the movable chamber body half. It is a top view of the bonding surface of a movable bonding stand. It is the sectional view on the AA line in FIG. It is a vertical front view of the workpiece | work bonding apparatus of the state which closed the vacuum chamber. It is a vertical front view of the workpiece | work bonding apparatus of the state which raised the fixed bonding stand. It is a vertical front view of the workpiece | work bonding apparatus of the state which expanded the diaphragm film | membrane. It is a vertical front view which shows the detail of the expansion state of a diaphragm film | membrane.

Explanation of symbols

2 Vacuum chamber 2A Fixed chamber body 2B Movable chamber body 3 Vacuum source (vacuum pump)
4 Fixed bonding table 5 Movable bonding table 6 Diaphragm film 7 Pressure source (pressure pump)
DESCRIPTION OF SYMBOLS 11 Drive structure 12 Output part 14 Pneumatic recessed part 18 Vent

Claims (6)

To the fixed bonding table (4) disposed inside the fixed chamber body (2A), the movable bonding table (5) disposed inside the movable chamber body (2B), and the movable bonding table (5). A work laminating method for laminating a first work (W1) and a second work (W2) using a breathable diaphragm membrane (6) provided,
Attaching the first workpiece (W1) and the second workpiece (W2) to each of the fixed bonding table (4) and the diaphragm film (6) of the movable bonding table (5);
The vacuum chamber (2) is closed by joining the movable chamber body (2B) to the fixed chamber body (2A) in a state where the vacuum pressure is applied to the diaphragm film (6) and the second workpiece (W2) is adsorbed and fixed. Process,
A step of causing the first work (W1) and the second work (W2) to face each other through a predetermined gap and exhausting the air in the vacuum chamber (2);
After the vacuum pressure supply to the diaphragm membrane (6) is cut off and the adsorption state of the second workpiece (W2) is released, pressurized air is applied to the diaphragm membrane (6) to center the second workpiece (W2). A work laminating method comprising pressing from a part to a peripheral part and laminating to a first work (W1).   In the process of exhausting the air in the vacuum chamber (2), the vacuum pressure of the same vacuum source (3) is applied to the vacuum chamber (2) and the diaphragm membrane (6), so that the inside and outside of the second workpiece (W2) are evenly distributed. The work bonding method according to claim 1, wherein a vacuum pressure is applied.   The process of exhausting the air in the vacuum chamber (2), wherein a facing gap between the first workpiece (W1) and the second workpiece (W2) is set to 0.1 to 1 mm. Work bonding method. A vacuum chamber (2), and a vacuum source (3) for exhausting air inside the vacuum chamber (2),
A movable bonding table provided with a fixed bonding table (4) on which the first workpiece (W1) is mounted and a diaphragm film (6) on which the second workpiece (W2) is mounted inside the vacuum chamber (2). (5) is provided,
The diaphragm membrane (6) is formed of a rubber plate in which a group of vent holes (18) is formed, and covers the entire opening surface of the pneumatic recess (14) provided in the movable bonding table (5). Fixed,
The pneumatic recess (14) is connected to the vacuum source (3) and the pressure source (7) via the passage (21, 22, 23) and the switching valve (28, 31), and the vacuum source (3 ) And the pressure source (7) can be alternatively communicated with,
Pressurized air is made to act on the diaphragm membrane (6) under the following conditions, and the second workpiece (W2) is pressed from the central portion to the peripheral portion and bonded to the first workpiece (W1). Work bonding device.
The first work (W1) mounted on the fixed bonding base (4) is directly facing the second work (W2) mounted on the diaphragm membrane (6) with a predetermined gap.
Air in the vacuum chamber (2) is exhausted by the vacuum source (3).
The supply of vacuum pressure to the diaphragm membrane (6) is cut off, and the suction state of the second workpiece (W2) is released. The pneumatic recess (14) is composed of spiral grooves formed in the movable bonding table (5).
The work bonding apparatus according to claim 4, wherein a passage (22) is connected to the center of the spiral. The vacuum chamber (2) is composed of a fixed chamber body (2A) and a movable chamber body (2B),
Inside the fixed chamber body (2A), the fixed bonding table (4), and the output unit (12) of the drive structure (11) that moves the fixed bonding table (4) up and down toward the diaphragm membrane (6); Is provided,
A movable bonding stand (5) provided with a diaphragm film (6) is provided inside the movable chamber body (2B),
The workpiece bonding apparatus according to claim 4 or 5, wherein the movable chamber body (2B) is connected to the fixed chamber body (2A) through a swing shaft (9) so as to be swingable and openable.

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