JP4671817B2 - Parts holder - Google Patents

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JP4671817B2
JP4671817B2 JP2005260347A JP2005260347A JP4671817B2 JP 4671817 B2 JP4671817 B2 JP 4671817B2 JP 2005260347 A JP2005260347 A JP 2005260347A JP 2005260347 A JP2005260347 A JP 2005260347A JP 4671817 B2 JP4671817 B2 JP 4671817B2
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movable
fixed
adhesive
component
fixed part
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JP2007073802A (en
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敦 小森
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Shin Etsu Polymer Co Ltd
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Shin Etsu Polymer Co Ltd
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Description

この発明は、シリコンウエハ、フレキシブルプリント基板等の薄板状の電子部品等を加工する際の保持又は加工後に搬送する際に用いる部品保持具に関する。   The present invention relates to a component holder used when holding or transporting a thin plate-shaped electronic component or the like such as a silicon wafer or a flexible printed circuit board after processing.

従来から、シリコンウエハ、フレキシブルプリント基板、ガラス板等の薄板状の電子部品は破損し易いため、その加工中においては保持具に固定して、研磨、パターニング、ダイシング等の加工を行っている。そして、複数の加工が別の場所で行われる電子部品にあっては、その工程間の電子部品の搬送に際しても保持具に固定した状態で移動される。つまり、このような部品保持具にあっては、加工中及び搬送中において電子部品が勝手に移動して重なり合ったりしないように固定され、電子機器本体に組み込むための組立作業時には容易に取り外し可能であることが要求される。   Conventionally, thin plate-like electronic components such as silicon wafers, flexible printed boards, glass plates and the like are easily damaged. Therefore, during the processing, they are fixed to a holder and subjected to processing such as polishing, patterning, and dicing. And in the electronic component in which a some process is performed in another place, it is moved in the state fixed to the holder also in the case of the conveyance of the electronic component between the processes. In other words, in such a component holder, the electronic components are fixed so that they do not move and overlap each other during processing and transportation, and can be easily removed during assembly work for incorporation into the electronic device body. It is required to be.

このような部品保持具としては、従来から、基材の表面に高さの等しい凸状体を多数形成し、この凸状体上に電子部品を載置し真空吸着するタイプの保持具がある(特許文献1を参照のこと)。また、表面が粘着性を有する弾性部材で構成され、その粘着力により部品をその弾性部材表面に密着保持する保持具(特許文献2を参照のこと)がある。   Conventionally, as such a component holder, there is a type of holder in which a large number of convex bodies having the same height are formed on the surface of a base material, and electronic components are placed on the convex bodies and vacuum-sucked. (See Patent Document 1). In addition, there is a holder (see Patent Document 2) that is composed of an elastic member having a sticky surface and that holds the component in close contact with the surface of the elastic member by the adhesive force.

以上のような従来の部品保持具のうち、真空吸着タイプのものについては、加工中常に吸引状態を保つ必要があり、保持具自体の構造、製法が複雑で高価なものであった。また、表面が粘着性を有する弾性部材で構成されたものについては、その弾性部材表面全体に粘着力があり、すべての位置において部品が密着してしまうため、粘着面との接触表面積が大きい部品の場合には取り外し難かった。そのため、取り外しの際に部品を保持具自体に衝突させてしまうことが生じ、薄板状の電子部品の場合には割れや欠け等の破損事故を起こすおそれがあった。
特開2000−286329号公報 特公平07−093247号公報
Among the conventional component holders as described above, vacuum suction type ones must always be kept in a suction state during processing, and the structure and manufacturing method of the holder itself are complicated and expensive. In addition, for parts composed of an elastic member having a sticky surface, the entire elastic member surface has adhesive force, and the parts are in close contact with each other, so the parts having a large contact surface area with the adhesive surface In the case of, it was difficult to remove. For this reason, the component may collide with the holder itself at the time of removal, and in the case of a thin plate-like electronic component, there is a risk of causing a breakage accident such as cracking or chipping.
JP 2000-286329 A Japanese Patent Publication No. 07-093247

そこで、この発明は、加工中又は搬送中には十分な保持力で部品を保持固定でき、完成後には部品を容易に取り外すことができて、部品を破損させることがなく、特に薄板状の電子部品の取り扱いに適した部品保持具を提供することを課題としている。   Therefore, the present invention can hold and fix a part with a sufficient holding force during processing or conveyance, and can easily remove the part after completion, without damaging the part, and particularly with a thin plate-like electronic device. An object is to provide a component holder suitable for handling components.

以上のような課題を実現するため、請求項1に係る発明は、上面に非粘着若しくは弱粘着の非・弱粘着面を有する固定部の平面内に、前記固定部の上面よりも粘着力の大きな強粘着面を上面に有する可動部が配置され、部品取り付け前の初期設定時には前記可動部の上面が前記固定部の上面と同一若しくはより高い位置にあり、かつ、部品取り外し時には前記可動部の上面を前記固定部の上面より低い位置に変更する切替手段を有し、前記切替手段は、空洞部を備えたゴム状弾性体で前記可動部を構成し、前記空洞部内の空気を排出することにより前記可動部の上面の位置を変更するようにした部品保持具であって、前記可動部は剛性を有する平板状の基材に固定される平面部と該平面部に連なる空洞部を有する凸部とからなり、前記固定部には前記可動部の凸部が収容される貫通孔が設けられており、前記基材には前記空洞部に連通する通気孔が設けられていることを特徴としている。 In order to realize the above-described problems, the invention according to claim 1 is more adhesive than the upper surface of the fixing portion in the plane of the fixing portion having a non-adhesive or weakly adhesive non-weak adhesive surface on the upper surface. A movable part having a large strong adhesive surface on the upper surface is arranged, and the upper surface of the movable part is at the same or higher position than the upper surface of the fixed part at the time of initial setting before mounting the component, and at the time of removing the component, It has switching means for changing the upper surface to a position lower than the upper surface of the fixed part, and the switching means constitutes the movable part with a rubber-like elastic body having a cavity part, and discharges air in the cavity part. The component holder is configured to change the position of the upper surface of the movable portion by the convex portion having a flat portion fixed to a rigid plate-like substrate and a hollow portion continuous to the flat portion. And the fixed part It is characterized in that is provided with a through hole in which the convex portion of the movable portion is housed, which is the substrate vent hole communicating with the hollow portion is provided.

請求項2に記載の発明は、上面に非粘着若しくは弱粘着の非・弱粘着面を有する固定部の平面内に、前記固定部の上面よりも粘着力の大きな強粘着面を上面に有する可動部が配置され、部品取り付け前の初期設定時には前記可動部の上面が前記固定部の上面と同一若しくはより高い位置にあり、かつ、部品取り外し時には前記可動部の上面を前記固定部の上面より低い位置に変更する切替手段を有し、前記切替手段は、空洞部を備えたゴム状弾性体で前記可動部を構成し、前記空洞部内の空気を排出することにより前記可動部の上面の位置を変更するようにした部品保持具であって、前記固定部と前記可動部とはゴム状弾性体で一体成形し、かつ、前記固定部の一部を切り欠いた空洞部を形成して前記可動部を構成したものが剛性を有する平板状の基材に前記固定部の下面で固定されており、前記基材には前記空洞部に連通する通気孔が設けられていることを特徴としている。 The invention according to claim 2 is a movable having a strong adhesive surface on the upper surface having a higher adhesive force than the upper surface of the fixed portion in a plane of the fixed portion having a non-adhesive or weakly adhesive non-weak adhesive surface on the upper surface. The upper surface of the movable portion is at the same or higher position than the upper surface of the fixed portion at the time of initial setting before mounting the component, and the upper surface of the movable portion is lower than the upper surface of the fixed portion at the time of component removal. Switching means for changing the position, and the switching means comprises a movable elastic member formed of a rubber-like elastic body having a cavity, and the position of the upper surface of the movable part is determined by discharging air in the cavity. A component holder configured to be changed , wherein the fixed portion and the movable portion are integrally formed of a rubber-like elastic body, and a hollow portion in which a part of the fixed portion is cut is formed to form the movable portion. The flat part of the part has rigidity Jo of being fixed to the substrate in the lower surface of the fixed part, the said base material is characterized in that the ventilation holes communicating with the hollow portion is provided.

請求項3に記載の発明は、請求項1または2に記載の構成に加え、前記空洞部内に、連続気泡構造のスポンジを収容したことを特徴としている。 The invention described in claim 3 is characterized in that, in addition to the structure described in claim 1 or 2 , a sponge having an open cell structure is accommodated in the cavity .

この発明は以上のような構成を有するため、請求項1に記載の発明によれば、初期設定時には可動部の強粘着面の上面が固定部の非・弱粘着面の上面と同一若しくはより高い位置にあるので、部品保持具の上に部品を載せた場合に強粘着面に部品の一部が接触してその位置で粘着固定されることになり、部品保持具に十分な保持力で部品を保持固定できることになる。また、部品を取り外す場合には、その後切替手段により可動部の強粘着面の上面を固定部の非・弱粘着面の上面より低い位置に変更することで、それまで接触していた可動部の強粘着面が部品から引き離されて、強粘着面に接触していなかった部品の一部が固定部の非・弱粘着面のみによって支持されることになるから、部品保持具から部品を持ち上げるだけで簡単に取り外すことができる。したがって、部品の取り外しに際して大きな粘着固定力に打ち勝つような大きな力を使うことがないため、誤って部品を部品保持具に当てて破損させるようなことがない。
また、可動部を空洞部を備えたゴム状弾性体で構成し、空洞部内の空気を排出することにより粘着面又は強粘着面の表面の位置を変更できるようにしたので、部品保持具に真空装置を接続するだけの簡単な設備で迅速な取り付け取り外し操作が実現できる。
さらに、可動部は剛性を有する平面状の基材に固定される平面部と該平面部に連なる空洞部を有する凸部とからなり、固定部には可動部の凸部が収容される貫通孔が設けられているので、可動部の凸部を固定部の貫通孔に収容するといった簡単な操作で機能部位の組立ができるため大量生産が可能となり部品保持具の製造コストが低減できる。また、固定部及び可動部は剛性を有する平面状の基材に固定され、該基材には空洞部に連通する通気孔が設けられているので、複数の空洞部の空気を同時に排気・吸気することができるから、迅速な取り付け取り外し動作にも追従できるとともに、寸法形状の異なる部品にも対応できる。
Since the present invention has the above-described configuration, according to the first aspect of the present invention, the upper surface of the strong adhesive surface of the movable portion is equal to or higher than the upper surface of the non-weak adhesive surface of the fixed portion at the initial setting. Because it is in the position, when a component is placed on the component holder, a part of the component comes into contact with the strong adhesive surface and is fixed in that position, and the component holder has sufficient holding force. Can be held and fixed. In addition, when removing the parts, the upper part of the strong adhesive surface of the movable part is then changed to a position lower than the upper surface of the non-weak adhesive surface of the fixed part by the switching means. Because the strong adhesive surface is pulled away from the part and the part of the part that was not in contact with the strong adhesive surface is supported only by the non-weak adhesive surface of the fixed part, just lift the part from the component holder Can be removed easily. Therefore, since a large force that overcomes a large adhesive fixing force is not used when removing the component, the component is not accidentally applied to the component holder and damaged.
In addition, the movable part is composed of a rubber-like elastic body with a hollow part, and the position of the surface of the adhesive surface or the strong adhesive surface can be changed by discharging the air in the hollow part. Quick installation and removal operations can be realized with simple equipment that only connects devices.
Furthermore, the movable part is composed of a flat part fixed to a rigid planar substrate and a convex part having a hollow part connected to the flat part, and the fixed part has a through-hole in which the convex part of the movable part is accommodated. Since the functional parts can be assembled by a simple operation such as accommodating the convex part of the movable part in the through hole of the fixed part, mass production is possible and the manufacturing cost of the component holder can be reduced. In addition, the fixed part and the movable part are fixed to a rigid planar base material, and the base material is provided with a vent hole communicating with the cavity part. Therefore, it is possible to follow a quick mounting / removing operation, and to deal with parts having different dimensional shapes.

請求項2に記載の発明によれば、初期設定時には可動部の強粘着面の上面が固定部の非・弱粘着面の上面と同一若しくはより高い位置にあるので、部品保持具の上に部品を載せた場合に強粘着面に部品の一部が接触してその位置で粘着固定されることになり、部品保持具に十分な保持力で部品を保持固定できることになる。また、部品を取り外す場合には、その後切替手段により可動部の強粘着面の上面を固定部の非・弱粘着面の上面より低い位置に変更することで、それまで接触していた可動部の強粘着面が部品から引き離されて、強粘着面に接触していなかった部品の一部が固定部の非・弱粘着面のみによって支持されることになるから、部品保持具から部品を持ち上げるだけで簡単に取り外すことができる。したがって、部品の取り外しに際して大きな粘着固定力に打ち勝つような大きな力を使うことがないため、誤って部品を部品保持具に当てて破損させるようなことがない。
また、可動部を空洞部を備えたゴム状弾性体で構成し、空洞部内の空気を排出することにより粘着面又は強粘着面の表面の位置を変更できるようにしたので、部品保持具に真空装置を接続するだけの簡単な設備で迅速な取り付け取り外し操作が実現できる。
さらに、固定部と可動部とはゴム状弾性体で一体成形し、かつ、固定部の一部を切り欠いた空洞部を形成して可動部を構成したものが剛性を有する平板状の基材に固定部の下面で固定し、空洞部内の空気を排出することにより強粘着面の上面の位置を変更するようにしたので、可動部と固定部とからなる機能部材を弾性を有する合成樹脂で一体成形することができるから、材料や寸法形状のばらつきがなく品質の安定した機能部材を大量に生産することが可能となり部品保持具の製造コストが低減できる。また、固定部及び可動部は剛性を有する平面状の基材に固定され、該基材には空洞部に連通する通気孔が設けられているので、複数の空洞部の空気を同時に排気・吸気することができるから、迅速な取り付け取り外し動作にも追従できるとともに、寸法形状の異なる部品にも対応できる。
According to the second aspect of the invention, since the upper surface of the strong adhesive surface of the movable portion is at the same or higher position as the upper surface of the non-weak adhesive surface of the fixed portion at the time of initial setting, the component is placed on the component holder. When a part is placed, a part of the component comes into contact with the strong adhesive surface and is adhesively fixed at that position, so that the component can be held and fixed to the component holder with a sufficient holding force. In addition, when removing the parts, the upper part of the strong adhesive surface of the movable part is then changed to a position lower than the upper surface of the non-weak adhesive surface of the fixed part by the switching means. Because the strong adhesive surface is pulled away from the part and the part of the part that was not in contact with the strong adhesive surface is supported only by the non-weak adhesive surface of the fixed part, just lift the part from the component holder Can be removed easily. Therefore, since a large force that overcomes a large adhesive fixing force is not used when removing the component, the component is not accidentally applied to the component holder and damaged.
In addition, the movable part is composed of a rubber-like elastic body with a hollow part, and the position of the surface of the adhesive surface or the strong adhesive surface can be changed by discharging the air in the hollow part. Quick installation and removal operations can be realized with simple equipment that only connects devices.
Furthermore, the fixed part and the movable part are integrally formed of a rubber-like elastic body, and a hollow base part in which a part of the fixed part is cut out to form a movable part is a flat plate-like base material having rigidity. Since the position of the upper surface of the strong adhesive surface is changed by discharging the air in the cavity portion, the functional member composed of the movable portion and the fixed portion is made of an elastic synthetic resin. Since it can be integrally molded, it is possible to produce a large number of functional members with stable quality without variation in materials and dimensions, and the manufacturing cost of the component holder can be reduced. In addition, the fixed part and the movable part are fixed to a rigid flat base material, and the base material is provided with a vent hole communicating with the cavity part. Therefore, it is possible to follow a quick mounting / removing operation, and to deal with parts having different dimensional shapes.

請求項3に記載の発明によれば、請求項1、2に記載の発明の効果に加えて、通気孔から空洞部内の空気(スポンジ内の空気も含む)を排除したときは空洞部の変形に伴いスポンジが潰れるようにして弾性変形し、通気孔から空洞部内へ空気が流入したときはスポンジ内にもその空気が取り込まれるため、スポンジがない場合に比べて可動部の上面が初期設定の位置に速く復帰することができる。これにより、薄板状の電子部品等を加工する際の保持又は加工後に搬送する工程のサイクルタイムを短縮できるため、生産効率のより一層の向上が可能となる。 According to the invention described in claim 3, in addition to the effects of the invention described in claims 1 and 2, when the air in the cavity (including the air in the sponge) is excluded from the vent hole, the cavity is deformed. As the sponge is crushed, it is elastically deformed so that when air flows into the cavity from the vent hole, the air is also taken into the sponge. Can quickly return to position. Thereby, since the cycle time of the process of carrying | maintaining or conveying after a process at the time of processing a thin-plate-shaped electronic component etc. can be shortened, the further improvement in production efficiency is attained.

以下、この発明の実施の形態に係る部品保持具について、図面に従って説明する。
[発明の実施の形態1]
Hereinafter, a component holder according to an embodiment of the present invention will be described with reference to the drawings.
Embodiment 1 of the Invention

図1はこの発明の実施の形態1に係る部品保持具を示した斜視図であり、図2はこの発明の実施の形態1に係る部品保持具に部品を載置した状態を示した要部断面図である。   1 is a perspective view showing a component holder according to Embodiment 1 of the present invention, and FIG. 2 is a main portion showing a state in which components are placed on the component holder according to Embodiment 1 of the present invention. It is sectional drawing.

この発明の実施の形態1に係る部品保持具1は、矩形状の剛性を有する平らな基材2の上面に、非粘着若しくは弱粘着の非・弱粘着面3を有する基材2と同じ大きさの均一な厚みからなる固定部4が設けられている。基材2には、鋼、ステンレス、アルミニウム等の金属材料の他、ABS樹脂、ポリブチレンテレフタレート、ポリエチレンテレフタレート、その他のエンジニアリングプラスチックが使用される。固定部4の平面部には固定部4の上面よりも粘着力の大きな強粘着面5を上面に有する可動部6が配置できる貫通孔7が設けられている。   The component holder 1 according to Embodiment 1 of the present invention is the same size as the base material 2 having a non-adhesive or weakly adhesive non-weakly adhesive surface 3 on the upper surface of a flat base material 2 having rectangular rigidity. A fixed portion 4 having a uniform thickness is provided. For the base material 2, ABS, polybutylene terephthalate, polyethylene terephthalate, and other engineering plastics are used in addition to metal materials such as steel, stainless steel, and aluminum. A through-hole 7 in which a movable part 6 having a strong adhesive surface 5 having an adhesive force larger than that of the upper surface of the fixed part 4 on the upper surface can be arranged in the flat part of the fixed part 4.

可動部6はシリコーンゴム、フッ素ゴム、ウレタンゴム、エチレンプロピレンゴム、ポリスチレン等の伸縮性、復元性に富むゴム状弾性体であって、基材2に固定される平面部8とこの平面部8に連なる凸部9とからなる一体成形品である。凸部9には空洞部10を備え、この空洞部内の空気を排出することにより可動部6の上面の位置を変更できるようになっている。可動部6の凸部9は固定部4に設けられた貫通孔7に収容され、部品保持具1に部品11を取り付ける前の初期設定時には、可動部6の上面が固定部4の上面と同一若しくはより高い位置にある。   The movable part 6 is a rubber-like elastic body having excellent elasticity and resilience, such as silicone rubber, fluorine rubber, urethane rubber, ethylene propylene rubber, polystyrene, and the like. It is an integrally molded product composed of the convex portions 9 that are connected to each other. The convex portion 9 includes a hollow portion 10, and the position of the upper surface of the movable portion 6 can be changed by discharging air in the hollow portion. The convex part 9 of the movable part 6 is accommodated in a through hole 7 provided in the fixed part 4, and the upper surface of the movable part 6 is the same as the upper surface of the fixed part 4 at the time of initial setting before attaching the component 11 to the component holder 1. Or in a higher position.

基材2には、可動部6の凸部9に設けた空洞部10に連通する通気孔12が設けられており、部品保持具1から部品11を取り外す場合に、真空吸引装置等の切替手段(図示せず)により、空洞部10内の空気を排出することで可動部6の上面を固定部4の上面より低い位置に変更できるようになっている。   The base material 2 is provided with a vent hole 12 communicating with the cavity 10 provided in the convex portion 9 of the movable portion 6, and when removing the component 11 from the component holder 1, a switching means such as a vacuum suction device. (Not shown), the upper surface of the movable portion 6 can be changed to a position lower than the upper surface of the fixed portion 4 by discharging the air in the cavity portion 10.

以上のような実施の形態1を使用する場合には、部品保持具1の上に部品11を載せると、強粘着面5に部品11の一部が接触してその位置で粘着固定され、部品保持具1に十分な保持力で部品11を保持固定できる。また、部品11を取り外す場合には、その後真空吸引装置等の切替手段を使用して可動部6の空洞部10内の空気を排出することで、可動部6の強粘着面5の上面を固定部4の非・弱粘着面3の上面より低い位置に変更する。すると、それまで接触していた可動部6の強粘着面5が部品11から引き離されて、強粘着面5に接触していなかった部品11の一部が固定部4の非・弱粘着面3のみによって支持されることになるから、部品保持具1から部品11を持ち上げるだけで簡単に取り外すことができる。
[発明の実施の形態2]
In the case of using the first embodiment as described above, when the component 11 is placed on the component holder 1, a part of the component 11 comes into contact with the strong adhesive surface 5 and is adhesively fixed at that position. The component 11 can be held and fixed to the holder 1 with a sufficient holding force. Moreover, when removing the component 11, the upper surface of the strong adhesion surface 5 of the movable part 6 is fixed by discharging the air in the cavity 10 of the movable part 6 using a switching means such as a vacuum suction device. The position is changed to a position lower than the upper surface of the non-weak adhesion surface 3 of the portion 4. Then, the strong adhesive surface 5 of the movable part 6 that has been in contact with the part is pulled away from the component 11, and a part of the part 11 that has not contacted the strong adhesive surface 5 is non-weakly adhesive surface 3 of the fixed part 4. Therefore, it can be easily removed simply by lifting the component 11 from the component holder 1.
[Embodiment 2 of the Invention]

図3はこの発明の実施の形態2に係る部品保持具を示した斜視図であり、図4はこの発明の実施の形態2に係る部品保持具に部品を載置した状態を示した要部断面図である。   3 is a perspective view showing a component holder according to Embodiment 2 of the present invention, and FIG. 4 is a main portion showing a state in which components are placed on the component holder according to Embodiment 2 of the present invention. It is sectional drawing.

この発明の実施の形態2に係る部品保持具1は、矩形状の剛性を有する平らな基材2の上面に、非粘着若しくは弱粘着の非・弱粘着面3を有する基材2と同じ大きさの均一な厚みからなる固定部4が設けられている。   A component holder 1 according to Embodiment 2 of the present invention is the same size as a base material 2 having a non-adhesive or weakly adhesive non-weakly adhesive surface 3 on the upper surface of a flat base material 2 having a rectangular rigidity. A fixed portion 4 having a uniform thickness is provided.

固定部4は、シリコーンゴムその他の合成樹脂が使用され、その平面部には固定部4の上面よりも粘着力の大きな強粘着面5を上面に有する可動部6が所定の間隔を置いて複数配置されている。   The fixed portion 4 is made of silicone rubber or other synthetic resin, and a plurality of movable portions 6 having a strong adhesive surface 5 having an adhesive force larger than that of the upper surface of the fixed portion 4 on the upper surface at predetermined intervals. Has been placed.

固定部4と可動部6とは、シリコーンゴムその他の合成樹脂製のゴム状弾性体で一体成形するものとし、固定部4の一部を切り欠いた空洞部10を形成して可動部6を構成している。   The fixed part 4 and the movable part 6 are integrally formed of a rubber-like elastic body made of silicone rubber or other synthetic resin, and the movable part 6 is formed by forming a cavity 10 in which a part of the fixed part 4 is cut out. It is composed.

基材2には固定部4の下面で固定されており、部品保持具1に部品11を取り付ける前の初期設定時には、可動部6の上面が固定部4の上面と同一若しくはより高い位置にある。   It is fixed to the base material 2 at the lower surface of the fixing portion 4, and the upper surface of the movable portion 6 is at the same or higher position as the upper surface of the fixing portion 4 at the initial setting before attaching the component 11 to the component holder 1. .

基材2には、可動部6の凸部9に設けた空洞部10に連通する通気孔12が設けられており、部品保持具1から部品11を取り外す場合に、真空吸引装置等の切替手段(図示せず)により、空洞部10内の空気を排出することで可動部6の上面を固定部4の上面より低い位置に変更できるようになっている。   The base material 2 is provided with a vent hole 12 communicating with the cavity 10 provided in the convex portion 9 of the movable portion 6, and when removing the component 11 from the component holder 1, a switching means such as a vacuum suction device. (Not shown), the upper surface of the movable portion 6 can be changed to a position lower than the upper surface of the fixed portion 4 by discharging the air in the cavity portion 10.

実施の形態2のように、一体成形品の上面に固定部4の非粘着若しくは弱粘着の非・弱粘着面3と可動部6の強粘着面5とを形成する方法としては、固定部4と可動部6とを粘着性部材で一体成形する方法と非粘着性部材で一体成形する方法とが考えられる。   As in the second embodiment, as a method of forming the non-adhesive or weakly adhesive non-weak adhesive surface 3 of the fixed portion 4 and the strong adhesive surface 5 of the movable portion 6 on the upper surface of the integrally molded product, the fixed portion 4 is used. And a method of integrally molding the movable part 6 with an adhesive member and a method of integrally molding with a non-adhesive member.

固定部4と可動部6とを粘着性部材で一体成形した場合には、一体成形後に固定部4に相当する部位に紫外線(UV)や電子線(EB)を照射したり、鋼、ステンレス、アルミニウム、マグネシウム、ガラス、セラミック等の非粘着性材料をコーティングすることとし、固定部4と可動部6とを非粘着性部材で一体成形した場合には、一体成形後に可動部6の上面に相当する部位にシリコーンゴム、フッ素ゴム、ウレタンゴム、エチレンプロピレンゴム、ポリスチレン等の粘着性材料をコーティングする。   When the fixed part 4 and the movable part 6 are integrally molded with an adhesive member, the part corresponding to the fixed part 4 is irradiated with ultraviolet rays (UV) or electron beams (EB) after the integral molding, or steel, stainless steel, When the non-adhesive material such as aluminum, magnesium, glass, ceramic, etc. is coated, and the fixed part 4 and the movable part 6 are integrally formed with a non-adhesive member, it corresponds to the upper surface of the movable part 6 after the integral molding. An adhesive material such as silicone rubber, fluorine rubber, urethane rubber, ethylene propylene rubber, polystyrene, etc. is coated on the part to be applied.

なお、粘着性部材で一体成形した場合には、部品保持機能には関係のない外周面を粗面化して非粘着なものとすることで、ハンドリング性の向上を図るとよい。   In addition, when it integrally molds with an adhesive member, it is good to aim at the improvement of handling property by roughening the outer peripheral surface which is not related to a component holding function, and making it non-adhesive.

実施の形態2のその他の構成は、実施の形態1と同様であり、同じ構成には同じ符号を付して、その構成及び作用の説明を省略する。   Other configurations of the second embodiment are the same as those of the first embodiment, and the same components are denoted by the same reference numerals, and descriptions of the configurations and operations are omitted.

以上説明した実施の形態1及び2のように、使用される部品11の平面形状内に固定部4と可動部6とが複数組存在できる構成とするのが一般的である。ただし、使用される部品11に対して固定部4と可動部6とが少なくとも一組存在する構成であれば、この発明が目的とする効果は得られるといえるので、そのような構成を採用してもよい。 As in Embodiments 1 and 2 described above, it is common to have a configuration in which a plurality of sets of fixed portions 4 and movable portions 6 can exist in the planar shape of the component 11 to be used. However, if at least one set of the fixed part 4 and the movable part 6 is present for the part 11 to be used, it can be said that the intended effect of the present invention can be obtained. May be.

材料が同じ場合には、表面積の大きさを変えることで粘着力を調整することが可能であるから、必要に応じて、可動部6の上面の強粘着面5の一部に非・弱粘着面3を形成することで、部品11の取り外し易さを向上させることも考えられる。 If the material is the same, since it is possible to adjust the adhesive strength by changing the amount of surface area, if necessary, the non-weak adhesive to a portion of the strong adhesive face 5 of the upper surface of the movable portion 6 It may be possible to improve the ease of removing the component 11 by forming the surface 3.

また、以上説明した実施の形態1及び2の空洞部10内に、連続気泡構造のスポンジを収容することとしてもよい。このような構成によれば、通気孔12から空洞部10内の空気(スポンジ内の空気も含む)を排除したときは空洞部10の変形に伴いスポンジが潰れるようにして弾性変形し、通気孔12から空洞部10内へ空気が流入したときはスポンジ内にもその空気が取り込まれるため、スポンジがない場合に比べて可動部6の上面が初期設定の位置に速く復帰することができる。これにより、薄板状の電子部品等を加工する際の保持又は加工後に搬送する工程のサイクルタイムを短縮できるため、生産効率のより一層の向上が可能となる。   Moreover, it is good also as accommodating the sponge of an open cell structure in the cavity part 10 of Embodiment 1 and 2 demonstrated above. According to such a configuration, when the air in the cavity 10 (including air in the sponge) is excluded from the vent hole 12, the sponge 10 is elastically deformed so that the sponge is crushed along with the deformation of the cavity 10. When air flows into the hollow portion 10 from 12, the air is also taken into the sponge, so that the upper surface of the movable portion 6 can quickly return to the initial position as compared with the case without the sponge. Thereby, since the cycle time of the process of holding | maintenance at the time of processing a thin-plate-shaped electronic component etc. or conveying after a process can be shortened, the further improvement of production efficiency is attained.

なお、以上説明した実施の形態1及び2では、空洞部10内の空気を排気するための通気孔12を基材2に空洞部10の数だけ設けたものとしたが、必要に応じて、一体成形品の固定部4又は基材2の内部で通気孔12を連通させる構成としてもよい。   In the first and second embodiments described above, the air holes 12 for exhausting the air in the cavity 10 are provided in the base material 2 by the number of the cavity 10, but if necessary, It is good also as a structure which connects the ventilation hole 12 inside the fixing | fixed part 4 or the base material 2 of an integrally molded product.

この発明の実施の形態1に係る部品保持具を示した斜視図である。It is the perspective view which showed the component holder which concerns on Embodiment 1 of this invention. 同実施の形態1に係る部品保持具に部品を載置した状態を示した要部断面図である。It is principal part sectional drawing which showed the state which mounted the components in the component holder which concerns on the same Embodiment 1. FIG. 同実施の形態2に係る部品保持具を示した斜視図である。It is the perspective view which showed the component holder which concerns on the same Embodiment 2. 同実施の形態2に係る部品保持具に部品を載置した状態を示した要部断面図である。It is principal part sectional drawing which showed the state which mounted the component in the component holder which concerns on the same Embodiment 2. FIG.

符号の説明Explanation of symbols

1 部品保持具
2 基材
3 非・弱粘着面
4 固定部
5 強粘着面
6 可動部
7 貫通孔
8 平面部
9 凸部
10 空洞部
11 部品
12 通気孔
1 Component holder 2 Base material 3 Non-weakly adhesive surface
4 Fixed part 5 Strong adhesive surface
6 Movable part 7 Through hole 8 Plane part 9 Convex part 10 Cavity part 11 Component 12 Vent hole

Claims (3)

上面に非粘着若しくは弱粘着の非・弱粘着面を有する固定部の平面内に、前記固定部の上面よりも粘着力の大きな強粘着面を上面に有する可動部が配置され、部品取り付け前の初期設定時には前記可動部の上面が前記固定部の上面と同一若しくはより高い位置にあり、かつ、部品取り外し時には前記可動部の上面を前記固定部の上面より低い位置に変更する切替手段を有し、前記切替手段は、空洞部を備えたゴム状弾性体で前記可動部を構成し、前記空洞部内の空気を排出することにより前記可動部の上面の位置を変更するようにした部品保持具であって、
前記可動部は剛性を有する平板状の基材に固定される平面部と該平面部に連なる空洞部を有する凸部とからなり、前記固定部には前記可動部の凸部が収容される貫通孔が設けられており、前記基材には前記空洞部に連通する通気孔が設けられていることを特徴とする部品保持具。
A movable part having a strong adhesive surface on its upper surface, which has a higher adhesive force than the upper surface of the fixed part, is arranged in the plane of the fixed part having a non-adhesive or weakly adhesive non-weak adhesive surface on the upper surface, and before mounting the component. Switching means for changing the upper surface of the movable part to a position lower than the upper surface of the fixed part when removing a component. The switching means includes a rubber-like elastic body having a hollow portion, and the movable portion is configured to change the position of the upper surface of the movable portion by discharging the air in the hollow portion. Because
The movable portion includes a flat portion fixed to a rigid flat plate-like base material and a convex portion having a hollow portion connected to the flat portion, and the fixed portion penetrates the convex portion of the movable portion. A component holder , wherein a hole is provided, and a vent hole communicating with the cavity is provided in the base material .
上面に非粘着若しくは弱粘着の非・弱粘着面を有する固定部の平面内に、前記固定部の上面よりも粘着力の大きな強粘着面を上面に有する可動部が配置され、部品取り付け前の初期設定時には前記可動部の上面が前記固定部の上面と同一若しくはより高い位置にあり、かつ、部品取り外し時には前記可動部の上面を前記固定部の上面より低い位置に変更する切替手段を有し、前記切替手段は、空洞部を備えたゴム状弾性体で前記可動部を構成し、前記空洞部内の空気を排出することにより前記可動部の上面の位置を変更するようにした部品保持具であって、
前記固定部と前記可動部とはゴム状弾性体で一体成形し、かつ、前記固定部の一部を切り欠いた空洞部を形成して前記可動部を構成したものが剛性を有する平板状の基材に前記固定部の下面で固定されており、前記基材には前記空洞部に連通する通気孔が設けられていることを特徴とする部品保持具。
In the plane of the fixed part having a non-adhesive or weakly adhesive non-weak adhesive surface on the upper surface, a movable part having a strong adhesive surface on the upper surface with a higher adhesive force than the upper surface of the fixed part is disposed, There is switching means for changing the upper surface of the movable part to a position lower than the upper surface of the fixed part when removing the parts, and the upper surface of the movable part is at the same or higher position than the upper surface of the fixed part at the time of initial setting. The switching means is a component holder in which the movable portion is configured by a rubber-like elastic body having a hollow portion, and the position of the upper surface of the movable portion is changed by discharging air in the hollow portion. There,
The fixed part and the movable part are integrally formed of a rubber-like elastic body, and a hollow part in which a part of the fixed part is cut out to form the movable part is a flat plate having rigidity. A component holder, wherein the component holder is fixed to a base material at a lower surface of the fixing portion, and the base material is provided with a vent hole communicating with the hollow portion .
前記空洞部内に、連続気泡構造のスポンジを収容したことを特徴とする請求項1または2に記載の部品保持具。 The component holder according to claim 1, wherein a sponge having an open cell structure is accommodated in the hollow portion .
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JP2013105779A (en) * 2011-11-10 2013-05-30 Shin Etsu Polymer Co Ltd Adhesion tray for manipulator
JP6281825B2 (en) * 2013-03-29 2018-02-21 株式会社クリエイティブテクノロジー Chuck device
JP6419635B2 (en) * 2014-04-23 2018-11-07 株式会社アルバック Holding device, vacuum processing device
JP6993908B2 (en) * 2018-03-09 2022-01-14 信越ポリマー株式会社 Tray holding jig
WO2020175401A1 (en) * 2019-02-28 2020-09-03 日東電工株式会社 Adhering device, transfer device using same, and transfer method
JP2023133649A (en) * 2020-08-05 2023-09-27 日東電工株式会社 Adhesion device and transfer device using the same

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