JP2005327758A - Part holder - Google Patents

Part holder

Info

Publication number
JP2005327758A
JP2005327758A JP2004141761A JP2004141761A JP2005327758A JP 2005327758 A JP2005327758 A JP 2005327758A JP 2004141761 A JP2004141761 A JP 2004141761A JP 2004141761 A JP2004141761 A JP 2004141761A JP 2005327758 A JP2005327758 A JP 2005327758A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
part
adhesive
holder
lt
member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004141761A
Other languages
Japanese (ja)
Other versions
JP4268091B2 (en )
Inventor
Atsushi Komori
Yugo Yako
雄吾 八子
敦 小森
Original Assignee
Shin Etsu Polymer Co Ltd
信越ポリマー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide a part holder to be used for processing or transportation of the part which can hold and secure a part by a sufficent holding force during processing or transportation and from which the part can be easily removed after completion thereof without damaging the part. <P>SOLUTION: The part holder is provided with an adhesive sheet member 8 having an adhesive part 12 on its upper surface and a vent hole 7 communicating with a space 10 formed by the adhesive sheet member 8 and a projected body 3 provided on a base 2, and a weak adhesive part having a weak adhesive force or a non-adhesive part 11 is formed on the upper surface of the adhesive sheet member 8 corresponding with the top of the projected body 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、シリコンウエハ、フレキシブルプリント基板、セラミックコンデンサー、コイルフィルター等の比較的小型の電子部品等を加工する際の保持又は加工後に搬送する際に用いる部品保持具に関する。 The present invention, a silicon wafer, a flexible printed circuit board, a ceramic capacitor, to the component holder to be used for transporting after holding or processing in processing relatively small electronic components such as coil filter.

従来から、シリコンウエハ、フレキシブルプリント基板、セラミックコンデンサー、コイルフィルター等の小型の電子部品のうち、薄板状のものは破損し易かったり、3次元形状のものは転倒し易いため、その加工中においては保持具に固定して、研磨、パターニング、ダイシング等の加工を行っている。 Conventionally, a silicon wafer, a flexible printed circuit board, ceramic capacitors, of small electronic components such as a coil filter, or those thin plate of Yasuka' damaged, because the easily fall a three-dimensional shape, in that during processing fixed to the holder, are carried out polishing, patterning, machining such as dicing. そして、複数の加工が別の場所で行われる小型の電子部品にあっては、その工程間の電子部品の搬送に際しても保持具に固定した状態で移動される。 Then, in the small electronic component in which a plurality of machining are carried out elsewhere, it is moved while fixing the holder also when transporting the electronic component between the steps. つまり、このような部品保持具にあっては、加工中及び搬送中において電子部品が勝手に移動して重なり合ったり、転倒しないように固定され、電子機器本体に組み込むための組立作業時には容易に取り外し可能であることが要求される。 That, in such a component holder, or overlapping the electronic component without permission move during processing and during transport, is fixed so as not to fall, easily removed during assembly work for incorporating the electronic apparatus body it is required can be.

このような部品保持具としては、従来から、ベース材の表面に高さの等しい凸状体を多数形成し、この凸状体上に電子部品を載置し真空吸着するタイプの保持具がある(特許文献1を参照のこと)。 Such component holder, conventionally, the height equal convex body is formed in a large number on the surface of the base material, there is mounted to the type of holder for vacuum adsorbing the electronic component on the convex body on (see Patent Document 1). また、表面が粘着性を有する弾性部材で構成され、その粘着力により部品をその弾性部材表面に密着保持する保持具(特許文献2を参照のこと)がある。 The surface is formed of an elastic material having tackiness, the there is adhesion holder for adhesion holding the component in its elastic member surface by (see Patent Document 2).

以上のような従来の部品保持具のうち、真空吸着タイプのものについては、加工中常に吸引状態を保つ必要があり、保持具自体の構造、製法が複雑で高価なものであった。 Among the above-described conventional component holder, for those of the vacuum suction type, it is necessary to keep constantly suction state during processing, the structure of the holder itself, preparation was a complex and expensive. また、表面が粘着性を有する弾性部材で構成されたものについては、その弾性部材表面全体に粘着力があり、すべての位置において部品が密着してしまうため、粘着面との接触表面積が大きい部品の場合には取り外し難かった。 Also, for those whose surface is formed of an elastic material having adhesiveness, has its adhesive to the entire elastic member surface forces, because the parts will be in close contact at all positions, a large surface area contact between the adhesive surface parts in the case of it was removed hardly. そのため、取り外しの際に部品を保持具自体に衝突させてしまうことが生じ、特に部品が電子部品の場合には割れや欠け等の破損事故を起こすおそれがあった。 Therefore, it occurs that would collide with the holder itself part during removal, especially when parts of the electronic components there is a risk of damage accident such as cracking or chipping. また、電子チップ等の小さな塊状のものにおいては、粘着性を有する弾性部材表面から取り外す場合に、ヘラ状物でスクレープするが、その際弾性部材の表面が削られることになり保持具自体の耐久性が劣るという問題があった。 Further, in those small massive electronic chips and the like, when removed from the resilient member surface having tackiness, although scraping with a spatula-like material, the durability of the holder itself will be the surface of the case the elastic member is cut there is a problem that sex is inferior.
特開2000−286329号公報 JP 2000-286329 JP 特公平07−093247号公報 Kokoku 07-093247 Patent Publication No.

そこで、この発明は、加工中又は搬送中には十分な保持力で部品を保持固定でき、完成後には部品を容易に取り外すことのできて、部品を破損させることのない、部品の加工及び搬送に使用する部品保持具を提供することを課題としている。 Accordingly, the invention is in or in the conveying process can hold fix the parts with sufficient holding force, after completion made of removing the part easily, without damaging the parts, parts of the processing and transport It has an object to provide a component holder to be used for.

以上のような課題を実現するため、請求項1に係る部品保持具は、上面に少なくとも一つの凸状体を有するベース部と、前記凸状体と隔ててその外側を囲う周壁部と、前記凸状体の頂部及び前記周壁部の頂部と下面で密着固定し、かつ上面に粘着部を有する粘着シート部材と、該粘着シート部材と前記ベース部及び前記周壁部によって形成される空隙部に連通する通気孔を備えた部品保持具であって、前記凸状体の頂部と対応させた前記粘着シート部材の上面部位には、前記粘着部よりも弱い粘着力を有する弱粘着部又は非粘着部を形成されており、前記空隙部内の気体を前記通気孔を介して外部から吸引することで、前記粘着シート部材の前記空隙部に対応する部位が前記ベース部の下面側に弾性変形するようにしたことを特徴としている To achieve the above problems, the component holder according to claim 1, a base portion having at least one convex body to the upper surface, a peripheral wall portion surrounding the outer separating said convex body, the closely fixed at the top and bottom surfaces of the top and the peripheral wall portion of the convex body, and an adhesive sheet member having an adhesive portion on the upper surface, communicating with the air gap formed by the PSA sheet member the base portion and the peripheral wall a component holder having a vent hole for said made to correspond with the top of the convex body to the upper surface portion of the pressure-sensitive adhesive sheet member, the weak adhesive portion having a weaker adhesive force than the adhesive portion or the non-adhesive portion It is formed, and the gas in the gap portion by suction from the outside through the vent hole, so a portion corresponding to the gap portion of the adhesive sheet member is elastically deformed to the lower surface side of the base portion It is characterized in that the

請求項2に記載の発明は、請求項1に記載の構成に加え、前記粘着シート部材の下面には、前記空隙部を埋めて前記粘着シート部材の下面に密着する連続気泡構造からなる弾性部材を設けていることを特徴としている。 Invention according to claim 2, in addition to the structure according to claim 1, the lower surface of the adhesive sheet member, the elastic member comprising a continuous pore structure in close contact with the lower surface of the adhesive sheet member fills the gap portion It is characterized in that are provided.

請求項3に記載の発明は、請求項1又は2に記載の構成に加え、前記粘着シート部材は、シリコーンゴムで形成されていることを特徴としている。 The invention according to claim 3, in addition to the configuration according to claim 1 or 2, wherein the adhesive sheet member is characterized by being formed by silicone rubber.

この発明は以上のような構成を有するため、請求項1に記載の発明によれば、部品の加工時或いは搬送時には粘着シート部材の表面の粘着部でしっかりと保持されるので、部品が移動して部品同士が重なり合ったり、転倒するようなことがない。 Since this invention having the structure described above, according to the invention described in claim 1, since the time of processing or during transportation of the components are securely held in the adhesive portion of the surface of the adhesive sheet member, the component is moved or overlapping parts between Te, there is no such thing as the fall. また、組立等の際の部品を保持具から取り外すときには、ベース部に設けられた通気孔を介して空隙部の気体を吸引することで、粘着シート部材の上面の粘着部に対応した部位がベース部の下面側に弾性変形して部品から引き剥がされる。 Also, when removing the parts during assembly or the like from the holder, by sucking the gas in the gap portion through the vent hole provided in the base portion, a portion corresponding to the adhesive portion of the upper surface of the pressure-sensitive adhesive sheet member base It is peeled off from the component to elastically deform the lower surface of the parts. このとき、部品が接触している粘着シート部材の上面は、凸状体に対応した弱粘着部又は非粘着部の部位であるから、粘着部の強い粘着力に打ち勝つための力を必要とせずに部品を取り外すことができるので、誤って部品を部品保持具に当てて破損させるようなことがない。 At this time, the upper surface of the adhesive sheet member parts are in contact, because a portion of the low-adhesion portion or the non-adhesive portion corresponding to the convex body, without the need for force to overcome the strong adhesion of the adhesive portion in it is possible to remove the parts, accidentally there is no such thing as cause damage against the parts to the component holder is.

請求項2に記載の発明によれば、請求項1の発明の効果に加えて、空隙部を弾性部材が埋めているため、空隙内の気体の吸引を解除した場合に、弾性部材の復元力により粘着シート部材の形態が迅速に初期状態に復帰できることになるから、保持具への部品の取り付け取り外し作業のサイクルタイムを短くすることできる。 According to the invention described in claim 2, in addition to the effect of the invention of claim 1, since the gap portion elastic member fills, when releasing the suction of the gas in the gap, the restoring force of the elastic member adhesive because the form of the sheet member will be quickly returned to the initial state can be shorten the cycle time of the installation and removal operations of the parts of the holder by. そのため、部品の生産性を上げることができる。 Therefore, it is possible to increase the component of productivity.

請求項3に記載の発明によれば、請求項1又は2に記載の発明の効果に加えて、シリコーンゴムを粘着シート部材として利用しているため、粘着シート部材の上面に紫外線照射等の簡単な処理で非粘着部を形成できると共に、シリコーンゴム自体が耐久性材料であるため、安価で耐久性に優れてた部品保持具を提供することができる。 According to the invention described in claim 3, in addition to the effect of the invention according to claim 1 or 2, since the use of silicone rubber as an adhesive sheet member, simple ultraviolet irradiation or the like to the upper surface of the pressure-sensitive adhesive sheet member it is possible to form a non-adhesive portion at Do process, since silicone rubber itself is a durable material, it is possible to provide a component holder which has excellent durability at low cost.

以下、この発明の実施の形態に係る部品保持具について、図面に従って説明する。 Hereinafter, the component holder according to the embodiment of the present invention will be described with reference to the accompanying drawings.

この発明の実施の形態に係る部品保持具1は、図1乃至3に示したように、矩形状の剛性を有するベース部2の上面に同一の高さの複数の凸状体3が形成されている。 Component holder 1 according to the embodiment of the invention, as shown in FIGS. 1 to 3, the base portion identical to the upper surface of the second height plurality of convex member 3 having a rectangular rigid formed ing. また、ベース部2の上面には、凸状体3と距離を置いて、凸状体3の周りを囲むようにして凸状体3の高さと等しい高さを有する周壁部4が形成されている。 On the upper surface of the base portion 2, at a convex body 3 and the distance, the peripheral wall portion 4 having a height equal to the height of the convex body 3 so as to surround the convex member 3 is formed. この周壁部4及び凸状体3は、ベース部2を加工してベース部2と一体に形成してもよいし、或いは別々に加工された凸状体3及び周壁部4をベース部2の表面に接着固定して一体化してもよい。 The peripheral wall 4 and the convex member 3 may be formed integrally with the base portion 2 by processing a base portion 2, or separately processed convex body 3 and the peripheral wall portion 4 of the base section 2 it may be integrated by bonding fixed to the surface.

隣り合う凸状体3同士の間の隙間5には、この隙間5を埋めるようにして連続気泡構造の弾性部材6が設けられており、ベース部2には弾性部材6と連通する通気孔7が設けられている。 The gap 5 between the convex member 3 adjacent, the vent hole 7 the gap 5 the fill way and the elastic member 6 provided in the open-cell structure, the base unit 2 that communicates with the elastic member 6 It is provided.

ベース部2に形成される通気孔7は、弾性部材6に内包される気体を吸引するためのものであり、弾性部材6中の気泡連続性の不完全さを補う目的や、吸引効率の向上を目的として、複数個形成することが好ましく、また、大きさは、小さすぎると吸引効率が悪くなり、また、大きすぎると後述する粘着シート部材8の平面性の形成に悪影響を及ぼすおそれがあるため、弾性部材6に接する側の面において直径が0.2〜3mm程度とすることがよい。 Vent 7 formed in the base unit 2 is for sucking a gas to be encapsulated in the elastic member 6, improves objects and suction efficiency to compensate for the cell opening of the imperfections in the elastic member 6 purposes, it is preferable to plural number, also, the size is, the suction efficiency is too small it is poor, also can adversely affect the formation of the plane of the adhesive sheet member 8 to be described later too big Therefore, the diameter at the surface on the side in contact with the elastic member 6 may be about 0.2 to 3 mm. 部品Pの密着を解除する際に吸引テーブル9側となる面における通気孔7の大きさは、吸引効率、吸引テーブル9の通気孔との位置合わせの容易さから大きい方が望ましい。 The size of the vent hole 7 in the surface to be the suction table 9 side when releasing the adhesion of the component P is sucked efficiency, it is preferably larger ease of alignment of the vent suction table 9. そこで、弾性部材6側の通気孔7の断面積を小さくし、吸引テーブル9側の通気孔7の断面積を大きくして、通気孔7の縦断面を台形状、ロート状とすることができる。 Therefore, the cross-sectional area of ​​the vent hole 7 of the elastic member 6 side is reduced, by increasing the cross-sectional area of ​​the vent hole 7 of the suction table 9 side, it is possible to the longitudinal section of the vent hole 7 trapezoid, a funnel-shaped . また、ほぼ全面がメッシュ状に形成された構造の吸引テーブル9を用いれば、特に正確な位置合わせを必要とせず取り扱いは容易である。 Further, it is almost the use the entire surface of the suction table 9 of structure formed in a mesh shape, it is easy to handle without requiring particularly accurate alignment.

通気孔7の断面形状は特に限定されるものではなく、円形、多角形、スリット状等適用可能であるが、加工の容易さからは円形が好ましい。 The cross-sectional shape of the vent hole 7 is not limited in particular, circular, polygonal, are possible slit shape or the like applied, the circular is preferred for ease of processing. また、ベース部2として多孔質セラミック等の多孔質板を用いれば、特段に孔加工をする必要はないが、この場合、側面は空気が漏れないように密閉することが望ましい。 Further, the use of the porous plate of a porous ceramic such as the base unit 2, it is not necessary to the hole processing in particular, this case, the side surface is desirably sealed to prevent air leakage.

通気孔7の形状は特に限定されるものではなく、円形、多角形、スリット状等適用可能であるが、加工の容易さからは円形が好ましい。 The shape of the vent hole 7 is not limited in particular, circular, polygonal, are possible slit shape or the like applied, the circular is preferred for ease of processing. また、ベース部2として多孔質セラミック等の多孔質板を用いれば、特段に孔加工をする必要はないが、この場合、側面は空気が漏れないように密閉することが望ましい。 Further, the use of the porous plate of a porous ceramic such as the base unit 2, it is not necessary to the hole processing in particular, this case, the side surface is desirably sealed to prevent air leakage.

凸状体3の頂部と周壁部4の頂部とは同一平面上に位置し、それらの上には上面が粘着性を有する粘着シート部材8が設けられている。 Located on the same plane with the top of the convex body 3 and the peripheral wall portion 4 of the top, the top surface on top of them the adhesive sheet member 8 are provided with an adhesive. これにより、凸状体3と周壁部4との隙間5と粘着シート部材8とで密閉された空隙部10が形成されることになる。 Thereby, the convex member 3 and the peripheral wall portion 4 and the gap portion 10 which is sealed with a gap 5 and the adhesive sheet member 8 are formed.

粘着シート部材8の下面は、凸状体3の頂部及び周壁部4の頂部と接着固定されている。 The lower surface of the adhesive sheet member 8 are bonded with the top of the convex body 3 and the top of the peripheral wall 4. 凸状体3の頂部に対応した凸状体3の直上の粘着シート部材8の上面には、凸状体3の頂部の平面形状とほぼ等しい形状をした弱粘着部又は非粘着部11が形成されている。 The upper surface of the pressure-sensitive adhesive sheet member 8 directly above the convex body 3 corresponding to the top portion of the convex body 3, the weak adhesive portion or the non-adhesive portion 11 has substantially the same shape as the planar shape of the top portion of the convex body 3 formed It is. 粘着シート部材8の下面と弾性部材6の上面とは密着していればよく、必ずしも互いが接着されていなくともよい。 It is sufficient to contact the lower surface and the upper surface of the elastic member 6 of the pressure-sensitive adhesive sheet member 8 may not necessarily have mutual adhesion. 要は、通気孔7から空隙部10内の気体を吸引した際に粘着シート部材8が弾性収縮し、吸引を解除したときの弾性部材6の弾性復元が容易であればよい。 In short, the adhesive sheet member 8 elastically shrink upon sucking the gas in the gap portion 10 from the vent holes 7 may be any easy elastic restoration of the elastic member 6 when releasing the suction.

空隙部10に充填される弾性部材6は、連続気泡を有する必要があるが、連続の程度は、ベース部2に設けられた通気孔7から吸引した際に、弾性部材6が十分に収縮する程度とすればよく、具体的には連泡率50%以上、好ましくは80%以上とすることがよい。 Elastic member 6 is filled in the gap portion 10, it is necessary to have an open cell, degree of continuous, when sucked through the ventilation holes 7 provided in the base unit 2, the elastic member 6 is fully contracted It may be the degree, specifically Ren'awaritsu least 50%, preferably from 80% or more.

弾性部材6は硬すぎると吸引に際して収縮しずらく、また、柔らかすぎると部品Pの平面を保持できなくなる恐れがあるため、JIS K6767で規定される圧縮硬さを0.001〜0.5MPaの範囲のものとすることが好ましい。 Elastic member 6 contracts when suction is too hard Zuraku, also, since there may not be too soft hold the plane of the component P, of 0.001~0.5MPa compression hardness defined by JIS K6767 it is preferably in the range of things.

弾性部材6の厚さは、厚すぎると吸引して密着を解除する際に時間を要し、薄すぎると十分な変位量が得られず、密着解除が十分になされない恐れがあるため、0.3〜5mmの範囲がよく、さらに好ましくは0.5〜3mmの範囲から選択するのがよい。 Because resilient thickness of the member 6, which takes time when releasing the adhesion by suction is too thick, sufficient amount of displacement is obtained is too thin, there is a possibility that adhesion release is not performed sufficiently, 0 range .3~5mm good, even more preferably it is chosen from the range of 0.5 to 3 mm.

粘着シート部材8の材質は、シリコーンゴム、フッ素ゴム、ウレタン系エラストマー、天然ゴム、スチレン−ブタジエン共重合エラストマー等の各種エラストマーを使用することが可能であるが、耐久性や耐候性に優れたシリコーンゴムを使用することが好ましい。 The material of the adhesive sheet member 8, silicone rubber, fluorine rubber, urethane elastomers, natural rubber, styrene - silicone it is possible to use various elastomers such as butadiene copolymer elastomers, having excellent durability and weather resistance it is preferred to use a rubber.

粘着シート部材8は、粘着シート部材8の上面に粘着部12と弱粘着部又は非粘着部11とが形成されており、ゴム硬度5〜60(JIS A)程度、厚さ0.05mm〜2mm程度のエラストマーからなり、中心線平均粗さ(JIS B0601)3.2μm以下程度に形成される。 Adhesive sheet member 8, the adhesive sheet the adhesive portion 12 on the upper surface of member 8 is weak and the adhesive portion or the non-adhesive portion 11 is formed, a rubber hardness 5 to 60 (JIS A) or so, a thickness 0.05mm~2mm consists extent of the elastomer, is formed on the degree center line average roughness (JIS B0601) 3.2 .mu.m or less.

粘着シート部材8のゴム硬度が、上述の範囲を下回ると、密着力が強くなり過ぎ、密着解除が十分になされない危険があり、逆に上述の範囲を上回ると、密着力が弱くなり、十分な保持力が得られないおそれがある。 Rubber hardness of the adhesive sheet member 8 falls below the above range, the adhesion force is too strong, there is a risk of contact release is not performed sufficiently, exceeds the range described above to the contrary, the adhesion is weak enough do retaining force may not be obtained. 粘着シート部材8の厚さが、上述の範囲を下回ると、粘着シート部材8自体の機械的強度が低下し、繰り返し耐久性に悪影響を与える恐れがあり、逆に上述の範囲を上回ると、凸状体3に十分追従しなくなり、粘着保持解除が十分になされないおそれがある。 The thickness of the pressure-sensitive adhesive sheet member 8 falls below the above range, the adhesive sheet member 8 mechanical strength itself is reduced, may adversely affect the repetition durability, it exceeds the range described above to the contrary, convex no longer sufficiently follow the shaped body 3, there is a risk that adhesive holding release is not performed sufficiently. 粘着シート部材6の密着保持面における表面粗さは、上述の範囲を上回ると、密着力が弱くなり、十分な保持力が得られないおそれがある。 Surface roughness of the contact holding surface of the adhesive sheet member 6 exceeds the range described above, adhesion is weak, there is a fear that sufficient holding force can not be obtained.

ベース部2は、樹脂材、金属材、セラミック材、ガラス材又はこれらの複合体を使用して板状に形成されている。 Base portion 2, a resin material, a metal material, a ceramic material, using a glass material or a composite thereof is formed in a plate shape. 厚さは、用途により適宜決定すればよいが、単に搬送目的であれば50μm程度以上の厚さがあれば十分であり、部品Pの研磨等の加工に使用する場合には、数mm程度の厚さに形成される。 The thickness may be suitably determined depending on applications, merely suffice thickness of at least about 50μm if transport purposes, when used in processing such as polishing of the component P is about several mm It is formed to a thickness.

ベース部2の上面に形成する凸状体3の形状、大きさ及び数等は、図4乃至図7に示したように、部品保持具1上に保持する部品Pの大きさ、形状或いは数等によって適宜選択すればよい。 The shape of the convex body 3 to be formed on the upper surface of the base portion 2, the size and Suto, as shown in FIGS. 4 to 7, the component P to be held on the component holder 1 size, shape or number it may be appropriately selected by like.

ベース部2の上面に形成する凸状体3の数は、図4のように一つのものから、図1又は図5乃至図7のように多数形成したものでもよい。 The number of convex body 3 to be formed on the upper surface of the base portion 2, from one of those as shown in FIG. 4, may be obtained by a number formed as shown in FIG. 1 or FIG. 5 to FIG. 7. ベース部2の上面に形成する凸状体3の平面形状は、図6に示したような格子状のもの、或いは図7のように複数の棒状ものであってもよい。 The planar shape of the convex body 3 to be formed on the upper surface of the base portion 2 are those lattice as shown in FIG. 6, or may be of a plurality of rod-shaped as shown in FIG. 図6に示した格子状のものにあっては凸状体3で区切られた各空隙部5には少なくとも通気孔7を一つ設けることになる。 Thereby providing one of at least the vent hole 7 in each gap portion 5 for the apparatus having grid separated by convex body 3 shown in FIG.

粘着シート部材8の上面の一部を弱粘着部又は非粘着部11とするには、図8に示したように、粘着性を有するシリコーンゴム材表面の粘着部12に離型フイルム(図示せず)を介在させてマスキング用部材13を粘着シート部材8の表面である粘着部12上に並べて、紫外線Sを照射し粘着シート部材8の粘着部12の粘着力を調整させる方法によればよい。 Adhesive part of the upper surface of the sheet member 8 in a weakly adhesive portion or the non-adhesive portion 11, as shown in FIG. 8, tacky adhesive portion 12 of the silicone rubber material surface releasing film (shown with not) a masking member 13 interposed therebetween are arranged on the adhesive portion 12 is the surface of the adhesive sheet member 8 may according to the method of adjusting the adhesive strength of the adhesive portion 12 of the adhesive sheet member 8 was irradiated with ultraviolet rays S .

なお、粘着シート部材8の上面に粘着部12と弱粘着部又は非粘着部11とを形成するには、紫外線Sを照射する以外に、(1)粘着部12の上面に粘着性の劣る粘着材(たとえば、シリコーン樹脂、フッ素樹脂、ウレタン樹脂等)又は粘着性のない非粘着材をコーティングする方法、(2)弱粘着部又は非粘着部11を形成する部分の粘着部12の上面の表面粗さを大きくする方法、(3)粘着シート部材8の代わりに全体を弱粘着シート材又は非粘着シート部材とし、その上面に粘着材をコーティングすることで粘着部12を形成する方法等が挙げられる。 In order to form a pressure-sensitive portion 12 and the weak adhesive portion or the non-adhesive portion 11 on the upper surface of the adhesive sheet member 8, in addition to irradiation of ultraviolet rays S, inferior adhesion on the upper surface of (1) the adhesive portion 12 adhesive material (e.g., silicone resin, fluorine resin, urethane resin, etc.) or a method of coating a non-tacky non-adhesive material, (2) a weak adhesive portion or surface of the upper surface of the adhesive portion 12 of the part forming the non-adhesive portion 11 how to roughness increases, (3) pressure-sensitive in its entirety instead of the sheet member 8 and the weak pressure-sensitive adhesive sheet material or non-adhesive sheet member, and a method is mentioned for forming the pressure-sensitive portion 12 by coating an adhesive material on its upper surface It is.

この発明の実施の形態に係る部品保持具1は、上記のように構成されているので、部品保持具1の粘着シート部材8の上面の粘着部12に保持固定された部品Pを取り外すには、部品保持具1を吸引テーブル9上にセットして、ベース部2に設けられた通気孔7を介して空隙部10を埋めている弾性部材6中の気体を吸引すると、弾性部材6は高さ方向に収縮して、この上に配設された粘着シート部材8は凸状体3の外形に追従して変形し、部品Pの下面と粘着シート部材8との間に空間が形成される。 Component holder 1 according to the embodiment of the invention, which is configured as described above, to remove the component P held fixed to the adhesive portion 12 of the upper surface of the pressure-sensitive adhesive sheet member 8 of the component holders 1 , by setting the component holders 1 on the suction table 9 and through the ventilation holes 7 provided in the base unit 2 sucks the gas in the elastic member 6 that fills the gap portion 10, the elastic member 6 is high to contract in a direction to, a space is formed between the adhesive sheet member 8 which is disposed on this is deformed following the contour of the convex body 3, the lower surface of the component P and the pressure-sensitive adhesive sheet member 8 . さらに、この凸状体3の頂部と対応する部位の粘着シート部材8の上面部位には弱粘着部又は非粘着部11が形成されているので、部品Pは弱粘着部又は非粘着部11で支えられた状態になるため、粘着シート部材8の上面と部品Pとの粘着保持力は弱められ又は完全に解除される。 Furthermore, since there is formed a low adhesive portion or the non-adhesive portion 11 on the upper surface portion of the adhesive sheet member 8 of the portion corresponding to the top of the convex member 3, parts P in the weak adhesive portion or the non-adhesive portion 11 to become a supported state, adhesive holding force between the upper surface and the component P of the adhesive sheet member 8 are weakened or completely canceled. したがって、この状態では粘着シート部材8から部品Pを容易に取り外すことができるから、取り外し作業中に誤って部品Pを部品保持具1に当ててしまうことがなくなり、結果として、部品を破損することない。 Thus, since in this state can be removed component P easily from the adhesive sheet member 8, it is not possible to accidentally during removal operations would hit the part P to the component holder 1, as a result, can damage the components Absent.

なお、上記実施の形態では、吸引を解除した際の粘着シート部材8の弾性復元の時間を速めるため、又は粘着シート部材8の平坦度を維持するために、粘着シート部材8の粘着部12の直下に位置する空隙部10に連続気泡構造からなる弾性部材6を充填しているが、弾性部材6を使用するか否かは、使用する部品の形状、大きさ、数とベース部2に形成する凸状体3及び周壁部4の形状、大きさ、数との関係の他、粘着シート部材8の弾性性能等を勘案して、適宜決定すればよい。 In the above embodiment, to accelerate the time of elastic return of the pressure-sensitive adhesive sheet member 8 at the time of releasing the suction, or to maintain the flatness of the adhesive sheet member 8, the adhesive portion 12 of the adhesive sheet member 8 While filling the elastic member 6 to the gap portion 10 made of open cell structure located immediately under, whether to use the elastic member 6, forming the shape of the components used, the size, the number and the base unit 2 the shape of the convex body 3 and the peripheral wall 4 to the size, other relationships between the number, in view of the elastic performance of the adhesive sheet member 8 may be suitably determined. 部品Pがシリコンウエハのようにある程度の大きさをした薄板状のものであって、部品Pを支える凸状体3の数及び凸状体3同士の隙間5を狭くした場合には、その隙間5にできる空隙部10に弾性部材6を充填しなくとも使用できる。 Be one component P is thin plate-shaped that a certain size such as a silicon wafer, when narrowing the number and convex body 3 gap 5 between the convex member 3 for supporting the component P is the gap the gap portion 10 which can be five usable without filling the elastic member 6.

また、粘着シート部材8を導電性材料で成形すれば、保持される電子部品等に対する静電対策が可能となる。 Also, if forming a pressure-sensitive adhesive sheet member 8 of a conductive material, the electrostatic protection is possible for electronic components to be retained.

この発明の実施の形態に係る部品保持具を示した要部平面図である。 It is a fragmentary plan view showing a component holder according to the embodiment of the present invention. 同実施の形態に係る部品保持具に部品を保持した状態を示した図1のA−A線に沿った要部拡大断面図である。 It is an enlarged sectional view taken along the line A-A of Figure 1 showing the state of holding the components in component holder according to the embodiment. 同実施の形態に係る部品保持具に保持した部品を取り外すために粘着部の保持力を解除した状態を示した図1のA−A線に沿った要部拡大断面図である。 It is an enlarged sectional view taken along the line A-A of Figure 1 showing a state releasing the holding force of the adhesive portion in order to remove the component held in the component holder according to the embodiment. 同実施の形態に係る部品保持具のベース部の異なる態様を示した概略図であり、(a)はその平面図、(b)はそのA−A線に沿った断面図である。 Is a schematic diagram showing different aspects of the base portion of the component holder according to the embodiment, (a) represents the plan view, (b) is a sectional view taken along the line A-A. 同実施の形態に係る部品保持具のベース部のさらに異なる態様を示した概略図であり、(a)はその平面図、(b)はそのA−A線に沿った断面図である。 It is a schematic view showing a further different embodiment of the base portion of the component holder according to the embodiment, (a) represents the plan view, (b) is a sectional view taken along the line A-A. 同実施の形態に係る部品保持具のベース部のさらに異なる態様を示した概略図であり、(a)はその平面図、(b)はそのA−A線に沿った断面図である。 It is a schematic view showing a further different embodiment of the base portion of the component holder according to the embodiment, (a) represents the plan view, (b) is a sectional view taken along the line A-A. 同実施の形態に係る部品保持具のベース部のさらに異なる態様を示した概略図であり、(a)はその平面図、(b)はそのA−A線に沿った断面図である。 It is a schematic view showing a further different embodiment of the base portion of the component holder according to the embodiment, (a) represents the plan view, (b) is a sectional view taken along the line A-A. 同実施の形態に係る粘着シート部材の上面に非粘着部を形成するためにマスキング材をセットした状態を示した要部拡大断面の概念図である。 It is a conceptual view of a main part enlarged cross section showing a state where the set masking material to form a non-adhesive portion on the upper surface of the pressure-sensitive adhesive sheet member according to the embodiment.

符号の説明 DESCRIPTION OF SYMBOLS

1 部品保持具 2 ベース部 3 凸状体 4 周壁部 5 隙間 1 component holder 2 base unit 3 convex body 4 wall portion 5 a gap
6 弾性部材 7 通気孔 8 粘着シート部材 9 吸引テーブル 10 空隙部 11 非粘着部 12 粘着部 13 マスキング用部材 P 部品 S 紫外線 6 elastic members 7 vents 8 adhesive sheet member 9 suction table 10 the gap portion 11 non-adhesive portion 12 the adhesive portion 13 masking member P component S UV

Claims (3)

  1. 上面に少なくとも一つの凸状体を有するベース部と、前記凸状体と隔ててその外側を囲う周壁部と、前記凸状体の頂部及び前記周壁部の頂部と下面で密着固定し、かつ上面に粘着部を有する粘着シート部材と、該粘着シート部材と前記ベース部及び前記周壁部によって形成される空隙部に連通する通気孔を備えた部品保持具であって、 A base portion having at least one convex body to the upper surface, a peripheral wall portion surrounding the outer separating said convex member, and closely fixed at the top and bottom surfaces of the top and the peripheral wall portion of the convex body and the top surface adhesive sheet and the member, a component holder having a vent hole communicating with the air gap formed by the PSA sheet member said base portion and said peripheral wall having an adhesive portion,
    前記凸状体の頂部と対応させた前記粘着シート部材の上面部位には、前記粘着部よりも弱い粘着力を有する弱粘着部又は非粘着部を形成されており、前記空隙部内の気体を前記通気孔を介して外部から吸引することで、前記粘着シート部材の前記空隙部に対応する部位が前記ベース部の下面側に弾性変形するようにしたことを特徴とする部品保持具。 An upper surface portion of the adhesive sheet member made to correspond with the top of the convex body, the adhesive portion is formed a weak adhesive portion or the non-adhesive portion having a weaker adhesive force than the gas in the gap portion by sucked from the outside through the vent hole, the component holder, characterized in that a portion corresponding to the gap portion of the adhesive sheet member was made to elastically deform the lower surface side of the base portion.
  2. 前記粘着シート部材の下面には、前記空隙部を埋めて前記粘着シート部材の下面に密着する連続気泡構造からなる弾性部材を設けていることを特徴とする請求項1に記載の部品保持具。 The adhesive on the lower surface of the sheet member, the component holder according to claim 1, characterized in that an elastic member made of open cell structure in close contact with the lower surface of the adhesive sheet member fills the gap portion.
  3. 前記粘着シート部材は、シリコーンゴムで形成されていることを特徴とする請求項1又は2に記載の部品保持具。 The adhesive sheet member, the component holder according to claim 1 or 2, characterized in that it is formed of silicone rubber.
JP2004141761A 2004-05-12 2004-05-12 Component holder Active JP4268091B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004141761A JP4268091B2 (en) 2004-05-12 2004-05-12 Component holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004141761A JP4268091B2 (en) 2004-05-12 2004-05-12 Component holder

Publications (2)

Publication Number Publication Date
JP2005327758A true true JP2005327758A (en) 2005-11-24
JP4268091B2 JP4268091B2 (en) 2009-05-27

Family

ID=35473886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004141761A Active JP4268091B2 (en) 2004-05-12 2004-05-12 Component holder

Country Status (1)

Country Link
JP (1) JP4268091B2 (en)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007073802A (en) * 2005-09-08 2007-03-22 Shin Etsu Polymer Co Ltd Component holder
JP2007157822A (en) * 2005-12-01 2007-06-21 Shin Etsu Polymer Co Ltd Adhesive sheet and holding jig
JP2007168025A (en) * 2005-12-22 2007-07-05 Lintec Corp Holding table, processing device of held article and processing device of semiconductor wafer
JP2007201173A (en) * 2006-01-26 2007-08-09 Shin Etsu Polymer Co Ltd Suction jig
JP2007220935A (en) * 2006-02-17 2007-08-30 Shin Etsu Polymer Co Ltd Fixed carrier
JP2007250738A (en) * 2006-03-15 2007-09-27 Lintec Corp Holding fixture and method of grinding semiconductor wafer
JP2008141065A (en) * 2006-12-04 2008-06-19 Lintec Corp Carrying device, sheet pasting apparatus using the same and sheet peeling apparatus
JP2008162240A (en) * 2007-01-05 2008-07-17 Fujicopian Co Ltd Adhesion sheet
JP2009023725A (en) * 2007-07-24 2009-02-05 Shin Etsu Polymer Co Ltd Component holder
JP2009054676A (en) * 2007-08-24 2009-03-12 Shin Etsu Polymer Co Ltd Holding tool, set of holding tools, and small component holding device
JP2009105226A (en) * 2007-10-23 2009-05-14 Daisho Denshi:Kk Holding tool, detachment auxiliary device, article conveying accommodation and article detaching method
JP2009170780A (en) * 2008-01-18 2009-07-30 Miraial Kk Wafer storage container with cushion sheet
JP2009196708A (en) * 2008-01-21 2009-09-03 Nec Engineering Ltd Chip storage tray
JP2010010205A (en) * 2008-06-24 2010-01-14 Shin Etsu Polymer Co Ltd Tray jig
JP2010067761A (en) * 2008-09-10 2010-03-25 Shin Etsu Polymer Co Ltd Substrate-supporting jig
JP2010222021A (en) * 2009-03-23 2010-10-07 Shin Etsu Polymer Co Ltd Adhesive holding tray
JP2011159936A (en) * 2010-02-04 2011-08-18 Shin Etsu Polymer Co Ltd Substrate holder and method of manufacturing the same
JP2012169405A (en) * 2011-02-14 2012-09-06 Shin Etsu Polymer Co Ltd Holding jig
JP2012195609A (en) * 2006-07-07 2012-10-11 Erich Thallner Handling device and handling method for wafer
JP2013105779A (en) * 2011-11-10 2013-05-30 Shin Etsu Polymer Co Ltd Adhesion tray for manipulator
WO2013161119A1 (en) * 2012-04-27 2013-10-31 Towa株式会社 Vacuum suction sheet for singulation device, and method for producing fixing tool

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007073802A (en) * 2005-09-08 2007-03-22 Shin Etsu Polymer Co Ltd Component holder
JP4671817B2 (en) * 2005-09-08 2011-04-20 信越ポリマー株式会社 Component holder
JP2007157822A (en) * 2005-12-01 2007-06-21 Shin Etsu Polymer Co Ltd Adhesive sheet and holding jig
JP2007168025A (en) * 2005-12-22 2007-07-05 Lintec Corp Holding table, processing device of held article and processing device of semiconductor wafer
JP2007201173A (en) * 2006-01-26 2007-08-09 Shin Etsu Polymer Co Ltd Suction jig
JP2007220935A (en) * 2006-02-17 2007-08-30 Shin Etsu Polymer Co Ltd Fixed carrier
JP2007250738A (en) * 2006-03-15 2007-09-27 Lintec Corp Holding fixture and method of grinding semiconductor wafer
JP2012195609A (en) * 2006-07-07 2012-10-11 Erich Thallner Handling device and handling method for wafer
JP2008141065A (en) * 2006-12-04 2008-06-19 Lintec Corp Carrying device, sheet pasting apparatus using the same and sheet peeling apparatus
JP2008162240A (en) * 2007-01-05 2008-07-17 Fujicopian Co Ltd Adhesion sheet
JP2009023725A (en) * 2007-07-24 2009-02-05 Shin Etsu Polymer Co Ltd Component holder
JP2009054676A (en) * 2007-08-24 2009-03-12 Shin Etsu Polymer Co Ltd Holding tool, set of holding tools, and small component holding device
JP2009105226A (en) * 2007-10-23 2009-05-14 Daisho Denshi:Kk Holding tool, detachment auxiliary device, article conveying accommodation and article detaching method
JP2009170780A (en) * 2008-01-18 2009-07-30 Miraial Kk Wafer storage container with cushion sheet
JP2009196708A (en) * 2008-01-21 2009-09-03 Nec Engineering Ltd Chip storage tray
JP4697615B2 (en) * 2008-01-21 2011-06-08 Necエンジニアリング株式会社 Chip holding tray
JP2010010205A (en) * 2008-06-24 2010-01-14 Shin Etsu Polymer Co Ltd Tray jig
JP2010067761A (en) * 2008-09-10 2010-03-25 Shin Etsu Polymer Co Ltd Substrate-supporting jig
JP2010222021A (en) * 2009-03-23 2010-10-07 Shin Etsu Polymer Co Ltd Adhesive holding tray
JP2011159936A (en) * 2010-02-04 2011-08-18 Shin Etsu Polymer Co Ltd Substrate holder and method of manufacturing the same
JP2012169405A (en) * 2011-02-14 2012-09-06 Shin Etsu Polymer Co Ltd Holding jig
JP2013105779A (en) * 2011-11-10 2013-05-30 Shin Etsu Polymer Co Ltd Adhesion tray for manipulator
WO2013161119A1 (en) * 2012-04-27 2013-10-31 Towa株式会社 Vacuum suction sheet for singulation device, and method for producing fixing tool
JP2013232450A (en) * 2012-04-27 2013-11-14 Towa Corp Vacuum adsorption sheet for individualization apparatus and manufacturing method of fixing jig using the same
CN104245234A (en) * 2012-04-27 2014-12-24 东和株式会社 Vacuum suction sheet for singulation device, and method for producing fixing tool
KR20150002858A (en) * 2012-04-27 2015-01-07 토와 가부시기가이샤 Vacuum suction sheet for singulation device, and method for producing fixing tool
CN104245234B (en) * 2012-04-27 2016-06-08 东和株式会社 The method of manufacturing a singulation apparatus by vacuum suction plate and the fixing jig
KR101665840B1 (en) * 2012-04-27 2016-10-12 토와 가부시기가이샤 Vacuum suction sheet for singulating device, and method for producing fixing jig

Also Published As

Publication number Publication date Type
JP4268091B2 (en) 2009-05-27 grant

Similar Documents

Publication Publication Date Title
US6465329B1 (en) Microcircuit die-sawing protector and method
US6846692B2 (en) Method of fabricating devices incorporating microelectromechanical systems using UV curable tapes
WO2006073098A1 (en) Method and device for breaking work, method for scribing and breaking work, and scribing device with breaking function
JP2005322815A (en) Manufacturing apparatus and manufacturing method of semiconductor apparatus
JP2004186352A (en) Semiconductor device and its manufacturing method
US20120028438A1 (en) Method for separating a layer system comprising a wafer
US7462551B2 (en) Adhesive system for supporting thin silicon wafer
JP2002059363A (en) Wafer base material
JP2004128115A (en) Decompression fixing film, wafer protection film, dicing film, and manufacturing method of semiconductor device
US7169248B1 (en) Methods for releasably attaching support members to microfeature workpieces and microfeature assemblies formed using such methods
JP2006318984A (en) Stationary carrier and manufacturing method thereof
US20060051935A1 (en) Method of separating MEMS devices from a composite structure
JP2007157847A (en) Chucking device
JP2005302982A (en) Process for producing semiconductor chip
JP2005072496A (en) Substrate holder
JP2005116678A (en) Semiconductor wafer separating method and separating device using same
US20120168089A1 (en) Tool for picking a planar object from a supply station
JP2006000930A (en) Component holder
JP2005093938A (en) Substrate holder
JP2010056341A (en) Supporting device
US20030073264A1 (en) Method of manufacturing semiconductor device from semiconductor wafer having thick peripheral portion
JP2001007179A (en) Method and device for peeling article fixed to double face adhesive sheet
JPH08115897A (en) Adhesive tape and method for removing foreign matter from semiconductor wafer
JP2005216948A (en) Method and device for manufacturing semiconductor device
JP2002211498A (en) Method of bonding solar battery panel, and solar battery panel

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060912

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090204

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090210

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090219

R150 Certificate of patent (=grant) or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120227

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120227

Year of fee payment: 3

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150227

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250