TW201226912A - Array test apparatus - Google Patents

Array test apparatus Download PDF

Info

Publication number
TW201226912A
TW201226912A TW100124118A TW100124118A TW201226912A TW 201226912 A TW201226912 A TW 201226912A TW 100124118 A TW100124118 A TW 100124118A TW 100124118 A TW100124118 A TW 100124118A TW 201226912 A TW201226912 A TW 201226912A
Authority
TW
Taiwan
Prior art keywords
probes
probe
signal generator
electrical signal
electrodes
Prior art date
Application number
TW100124118A
Other languages
English (en)
Chinese (zh)
Inventor
Jung-Hee Park
Original Assignee
Top Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Top Eng Co Ltd filed Critical Top Eng Co Ltd
Publication of TW201226912A publication Critical patent/TW201226912A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Theoretical Computer Science (AREA)
TW100124118A 2010-12-30 2011-07-07 Array test apparatus TW201226912A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100139192A KR101234088B1 (ko) 2010-12-30 2010-12-30 어레이 테스트 장치

Publications (1)

Publication Number Publication Date
TW201226912A true TW201226912A (en) 2012-07-01

Family

ID=46347758

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100124118A TW201226912A (en) 2010-12-30 2011-07-07 Array test apparatus

Country Status (3)

Country Link
KR (1) KR101234088B1 (ko)
CN (1) CN102540509A (ko)
TW (1) TW201226912A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI674412B (zh) * 2018-10-29 2019-10-11 致茂電子股份有限公司 晶圓測試載盤與晶圓測試裝置

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8970245B2 (en) 2012-09-26 2015-03-03 Shenzhen China Star Optoelectronics Technology Co., Ltd. Probing device for TFT-LCD substrate
CN102929005B (zh) * 2012-09-26 2016-03-30 深圳市华星光电技术有限公司 Tft-lcd基板的探测装置
CN103345077B (zh) * 2013-06-19 2016-03-09 深圳市华星光电技术有限公司 液晶显示模组的质量检测装置及其使用方法
KR102070056B1 (ko) * 2013-10-11 2020-01-28 엘지디스플레이 주식회사 유기전계발광 표시소자의 검사시스템 및 방법
KR102317069B1 (ko) * 2015-03-25 2021-10-25 삼성디스플레이 주식회사 표시 장치의 어레이 시험 장치 및 시험 방법
KR102386205B1 (ko) 2015-08-05 2022-04-13 삼성디스플레이 주식회사 어레이 테스트 장치 및 어레이 테스트 방법
CN107688249B (zh) * 2016-08-05 2021-09-10 豪威科技股份有限公司 液晶面板测试平台
CN108508639B (zh) * 2018-03-27 2020-02-11 武汉华星光电技术有限公司 离线量测设备及玻璃基板的离线量测方法
CN108806564B (zh) * 2018-05-22 2021-07-13 武汉华星光电半导体显示技术有限公司 一种用于显示面板的测试治具
CN111103442A (zh) * 2018-10-29 2020-05-05 致茂电子(苏州)有限公司 晶圆测试载盘与晶圆测试装置
KR102149703B1 (ko) * 2019-04-09 2020-08-31 주식회사 이엘피 디스플레이 패널의 사이즈에 따른 간격 가변 검사장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
JP2006060038A (ja) * 2004-08-20 2006-03-02 Agilent Technol Inc プローバおよびこれを用いた試験装置
KR100773732B1 (ko) * 2006-05-09 2007-11-09 주식회사 파이컴 프로브 유닛 및 이를 포함하는 프로브 장치
TWI339730B (en) * 2006-05-31 2011-04-01 Applied Materials Inc Prober for electronic device testing on large area substrates
CN101101314B (zh) * 2007-08-23 2011-07-06 友达光电股份有限公司 显示面板的测试治具及测试方法
KR100945951B1 (ko) * 2009-01-15 2010-03-05 주식회사 코디에스 비주얼 검사 및 그로스 테스트 겸용 프로브 유닛

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI674412B (zh) * 2018-10-29 2019-10-11 致茂電子股份有限公司 晶圓測試載盤與晶圓測試裝置

Also Published As

Publication number Publication date
CN102540509A (zh) 2012-07-04
KR20120077290A (ko) 2012-07-10
KR101234088B1 (ko) 2013-02-19

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