TW200921771A - Substrate processing apparatus - Google Patents

Substrate processing apparatus Download PDF

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Publication number
TW200921771A
TW200921771A TW097128852A TW97128852A TW200921771A TW 200921771 A TW200921771 A TW 200921771A TW 097128852 A TW097128852 A TW 097128852A TW 97128852 A TW97128852 A TW 97128852A TW 200921771 A TW200921771 A TW 200921771A
Authority
TW
Taiwan
Prior art keywords
substrate
cup
liquid
annular space
rotating
Prior art date
Application number
TW097128852A
Other languages
English (en)
Chinese (zh)
Other versions
TWI374485B (https=
Inventor
Norihiro Ito
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200921771A publication Critical patent/TW200921771A/zh
Application granted granted Critical
Publication of TWI374485B publication Critical patent/TWI374485B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7608—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Coating Apparatus (AREA)
  • Weting (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW097128852A 2007-07-31 2008-07-30 Substrate processing apparatus TW200921771A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007198826A JP4825178B2 (ja) 2007-07-31 2007-07-31 基板処理装置

Publications (2)

Publication Number Publication Date
TW200921771A true TW200921771A (en) 2009-05-16
TWI374485B TWI374485B (https=) 2012-10-11

Family

ID=40176161

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097128852A TW200921771A (en) 2007-07-31 2008-07-30 Substrate processing apparatus

Country Status (5)

Country Link
US (1) US8042560B2 (https=)
JP (1) JP4825178B2 (https=)
KR (1) KR101244591B1 (https=)
DE (1) DE102008035802A1 (https=)
TW (1) TW200921771A (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102934201A (zh) * 2009-12-18 2013-02-13 Jet股份有限公司 基板处理装置
TWI547320B (zh) * 2013-08-08 2016-09-01 斯克林集團公司 基板處理裝置及基板處理方法
TWI571952B (zh) * 2014-09-18 2017-02-21 斯克林集團公司 Substrate processing device
TWI620989B (zh) * 2013-08-30 2018-04-11 芝浦機械電子裝置股份有限公司 旋轉處理裝置
US9984903B2 (en) 2013-09-27 2018-05-29 SCREEN Holdings Co., Ltd. Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus
TWI638400B (zh) * 2015-02-03 2018-10-11 東京威力科創股份有限公司 Substrate processing device, substrate processing method, and memory medium

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4920643B2 (ja) * 2008-07-09 2012-04-18 東京エレクトロン株式会社 液処理装置および液処理方法
JP2011054619A (ja) * 2009-08-31 2011-03-17 Hitachi Kokusai Electric Inc 基板処理装置
JP5726636B2 (ja) * 2011-05-24 2015-06-03 東京エレクトロン株式会社 液処理装置、液処理方法
JP5726637B2 (ja) * 2011-05-24 2015-06-03 東京エレクトロン株式会社 液処理装置、液処理方法
US9242279B2 (en) 2011-05-24 2016-01-26 Tokyo Electron Limited Liquid processing apparatus and liquid processing method
JP6057624B2 (ja) 2012-09-03 2017-01-11 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ カップおよび基板処理装置
KR20150000548A (ko) * 2013-06-24 2015-01-05 삼성전자주식회사 기판 처리 장치
JP7314634B2 (ja) 2019-06-11 2023-07-26 東京エレクトロン株式会社 塗布装置及び塗布方法
KR102346529B1 (ko) * 2019-06-24 2021-12-31 세메스 주식회사 액 공급 유닛, 그리고 이를 가지는 기판 처리 장치 및 방법
CN113019827A (zh) * 2021-03-06 2021-06-25 山东阅航环保科技有限公司 一种方便上色的中空玻璃风干装置
JP2024060970A (ja) * 2022-10-20 2024-05-07 東京エレクトロン株式会社 カップ、液処理装置及び液処理方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05146736A (ja) * 1991-11-27 1993-06-15 Sharp Corp スピン式コーテイング装置
US5718763A (en) 1994-04-04 1998-02-17 Tokyo Electron Limited Resist processing apparatus for a rectangular substrate
JP3102831B2 (ja) 1994-06-20 2000-10-23 大日本スクリーン製造株式会社 回転処理装置
TW406216B (en) * 1995-05-24 2000-09-21 Tokyo Electron Ltd Apparatus for coating resist on substrate
JP2003264167A (ja) 1996-10-07 2003-09-19 Tokyo Electron Ltd 液処理方法及びその装置
TW418452B (en) 1997-10-31 2001-01-11 Tokyo Electron Ltd Coating process
JP2000138163A (ja) 1998-10-30 2000-05-16 Tokyo Electron Ltd 液処理装置
JP3587723B2 (ja) 1999-04-30 2004-11-10 東京エレクトロン株式会社 基板処理装置および基板処理方法
JP4593713B2 (ja) * 2000-02-04 2010-12-08 芝浦メカトロニクス株式会社 スピン処理装置
JP2002368066A (ja) 2001-06-06 2002-12-20 Tokyo Electron Ltd 処理装置
JP3890026B2 (ja) 2003-03-10 2007-03-07 東京エレクトロン株式会社 液処理装置および液処理方法
JP3890025B2 (ja) 2003-03-10 2007-03-07 東京エレクトロン株式会社 塗布処理装置及び塗布処理方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102934201A (zh) * 2009-12-18 2013-02-13 Jet股份有限公司 基板处理装置
CN102934201B (zh) * 2009-12-18 2016-01-20 Jet股份有限公司 基板处理装置
TWI547320B (zh) * 2013-08-08 2016-09-01 斯克林集團公司 基板處理裝置及基板處理方法
US9508568B2 (en) 2013-08-08 2016-11-29 SCREEN Holdings Co., Ltd. Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrate
TWI620989B (zh) * 2013-08-30 2018-04-11 芝浦機械電子裝置股份有限公司 旋轉處理裝置
US9984903B2 (en) 2013-09-27 2018-05-29 SCREEN Holdings Co., Ltd. Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus
TWI571952B (zh) * 2014-09-18 2017-02-21 斯克林集團公司 Substrate processing device
US11043398B2 (en) 2014-09-18 2021-06-22 SCREEN Holdings Co., Ltd. Substrate processing device
US11935763B2 (en) 2014-09-18 2024-03-19 SCREEN Holdings Co., Ltd. Substrate processing device
TWI638400B (zh) * 2015-02-03 2018-10-11 東京威力科創股份有限公司 Substrate processing device, substrate processing method, and memory medium

Also Published As

Publication number Publication date
US8042560B2 (en) 2011-10-25
JP4825178B2 (ja) 2011-11-30
JP2009038083A (ja) 2009-02-19
TWI374485B (https=) 2012-10-11
KR101244591B1 (ko) 2013-03-25
US20090031948A1 (en) 2009-02-05
DE102008035802A1 (de) 2009-02-05
KR20090013024A (ko) 2009-02-04

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