TW200811565A - TFT array substrate and method of manufacturing the same, and display device using the same - Google Patents

TFT array substrate and method of manufacturing the same, and display device using the same Download PDF

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Publication number
TW200811565A
TW200811565A TW96122332A TW96122332A TW200811565A TW 200811565 A TW200811565 A TW 200811565A TW 96122332 A TW96122332 A TW 96122332A TW 96122332 A TW96122332 A TW 96122332A TW 200811565 A TW200811565 A TW 200811565A
Authority
TW
Taiwan
Prior art keywords
electrode
source
wiring
gate
conductive film
Prior art date
Application number
TW96122332A
Other languages
English (en)
Chinese (zh)
Inventor
Kensuke Nagayama
Nobuaki Ishiga
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200811565A publication Critical patent/TW200811565A/zh

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  • Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
TW96122332A 2006-07-19 2007-06-21 TFT array substrate and method of manufacturing the same, and display device using the same TW200811565A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006196435A JP4884864B2 (ja) 2006-07-19 2006-07-19 Ｔｆｔアレイ基板及びその製造方法、並びにこれを用いた表示装置

Publications (1)

Publication Number Publication Date
TW200811565A true TW200811565A (en) 2008-03-01

Family

ID=39042398

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96122332A TW200811565A (en) 2006-07-19 2007-06-21 TFT array substrate and method of manufacturing the same, and display device using the same

Country Status (4)

Country Link
JP (1) JP4884864B2 (ko)
KR (1) KR100866943B1 (ko)
CN (1) CN100555641C (ko)
TW (1) TW200811565A (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI556309B (zh) * 2009-06-19 2016-11-01 半導體能源研究所股份有限公司 電漿處理裝置，形成膜的方法，和薄膜電晶體的製造方法
KR20170085148A (ko) 2009-10-09 2017-07-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN103000627A (zh) 2012-12-06 2013-03-27 京东方科技集团股份有限公司 一种阵列基板及其制作方法、显示装置
KR102097023B1 (ko) 2013-06-17 2020-04-06 삼성디스플레이 주식회사 표시 장치 및 표시 장치의 제조 방법
CN103456741B (zh) * 2013-08-23 2016-03-23 合肥京东方光电科技有限公司 一种阵列基板及其制造方法、显示装置
US9698173B2 (en) * 2014-08-24 2017-07-04 Royole Corporation Thin film transistor, display, and method for fabricating the same
KR102461634B1 (ko) * 2016-05-26 2022-10-31 티씨엘 차이나 스타 옵토일렉트로닉스 테크놀로지 컴퍼니 리미티드 액정 표시 장치 및 그 제조방법
CN114326232A (zh) * 2021-12-30 2022-04-12 广州华星光电半导体显示技术有限公司 阵列基板及其制造方法、显示面板和显示装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02161734A (ja) * 1988-11-08 1990-06-21 Fuji Xerox Co Ltd 薄膜トランジスタの製造方法
JP2575052B2 (ja) * 1988-12-07 1997-01-22 ホシデン株式会社 液晶表示素子
JPH04366923A (ja) * 1991-06-14 1992-12-18 Toshiba Corp 薄膜トランジスタアレイの製造方法
JP2576436B2 (ja) * 1995-02-15 1997-01-29 株式会社日立製作所 液晶表示装置
JPH08262492A (ja) * 1995-03-27 1996-10-11 Toshiba Corp 液晶表示装置
JPH095767A (ja) * 1995-06-22 1997-01-10 Sanyo Electric Co Ltd 液晶パネルの入力端構造
JP3509057B2 (ja) * 1998-12-15 2004-03-22 シャープ株式会社 液晶表示装置及びその製造方法
KR100499569B1 (ko) * 2002-04-18 2005-07-07 엘지.필립스 엘시디 주식회사 액정표시소자 및 그 제조방법
KR100924750B1 (ko) * 2002-12-06 2009-11-05 엘지디스플레이 주식회사 액정표시장치 및 그 제조방법

Also Published As

Publication number Publication date
KR20080008240A (ko) 2008-01-23
JP4884864B2 (ja) 2012-02-29
KR100866943B1 (ko) 2008-11-04
JP2008026433A (ja) 2008-02-07
CN101110434A (zh) 2008-01-23
CN100555641C (zh) 2009-10-28

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