TW200811021A - Air table for transferring sheet material, and apparatus for transferring the sheet material - Google Patents
Air table for transferring sheet material, and apparatus for transferring the sheet material Download PDFInfo
- Publication number
- TW200811021A TW200811021A TW096114041A TW96114041A TW200811021A TW 200811021 A TW200811021 A TW 200811021A TW 096114041 A TW096114041 A TW 096114041A TW 96114041 A TW96114041 A TW 96114041A TW 200811021 A TW200811021 A TW 200811021A
- Authority
- TW
- Taiwan
- Prior art keywords
- plate
- porous film
- surface plate
- air
- disposed
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006215557A JP4629007B2 (ja) | 2006-08-08 | 2006-08-08 | 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200811021A true TW200811021A (en) | 2008-03-01 |
TWI352056B TWI352056B (ko) | 2011-11-11 |
Family
ID=39084012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096114041A TW200811021A (en) | 2006-08-08 | 2007-04-20 | Air table for transferring sheet material, and apparatus for transferring the sheet material |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4629007B2 (ko) |
KR (1) | KR100831135B1 (ko) |
CN (1) | CN101121466B (ko) |
TW (1) | TW200811021A (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI385114B (zh) * | 2009-04-23 | 2013-02-11 | Corning Inc | 實質上以垂直的方向運送玻璃片的方法 |
US9708136B2 (en) | 2008-09-26 | 2017-07-18 | Corning Incorporated | Liquid-ejecting bearings for transport of glass sheets |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5123842B2 (ja) * | 2008-12-26 | 2013-01-23 | Ckd株式会社 | 非接触支持装置 |
JP6043123B2 (ja) * | 2012-08-22 | 2016-12-14 | オイレス工業株式会社 | 非接触支持装置及び塗布装置 |
JP6173173B2 (ja) * | 2013-11-11 | 2017-08-02 | 株式会社ディスコ | 切削装置 |
JP7378481B2 (ja) * | 2019-12-26 | 2023-11-13 | ナンジン リアン セミコンダクター リミテッド | 半導体産業におけるウェハ幾何学形状測定のためのツールアーキテクチャ |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02158152A (ja) * | 1988-12-09 | 1990-06-18 | Rohm Co Ltd | ペレット収納整列用治具 |
JPH0680227A (ja) * | 1992-08-31 | 1994-03-22 | Taiyo Yuden Co Ltd | 物品搬送ベルト |
JP3718014B2 (ja) * | 1996-11-01 | 2005-11-16 | 東レエンジニアリング株式会社 | 板状物搬送装置及び非接触搬送ライン |
JPH11268831A (ja) * | 1998-03-19 | 1999-10-05 | Toray Eng Co Ltd | 気流搬送セル |
JPH11268830A (ja) * | 1998-03-19 | 1999-10-05 | Toray Eng Co Ltd | 気流搬送セル |
JP2003063643A (ja) * | 2001-08-30 | 2003-03-05 | Nippon Sekkei Kogyo:Kk | 薄板の搬送方法及び装置 |
JP2003321119A (ja) | 2002-05-07 | 2003-11-11 | Mineya Mori | プレートとフラットパネルの間の相対的高圧力域によってフラットパネルを浮上させる浮上機器 |
JP4313080B2 (ja) | 2003-04-02 | 2009-08-12 | 第一施設工業株式会社 | 非接触浮上ユニット |
JP2004307152A (ja) * | 2003-04-08 | 2004-11-04 | Daiichi Shisetsu Kogyo Kk | 起倒可能な非接触搬送装置 |
JP2004345744A (ja) * | 2003-05-20 | 2004-12-09 | Hitachi Zosen Corp | 空気浮上装置および空気浮上式搬送装置 |
JP4217963B2 (ja) * | 2003-07-08 | 2009-02-04 | 株式会社ダイフク | 板状体搬送装置 |
JP2005075496A (ja) * | 2003-08-28 | 2005-03-24 | Murata Mach Ltd | 浮上搬送装置 |
KR200346820Y1 (ko) | 2004-01-06 | 2004-04-06 | 김태원 | 다공질 플라스틱(porous plastic)을 공기분사부로 이용한부상이송장치 |
JP2005340399A (ja) * | 2004-05-26 | 2005-12-08 | Hitachi Zosen Corp | ガラス基板の作業台装置 |
JP2006049493A (ja) * | 2004-08-03 | 2006-02-16 | Dainippon Screen Mfg Co Ltd | 基板搬送モジュールならびにそれを用いた基板搬送装置および基板搬送方法 |
JP4414856B2 (ja) * | 2004-09-30 | 2010-02-10 | 大日本スクリーン製造株式会社 | 基板保管装置 |
JP2006179653A (ja) * | 2004-12-22 | 2006-07-06 | Murata Mach Ltd | 枚葉搬送用トレイおよび搬送システム |
CN1810608A (zh) * | 2005-01-26 | 2006-08-02 | 三发机电有限公司 | 基底传送设备 |
-
2006
- 2006-08-08 JP JP2006215557A patent/JP4629007B2/ja not_active Expired - Fee Related
-
2007
- 2007-04-10 KR KR1020070035014A patent/KR100831135B1/ko not_active IP Right Cessation
- 2007-04-18 CN CN2007101008176A patent/CN101121466B/zh not_active Expired - Fee Related
- 2007-04-20 TW TW096114041A patent/TW200811021A/zh unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9708136B2 (en) | 2008-09-26 | 2017-07-18 | Corning Incorporated | Liquid-ejecting bearings for transport of glass sheets |
TWI385114B (zh) * | 2009-04-23 | 2013-02-11 | Corning Inc | 實質上以垂直的方向運送玻璃片的方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2008041989A (ja) | 2008-02-21 |
TWI352056B (ko) | 2011-11-11 |
CN101121466A (zh) | 2008-02-13 |
KR20080013693A (ko) | 2008-02-13 |
KR100831135B1 (ko) | 2008-05-20 |
CN101121466B (zh) | 2012-01-04 |
JP4629007B2 (ja) | 2011-02-09 |
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