TW200633845A - Manufacturing method of fine structure using organic/inorganic hybrid material and nano-imprinting technique and fine structure - Google Patents

Manufacturing method of fine structure using organic/inorganic hybrid material and nano-imprinting technique and fine structure

Info

Publication number
TW200633845A
TW200633845A TW094144262A TW94144262A TW200633845A TW 200633845 A TW200633845 A TW 200633845A TW 094144262 A TW094144262 A TW 094144262A TW 94144262 A TW94144262 A TW 94144262A TW 200633845 A TW200633845 A TW 200633845A
Authority
TW
Taiwan
Prior art keywords
organic
fine structure
inorganic hybrid
hybrid material
nano
Prior art date
Application number
TW094144262A
Other languages
English (en)
Inventor
Tsutomu Morimoto
Nobuhito Miura
Naganori Tsutsui
Kazuhiko Fujii
Kenji Kozaki
Yung-Chuen Luo
Original Assignee
Internat Test & Engineering Services Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Internat Test & Engineering Services Co Ltd filed Critical Internat Test & Engineering Services Co Ltd
Publication of TW200633845A publication Critical patent/TW200633845A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0009—Forming specific nanostructures
    • B82B3/0038—Manufacturing processes for forming specific nanostructures not provided for in groups B82B3/0014 - B82B3/0033
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V3/00—Globes; Bowls; Cover glasses
    • F21V3/04—Globes; Bowls; Cover glasses characterised by materials, surface treatments or coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Surface Treatment Of Glass (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
TW094144262A 2004-12-15 2005-12-14 Manufacturing method of fine structure using organic/inorganic hybrid material and nano-imprinting technique and fine structure TW200633845A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004362858A JP2006168147A (ja) 2004-12-15 2004-12-15 有機無機ハイブリッド材料とナノインプリント技術を用いた微細構造体の製造方法および微細構造体

Publications (1)

Publication Number Publication Date
TW200633845A true TW200633845A (en) 2006-10-01

Family

ID=36669397

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094144262A TW200633845A (en) 2004-12-15 2005-12-14 Manufacturing method of fine structure using organic/inorganic hybrid material and nano-imprinting technique and fine structure

Country Status (5)

Country Link
JP (1) JP2006168147A (zh)
KR (1) KR100955018B1 (zh)
CN (1) CN100557467C (zh)
HK (1) HK1091905A1 (zh)
TW (1) TW200633845A (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8318253B2 (en) * 2006-06-30 2012-11-27 Asml Netherlands B.V. Imprint lithography
JP5189772B2 (ja) 2007-02-09 2013-04-24 昭和電工株式会社 微細パターン転写材料
JP5261817B2 (ja) * 2008-08-30 2013-08-14 国立大学法人長岡技術科学大学 表面に微細凹凸パターンを有したセラミックス焼成体及びその製造方法
JP2010069730A (ja) * 2008-09-18 2010-04-02 Osaka Univ ナノインプリントリソグラフィー用の高耐久性レプリカモールドおよびその作製方法
JP2010129507A (ja) * 2008-12-01 2010-06-10 Asahi Kasei Corp 照明器具
US9904165B2 (en) * 2009-08-04 2018-02-27 Agency For Science, Technology And Research Method of reducing the dimension of an imprint structure on a substrate
KR100974288B1 (ko) 2010-01-13 2010-08-05 한국기계연구원 나노임프린트를 이용한 금속 산화박막 패턴 형성방법 및 이를 이용한 ｌｅｄ 소자의 제조방법
KR101302350B1 (ko) * 2012-02-10 2013-08-30 노바테크인더스트리 주식회사 광 추출용 투명기판의 제조방법
KR20140031514A (ko) * 2012-09-03 2014-03-13 포항공과대학교 산학협력단 굴절률 조절층을 포함하는 발광 다이오드 및 그 제조 방법
CN104101923B (zh) * 2014-07-08 2016-05-18 淮安信息职业技术学院 具有随机微米/纳米混合结构的光扩散片的制备方法
CN105487151A (zh) * 2016-01-22 2016-04-13 武汉理工大学 一种基于纳米压印的图形转移制备光栅的方法
TWI610804B (zh) * 2016-05-23 2018-01-11 國立成功大學 節能玻璃及其製造方法
WO2018164017A1 (ja) * 2017-03-08 2018-09-13 キヤノン株式会社 硬化物パターンの製造方法、光学部品、回路基板および石英モールドレプリカの製造方法、ならびにインプリント前処理コート用材料およびその硬化物
CN108339885B (zh) * 2018-01-16 2019-06-11 杭州电子科技大学 拉刀后刀面微纳表面形貌单点增量压印方法及其装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3381945B2 (ja) * 1992-10-05 2003-03-04 日本板硝子株式会社 基板上に微細な凹凸パターンを形成する方法
KR100316731B1 (ko) * 1999-03-31 2001-12-12 김충섭 광학 코팅용 혼성 조성물 및 그것을 함유한 광변색 박막용 조성물
JP2001100026A (ja) * 1999-09-30 2001-04-13 Minolta Co Ltd 液晶光学デバイス及び液晶偏光デバイス
JP4208447B2 (ja) * 2001-09-26 2009-01-14 独立行政法人科学技術振興機構 Ｓｏｇを用いた室温ナノ−インプリント−リソグラフィー
JP4090374B2 (ja) * 2003-03-20 2008-05-28 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法
JP4639054B2 (ja) 2004-04-02 2011-02-23 旭化成株式会社 透明ハイブリッドシート

Also Published As

Publication number Publication date
HK1091905A1 (en) 2007-01-26
KR100955018B1 (ko) 2010-04-27
CN100557467C (zh) 2009-11-04
KR20060067875A (ko) 2006-06-20
JP2006168147A (ja) 2006-06-29
CN1790064A (zh) 2006-06-21

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