CN1790064A - 使用有机无机混合材料和纳米压印技术的微细结构体的制造方法以及微细结构体 - Google Patents
使用有机无机混合材料和纳米压印技术的微细结构体的制造方法以及微细结构体 Download PDFInfo
- Publication number
- CN1790064A CN1790064A CNA2005101305830A CN200510130583A CN1790064A CN 1790064 A CN1790064 A CN 1790064A CN A2005101305830 A CNA2005101305830 A CN A2005101305830A CN 200510130583 A CN200510130583 A CN 200510130583A CN 1790064 A CN1790064 A CN 1790064A
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- China
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- convex portion
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- composite material
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/0009—Forming specific nanostructures
- B82B3/0038—Manufacturing processes for forming specific nanostructures not provided for in groups B82B3/0014 - B82B3/0033
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V3/00—Globes; Bowls; Cover glasses
- F21V3/04—Globes; Bowls; Cover glasses characterised by materials, surface treatments or coatings
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Micromachines (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Laminated Bodies (AREA)
Abstract
Description
Claims (45)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004362858 | 2004-12-15 | ||
JP2004362858A JP2006168147A (ja) | 2004-12-15 | 2004-12-15 | 有機無機ハイブリッド材料とナノインプリント技術を用いた微細構造体の製造方法および微細構造体 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1790064A true CN1790064A (zh) | 2006-06-21 |
CN100557467C CN100557467C (zh) | 2009-11-04 |
Family
ID=36669397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101305830A Expired - Fee Related CN100557467C (zh) | 2004-12-15 | 2005-12-14 | 使用有机无机混合材料和纳米压印技术的微细结构体的制造方法以及微细结构体 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2006168147A (zh) |
KR (1) | KR100955018B1 (zh) |
CN (1) | CN100557467C (zh) |
HK (1) | HK1091905A1 (zh) |
TW (1) | TW200633845A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104101923A (zh) * | 2014-07-08 | 2014-10-15 | 淮安信息职业技术学院 | 具有随机微米/纳米混合结构的光扩散片的制备方法 |
CN107445477A (zh) * | 2016-05-23 | 2017-12-08 | 陈玉彬 | 节能玻璃及其制造方法 |
CN108339885A (zh) * | 2018-01-16 | 2018-07-31 | 杭州电子科技大学 | 拉刀后刀面微纳表面形貌单点增量压印方法及其装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8318253B2 (en) * | 2006-06-30 | 2012-11-27 | Asml Netherlands B.V. | Imprint lithography |
JP5189772B2 (ja) * | 2007-02-09 | 2013-04-24 | 昭和電工株式会社 | 微細パターン転写材料 |
JP5261817B2 (ja) * | 2008-08-30 | 2013-08-14 | 国立大学法人長岡技術科学大学 | 表面に微細凹凸パターンを有したセラミックス焼成体及びその製造方法 |
JP2010069730A (ja) * | 2008-09-18 | 2010-04-02 | Osaka Univ | ナノインプリントリソグラフィー用の高耐久性レプリカモールドおよびその作製方法 |
JP2010129507A (ja) * | 2008-12-01 | 2010-06-10 | Asahi Kasei Corp | 照明器具 |
SG168513A1 (en) * | 2009-08-04 | 2011-02-28 | Agency Science Tech & Res | A method of reducing the dimension of an imprint structure on a substrate |
KR100974288B1 (ko) * | 2010-01-13 | 2010-08-05 | 한국기계연구원 | 나노임프린트를 이용한 금속 산화박막 패턴 형성방법 및 이를 이용한 led 소자의 제조방법 |
KR101302350B1 (ko) * | 2012-02-10 | 2013-08-30 | 노바테크인더스트리 주식회사 | 광 추출용 투명기판의 제조방법 |
KR20140031514A (ko) * | 2012-09-03 | 2014-03-13 | 포항공과대학교 산학협력단 | 굴절률 조절층을 포함하는 발광 다이오드 및 그 제조 방법 |
CN105487151A (zh) * | 2016-01-22 | 2016-04-13 | 武汉理工大学 | 一种基于纳米压印的图形转移制备光栅的方法 |
KR102256349B1 (ko) * | 2017-03-08 | 2021-05-27 | 캐논 가부시끼가이샤 | 경화물 패턴의 제조 방법, 광학 부품, 회로 기판 및 석영 몰드 레플리카의 제조 방법, 및 임프린트 전처리 코팅용 재료 및 그의 경화물 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3381945B2 (ja) * | 1992-10-05 | 2003-03-04 | 日本板硝子株式会社 | 基板上に微細な凹凸パターンを形成する方法 |
KR100316731B1 (ko) * | 1999-03-31 | 2001-12-12 | 김충섭 | 광학 코팅용 혼성 조성물 및 그것을 함유한 광변색 박막용 조성물 |
JP2001100026A (ja) * | 1999-09-30 | 2001-04-13 | Minolta Co Ltd | 液晶光学デバイス及び液晶偏光デバイス |
JP4208447B2 (ja) * | 2001-09-26 | 2009-01-14 | 独立行政法人科学技術振興機構 | Sogを用いた室温ナノ−インプリント−リソグラフィー |
JP4090374B2 (ja) * | 2003-03-20 | 2008-05-28 | 株式会社日立製作所 | ナノプリント装置、及び微細構造転写方法 |
JP4639054B2 (ja) | 2004-04-02 | 2011-02-23 | 旭化成株式会社 | 透明ハイブリッドシート |
-
2004
- 2004-12-15 JP JP2004362858A patent/JP2006168147A/ja active Pending
-
2005
- 2005-12-14 TW TW094144262A patent/TW200633845A/zh unknown
- 2005-12-14 KR KR1020050123018A patent/KR100955018B1/ko active IP Right Grant
- 2005-12-14 CN CNB2005101305830A patent/CN100557467C/zh not_active Expired - Fee Related
-
2006
- 2006-12-12 HK HK06113604.5A patent/HK1091905A1/xx not_active IP Right Cessation
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104101923A (zh) * | 2014-07-08 | 2014-10-15 | 淮安信息职业技术学院 | 具有随机微米/纳米混合结构的光扩散片的制备方法 |
CN104101923B (zh) * | 2014-07-08 | 2016-05-18 | 淮安信息职业技术学院 | 具有随机微米/纳米混合结构的光扩散片的制备方法 |
CN107445477A (zh) * | 2016-05-23 | 2017-12-08 | 陈玉彬 | 节能玻璃及其制造方法 |
CN107445477B (zh) * | 2016-05-23 | 2019-12-03 | 陈玉彬 | 节能玻璃的制造方法 |
CN108339885A (zh) * | 2018-01-16 | 2018-07-31 | 杭州电子科技大学 | 拉刀后刀面微纳表面形貌单点增量压印方法及其装置 |
CN108339885B (zh) * | 2018-01-16 | 2019-06-11 | 杭州电子科技大学 | 拉刀后刀面微纳表面形貌单点增量压印方法及其装置 |
Also Published As
Publication number | Publication date |
---|---|
CN100557467C (zh) | 2009-11-04 |
KR20060067875A (ko) | 2006-06-20 |
HK1091905A1 (en) | 2007-01-26 |
KR100955018B1 (ko) | 2010-04-27 |
TW200633845A (en) | 2006-10-01 |
JP2006168147A (ja) | 2006-06-29 |
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