TW200624396A - Method and apparatus for scribing brittle material board and system for breaking brittle material board - Google Patents

Method and apparatus for scribing brittle material board and system for breaking brittle material board

Info

Publication number
TW200624396A
TW200624396A TW094135617A TW94135617A TW200624396A TW 200624396 A TW200624396 A TW 200624396A TW 094135617 A TW094135617 A TW 094135617A TW 94135617 A TW94135617 A TW 94135617A TW 200624396 A TW200624396 A TW 200624396A
Authority
TW
Taiwan
Prior art keywords
holding table
brittle material
material board
scribing
mother glass
Prior art date
Application number
TW094135617A
Other languages
English (en)
Chinese (zh)
Other versions
TWI374862B (https=
Inventor
Kiyoshi Takamatsu
Kenji Otoda
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Ind Co Ltd filed Critical Mitsuboshi Diamond Ind Co Ltd
Publication of TW200624396A publication Critical patent/TW200624396A/zh
Application granted granted Critical
Publication of TWI374862B publication Critical patent/TWI374862B/zh

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • C03B33/105Details of cutting or scoring means, e.g. tips
    • C03B33/107Wheel design, e.g. materials, construction, shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
TW094135617A 2004-10-13 2005-10-13 Method and apparatus for scribing brittle material board and system for breaking brittle material board TW200624396A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004299446 2004-10-13

Publications (2)

Publication Number Publication Date
TW200624396A true TW200624396A (en) 2006-07-16
TWI374862B TWI374862B (https=) 2012-10-21

Family

ID=36148283

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135617A TW200624396A (en) 2004-10-13 2005-10-13 Method and apparatus for scribing brittle material board and system for breaking brittle material board

Country Status (7)

Country Link
US (1) US20090050610A1 (https=)
EP (1) EP1800820B1 (https=)
JP (1) JP4818120B2 (https=)
KR (1) KR100893871B1 (https=)
CN (1) CN101068666B (https=)
TW (1) TW200624396A (https=)
WO (1) WO2006040988A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI797352B (zh) * 2018-10-30 2023-04-01 日商三星鑽石工業股份有限公司 裂斷裝置

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009126780A (ja) * 2007-11-21 2009-06-11 Semes Co Ltd スクライブ装置並びに方法、及びこれを利用した基板切断装置
TWI435850B (zh) * 2008-01-23 2014-05-01 Mitsuboshi Diamond Ind Co Ltd Scribing device and scribing method
KR100989125B1 (ko) * 2008-07-16 2010-10-20 삼성모바일디스플레이주식회사 원장기판 절단 장치 및 이에 의하여 절단된 유기발광표시장치
JP5167160B2 (ja) * 2009-01-30 2013-03-21 三星ダイヤモンド工業株式会社 脆性材料基板の搬送・分断装置
JP5249979B2 (ja) * 2010-03-18 2013-07-31 三星ダイヤモンド工業株式会社 脆性材料基板の加工方法およびこれに用いるレーザ加工装置
JP5508133B2 (ja) * 2010-05-19 2014-05-28 株式会社ディスコ 板状物の分割装置
KR101356217B1 (ko) * 2011-12-20 2014-01-29 참엔지니어링(주) 기판 트리밍 장치 및 방법
KR101407976B1 (ko) * 2012-05-04 2014-07-03 코닝정밀소재 주식회사 실시간 파손 감지 기능을 구비한 유리기판용 레이저 절단 장치 및 이의 유리기판 파손 감지 방법
CN102674676A (zh) * 2012-05-17 2012-09-19 东莞宏威数码机械有限公司 基片切割装置
JP6043149B2 (ja) * 2012-10-29 2016-12-14 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク装置および脆性材料基板のブレイク方法
CN103056976B (zh) * 2012-12-27 2015-07-22 东莞市拓荒牛自动化设备有限公司 一种led导光板刻线方法及实施该方法的刻线机
US9434085B2 (en) * 2013-06-04 2016-09-06 Shenzhen China Star Optoelectronics Technology Co., Ltd Cutting system for glass substrate
CN103288342B (zh) * 2013-06-04 2015-06-03 深圳市华星光电技术有限公司 一种玻璃基板切割系统
JP2015034111A (ja) * 2013-08-09 2015-02-19 三星ダイヤモンド工業株式会社 積層セラミックス基板の分断方法
CN106415592B (zh) * 2014-06-10 2020-03-27 锡克拜控股有限公司 在其上具有碎片化标记的基板
EP2990388B1 (en) * 2014-08-26 2019-01-30 Mecánicas Teruel S.L. Cutting device for a cutting table
KR101648010B1 (ko) * 2015-03-03 2016-08-17 한국미쯔보시다이아몬드공업(주) 스크라이브 라인 형성 방법
DE102015211017B4 (de) * 2015-06-16 2017-06-14 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zum hauptzeitparallelen Entladen eines freigeschnittenen Werkstückteils, zugehörige Laserschneidmaschine und Computerprogrammprodukt
JP6610026B2 (ja) * 2015-06-23 2019-11-27 三星ダイヤモンド工業株式会社 スクライブ装置
CN106891094A (zh) * 2015-12-14 2017-06-27 上海申和热磁电子有限公司 用于覆铜陶瓷基板的激光切割机工作台
JP6699196B2 (ja) * 2016-01-22 2020-05-27 三星ダイヤモンド工業株式会社 ブレイク装置
CN105643823B (zh) * 2016-03-18 2017-11-07 郑招才 一种陶瓷简易切割装置四轴移动机架
CN105619633B (zh) * 2016-03-18 2017-11-07 管敏富 一种陶瓷简易切割装置用移动架
CN107234737B (zh) * 2016-03-18 2019-02-05 广东全圣陶瓷有限公司 一种陶瓷简易切割装置的工作方法
CN105619634B (zh) * 2016-03-18 2017-10-20 海门华夏时丽网络科技服务有限公司 一种气缸推动式陶瓷简易切割装置用固定板
CN205874212U (zh) * 2016-07-21 2017-01-11 京东方科技集团股份有限公司 切割刀头以及切割装置
CN106114983B (zh) * 2016-08-11 2018-05-22 新昌县远通农业发展有限公司 一种化妆品盒输送架抓取输送机构
CN106114980B (zh) * 2016-08-11 2018-05-29 新昌县远通农业发展有限公司 一种化妆品盒输送架搬运输送自动提升机构
CN106081249B (zh) * 2016-08-11 2018-05-25 台州市黄岩昱通塑业有限公司 一种化妆品盒输送架搬运输送机构
CN106696102A (zh) * 2016-12-05 2017-05-24 无锡明珠增压器制造有限公司 一种精确控制硅片切片装置
CN106514885A (zh) * 2016-12-05 2017-03-22 无锡明珠增压器制造有限公司 一种硅棒自动切片机
CN106626109A (zh) * 2016-12-21 2017-05-10 日照市奥大力精密设备有限公司 一种智能玻璃上片切割一体机
KR101899679B1 (ko) * 2016-12-21 2018-09-17 주식회사 포스코 시료 고정장치
DE102017007585A1 (de) * 2017-08-11 2019-02-14 Siltectra Gmbh Vorrichtung und Verfahren zum Beaufschlagen von Spannungserzeugungsschichten mit Druck zum verbesserten Führen eines Abtrennrisses
KR101980606B1 (ko) * 2017-08-29 2019-05-21 한국미쯔보시다이아몬드공업(주) 취성 재료 기판의 경사 타입 분단 장치 및 분단 방법
CN107352786A (zh) * 2017-08-30 2017-11-17 蚌埠朝阳玻璃机械有限公司 Tft视觉定位精密光电玻璃切割机
JP6967276B2 (ja) * 2017-12-28 2021-11-17 三星ダイヤモンド工業株式会社 ブレーク装置
JP2020066539A (ja) * 2018-10-22 2020-04-30 坂東機工株式会社 ガラス板の折割機械
CN109524332B (zh) * 2018-12-26 2020-10-20 江苏纳沛斯半导体有限公司 一种半导体晶圆精准切割装置
KR102122427B1 (ko) * 2019-01-09 2020-06-12 한국미쯔보시다이아몬드공업(주) 단재 제거 장치
JP7228883B2 (ja) * 2019-01-30 2023-02-27 三星ダイヤモンド工業株式会社 分断方法およびブレイク方法
CN111908780A (zh) * 2019-05-10 2020-11-10 塔工程有限公司 划线装置及其控制方法
ES2799998A1 (es) * 2019-06-21 2020-12-22 Univ Valladolid Aparato y procedimiento para la realizacion de grietas controladas en muestras de silicio monocristalino y multicristalino
CN110282867B (zh) * 2019-08-01 2023-08-01 中电科风华信息装备股份有限公司 一种多刀划线机的异形划线结构
CN110556320B (zh) * 2019-09-12 2021-11-30 常州时创能源股份有限公司 硅片分割装置及分割方法
CN110590147B (zh) * 2019-09-18 2022-08-02 彩虹(合肥)液晶玻璃有限公司 分离方法、装置、设备和切割设备
CN110978086B (zh) * 2019-12-24 2021-07-20 上饶市晶鑫光学元件有限公司 一种光学器材用镜片切割装置
JP7098173B2 (ja) * 2020-02-12 2022-07-11 三星ダイヤモンド工業株式会社 脆性材料基板の分断機構
CN114454240B (zh) * 2022-04-11 2022-06-17 中国空气动力研究与发展中心高速空气动力研究所 一种激波管膜片的划刻装置及划刻方法
KR102876109B1 (ko) * 2024-08-28 2025-10-28 주식회사 에스피오엠 렌즈 제작용 글라스 가공 장치

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2404840C3 (de) * 1974-02-01 1978-08-31 Wunderlich, Christian, 4057 Brueggen Verfahren zur Trennung von in einem Bogen zusammenhängenden Nutzenabschnitten und Vorrichtung zur Durchführung des Verfahrens
JPS5918123A (ja) * 1982-07-20 1984-01-30 Nippon Electric Glass Co Ltd 厚板ガラスの切断方法
US4653680A (en) * 1985-04-25 1987-03-31 Regan Barrie F Apparatus for breaking semiconductor wafers and the like
JPH01179770A (ja) * 1988-01-12 1989-07-17 Hiroshima Denki Gakuen 金属とセラミックスとの接合方法
US5303861A (en) * 1992-09-01 1994-04-19 Corning Incorporated Separating sheet glass
JPH06144860A (ja) * 1992-11-11 1994-05-24 Fuji Xerox Co Ltd 脆性板用スクライブ装置
JP2700136B2 (ja) * 1994-06-02 1998-01-19 双栄通商株式会社 脆性材料の割断方法
JP3847864B2 (ja) * 1995-11-21 2006-11-22 三星ダイヤモンド工業株式会社 ガラススクライバー
JPH1071483A (ja) * 1996-08-29 1998-03-17 Hitachi Constr Mach Co Ltd 脆性材料の割断方法
JPH1179770A (ja) * 1997-07-10 1999-03-23 Yamaha Corp スクライブ装置及び劈開方法
JP3326384B2 (ja) * 1998-03-12 2002-09-24 古河電気工業株式会社 半導体ウエハーの劈開方法およびその装置
JP2002050589A (ja) * 2000-08-03 2002-02-15 Sony Corp 半導体ウェーハの延伸分離方法及び装置
TW536527B (en) * 2000-08-11 2003-06-11 Mitsuboshi Diamond Ind Co Ltd Cutter for cutting brittle material, scriber using the same and scribing method
JP2003286044A (ja) * 2002-03-27 2003-10-07 Sharp Corp 基板分断装置および基板分断方法
KR100724474B1 (ko) * 2002-10-22 2007-06-04 엘지.필립스 엘시디 주식회사 액정 표시패널의 절단 장치 및 이를 이용한 절단방법
US8348115B2 (en) * 2002-11-06 2013-01-08 Mitsuboshi Diamond Industrial Co., Ltd. Scribe line forming device and scribe line forming method
US20040187523A1 (en) * 2003-03-24 2004-09-30 Corning Incorporated Score bar instrumented with a force sensor
SG116533A1 (en) * 2003-03-26 2005-11-28 Toshiba Kk Semiconductor manufacturing apparatus and method of manufacturing semiconductor device.
CN100572004C (zh) * 2004-03-15 2009-12-23 三星钻石工业株式会社 基片切割系统、基片制造设备、基片划线方法以及基片切割方法
JP4511903B2 (ja) * 2004-10-20 2010-07-28 株式会社ディスコ ウエーハの分割装置
KR101096733B1 (ko) * 2004-12-27 2011-12-21 엘지디스플레이 주식회사 기판의 절단장치 및 이를 이용한 기판의 절단방법
WO2006073098A1 (ja) * 2005-01-05 2006-07-13 Thk Co., Ltd. ワークのブレイク方法及び装置、スクライブ及びブレイク方法、並びにブレイク機能付きスクライブ装置
JP2006199553A (ja) * 2005-01-24 2006-08-03 Sharp Corp 基板分断装置及び基板分断方法
US20060249553A1 (en) * 2005-05-06 2006-11-09 Ljerka Ukrainczyk Ultrasonic induced crack propagation in a brittle material
US8656738B2 (en) * 2008-10-31 2014-02-25 Corning Incorporated Glass sheet separating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI797352B (zh) * 2018-10-30 2023-04-01 日商三星鑽石工業股份有限公司 裂斷裝置

Also Published As

Publication number Publication date
JP4818120B2 (ja) 2011-11-16
CN101068666B (zh) 2011-05-04
EP1800820B1 (en) 2012-12-12
WO2006040988A1 (ja) 2006-04-20
KR20070067200A (ko) 2007-06-27
JPWO2006040988A1 (ja) 2008-05-15
EP1800820A1 (en) 2007-06-27
US20090050610A1 (en) 2009-02-26
EP1800820A4 (en) 2011-02-23
KR100893871B1 (ko) 2009-04-20
TWI374862B (https=) 2012-10-21
CN101068666A (zh) 2007-11-07

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