TW200512933A - A method of manufacturing a solid-state image-sensing device - Google Patents
A method of manufacturing a solid-state image-sensing deviceInfo
- Publication number
- TW200512933A TW200512933A TW093127225A TW93127225A TW200512933A TW 200512933 A TW200512933 A TW 200512933A TW 093127225 A TW093127225 A TW 093127225A TW 93127225 A TW93127225 A TW 93127225A TW 200512933 A TW200512933 A TW 200512933A
- Authority
- TW
- Taiwan
- Prior art keywords
- wiring substrate
- sensing chip
- chip
- lens
- present
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 6
- 229910000679 solder Inorganic materials 0.000 abstract 2
- 238000004140 cleaning Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
Classifications
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- H—ELECTRICITY
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
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- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
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- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
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- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
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- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19105—Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate
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- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/57—Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Studio Devices (AREA)
- Lens Barrels (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003329700A JP2005101711A (ja) | 2003-09-22 | 2003-09-22 | 固体撮像装置およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200512933A true TW200512933A (en) | 2005-04-01 |
Family
ID=34458879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093127225A TW200512933A (en) | 2003-09-22 | 2004-09-09 | A method of manufacturing a solid-state image-sensing device |
Country Status (4)
Country | Link |
---|---|
US (1) | US20050116138A1 (zh) |
JP (1) | JP2005101711A (zh) |
CN (1) | CN1601752A (zh) |
TW (1) | TW200512933A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8476729B2 (en) | 2009-04-16 | 2013-07-02 | Kabushiki Kaisha Toshiba | Solid-state imaging device comprising through-electrode |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006073683A (ja) * | 2004-08-31 | 2006-03-16 | Sony Corp | 回路デバイス及び回路デバイスの製造方法 |
CN100429778C (zh) * | 2005-03-31 | 2008-10-29 | 今湛光学科技股份有限公司 | 影像感测器模组 |
JP4585409B2 (ja) * | 2005-08-24 | 2010-11-24 | 株式会社東芝 | 小型カメラモジュール |
JP2007158751A (ja) * | 2005-12-06 | 2007-06-21 | Hitachi Maxell Ltd | 撮像装置及びその製造方法 |
JP2007181044A (ja) * | 2005-12-28 | 2007-07-12 | Mitsumi Electric Co Ltd | カメラモジュール |
JP2007208045A (ja) * | 2006-02-02 | 2007-08-16 | Sony Corp | 撮像装置、カメラモジュール、電子機器および撮像装置の製造方法 |
KR20080021883A (ko) * | 2006-09-05 | 2008-03-10 | 삼성전기주식회사 | 카메라 모듈의 렌즈배럴 |
JP4884180B2 (ja) * | 2006-11-21 | 2012-02-29 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
US7645628B2 (en) * | 2006-11-28 | 2010-01-12 | Aptina Imaging Corporation | Method and system for fabricating semiconductor components with lens structures and lens support structures |
US7919410B2 (en) | 2007-03-14 | 2011-04-05 | Aptina Imaging Corporation | Packaging methods for imager devices |
KR101361359B1 (ko) * | 2007-04-30 | 2014-02-12 | 엘지이노텍 주식회사 | 카메라 모듈 |
CN101339282A (zh) * | 2007-07-06 | 2009-01-07 | 鸿富锦精密工业(深圳)有限公司 | 相机模组 |
JPWO2009016931A1 (ja) * | 2007-08-02 | 2010-10-14 | コニカミノルタオプト株式会社 | 撮像装置の製造方法、撮像装置及び携帯端末 |
KR101499949B1 (ko) * | 2007-08-13 | 2015-03-06 | 엘지이노텍 주식회사 | 카메라 모듈 |
CN101373248A (zh) * | 2007-08-24 | 2009-02-25 | 鸿富锦精密工业(深圳)有限公司 | 镜头座及其应用的镜头组件 |
WO2009096460A1 (ja) * | 2008-01-31 | 2009-08-06 | Konica Minolta Opto, Inc. | 撮像装置、携帯端末、撮像装置の製造方法、および携帯端末の製造方法 |
US7813043B2 (en) * | 2008-08-15 | 2010-10-12 | Ether Precision, Inc. | Lens assembly and method of manufacture |
KR101529729B1 (ko) * | 2008-11-19 | 2015-06-30 | 삼성전자주식회사 | 카메라 모듈의 손떨림 보정 장치 |
NL2004242A (en) * | 2009-04-13 | 2010-10-14 | Asml Netherlands Bv | Detector module, cooling arrangement and lithographic apparatus comprising a detector module. |
US20120019695A1 (en) * | 2010-07-26 | 2012-01-26 | Omnivision Technologies, Inc. | Image sensor having dark sidewalls between color filters to reduce optical crosstalk |
JP5617561B2 (ja) | 2010-11-25 | 2014-11-05 | 株式会社リコー | 撮像装置 |
DE102010053214A1 (de) * | 2010-12-03 | 2012-06-06 | Evonik Degussa Gmbh | Verfahren zur Wasserstoffpassivierung von Halbleiterschichten |
JP5794002B2 (ja) * | 2011-07-07 | 2015-10-14 | ソニー株式会社 | 固体撮像装置、電子機器 |
JP2013037189A (ja) * | 2011-08-08 | 2013-02-21 | Ricoh Co Ltd | 撮像装置及び車載用カメラ |
KR101986341B1 (ko) * | 2012-03-30 | 2019-06-07 | 삼성전자주식회사 | 양방향 카메라 모듈 및 그를 구비한 플립 칩 본딩 장치 |
CN102629650A (zh) * | 2012-04-25 | 2012-08-08 | 电子科技大学 | 一种led荧光粉层的制备方法 |
US8796049B2 (en) * | 2012-07-30 | 2014-08-05 | International Business Machines Corporation | Underfill adhesion measurements at a microscopic scale |
JP6079124B2 (ja) * | 2012-10-18 | 2017-02-15 | ミツミ電機株式会社 | カメラモジュール及びカメラ付き携帯端末 |
TW201426081A (zh) * | 2012-12-28 | 2014-07-01 | Hon Hai Prec Ind Co Ltd | 影像感測器模組及取像模組 |
JP6637489B2 (ja) * | 2014-09-09 | 2020-01-29 | アクチュエーター・ソリュ—ションズ・ゲーエムベーハー | カメラモジュールのためのダストバリア付きオートフォーカスアクチュエータユニット |
CN105657296B (zh) * | 2014-10-11 | 2019-12-24 | 意法半导体有限公司 | 具有互连层间隙的图像感测设备及相关方法 |
JP2016092061A (ja) * | 2014-10-30 | 2016-05-23 | 株式会社東芝 | 半導体装置および固体撮像装置 |
JP2016162985A (ja) * | 2015-03-05 | 2016-09-05 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
TWI566524B (zh) * | 2015-05-12 | 2017-01-11 | Modularized filter manufacturing method | |
KR102400658B1 (ko) * | 2015-07-27 | 2022-05-20 | 엘지이노텍 주식회사 | 카메라 모듈 |
CN105070733B (zh) * | 2015-07-28 | 2019-02-19 | 昆明物理研究所 | 非制冷红外焦平面探测器的气密性封装方法 |
JP6499042B2 (ja) * | 2015-08-20 | 2019-04-10 | 京セラ株式会社 | 撮像素子実装用基板および撮像装置 |
JP2017084861A (ja) * | 2015-10-23 | 2017-05-18 | 日本電気株式会社 | 固体撮像素子を搭載した撮像装置及びその製造方法 |
KR102563860B1 (ko) * | 2015-12-02 | 2023-08-03 | 마이크로 모듈 테크놀로지 가부시키가이샤 | 광학 장치 및 광학 장치의 제조 방법 |
KR102467061B1 (ko) * | 2016-02-11 | 2022-11-14 | 엘지이노텍 주식회사 | 카메라 모듈 및 이의 제조 방법 |
KR102538894B1 (ko) | 2016-04-11 | 2023-06-01 | 삼성전기주식회사 | 카메라 모듈용 기판 및 이를 구비하는 카메라 모듈 |
KR102647850B1 (ko) * | 2016-11-21 | 2024-03-15 | 엘지이노텍 주식회사 | 카메라 모듈 |
CN108240829B (zh) * | 2016-12-23 | 2022-01-21 | 奥特斯奥地利科技与系统技术有限公司 | 传感器系统 |
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US5220487A (en) * | 1992-01-27 | 1993-06-15 | International Business Machines Corporation | Electronic package with enhanced heat sinking |
JP4000743B2 (ja) * | 2000-03-13 | 2007-10-31 | 株式会社デンソー | 電子部品の実装方法 |
US6310018B1 (en) * | 2000-03-31 | 2001-10-30 | 3M Innovative Properties Company | Fluorinated solvent compositions containing hydrogen fluoride |
JP2003298888A (ja) * | 2002-04-02 | 2003-10-17 | Konica Corp | 撮像装置の製造方法 |
US7872686B2 (en) * | 2004-02-20 | 2011-01-18 | Flextronics International Usa, Inc. | Integrated lens and chip assembly for a digital camera |
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- 2004-09-21 CN CNA2004100782927A patent/CN1601752A/zh active Pending
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US8476729B2 (en) | 2009-04-16 | 2013-07-02 | Kabushiki Kaisha Toshiba | Solid-state imaging device comprising through-electrode |
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CN1601752A (zh) | 2005-03-30 |
JP2005101711A (ja) | 2005-04-14 |
US20050116138A1 (en) | 2005-06-02 |
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