SG97148A1 - Method of manufacturing a surface acoustic wave element - Google Patents
Method of manufacturing a surface acoustic wave elementInfo
- Publication number
- SG97148A1 SG97148A1 SG200002052A SG200002052A SG97148A1 SG 97148 A1 SG97148 A1 SG 97148A1 SG 200002052 A SG200002052 A SG 200002052A SG 200002052 A SG200002052 A SG 200002052A SG 97148 A1 SG97148 A1 SG 97148A1
- Authority
- SG
- Singapore
- Prior art keywords
- manufacturing
- acoustic wave
- surface acoustic
- wave element
- wave
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000010897 surface acoustic wave method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
- H03H9/1092—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the surface acoustic wave [SAW] device on the side of the IDT's
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/4908—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49789—Obtaining plural product pieces from unitary workpiece
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49789—Obtaining plural product pieces from unitary workpiece
- Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12250799A JP3712035B2 (ja) | 1999-04-28 | 1999-04-28 | 表面波装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG97148A1 true SG97148A1 (en) | 2003-07-18 |
Family
ID=14837569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200002052A SG97148A1 (en) | 1999-04-28 | 2000-04-11 | Method of manufacturing a surface acoustic wave element |
Country Status (7)
Country | Link |
---|---|
US (3) | US6564439B1 (zh) |
EP (1) | EP1049252A3 (zh) |
JP (1) | JP3712035B2 (zh) |
KR (1) | KR100352392B1 (zh) |
CN (1) | CN1158758C (zh) |
SG (1) | SG97148A1 (zh) |
TW (1) | TW480812B (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002043880A (ja) * | 2000-07-26 | 2002-02-08 | Murata Mfg Co Ltd | 弾性表面波素子の周波数調整方法 |
US6773557B2 (en) * | 2001-01-31 | 2004-08-10 | Showa Shinku Co., Ltd. | System for frequency adjustment of piezoelectric resonators by dual-track ion etching |
DE10206480B4 (de) * | 2001-02-16 | 2005-02-10 | Leibniz-Institut für Festkörper- und Werkstoffforschung e.V. | Akustisches Oberflächenwellenbauelement |
US6997921B2 (en) * | 2001-09-07 | 2006-02-14 | Medtronic Minimed, Inc. | Infusion device and driving mechanism for same |
DE10162580A1 (de) * | 2001-12-19 | 2003-07-17 | Infineon Technologies Ag | Piezoelektrischer Schwingkreis, Verfahren zu dessen Herstellung und Filteranordnung |
CN1290258C (zh) * | 2001-12-28 | 2006-12-13 | 松下电器产业株式会社 | 弹性表面波装置以及应用该装置的电子部件和复合模件 |
KR100814005B1 (ko) * | 2002-04-15 | 2008-03-14 | 마쯔시다덴기산교 가부시키가이샤 | 탄성 표면파 장치 및 이를 이용한 이동통신기기 및 센서 |
KR100496527B1 (ko) * | 2002-09-25 | 2005-06-22 | 일진디스플레이(주) | 표면 탄성파 소자용 탄탈산 리튬 단결정 기판의 제조방법 |
KR100496526B1 (ko) * | 2002-09-25 | 2005-06-22 | 일진디스플레이(주) | 표면 탄성파 소자용 탄탈산 리튬 단결정 기판의 제조방법 |
JP2006025396A (ja) | 2004-06-09 | 2006-01-26 | Seiko Epson Corp | 弾性表面波装置、その製造方法、および電子機器 |
US8132314B2 (en) * | 2008-10-29 | 2012-03-13 | Honeywell International Inc. | Method and system for packaging and mounting surface acoustic wave sensor elements to a flex plate |
JP4863097B2 (ja) * | 2009-08-11 | 2012-01-25 | 株式会社村田製作所 | 弾性表面波素子の製造方法 |
CN102412802A (zh) * | 2011-11-24 | 2012-04-11 | 中国电子科技集团公司第二十六研究所 | 基片级声表面波器件的频率修正方法 |
CN103701424A (zh) * | 2013-12-24 | 2014-04-02 | 珠海东精大电子科技有限公司 | 49s石英晶体谐振器的制备方法 |
CN106154186B (zh) * | 2016-06-20 | 2020-01-17 | 瑞声声学科技(常州)有限公司 | 声表面波磁传感器及其制备方法 |
DE102019130514B4 (de) * | 2019-11-12 | 2021-09-23 | RF360 Europe GmbH | Trimmverfahren für einen SAW-Wafer, getrimmte Wafer und getrimmte SAW-Vorrichtungen |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0774573A (ja) * | 1993-08-31 | 1995-03-17 | Toshiba Corp | 弾性表面波素子の周波数調整方法 |
JPH08139546A (ja) * | 1994-11-14 | 1996-05-31 | Murata Mfg Co Ltd | 弾性表面波素子の電極形成方法 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4403165A (en) | 1982-05-07 | 1983-09-06 | The United States Of America As Represented By The Secretary Of The Army | Transducer isolation in surface acoustic wave processor |
US4450374A (en) * | 1982-05-27 | 1984-05-22 | Motorola Inc. | Oxygen-plasma passivated and low scatter acoustic wave devices |
JPS5958907A (ja) * | 1982-09-29 | 1984-04-04 | Hitachi Ltd | 弾性表面波装置 |
JPS6120410A (ja) * | 1984-07-07 | 1986-01-29 | Nec Kansai Ltd | 弾性表面波装置の製造方法 |
US4756794A (en) * | 1987-08-31 | 1988-07-12 | The United States Of America As Represented By The Secretary Of The Navy | Atomic layer etching |
JPH01231412A (ja) * | 1988-03-11 | 1989-09-14 | Fujitsu Ltd | 弾性表面波ディバイスの周波数特性調整方法 |
JPH01238213A (ja) * | 1988-03-18 | 1989-09-22 | Fujitsu Ltd | 弾性表面波ディバイス用周波数特性調整装置 |
JPH02189011A (ja) | 1989-01-18 | 1990-07-25 | Fujitsu Ltd | 弾性表面波デバイスの製造方法 |
JP3140767B2 (ja) * | 1990-10-23 | 2001-03-05 | キンセキ株式会社 | 弾性表面波素子の製造方法 |
JPH04199906A (ja) * | 1990-11-29 | 1992-07-21 | Kokusai Electric Co Ltd | 弾性表面波共振子 |
JP2589634B2 (ja) | 1992-10-05 | 1997-03-12 | 松下電器産業株式会社 | 電子音響集積回路とその製造方法 |
EP0534354A1 (en) * | 1991-09-25 | 1993-03-31 | Sumitomo Electric Industries, Limited | Surface acoustic wave device and manufacturing method thereof |
JP3109060B2 (ja) * | 1991-09-26 | 2000-11-13 | 住友電気工業株式会社 | 表面弾性波素子 |
US5356870A (en) * | 1992-03-26 | 1994-10-18 | Sanyo Electric Co., Ltd. | Method for processing superconducting thin films |
JPH05299960A (ja) | 1992-04-21 | 1993-11-12 | Sanyo Electric Co Ltd | 弾性表面波素子の製造方法 |
JP3132898B2 (ja) | 1992-06-16 | 2001-02-05 | 富士通株式会社 | 弾性表面波素子の製造方法 |
JP3252865B2 (ja) * | 1992-09-11 | 2002-02-04 | 住友電気工業株式会社 | 表面弾性波素子および表面弾性波素子の製造方法 |
JP3205976B2 (ja) * | 1992-09-14 | 2001-09-04 | 住友電気工業株式会社 | 表面弾性波素子 |
JPH06120759A (ja) | 1992-10-05 | 1994-04-28 | Fujitsu Ltd | 弾性表面波素子の製造方法 |
JP3291046B2 (ja) | 1992-12-18 | 2002-06-10 | ティーディーケイ株式会社 | 弾性表面波装置及びその製造方法 |
JPH06268463A (ja) | 1993-03-10 | 1994-09-22 | Canon Inc | 表面弾性波素子及びその製造法 |
DE69424737T2 (de) * | 1993-10-08 | 2000-09-28 | Matsushita Electric Ind Co Ltd | Akustisches Oberflächenwellenfilter |
JP3379049B2 (ja) | 1993-10-27 | 2003-02-17 | 富士通株式会社 | 表面弾性波素子とその製造方法 |
JPH07264000A (ja) * | 1994-03-16 | 1995-10-13 | Fujitsu Ltd | 弾性表面波フィルタ素子及びそれをパッケージングして成る弾性表面波フィルタ |
US5815900A (en) * | 1995-03-06 | 1998-10-06 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a surface acoustic wave module |
EP0840369A4 (en) * | 1995-06-30 | 2001-12-19 | Toshiba Kk | ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD |
JP3609423B2 (ja) * | 1995-09-21 | 2005-01-12 | Tdk株式会社 | 弾性表面波装置及びその製造方法 |
US5651856A (en) * | 1996-01-22 | 1997-07-29 | Micron Technology, Inc. | Selective etch process |
JPH09270654A (ja) * | 1996-03-29 | 1997-10-14 | Kinseki Ltd | 弾性表面波素子の製造方法 |
JPH11163655A (ja) * | 1997-12-01 | 1999-06-18 | Murata Mfg Co Ltd | 弾性表面波装置の製造方法 |
JP3266109B2 (ja) * | 1998-08-05 | 2002-03-18 | 株式会社村田製作所 | 電子デバイスの作製方法 |
JP3293564B2 (ja) * | 1998-08-20 | 2002-06-17 | 株式会社村田製作所 | 電子デバイスの作製方法 |
US6426583B1 (en) * | 1999-06-14 | 2002-07-30 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave element, method for producing the same and surface acoustic wave device using the same |
-
1999
- 1999-04-28 JP JP12250799A patent/JP3712035B2/ja not_active Expired - Lifetime
-
2000
- 2000-04-10 TW TW089106601A patent/TW480812B/zh not_active IP Right Cessation
- 2000-04-10 US US09/546,862 patent/US6564439B1/en not_active Expired - Lifetime
- 2000-04-11 SG SG200002052A patent/SG97148A1/en unknown
- 2000-04-25 KR KR1020000021875A patent/KR100352392B1/ko active IP Right Grant
- 2000-04-27 EP EP00401155A patent/EP1049252A3/en not_active Withdrawn
- 2000-04-28 CN CNB001081829A patent/CN1158758C/zh not_active Expired - Lifetime
-
2002
- 2002-01-25 US US10/054,921 patent/US6810566B2/en not_active Expired - Lifetime
- 2002-01-25 US US10/054,907 patent/US6789297B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0774573A (ja) * | 1993-08-31 | 1995-03-17 | Toshiba Corp | 弾性表面波素子の周波数調整方法 |
JPH08139546A (ja) * | 1994-11-14 | 1996-05-31 | Murata Mfg Co Ltd | 弾性表面波素子の電極形成方法 |
Also Published As
Publication number | Publication date |
---|---|
JP3712035B2 (ja) | 2005-11-02 |
US6789297B2 (en) | 2004-09-14 |
US6810566B2 (en) | 2004-11-02 |
US6564439B1 (en) | 2003-05-20 |
JP2000315928A (ja) | 2000-11-14 |
CN1158758C (zh) | 2004-07-21 |
KR100352392B1 (ko) | 2002-09-11 |
US20020062542A1 (en) | 2002-05-30 |
EP1049252A2 (en) | 2000-11-02 |
CN1271996A (zh) | 2000-11-01 |
EP1049252A3 (en) | 2003-01-22 |
TW480812B (en) | 2002-03-21 |
KR20000077080A (ko) | 2000-12-26 |
US20020059709A1 (en) | 2002-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1056202B8 (en) | Method of producing a surface acoustic wave device | |
GB2374993B (en) | Surface acoustic wave apparatus and manufacturing method therefor | |
HK1036699A1 (en) | Surface acoustic wave devices and method for manufacturing the same | |
EP1050962A4 (en) | SURFACE ACOUSTIC WAVE FILTER | |
GB2365640B (en) | Surface acoustic wave filter | |
EP1393441A4 (en) | SURFACE WAVE SENSOR | |
PL342359A1 (en) | Acoustic apparatus incorporating a panel-like element employing the action of deforming wave | |
AU2866600A (en) | Method of manufacturing a perforated laminate | |
SG97148A1 (en) | Method of manufacturing a surface acoustic wave element | |
SG80101A1 (en) | Method of producing a contact structure | |
EP1152528A4 (en) | ACOUSTIC SURFACE WAVE ASSEMBLY AND METHOD FOR THE PRODUCTION THEREOF | |
EP1411634A4 (en) | SURFACE WAVE FILTER | |
SG94318A1 (en) | Method of manufacturing surface acoustic wave device | |
DE60035966D1 (de) | Herstellungsverfahren für eine akustische oberflächenwellenvorrichtung | |
EP0998039A4 (en) | SURFACE ACOUSTIC WAVE FILTER | |
GB2337886B (en) | Surface acoustic wave filter | |
SG96230A1 (en) | Surface acoustic wave filter | |
EP1330026A4 (en) | ACOUSTIC SURFACE WAVE FILTER | |
GB2365236B (en) | Surface acoustic wave filter | |
GB0216984D0 (en) | Surface acoustic wave | |
SG75868A1 (en) | Surface acoustic wave filter | |
GB2372654B (en) | Surface acoustic wave device and manufacturing method therefor | |
EP1414149A4 (en) | PROCESS FOR PRODUCING SURFACE ACOUSTIC WAVE PROCESSING DEVICES | |
GB2355801B (en) | Interrogation of surface acoustical wave devices | |
SG74699A1 (en) | Surface acoustic wave filter |