SG77263A1 - Low voltage active body semiconductor device - Google Patents
Low voltage active body semiconductor deviceInfo
- Publication number
- SG77263A1 SG77263A1 SG1999003754A SG1999003754A SG77263A1 SG 77263 A1 SG77263 A1 SG 77263A1 SG 1999003754 A SG1999003754 A SG 1999003754A SG 1999003754 A SG1999003754 A SG 1999003754A SG 77263 A1 SG77263 A1 SG 77263A1
- Authority
- SG
- Singapore
- Prior art keywords
- semiconductor device
- low voltage
- active body
- voltage active
- body semiconductor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78612—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H01L29/78615—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect with a body contact
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/90—MOSFET type gate sidewall insulating spacer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/132,599 US5998847A (en) | 1998-08-11 | 1998-08-11 | Low voltage active body semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG77263A1 true SG77263A1 (en) | 2000-12-19 |
Family
ID=22454778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1999003754A SG77263A1 (en) | 1998-08-11 | 1999-08-03 | Low voltage active body semiconductor device |
Country Status (6)
Country | Link |
---|---|
US (2) | US5998847A (zh) |
JP (1) | JP3396186B2 (zh) |
KR (1) | KR100315839B1 (zh) |
CN (1) | CN1252821C (zh) |
MY (1) | MY116040A (zh) |
SG (1) | SG77263A1 (zh) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3568385B2 (ja) * | 1998-03-16 | 2004-09-22 | 沖電気工業株式会社 | 半導体装置の製造方法 |
JP4540142B2 (ja) * | 1999-01-19 | 2010-09-08 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2000311871A (ja) * | 1999-04-27 | 2000-11-07 | Nec Corp | 半導体装置の製造方法 |
JP2000332242A (ja) * | 1999-05-21 | 2000-11-30 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
US6221767B1 (en) * | 1999-10-28 | 2001-04-24 | United Microelectronics Corp. | Method of fabricating a silicide landing pad |
US6429056B1 (en) * | 1999-11-22 | 2002-08-06 | International Business Machines Corporation | Dynamic threshold voltage devices with low gate to substrate resistance |
US6555446B1 (en) * | 1999-12-10 | 2003-04-29 | Texas Instruments Incorporated | Body contact silicon-on-insulator transistor and method |
US6433371B1 (en) * | 2000-01-29 | 2002-08-13 | Advanced Micro Devices, Inc. | Controlled gate length and gate profile semiconductor device |
US6635552B1 (en) | 2000-06-12 | 2003-10-21 | Micron Technology, Inc. | Methods of forming semiconductor constructions |
TW509984B (en) * | 2000-07-24 | 2002-11-11 | United Microelectronics Corp | Manufacture method of metal silicide |
TW501227B (en) * | 2000-08-11 | 2002-09-01 | Samsung Electronics Co Ltd | SOI MOSFET having body contact for preventing floating body effect and method of fabricating the same |
DE10041748A1 (de) * | 2000-08-27 | 2002-03-14 | Infineon Technologies Ag | SOI-Substrat sowie darin ausgebildete Halbleiterschaltung und dazugehörige Herstellungsverfahren |
US6583460B1 (en) * | 2000-08-29 | 2003-06-24 | Micron Technology, Inc. | Method of forming a metal to polysilicon contact in oxygen environment |
US6429070B1 (en) * | 2000-08-30 | 2002-08-06 | Micron Technology, Inc. | DRAM cell constructions, and methods of forming DRAM cells |
US6448131B1 (en) * | 2001-08-14 | 2002-09-10 | International Business Machines Corporation | Method for increasing the capacitance of a trench capacitor |
KR20030070652A (ko) * | 2002-02-26 | 2003-09-02 | 주식회사 하이닉스반도체 | 반도체 소자의 제조방법 |
KR100483564B1 (ko) * | 2002-05-14 | 2005-04-15 | 재단법인서울대학교산학협력재단 | 전계 효과 트랜지스터 및 그의 제조 방법 |
US6869853B1 (en) | 2002-12-18 | 2005-03-22 | Cypress Semiconductor Corporation | Fabrication of a bipolar transistor using a sacrificial emitter |
US6803611B2 (en) * | 2003-01-03 | 2004-10-12 | Texas Instruments Incorporated | Use of indium to define work function of p-type doped polysilicon |
US6964897B2 (en) * | 2003-06-09 | 2005-11-15 | International Business Machines Corporation | SOI trench capacitor cell incorporating a low-leakage floating body array transistor |
KR100543004B1 (ko) * | 2003-09-18 | 2006-01-20 | 삼성에스디아이 주식회사 | 평판표시장치 |
KR100574358B1 (ko) * | 2003-12-29 | 2006-04-27 | 삼성전자주식회사 | 반도체 장치 및 그 제조방법 |
US7611943B2 (en) * | 2004-10-20 | 2009-11-03 | Texas Instruments Incorporated | Transistors, integrated circuits, systems, and processes of manufacture with improved work function modulation |
KR100722112B1 (ko) * | 2005-12-09 | 2007-05-25 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 그의 제조방법 |
JP4680850B2 (ja) | 2005-11-16 | 2011-05-11 | 三星モバイルディスプレイ株式會社 | 薄膜トランジスタ及びその製造方法 |
KR100729055B1 (ko) * | 2005-11-29 | 2007-06-14 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 그 제조 방법 |
KR100729054B1 (ko) * | 2005-11-16 | 2007-06-14 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 그 제조 방법 |
US7929343B2 (en) | 2009-04-07 | 2011-04-19 | Micron Technology, Inc. | Methods, devices, and systems relating to memory cells having a floating body |
US8148780B2 (en) * | 2009-03-24 | 2012-04-03 | Micron Technology, Inc. | Devices and systems relating to a memory cell having a floating body |
US9240354B2 (en) * | 2012-11-14 | 2016-01-19 | Globalfoundries Inc. | Semiconductor device having diffusion barrier to reduce back channel leakage |
CN104251751B (zh) * | 2014-09-26 | 2017-01-25 | 中国科学院半导体研究所 | 一种多感官集成的电子皮肤及其制造方法 |
CN107611168B (zh) * | 2017-08-24 | 2020-07-10 | 长江存储科技有限责任公司 | 一种消除体效应中窄沟道效应影响的mos器件结构 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4359816A (en) * | 1980-07-08 | 1982-11-23 | International Business Machines Corporation | Self-aligned metal process for field effect transistor integrated circuits |
US4716131A (en) * | 1983-11-28 | 1987-12-29 | Nec Corporation | Method of manufacturing semiconductor device having polycrystalline silicon layer with metal silicide film |
JPS6293977A (ja) * | 1985-10-21 | 1987-04-30 | Seiko Epson Corp | 固体撮像装置 |
JPH02302044A (ja) * | 1989-05-16 | 1990-12-14 | Fujitsu Ltd | 半導体装置の製造方法 |
KR940010564B1 (ko) * | 1991-10-10 | 1994-10-24 | 금성일렉트론 주식회사 | 전계효과 트랜지스터 및 그 제조방법 |
JPH05343669A (ja) * | 1992-06-08 | 1993-12-24 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
KR0161380B1 (ko) * | 1994-12-28 | 1998-12-01 | 김광호 | 반도체장치의 트랜지스터 및 그 제조방법 |
US5714393A (en) * | 1996-12-09 | 1998-02-03 | Motorola, Inc. | Diode-connected semiconductor device and method of manufacture |
US6025232A (en) * | 1997-11-12 | 2000-02-15 | Micron Technology, Inc. | Methods of forming field effect transistors and related field effect transistor constructions |
-
1998
- 1998-08-11 US US09/132,599 patent/US5998847A/en not_active Expired - Lifetime
-
1999
- 1999-06-29 US US09/342,066 patent/US6136655A/en not_active Expired - Fee Related
- 1999-07-13 KR KR1019990028142A patent/KR100315839B1/ko not_active IP Right Cessation
- 1999-07-20 MY MYPI99003047A patent/MY116040A/en unknown
- 1999-07-21 CN CNB991105125A patent/CN1252821C/zh not_active Expired - Fee Related
- 1999-08-03 SG SG1999003754A patent/SG77263A1/en unknown
- 1999-08-09 JP JP22482799A patent/JP3396186B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100315839B1 (ko) | 2001-12-12 |
CN1244733A (zh) | 2000-02-16 |
JP2000058861A (ja) | 2000-02-25 |
MY116040A (en) | 2003-10-31 |
US5998847A (en) | 1999-12-07 |
US6136655A (en) | 2000-10-24 |
JP3396186B2 (ja) | 2003-04-14 |
KR20000016924A (ko) | 2000-03-25 |
CN1252821C (zh) | 2006-04-19 |
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