SG67505A1 - Combined slurry dispenser and rinse arm and method of operation - Google Patents

Combined slurry dispenser and rinse arm and method of operation

Info

Publication number
SG67505A1
SG67505A1 SG1998001113A SG1998001113A SG67505A1 SG 67505 A1 SG67505 A1 SG 67505A1 SG 1998001113 A SG1998001113 A SG 1998001113A SG 1998001113 A SG1998001113 A SG 1998001113A SG 67505 A1 SG67505 A1 SG 67505A1
Authority
SG
Singapore
Prior art keywords
slurry dispenser
rinse arm
combined slurry
combined
rinse
Prior art date
Application number
SG1998001113A
Other languages
English (en)
Inventor
Daniel Kennedy
Boris Fuksshimov
Victor Belitsky
Kyle Brown
Tom Osterheld
Jeff Beeler
Ginetto Addiego
Boris Fishkin
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG67505A1 publication Critical patent/SG67505A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
SG1998001113A 1997-06-24 1998-02-25 Combined slurry dispenser and rinse arm and method of operation SG67505A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/879,447 US6139406A (en) 1997-06-24 1997-06-24 Combined slurry dispenser and rinse arm and method of operation

Publications (1)

Publication Number Publication Date
SG67505A1 true SG67505A1 (en) 1999-09-21

Family

ID=25374186

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998001113A SG67505A1 (en) 1997-06-24 1998-02-25 Combined slurry dispenser and rinse arm and method of operation

Country Status (7)

Country Link
US (2) US6139406A (ja)
EP (1) EP0887153B1 (ja)
JP (2) JPH1170464A (ja)
KR (1) KR100328607B1 (ja)
DE (1) DE69813678T2 (ja)
SG (1) SG67505A1 (ja)
TW (1) TW385500B (ja)

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Also Published As

Publication number Publication date
KR100328607B1 (ko) 2002-06-20
KR19990007262A (ko) 1999-01-25
EP0887153A2 (en) 1998-12-30
DE69813678D1 (de) 2003-05-28
EP0887153A3 (en) 2000-01-05
JPH1170464A (ja) 1999-03-16
JP2003229393A (ja) 2003-08-15
US6280299B1 (en) 2001-08-28
US6139406A (en) 2000-10-31
TW385500B (en) 2000-03-21
DE69813678T2 (de) 2004-04-08
EP0887153B1 (en) 2003-04-23

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