SG185916A1 - Elastic micro high frequency probe - Google Patents

Elastic micro high frequency probe Download PDF

Info

Publication number
SG185916A1
SG185916A1 SG2012038212A SG2012038212A SG185916A1 SG 185916 A1 SG185916 A1 SG 185916A1 SG 2012038212 A SG2012038212 A SG 2012038212A SG 2012038212 A SG2012038212 A SG 2012038212A SG 185916 A1 SG185916 A1 SG 185916A1
Authority
SG
Singapore
Prior art keywords
spring mechanism
guider
conductive terminal
high frequency
guiding
Prior art date
Application number
SG2012038212A
Other languages
English (en)
Inventor
Lee Yu-Lung
Chen Chih-Chung
Chen Tsung-Yi
Fan Horng-Kuang
Original Assignee
Mpi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mpi Corp filed Critical Mpi Corp
Publication of SG185916A1 publication Critical patent/SG185916A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
SG2012038212A 2011-05-27 2012-05-24 Elastic micro high frequency probe SG185916A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW100118745A TWI482975B (zh) 2011-05-27 2011-05-27 Spring-type micro-high-frequency probe

Publications (1)

Publication Number Publication Date
SG185916A1 true SG185916A1 (en) 2012-12-28

Family

ID=47197910

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2012038212A SG185916A1 (en) 2011-05-27 2012-05-24 Elastic micro high frequency probe

Country Status (4)

Country Link
US (1) US9000794B2 (zh)
CN (1) CN102798741B (zh)
SG (1) SG185916A1 (zh)
TW (1) TWI482975B (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9774121B2 (en) * 2012-12-04 2017-09-26 Japan Electronics Material Corporation Contact probe
TWI548879B (zh) * 2014-01-28 2016-09-11 Spring sleeve probe
TW201533449A (zh) * 2014-02-24 2015-09-01 Mpi Corp 具有彈簧套筒式探針之探針裝置
CN104280904A (zh) * 2014-09-26 2015-01-14 京东方科技集团股份有限公司 阵列基板检测头及检测装置、阵列基板检测方法
JP6515877B2 (ja) * 2016-06-17 2019-05-22 オムロン株式会社 プローブピン
CN106290997B (zh) * 2016-07-28 2019-02-15 中国科学院物理研究所 高频测量杆
TWI592666B (zh) * 2016-09-12 2017-07-21 中華精測科技股份有限公司 滑軌式探針
JP6642359B2 (ja) * 2016-09-21 2020-02-05 オムロン株式会社 プローブピンおよび検査ユニット
CN110907795B (zh) * 2018-09-14 2022-01-14 新加坡商美亚国际电子有限公司 测试用电路板及其操作方法
CN111239449B (zh) * 2018-11-28 2022-06-10 台湾中华精测科技股份有限公司 探针卡装置及其探针座
US11867721B1 (en) * 2019-12-31 2024-01-09 Microfabrica Inc. Probes with multiple springs, methods for making, and methods for using
CN113219220B (zh) * 2020-01-21 2023-10-10 台湾中华精测科技股份有限公司 探针卡装置及其指向性探针
KR102538834B1 (ko) * 2021-04-15 2023-06-02 (주)위드멤스 프로브 핀
KR102708633B1 (ko) * 2022-01-21 2024-09-24 (주)포인트엔지니어링 전기 전도성 접촉핀
CN115616259B (zh) * 2022-09-26 2023-12-08 上海泽丰半导体科技有限公司 薄膜探针卡水平调节装置及薄膜探针卡

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US6945827B2 (en) * 2002-12-23 2005-09-20 Formfactor, Inc. Microelectronic contact structure
US7015708B2 (en) * 2003-07-11 2006-03-21 Gore Enterprise Holdings, Inc. Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts
US7176702B2 (en) * 2004-04-07 2007-02-13 Micron Technology, Inc. Contact system for wafer level testing
JP4905872B2 (ja) * 2005-02-18 2012-03-28 日本発條株式会社 導電性接触子ユニット
KR101012712B1 (ko) * 2005-06-10 2011-02-09 델라웨어 캐피탈 포메이션, 인코포레이티드 컴플라이언트 전기적 상호접속체 및 전기적 접촉 프로브
JP4792465B2 (ja) * 2005-08-09 2011-10-12 株式会社日本マイクロニクス 通電試験用プローブ
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TW200829922A (en) * 2007-01-08 2008-07-16 Microelectonics Technology Inc High frequency probe
TWI314651B (en) * 2007-01-25 2009-09-11 Asp Test Technology Ltd High frequency probe assembly for ic testing
TWI385399B (zh) * 2007-04-27 2013-02-11 Nhk Spring Co Ltd 導電性觸頭
JP5607934B2 (ja) * 2008-02-01 2014-10-15 日本発條株式会社 プローブユニット
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JP5036892B2 (ja) * 2010-05-10 2012-09-26 株式会社神戸製鋼所 コンタクトプローブ
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Also Published As

Publication number Publication date
US9000794B2 (en) 2015-04-07
CN102798741B (zh) 2015-05-13
CN102798741A (zh) 2012-11-28
TWI482975B (zh) 2015-05-01
TW201248158A (en) 2012-12-01
US20120299612A1 (en) 2012-11-29

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