SE511139C2 - Plasmabearbetningsapparat med vridbara magneter - Google Patents

Plasmabearbetningsapparat med vridbara magneter

Info

Publication number
SE511139C2
SE511139C2 SE9704260A SE9704260A SE511139C2 SE 511139 C2 SE511139 C2 SE 511139C2 SE 9704260 A SE9704260 A SE 9704260A SE 9704260 A SE9704260 A SE 9704260A SE 511139 C2 SE511139 C2 SE 511139C2
Authority
SE
Sweden
Prior art keywords
permanent magnet
rotatable
plasma processing
magnetic
plasma
Prior art date
Application number
SE9704260A
Other languages
English (en)
Swedish (sv)
Other versions
SE9704260D0 (sv
SE9704260L (sv
Inventor
Hana Barankova
Ladislav Bardos
Original Assignee
Hana Barankova
Ladislav Bardos
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=20409052&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SE511139(C2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Publication of SE9704260D0 publication Critical patent/SE9704260D0/xx
Priority to SE9704260A priority Critical patent/SE511139C2/sv
Application filed by Hana Barankova, Ladislav Bardos filed Critical Hana Barankova
Priority to DE69828904T priority patent/DE69828904T3/de
Priority to AU11820/99A priority patent/AU1182099A/en
Priority to PCT/SE1998/001983 priority patent/WO1999027758A1/en
Priority to US09/554,666 priority patent/US6351075B1/en
Priority to EP98954885A priority patent/EP1033068B2/en
Priority to JP2000522766A priority patent/JP4491132B2/ja
Priority to CZ20001853A priority patent/CZ298474B6/cs
Publication of SE9704260L publication Critical patent/SE9704260L/xx
Publication of SE511139C2 publication Critical patent/SE511139C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
SE9704260A 1997-11-20 1997-11-20 Plasmabearbetningsapparat med vridbara magneter SE511139C2 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE9704260A SE511139C2 (sv) 1997-11-20 1997-11-20 Plasmabearbetningsapparat med vridbara magneter
CZ20001853A CZ298474B6 (cs) 1997-11-20 1998-11-03 Zarízení na zpracování plazmatem
DE69828904T DE69828904T3 (de) 1997-11-20 1998-11-03 Plasmabehandlungsgerät mit rotierenden magneten
JP2000522766A JP4491132B2 (ja) 1997-11-20 1998-11-03 プラズマ処理装置
AU11820/99A AU1182099A (en) 1997-11-20 1998-11-03 Plasma processing apparatus having rotating magnets
PCT/SE1998/001983 WO1999027758A1 (en) 1997-11-20 1998-11-03 Plasma processing apparatus having rotating magnets
US09/554,666 US6351075B1 (en) 1997-11-20 1998-11-03 Plasma processing apparatus having rotating magnets
EP98954885A EP1033068B2 (en) 1997-11-20 1998-11-03 Plasma processing apparatus having rotating magnets

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9704260A SE511139C2 (sv) 1997-11-20 1997-11-20 Plasmabearbetningsapparat med vridbara magneter

Publications (3)

Publication Number Publication Date
SE9704260D0 SE9704260D0 (sv) 1997-11-20
SE9704260L SE9704260L (sv) 1999-05-21
SE511139C2 true SE511139C2 (sv) 1999-08-09

Family

ID=20409052

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9704260A SE511139C2 (sv) 1997-11-20 1997-11-20 Plasmabearbetningsapparat med vridbara magneter

Country Status (8)

Country Link
US (1) US6351075B1 (cs)
EP (1) EP1033068B2 (cs)
JP (1) JP4491132B2 (cs)
AU (1) AU1182099A (cs)
CZ (1) CZ298474B6 (cs)
DE (1) DE69828904T3 (cs)
SE (1) SE511139C2 (cs)
WO (1) WO1999027758A1 (cs)

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Also Published As

Publication number Publication date
SE9704260D0 (sv) 1997-11-20
EP1033068A1 (en) 2000-09-06
DE69828904D1 (de) 2005-03-10
DE69828904T3 (de) 2012-02-09
WO1999027758A1 (en) 1999-06-03
US6351075B1 (en) 2002-02-26
DE69828904T2 (de) 2006-01-12
EP1033068B1 (en) 2005-02-02
JP2001524743A (ja) 2001-12-04
CZ298474B6 (cs) 2007-10-10
SE9704260L (sv) 1999-05-21
EP1033068B2 (en) 2011-03-09
AU1182099A (en) 1999-06-15
CZ20001853A3 (cs) 2000-08-16
JP4491132B2 (ja) 2010-06-30

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