SE468067B - Kapacitiv accelerometer och saett foer tillverkning av denna - Google Patents
Kapacitiv accelerometer och saett foer tillverkning av dennaInfo
- Publication number
- SE468067B SE468067B SE8804039A SE8804039A SE468067B SE 468067 B SE468067 B SE 468067B SE 8804039 A SE8804039 A SE 8804039A SE 8804039 A SE8804039 A SE 8804039A SE 468067 B SE468067 B SE 468067B
- Authority
- SE
- Sweden
- Prior art keywords
- center electrode
- accelerometer
- electrode
- side electrodes
- center
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI874942A FI81915C (fi) | 1987-11-09 | 1987-11-09 | Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. |
Publications (2)
Publication Number | Publication Date |
---|---|
SE8804039D0 SE8804039D0 (sv) | 1988-11-08 |
SE468067B true SE468067B (sv) | 1992-10-26 |
Family
ID=8525381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8804039A SE468067B (sv) | 1987-11-09 | 1988-11-08 | Kapacitiv accelerometer och saett foer tillverkning av denna |
Country Status (10)
Country | Link |
---|---|
JP (1) | JPH01259265A (it) |
KR (1) | KR890008569A (it) |
CN (1) | CN1022136C (it) |
DE (1) | DE3837883A1 (it) |
ES (1) | ES2012420A6 (it) |
FI (1) | FI81915C (it) |
FR (1) | FR2622975B1 (it) |
GB (1) | GB2212274A (it) |
IT (1) | IT1224301B (it) |
SE (1) | SE468067B (it) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4983485A (en) * | 1988-04-13 | 1991-01-08 | Shikoku Chemicals Corporation | Positively chargeable toner |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US5228341A (en) * | 1989-10-18 | 1993-07-20 | Hitachi, Ltd. | Capacitive acceleration detector having reduced mass portion |
US6864677B1 (en) | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
JPH03210478A (ja) * | 1990-01-12 | 1991-09-13 | Nissan Motor Co Ltd | 半導体加速度センサ |
DE4000903C1 (it) * | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
JP2786321B2 (ja) * | 1990-09-07 | 1998-08-13 | 株式会社日立製作所 | 半導体容量式加速度センサ及びその製造方法 |
DE4222472C2 (de) * | 1992-07-09 | 1998-07-02 | Bosch Gmbh Robert | Beschleunigungssensor |
JP2533272B2 (ja) * | 1992-11-17 | 1996-09-11 | 住友電気工業株式会社 | 半導体デバイスの製造方法 |
FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
DE10117630B4 (de) * | 2001-04-09 | 2005-12-29 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
EP1243930A1 (de) | 2001-03-08 | 2002-09-25 | EADS Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
DE10111149B4 (de) * | 2001-03-08 | 2011-01-05 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
DE10117257A1 (de) * | 2001-04-06 | 2002-10-17 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
JP2005077349A (ja) * | 2003-09-03 | 2005-03-24 | Mitsubishi Electric Corp | 加速度センサ |
WO2007104289A1 (de) | 2006-03-10 | 2007-09-20 | Conti Temic Microelectronic Gmbh | Mikromechanischer drehratensensor |
EP2259018B1 (en) | 2009-05-29 | 2017-06-28 | Infineon Technologies AG | Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system |
DE112012005609T5 (de) * | 2012-04-30 | 2014-09-25 | Hewlett-Packard Development Company, L.P. | Steuersignal basierend auf einem durch einen Benutzer geklopften Befehl |
CN106771361B (zh) * | 2016-12-15 | 2023-04-25 | 西安邮电大学 | 双电容式微机械加速度传感器及基于其的温度自补偿系统 |
CN106841683B (zh) * | 2017-04-06 | 2023-09-01 | 中国工程物理研究院电子工程研究所 | 石英摆式加速度计及其制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
JPS6197572A (ja) * | 1984-10-19 | 1986-05-16 | Nissan Motor Co Ltd | 半導体加速度センサの製造方法 |
US4744249A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
DE3625411A1 (de) * | 1986-07-26 | 1988-02-04 | Messerschmitt Boelkow Blohm | Kapazitiver beschleunigungssensor |
DE3703793A1 (de) * | 1987-02-07 | 1988-08-18 | Messerschmitt Boelkow Blohm | Detektorelement |
-
1987
- 1987-11-09 FI FI874942A patent/FI81915C/fi not_active IP Right Cessation
-
1988
- 1988-11-08 ES ES8803392A patent/ES2012420A6/es not_active Expired - Fee Related
- 1988-11-08 IT IT48532/88A patent/IT1224301B/it active
- 1988-11-08 FR FR888814564A patent/FR2622975B1/fr not_active Expired - Lifetime
- 1988-11-08 SE SE8804039A patent/SE468067B/sv unknown
- 1988-11-08 KR KR1019880014655A patent/KR890008569A/ko not_active Application Discontinuation
- 1988-11-08 DE DE3837883A patent/DE3837883A1/de not_active Ceased
- 1988-11-09 GB GB8826263A patent/GB2212274A/en not_active Withdrawn
- 1988-11-09 JP JP63283533A patent/JPH01259265A/ja active Pending
- 1988-11-09 CN CN88107822A patent/CN1022136C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2622975B1 (fr) | 1991-07-12 |
JPH01259265A (ja) | 1989-10-16 |
SE8804039D0 (sv) | 1988-11-08 |
IT8848532A0 (it) | 1988-11-08 |
ES2012420A6 (es) | 1990-03-16 |
GB8826263D0 (en) | 1988-12-14 |
KR890008569A (ko) | 1989-07-12 |
FI874942A0 (fi) | 1987-11-09 |
CN1022136C (zh) | 1993-09-15 |
CN1033110A (zh) | 1989-05-24 |
GB2212274A (en) | 1989-07-19 |
IT1224301B (it) | 1990-10-04 |
FI81915C (fi) | 1990-12-10 |
FI81915B (fi) | 1990-08-31 |
DE3837883A1 (de) | 1989-05-18 |
FR2622975A1 (fr) | 1989-05-12 |
FI874942A (fi) | 1989-05-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE468067B (sv) | Kapacitiv accelerometer och saett foer tillverkning av denna | |
US5488864A (en) | Torsion beam accelerometer with slotted tilt plate | |
US6286369B1 (en) | Single-side microelectromechanical capacitive acclerometer and method of making same | |
JP3457037B2 (ja) | 集積型加速度計 | |
US6035714A (en) | Microelectromechanical capacitive accelerometer and method of making same | |
US6935175B2 (en) | Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping | |
US5447068A (en) | Digital capacitive accelerometer | |
US6718605B2 (en) | Single-side microelectromechanical capacitive accelerometer and method of making same | |
US5447067A (en) | Acceleration sensor and method for manufacturing same | |
US6792804B2 (en) | Sensor for measuring out-of-plane acceleration | |
JPH10142254A (ja) | 半導体集積型容量加速度センサおよびその製法 | |
JP5799929B2 (ja) | 加速度センサ | |
US5604313A (en) | Varying apparent mass accelerometer | |
US10544037B2 (en) | Integrated semiconductor device and manufacturing method | |
US20190271717A1 (en) | Accelerometer sensor | |
JPH09318656A (ja) | 静電容量式加速度センサ | |
JP2019049434A (ja) | 加速度センサ | |
CN111908419B (zh) | 一种三明治式mems器件结构 | |
Zou et al. | Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer | |
CN115420907B (zh) | 一种mems加速度计及其形成方法 | |
KR100880212B1 (ko) | 자이로 센서 및 이를 이용하는 센서 장치 | |
KR20010050348A (ko) | 미크로 기계가공되는 구조물 및 그 제조방법 | |
JPH11271354A (ja) | 容量型センサ | |
JPH04192370A (ja) | 半導体加速度センサ | |
JPH05113447A (ja) | 加速度センサ素子およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
NAL | Patent in force |
Ref document number: 8804039-9 Format of ref document f/p: F |