ES2012420A6 - Acelerometro capacitivo y metodo de fabricacion del mismo. - Google Patents
Acelerometro capacitivo y metodo de fabricacion del mismo.Info
- Publication number
- ES2012420A6 ES2012420A6 ES8803392A ES8803392A ES2012420A6 ES 2012420 A6 ES2012420 A6 ES 2012420A6 ES 8803392 A ES8803392 A ES 8803392A ES 8803392 A ES8803392 A ES 8803392A ES 2012420 A6 ES2012420 A6 ES 2012420A6
- Authority
- ES
- Spain
- Prior art keywords
- centre electrode
- electrode
- centre
- body element
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Abstract
ACELEROMETRO CAPACITIVO Y METODO DE FABRICACION DEL MISMO. EL ACELEROMETRO COMPRENDE DOS ELECTRODOS LATERALES (15) CON ELECTRODOS FIJOS (4, 6'') Y UN ELECTRODO CENTRAL (16) DISPUESTO ENTRE LOS ELECTRODOS FIJOS (15), EL CUAL POSEE UN ELECTRODO CENTRAL (17). EL ELECTRODO (16) COMPRENDE UN CUERPO PLANO (3) ALINEADO CON LOS ELECTRODOS (15), EN CUYO ELEMENTO, LA SECCION QUE PERMANECE ENTRE LOS ELECTRODOS LATERALES (15) LLEVA UNA RANURA QUE PENETRA EN EL ELEMENTO (3) EN FORMA DE U Y QUE DELINEA UN ELECTRODO CENTRAL (17) EN FORMA DE BRAZO EN VOLADIZO PARALELO AL CUERPO (3) DE MANERA QUE LA PUNTA (1) DEL ELECTRODO (17) ES MAS DELGADA QUE EL CUERPO (3) DE MANERA QUE SE FORMAN INTERSTICIOS (7) ENTRE LOS ELECTRODOS LATERALES (4, 6'') Y EL ELECTRODO CENTRAL (17).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI874942A FI81915C (fi) | 1987-11-09 | 1987-11-09 | Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav. |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2012420A6 true ES2012420A6 (es) | 1990-03-16 |
Family
ID=8525381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES8803392A Expired - Fee Related ES2012420A6 (es) | 1987-11-09 | 1988-11-08 | Acelerometro capacitivo y metodo de fabricacion del mismo. |
Country Status (10)
Country | Link |
---|---|
JP (1) | JPH01259265A (es) |
KR (1) | KR890008569A (es) |
CN (1) | CN1022136C (es) |
DE (1) | DE3837883A1 (es) |
ES (1) | ES2012420A6 (es) |
FI (1) | FI81915C (es) |
FR (1) | FR2622975B1 (es) |
GB (1) | GB2212274A (es) |
IT (1) | IT1224301B (es) |
SE (1) | SE468067B (es) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4983485A (en) * | 1988-04-13 | 1991-01-08 | Shikoku Chemicals Corporation | Positively chargeable toner |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US5228341A (en) * | 1989-10-18 | 1993-07-20 | Hitachi, Ltd. | Capacitive acceleration detector having reduced mass portion |
US6864677B1 (en) | 1993-12-15 | 2005-03-08 | Kazuhiro Okada | Method of testing a sensor |
JPH03210478A (ja) * | 1990-01-12 | 1991-09-13 | Nissan Motor Co Ltd | 半導体加速度センサ |
DE4000903C1 (es) * | 1990-01-15 | 1990-08-09 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
JP2786321B2 (ja) * | 1990-09-07 | 1998-08-13 | 株式会社日立製作所 | 半導体容量式加速度センサ及びその製造方法 |
DE4222472C2 (de) * | 1992-07-09 | 1998-07-02 | Bosch Gmbh Robert | Beschleunigungssensor |
JP2533272B2 (ja) * | 1992-11-17 | 1996-09-11 | 住友電気工業株式会社 | 半導体デバイスの製造方法 |
FR2698447B1 (fr) * | 1992-11-23 | 1995-02-03 | Suisse Electronique Microtech | Cellule de mesure micro-usinée. |
DE10117630B4 (de) * | 2001-04-09 | 2005-12-29 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
EP1243930A1 (de) | 2001-03-08 | 2002-09-25 | EADS Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
DE10111149B4 (de) * | 2001-03-08 | 2011-01-05 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
DE10117257A1 (de) * | 2001-04-06 | 2002-10-17 | Eads Deutschland Gmbh | Mikromechanischer kapazitiver Beschleunigungssensor |
JP2005077349A (ja) * | 2003-09-03 | 2005-03-24 | Mitsubishi Electric Corp | 加速度センサ |
CN101400969A (zh) | 2006-03-10 | 2009-04-01 | 康蒂特米克微电子有限公司 | 微机械的转速传感器 |
EP2259018B1 (en) * | 2009-05-29 | 2017-06-28 | Infineon Technologies AG | Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system |
WO2013165348A1 (en) * | 2012-04-30 | 2013-11-07 | Hewlett-Packard Development Company | Control signal based on a command tapped by a user |
CN106771361B (zh) * | 2016-12-15 | 2023-04-25 | 西安邮电大学 | 双电容式微机械加速度传感器及基于其的温度自补偿系统 |
CN106841683B (zh) * | 2017-04-06 | 2023-09-01 | 中国工程物理研究院电子工程研究所 | 石英摆式加速度计及其制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
JPS6197572A (ja) * | 1984-10-19 | 1986-05-16 | Nissan Motor Co Ltd | 半導体加速度センサの製造方法 |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
US4744249A (en) * | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
DE3625411A1 (de) * | 1986-07-26 | 1988-02-04 | Messerschmitt Boelkow Blohm | Kapazitiver beschleunigungssensor |
DE3703793A1 (de) * | 1987-02-07 | 1988-08-18 | Messerschmitt Boelkow Blohm | Detektorelement |
-
1987
- 1987-11-09 FI FI874942A patent/FI81915C/fi not_active IP Right Cessation
-
1988
- 1988-11-08 SE SE8804039A patent/SE468067B/sv unknown
- 1988-11-08 ES ES8803392A patent/ES2012420A6/es not_active Expired - Fee Related
- 1988-11-08 KR KR1019880014655A patent/KR890008569A/ko not_active Application Discontinuation
- 1988-11-08 DE DE3837883A patent/DE3837883A1/de not_active Ceased
- 1988-11-08 FR FR888814564A patent/FR2622975B1/fr not_active Expired - Lifetime
- 1988-11-08 IT IT48532/88A patent/IT1224301B/it active
- 1988-11-09 CN CN88107822A patent/CN1022136C/zh not_active Expired - Lifetime
- 1988-11-09 JP JP63283533A patent/JPH01259265A/ja active Pending
- 1988-11-09 GB GB8826263A patent/GB2212274A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE3837883A1 (de) | 1989-05-18 |
IT8848532A0 (it) | 1988-11-08 |
GB2212274A (en) | 1989-07-19 |
CN1022136C (zh) | 1993-09-15 |
SE468067B (sv) | 1992-10-26 |
FI81915B (fi) | 1990-08-31 |
SE8804039D0 (sv) | 1988-11-08 |
FI874942A (fi) | 1989-05-10 |
FI874942A0 (fi) | 1987-11-09 |
KR890008569A (ko) | 1989-07-12 |
CN1033110A (zh) | 1989-05-24 |
FI81915C (fi) | 1990-12-10 |
FR2622975B1 (fr) | 1991-07-12 |
GB8826263D0 (en) | 1988-12-14 |
IT1224301B (it) | 1990-10-04 |
JPH01259265A (ja) | 1989-10-16 |
FR2622975A1 (fr) | 1989-05-12 |
SE8804039A (es) | 1988-11-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
SA6 | Expiration date (snapshot 920101) |
Free format text: 2008-11-08 |
|
FD1A | Patent lapsed |
Effective date: 20081110 |