JPS6469957A - Semiconductor acceleration sensor - Google Patents

Semiconductor acceleration sensor

Info

Publication number
JPS6469957A
JPS6469957A JP62227165A JP22716587A JPS6469957A JP S6469957 A JPS6469957 A JP S6469957A JP 62227165 A JP62227165 A JP 62227165A JP 22716587 A JP22716587 A JP 22716587A JP S6469957 A JPS6469957 A JP S6469957A
Authority
JP
Japan
Prior art keywords
parts
strain
resistance values
overlapped part
gages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62227165A
Other languages
Japanese (ja)
Other versions
JPH07113646B2 (en
Inventor
Akio Shimomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP62227165A priority Critical patent/JPH07113646B2/en
Publication of JPS6469957A publication Critical patent/JPS6469957A/en
Publication of JPH07113646B2 publication Critical patent/JPH07113646B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Pressure Sensors (AREA)

Abstract

PURPOSE:To improve detecting accuracy without enhancing forming accuracy, by providing cantilever parts, an overlapped part, strain gage parts and the like. CONSTITUTION:Cantilever parts 5a and 5b have a center beam structure. When acceleration acts in the lower direction of an overlapped part 5c, tensile stress is applied on strain gages 7-11, and the resistance values are increased. Compression strain in applied on strain gages 13 and 14, and the resistance values are decreased. Thus, the stress, which corresponds to the acting direction of the acceleration, is applied to the overlapped part 5c. The changes in resistance values corresponding to the stresses at the parts, where the gages are attached, are yielded in the strain gages 7-14. In this way, the detecting accuracy can be improved without enhancing forming accuracy.
JP62227165A 1987-09-10 1987-09-10 Semiconductor acceleration sensor Expired - Lifetime JPH07113646B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62227165A JPH07113646B2 (en) 1987-09-10 1987-09-10 Semiconductor acceleration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62227165A JPH07113646B2 (en) 1987-09-10 1987-09-10 Semiconductor acceleration sensor

Publications (2)

Publication Number Publication Date
JPS6469957A true JPS6469957A (en) 1989-03-15
JPH07113646B2 JPH07113646B2 (en) 1995-12-06

Family

ID=16856507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62227165A Expired - Lifetime JPH07113646B2 (en) 1987-09-10 1987-09-10 Semiconductor acceleration sensor

Country Status (1)

Country Link
JP (1) JPH07113646B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328904U (en) * 1989-07-31 1991-03-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328904U (en) * 1989-07-31 1991-03-22

Also Published As

Publication number Publication date
JPH07113646B2 (en) 1995-12-06

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