JPS6469957A - Semiconductor acceleration sensor - Google Patents
Semiconductor acceleration sensorInfo
- Publication number
- JPS6469957A JPS6469957A JP62227165A JP22716587A JPS6469957A JP S6469957 A JPS6469957 A JP S6469957A JP 62227165 A JP62227165 A JP 62227165A JP 22716587 A JP22716587 A JP 22716587A JP S6469957 A JPS6469957 A JP S6469957A
- Authority
- JP
- Japan
- Prior art keywords
- parts
- strain
- resistance values
- overlapped part
- gages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
PURPOSE:To improve detecting accuracy without enhancing forming accuracy, by providing cantilever parts, an overlapped part, strain gage parts and the like. CONSTITUTION:Cantilever parts 5a and 5b have a center beam structure. When acceleration acts in the lower direction of an overlapped part 5c, tensile stress is applied on strain gages 7-11, and the resistance values are increased. Compression strain in applied on strain gages 13 and 14, and the resistance values are decreased. Thus, the stress, which corresponds to the acting direction of the acceleration, is applied to the overlapped part 5c. The changes in resistance values corresponding to the stresses at the parts, where the gages are attached, are yielded in the strain gages 7-14. In this way, the detecting accuracy can be improved without enhancing forming accuracy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62227165A JPH07113646B2 (en) | 1987-09-10 | 1987-09-10 | Semiconductor acceleration sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62227165A JPH07113646B2 (en) | 1987-09-10 | 1987-09-10 | Semiconductor acceleration sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6469957A true JPS6469957A (en) | 1989-03-15 |
JPH07113646B2 JPH07113646B2 (en) | 1995-12-06 |
Family
ID=16856507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62227165A Expired - Lifetime JPH07113646B2 (en) | 1987-09-10 | 1987-09-10 | Semiconductor acceleration sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07113646B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0328904U (en) * | 1989-07-31 | 1991-03-22 |
-
1987
- 1987-09-10 JP JP62227165A patent/JPH07113646B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0328904U (en) * | 1989-07-31 | 1991-03-22 |
Also Published As
Publication number | Publication date |
---|---|
JPH07113646B2 (en) | 1995-12-06 |
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