JPS6488255A - Detecting device of acceleration - Google Patents

Detecting device of acceleration

Info

Publication number
JPS6488255A
JPS6488255A JP24596787A JP24596787A JPS6488255A JP S6488255 A JPS6488255 A JP S6488255A JP 24596787 A JP24596787 A JP 24596787A JP 24596787 A JP24596787 A JP 24596787A JP S6488255 A JPS6488255 A JP S6488255A
Authority
JP
Japan
Prior art keywords
weight
cantilever
gages
circuit
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24596787A
Other languages
Japanese (ja)
Inventor
Akihiro Kobayashi
Takeshi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP24596787A priority Critical patent/JPS6488255A/en
Publication of JPS6488255A publication Critical patent/JPS6488255A/en
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)

Abstract

PURPOSE:To make a device small in size by a construction wherein a processing circuit of an input electric signal of a strain gage is provided in a part of a strain-generating substrate or in a weight part disposed in contact with or in proximity to said part, so as to amplify a weak strain gage signal. CONSTITUTION:The title device is provided with a cantilever 2 supported by a base 1 and with a weight 3 fixed to the cantilever 2, and diffusion-type piezoresistance gages 4a, 4b, 4c and 4d are formed integrally on the cantilever 2. The gages 4a-4d constitute a Wheatstone bridge circuit, and a signal processing circuit 5 and others are formed directly on the weight 3. When an acceleration is impressed, the cantilever 2 is bent by a force acting on the weight 3, and electric signals converted by the gages 4a-4d are led to electrode pads 7 through the circuit 5 and wirings 6 respectively and taken outside. Accordingly, the device can be made small in size by making the weight 3 operate also as a circuit chip.
JP24596787A 1987-09-30 1987-09-30 Detecting device of acceleration Pending JPS6488255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24596787A JPS6488255A (en) 1987-09-30 1987-09-30 Detecting device of acceleration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24596787A JPS6488255A (en) 1987-09-30 1987-09-30 Detecting device of acceleration

Publications (1)

Publication Number Publication Date
JPS6488255A true JPS6488255A (en) 1989-04-03

Family

ID=17141497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24596787A Pending JPS6488255A (en) 1987-09-30 1987-09-30 Detecting device of acceleration

Country Status (1)

Country Link
JP (1) JPS6488255A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328769A (en) * 1989-06-27 1991-02-06 Mitsubishi Electric Corp Acceleration sensor
JPH06194379A (en) * 1992-12-25 1994-07-15 Mitsubishi Electric Corp Semiconductor acceleration detector
JP2006105798A (en) * 2004-10-06 2006-04-20 Oki Electric Ind Co Ltd Semiconductor acceleration sensor and method for manufacturing same
JP2008096374A (en) * 2006-10-16 2008-04-24 Denso Corp Sensor device
CN108120858A (en) * 2017-12-20 2018-06-05 中国科学院半导体研究所 Autoexcitation self-test probe and preparation method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328769A (en) * 1989-06-27 1991-02-06 Mitsubishi Electric Corp Acceleration sensor
JPH06194379A (en) * 1992-12-25 1994-07-15 Mitsubishi Electric Corp Semiconductor acceleration detector
JP2006105798A (en) * 2004-10-06 2006-04-20 Oki Electric Ind Co Ltd Semiconductor acceleration sensor and method for manufacturing same
JP2008096374A (en) * 2006-10-16 2008-04-24 Denso Corp Sensor device
CN108120858A (en) * 2017-12-20 2018-06-05 中国科学院半导体研究所 Autoexcitation self-test probe and preparation method thereof
CN108120858B (en) * 2017-12-20 2020-05-26 中国科学院半导体研究所 Self-excitation self-detection probe and manufacturing method thereof

Similar Documents

Publication Publication Date Title
ATE435422T1 (en) ARRANGEMENT OF CHEMICALLY SENSITIVE CAPACITORS
FR2301815A1 (en) STRENGTH SENSOR WITH STRAIN GAUGES
JPS6418822A (en) Coordinate input device
JPS6488255A (en) Detecting device of acceleration
EP0321097A3 (en) Pressure sensors
JPS6475930A (en) Force/moment detector
CN2162654Y (en) Piezoelectricity compound acceleration sensor
JPS6267264U (en)
JPS56125630A (en) Thin type electronic balance
EP0293145A3 (en) Thread friction measurement arrangement
JPH0752130B2 (en) Tactile sensor
ES8402127A1 (en) Electronic pressure responsive switch
FR2598226B1 (en) RESISTIVE GAUGE FORCE SENSOR
JPH0663893B2 (en) Touch sensor
JPS6461628A (en) Force detecting device
JPS57163826A (en) Measuring device for weight and center position gravity
JPS646836A (en) Optical force sensor
JPS56110027A (en) Load-detecting device
JPS56110026A (en) Load-detecting device
SU1744530A1 (en) Pressure transducer
JPS6459075A (en) Semiconductor acceleration sensor
CN118347566A (en) Mobile phone portable balance
JPS6166135A (en) Sence-of-contact-force sensor
JPS61277027A (en) Touch sensor
SU718736A1 (en) Pressure transducer