JPS6461628A - Force detecting device - Google Patents
Force detecting deviceInfo
- Publication number
- JPS6461628A JPS6461628A JP62219637A JP21963787A JPS6461628A JP S6461628 A JPS6461628 A JP S6461628A JP 62219637 A JP62219637 A JP 62219637A JP 21963787 A JP21963787 A JP 21963787A JP S6461628 A JPS6461628 A JP S6461628A
- Authority
- JP
- Japan
- Prior art keywords
- detecting element
- force
- temperature
- insulation part
- cuts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To accurately detect temperature variation and to perform accurate force detection, by providing a temperature detecting element and a dynamic insulation part which cuts off external force on a signal crystal substrate where a force detecting element is formed. CONSTITUTION:The single crystal substrate 8 is fitted on a strain inducer and the detecting element 10 which detects the external force by varying electric resistance by mechanical deformation is formed at the deformation part. Then a detecting element 11 for temperature compensation and the dynamical insulation part 12 which cuts off the interference of force are formed at the peripheral part of the substrate 8. Consequently, the insulation part 12 exerts any influence on the peripheral part, so the temperature detecting element 11 accurately detects the temperature variation to performs the temperature compensation of the force detecting element 10, so the accurate force detection is performed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62219637A JPS6461628A (en) | 1987-09-02 | 1987-09-02 | Force detecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62219637A JPS6461628A (en) | 1987-09-02 | 1987-09-02 | Force detecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6461628A true JPS6461628A (en) | 1989-03-08 |
Family
ID=16738646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62219637A Pending JPS6461628A (en) | 1987-09-02 | 1987-09-02 | Force detecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6461628A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5076106A (en) * | 1990-03-21 | 1991-12-31 | Amp Incorporated | Normal force transducer |
JP2007113957A (en) * | 2005-10-18 | 2007-05-10 | Hitachi Ltd | Friction force sensor and tire with friction force sensor |
JP2010025735A (en) * | 2008-07-18 | 2010-02-04 | Honda Motor Co Ltd | Force sensor unit |
WO2023181687A1 (en) * | 2022-03-25 | 2023-09-28 | Koa株式会社 | Load sensor element |
-
1987
- 1987-09-02 JP JP62219637A patent/JPS6461628A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5076106A (en) * | 1990-03-21 | 1991-12-31 | Amp Incorporated | Normal force transducer |
JP2007113957A (en) * | 2005-10-18 | 2007-05-10 | Hitachi Ltd | Friction force sensor and tire with friction force sensor |
JP2010025735A (en) * | 2008-07-18 | 2010-02-04 | Honda Motor Co Ltd | Force sensor unit |
WO2023181687A1 (en) * | 2022-03-25 | 2023-09-28 | Koa株式会社 | Load sensor element |
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