JPS5287076A - Non-linearity correction method of semiconductor diaphragm type pressu re gauge - Google Patents
Non-linearity correction method of semiconductor diaphragm type pressu re gaugeInfo
- Publication number
- JPS5287076A JPS5287076A JP363676A JP363676A JPS5287076A JP S5287076 A JPS5287076 A JP S5287076A JP 363676 A JP363676 A JP 363676A JP 363676 A JP363676 A JP 363676A JP S5287076 A JPS5287076 A JP S5287076A
- Authority
- JP
- Japan
- Prior art keywords
- pressu
- gauge
- correction method
- diaphragm type
- linearity correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To correct the non-linearity between pressure and strain as well as between strain and resistance and eliminate the adverse influence to temperature characteristics and sensitivity by adjusting the diameter of the recessed circular hole of the strain inducing part on a Si diaphragm being a pressure sensitive part.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP363676A JPS5287076A (en) | 1976-01-14 | 1976-01-14 | Non-linearity correction method of semiconductor diaphragm type pressu re gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP363676A JPS5287076A (en) | 1976-01-14 | 1976-01-14 | Non-linearity correction method of semiconductor diaphragm type pressu re gauge |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5287076A true JPS5287076A (en) | 1977-07-20 |
Family
ID=11562958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP363676A Pending JPS5287076A (en) | 1976-01-14 | 1976-01-14 | Non-linearity correction method of semiconductor diaphragm type pressu re gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5287076A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03103741A (en) * | 1989-09-19 | 1991-04-30 | Yamatake Honeywell Co Ltd | Semiconductor pressure sensor |
JPH08334424A (en) * | 1995-06-07 | 1996-12-17 | Mitsubishi Electric Corp | Semiconductor pressure detecting device |
-
1976
- 1976-01-14 JP JP363676A patent/JPS5287076A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03103741A (en) * | 1989-09-19 | 1991-04-30 | Yamatake Honeywell Co Ltd | Semiconductor pressure sensor |
JPH08334424A (en) * | 1995-06-07 | 1996-12-17 | Mitsubishi Electric Corp | Semiconductor pressure detecting device |
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