JPS53109490A - Semiconductor strain gauge - Google Patents
Semiconductor strain gaugeInfo
- Publication number
- JPS53109490A JPS53109490A JP2504577A JP2504577A JPS53109490A JP S53109490 A JPS53109490 A JP S53109490A JP 2504577 A JP2504577 A JP 2504577A JP 2504577 A JP2504577 A JP 2504577A JP S53109490 A JPS53109490 A JP S53109490A
- Authority
- JP
- Japan
- Prior art keywords
- strain gauge
- semiconductor strain
- plane
- diaphragm
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain the strain gauge having a wide variety of permissible temperature range, by taking the (110) plane of crystal as the diaphragm plane and by making the distance from the center of diaphragm different for the strain gauge element toward radial and tangent direction.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2504577A JPS5923118B2 (en) | 1977-03-07 | 1977-03-07 | semiconductor strain gauge |
DE2809549A DE2809549C2 (en) | 1977-03-07 | 1978-03-06 | A method of manufacturing a semiconductor pressure sensor and a semiconductor pressure sensor |
US05/883,589 US4173900A (en) | 1977-03-07 | 1978-03-06 | Semiconductor pressure transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2504577A JPS5923118B2 (en) | 1977-03-07 | 1977-03-07 | semiconductor strain gauge |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53109490A true JPS53109490A (en) | 1978-09-25 |
JPS5923118B2 JPS5923118B2 (en) | 1984-05-30 |
Family
ID=12154936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2504577A Expired JPS5923118B2 (en) | 1977-03-07 | 1977-03-07 | semiconductor strain gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5923118B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006029931A (en) * | 2004-07-15 | 2006-02-02 | Hitachi Ltd | Construction structure defect sensor |
JP2008082907A (en) * | 2006-09-28 | 2008-04-10 | Hitachi Ltd | Device for measuring mechanical quantity |
JP2017500545A (en) * | 2013-12-11 | 2017-01-05 | メレクシス・テクノロジーズ・ナムローゼフェンノートシャップ | Semiconductor pressure sensor |
US10317297B2 (en) | 2013-12-11 | 2019-06-11 | Melexis Technologies Nv | Semiconductor pressure sensor |
-
1977
- 1977-03-07 JP JP2504577A patent/JPS5923118B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006029931A (en) * | 2004-07-15 | 2006-02-02 | Hitachi Ltd | Construction structure defect sensor |
JP2008082907A (en) * | 2006-09-28 | 2008-04-10 | Hitachi Ltd | Device for measuring mechanical quantity |
JP4710779B2 (en) * | 2006-09-28 | 2011-06-29 | 株式会社日立製作所 | Mechanical quantity measuring device |
JP2017500545A (en) * | 2013-12-11 | 2017-01-05 | メレクシス・テクノロジーズ・ナムローゼフェンノートシャップ | Semiconductor pressure sensor |
US10317297B2 (en) | 2013-12-11 | 2019-06-11 | Melexis Technologies Nv | Semiconductor pressure sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS5923118B2 (en) | 1984-05-30 |
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